JP5971902B2 - ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置 - Google Patents

ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置 Download PDF

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Publication number
JP5971902B2
JP5971902B2 JP2011142588A JP2011142588A JP5971902B2 JP 5971902 B2 JP5971902 B2 JP 5971902B2 JP 2011142588 A JP2011142588 A JP 2011142588A JP 2011142588 A JP2011142588 A JP 2011142588A JP 5971902 B2 JP5971902 B2 JP 5971902B2
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support
rotary
workpiece
rotating
holding device
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JP2013011445A (ja
JP2013011445A5 (https=
Inventor
保坂　光太郎
光太郎 保坂
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Canon Inc
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Canon Inc
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Priority to JP2011142588A priority Critical patent/JP5971902B2/ja
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JP2011142588A 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置 Expired - Fee Related JP5971902B2 (ja)

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JP2011142588A JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

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JP2011142588A JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

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JP2013011445A JP2013011445A (ja) 2013-01-17
JP2013011445A5 JP2013011445A5 (https=) 2014-08-14
JP5971902B2 true JP5971902B2 (ja) 2016-08-17

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JP2011142588A Expired - Fee Related JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210093102A (ko) * 2020-01-17 2021-07-27 고흥도 하이트 게이지 측정 지그

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024252551A1 (https=) * 2023-06-07 2024-12-12

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05240798A (ja) * 1992-02-28 1993-09-17 Nec Yamagata Ltd パターン付きウエハ表面のレーザ検査装置
JP3430788B2 (ja) * 1996-04-26 2003-07-28 株式会社日立製作所 試料像測定装置
JP5043476B2 (ja) * 2007-03-06 2012-10-10 株式会社神戸製鋼所 形状測定装置及びその方法
JP2010133841A (ja) * 2008-12-05 2010-06-17 Nikon Corp 周部検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210093102A (ko) * 2020-01-17 2021-07-27 고흥도 하이트 게이지 측정 지그
KR102389557B1 (ko) 2020-01-17 2022-04-21 고흥도 하이트 게이지 측정 지그

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