JP5946140B2 - 多層気密バリアおよび関連構造および気密封止方法 - Google Patents
多層気密バリアおよび関連構造および気密封止方法 Download PDFInfo
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Description
2種類の異なる多層気密シートを、約2マイクロメートルの870CHM材料で被覆された約125マイクロメートル厚のポリエチレンナフタレート(PEN)プラスチックから調製した。サンプル1は、堆積されたままのCHM被覆PENプラスチックからなるのに対し、サンプル2は、2時間に亘り140℃で焼結されたCHM被覆PENプラスチックからなった。比較用のサンプル3は未被覆のPENプラスチックからなった。
110,210,410 第1のキャリアフイルム
120,220 無機薄膜
130,230,430 第2のキャリアフイルム
240 縁シール
250 保護フイルム
270,370,470 デバイス
315 多層気密ガスケット
322,420a,420b 気密無機薄膜
330 キャリアフイルム
332 ガスケット部材
380 基板
Claims (19)
- 多層気密シートにおいて、
第1のキャリアフイルム、
対向する第1と第2の主面を有する無機薄膜、および
第2のキャリアフイルム、
を備え、前記無機薄膜の第1の主面が前記第1のキャリアフイルムの表面上に物理的に直接接触して形成され、前記第2のキャリアフイルムが前記無機薄膜の第2の主面上に物理的に直接接触して形成され、前記無機薄膜が低溶融温度ガラス組成物を含んでいることを特徴とする気密シート。 - 自立形であることを特徴とする請求項1記載の気密シート。
- 前記無機薄膜が前記気密シートの中立応力面に配置されていることを特徴とする請求項1記載の気密シート。
- 前記無機薄膜が前記気密シートの圧縮応力面に配置されていることを特徴とする請求項1記載の気密シート。
- 前記第1のキャリアフイルムがポリエチレンナフタレート、ポリエチレンテレフタレートまたはポリジメチルシロキサンからなり、前記第2のキャリアフイルムがポリエチレンナフタレート、ポリエチレンテレフタレートまたはポリジメチルシロキサンからなることを特徴とする請求項1記載の気密シート。
- 加工製品を被包する方法において、
基体上に加工製品を支持する工程、
多層気密シートであって、
第1のキャリアフイルムと、
対向する第1と第2の主面を有し低溶融温度ガラス組成物を含む無機薄膜と、
第2のキャリアフイルムと、
を備え、前記無機薄膜の第1の主面は前記第1のキャリアフイルムの表面上に物理的に直接接触して形成されており、前記第2のキャリアフイルムは前記無機薄膜の第2の主面上に物理的に直接接触して形成されている、多層気密シートを形成する工程、および
前記気密シートを前記加工製品上に配置して、被包された加工製品を形成する工程、
を有してなる方法。 - 前記第1のキャリアフイルム、前記第2のキャリアフイルム、および前記無機薄膜の1つ以上の外側の縁表面に気密接触する縁シールを、前記基体上であって、前記多層気密シートの周囲に形成する工程をさらに含む、請求項6記載の方法。
- 前記縁シールが、乾燥剤と樹脂との混合物を含む、請求項7記載の方法。
- 前記多層気密シートの露出された表面上に保護フイルムを形成する工程をさらに含む、請求項6記載の方法。
- 前記基体上に乾燥剤を支持する工程、および前記加工製品および該乾燥剤の上に前記気密シートを配置して、被包された加工製品を形成する工程をさらに含む、請求項6記載の方法。
- 多層封止アセンブリにより封止された気密封止加工製品であって、該多層封止アセンブリが、
キャリアフイルムの表面上に物理的に直接接触して形成された第1の無機薄膜を含む多層気密シート、および
ガスケット部材、
を含み、
前記加工製品が基体の表面上に形成されており、
前記ガスケット部材が、前記加工製品の周囲で前記基体の表面上に配置されており、
前記多層気密シートが、前記加工製品上に、前記ガスケット部材と気密接触して配置されており、
前記無機薄膜が、低溶融温度ガラス組成物を含んでいる、
気密封止加工製品。 - 前記第1の無機薄膜が前記ガスケット部材と気密接触している、請求項11記載の加工製品。
- 前記ガスケット部材が前記基体と気密接触している、請求項11記載の加工製品。
- 前記ガスケット部材の表面上に第2の無機薄膜が形成されている、請求項11記載の加工製品。
- 前記第1の無機薄膜が前記第2の無機薄膜と気密接触している、請求項14記載の加工製品。
- 前記多層気密シートが、前記第1の無機薄膜の表面上に形成された第2のキャリアフイルムをさらに含む、請求項11記載の加工製品。
- 前記第1の無機薄膜が前記気密封止加工製品の中立応力面に配置されている、請求項11記載の加工製品。
- 前記第1の無機薄膜が前記気密封止加工製品の圧縮応力面に配置されている、請求項11記載の加工製品。
- 積層封止アセンブリにより封止された気密封止加工製品において、該積層封止アセンブリが、
各々が対向する第1と第2の主面を有する、1つ以上キャリアフイルムおよび1つ以上の無機薄膜を含む積層気密シートであって、ある無機薄膜の第1の主面があるキャリアフイルムの表面上に物理的に直接接触して形成されている積層気密シート、および
ガスケット部材、
を含み、
前記加工製品が基体の表面上に形成されており、
前記ガスケット部材が、前記加工製品の周囲で前記基体の表面上に配置されており、
前記積層気密シートが、前記加工製品上に、前記ガスケット部材と気密接触して配置されており、
前記1つ以上の無機薄膜が、低溶融温度ガラス組成物を含んでいる、
気密封止加工製品。
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PCT/US2011/032389 WO2011133373A2 (en) | 2010-04-20 | 2011-04-14 | Multi-laminate hermetic barriers and related structures and methods of hermetic sealing |
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EP2561562A2 (en) | 2013-02-27 |
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TW201144062A (en) | 2011-12-16 |
US8563113B2 (en) | 2013-10-22 |
US9555595B2 (en) | 2017-01-31 |
KR101715982B1 (ko) | 2017-03-13 |
US20140017437A1 (en) | 2014-01-16 |
KR20130061141A (ko) | 2013-06-10 |
US20110256334A1 (en) | 2011-10-20 |
WO2011133373A3 (en) | 2012-01-19 |
TWI561378B (en) | 2016-12-11 |
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