JP2013011445A5 - - Google Patents

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Publication number
JP2013011445A5
JP2013011445A5 JP2011142588A JP2011142588A JP2013011445A5 JP 2013011445 A5 JP2013011445 A5 JP 2013011445A5 JP 2011142588 A JP2011142588 A JP 2011142588A JP 2011142588 A JP2011142588 A JP 2011142588A JP 2013011445 A5 JP2013011445 A5 JP 2013011445A5
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JP
Japan
Prior art keywords
support
rotating
workpiece
region
holding device
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Application number
JP2011142588A
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English (en)
Japanese (ja)
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JP5971902B2 (ja
JP2013011445A (ja
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Priority to JP2011142588A priority Critical patent/JP5971902B2/ja
Priority claimed from JP2011142588A external-priority patent/JP5971902B2/ja
Publication of JP2013011445A publication Critical patent/JP2013011445A/ja
Publication of JP2013011445A5 publication Critical patent/JP2013011445A5/ja
Application granted granted Critical
Publication of JP5971902B2 publication Critical patent/JP5971902B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011142588A 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置 Expired - Fee Related JP5971902B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011142588A JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011142588A JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

Publications (3)

Publication Number Publication Date
JP2013011445A JP2013011445A (ja) 2013-01-17
JP2013011445A5 true JP2013011445A5 (https=) 2014-08-14
JP5971902B2 JP5971902B2 (ja) 2016-08-17

Family

ID=47685446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011142588A Expired - Fee Related JP5971902B2 (ja) 2011-06-28 2011-06-28 ワーク保持装置及び、このワーク保持装置を備えた３次元形状測定装置

Country Status (1)

Country Link
JP (1) JP5971902B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102389557B1 (ko) * 2020-01-17 2022-04-21 고흥도 하이트 게이지 측정 지그
JPWO2024252551A1 (https=) * 2023-06-07 2024-12-12

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05240798A (ja) * 1992-02-28 1993-09-17 Nec Yamagata Ltd パターン付きウエハ表面のレーザ検査装置
JP3430788B2 (ja) * 1996-04-26 2003-07-28 株式会社日立製作所 試料像測定装置
JP5043476B2 (ja) * 2007-03-06 2012-10-10 株式会社神戸製鋼所 形状測定装置及びその方法
JP2010133841A (ja) * 2008-12-05 2010-06-17 Nikon Corp 周部検査装置

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