JP5948729B2 - 形状測定装置 - Google Patents

形状測定装置 Download PDF

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Publication number
JP5948729B2
JP5948729B2 JP2011086303A JP2011086303A JP5948729B2 JP 5948729 B2 JP5948729 B2 JP 5948729B2 JP 2011086303 A JP2011086303 A JP 2011086303A JP 2011086303 A JP2011086303 A JP 2011086303A JP 5948729 B2 JP5948729 B2 JP 5948729B2
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measurement
unit
shape
measured
control unit
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JP2012220338A5 (enExample
JP2012220338A (ja
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工藤　浩一
浩一 工藤
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Nikon Corp
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Nikon Corp
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JP2011086303A 2011-04-08 2011-04-08 形状測定装置 Active JP5948729B2 (ja)

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JP2011086303A JP5948729B2 (ja) 2011-04-08 2011-04-08 形状測定装置

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JP2011086303A JP5948729B2 (ja) 2011-04-08 2011-04-08 形状測定装置

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JP2012220338A JP2012220338A (ja) 2012-11-12
JP2012220338A5 JP2012220338A5 (enExample) 2014-05-29
JP5948729B2 true JP5948729B2 (ja) 2016-07-06

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015152585A (ja) * 2014-02-19 2015-08-24 小林　茂樹 金属表面の形状測定装置及び形状検査装置
JP6507067B2 (ja) * 2015-08-27 2019-04-24 株式会社日立製作所 計測方法、計測装置及びこれを用いた製造方法
WO2017038875A1 (ja) * 2015-08-31 2017-03-09 株式会社ニコン 表面形状測定装置および表面形状測定プログラム
WO2017038903A1 (ja) * 2015-08-31 2017-03-09 株式会社ニコン 表面形状測定装置および表面形状測定プログラム
JP6543170B2 (ja) * 2015-11-09 2019-07-10 株式会社東芝 計測装置及び計測方法
JP2018165655A (ja) * 2017-03-28 2018-10-25 凸版印刷株式会社 対象物計測制御装置及び対象物計測制御方法
CN115349076A (zh) * 2021-03-12 2022-11-15 法国圣戈班玻璃厂 用于以高测量精度确定板状或层状对象的表面形状的迭代方法
JP7600859B2 (ja) 2021-05-19 2024-12-17 オムロン株式会社 情報処理システム、情報処理方法、プログラム
JP7412652B1 (ja) * 2023-04-14 2024-01-12 三菱電機株式会社 計測経路生成装置、計測経路生成方法および計測システム
JP7531037B1 (ja) 2023-08-30 2024-08-08 株式会社キーエンス 光学式変位計

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63253206A (ja) * 1987-04-10 1988-10-20 Mitsubishi Electric Corp 形状計測装置
JPH04176543A (ja) * 1990-11-08 1992-06-24 Fanuc Ltd デジタイジング制御装置
JPH074932A (ja) * 1993-06-17 1995-01-10 Mazda Motor Corp 物体の形状測定方法およびその装置

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