JP5929992B2 - Wire electric discharge machining apparatus and wire electric discharge machining method - Google Patents

Description

  The present invention relates to a wire electric discharge machining apparatus and a wire electric discharge machining method, and to a technique for reducing electric wire blurring due to a machining liquid in a machining liquid tank and appropriately electric discharge machining a workpiece.

  In recent years, a method has been developed in which a plurality of work materials such as semiconductor materials, solar cell materials, and hard materials are simultaneously cut out in a short time by electric discharge machining.

  For example, in order to cut the workpiece material into a thin plate shape, the wire electrical discharge machining device is run while applying a voltage to the wire via a power supply, and an electric discharge phenomenon is generated by bringing the workpiece material close to the wire. The work material is subjected to electric discharge machining.

  Patent Literature 1 describes that a workpiece is cut by electric discharge machining with a plurality of traveling wires to cut into thin pieces.

JP 2010-260151 A

  However, conventionally, for example, as the speed of the traveling wire increases, as the number of wire electrodes increases, and as the interval between the wires decreases, the processing liquid in the processing water tank is processed by the traveling wire. In some cases, it is not possible to ensure a sufficient amount of machining liquid necessary for wire electric discharge machining in the machining water tank.

  Therefore, when a sufficient amount of machining fluid required for electric discharge machining cannot be secured between the workpiece (work) and the wire, which is an electric discharge generation unit, for example, air discharge occurs and the workpiece is processed. There is a possibility that the workpiece or the wire, which is an object, is damaged, and the workpiece cannot be appropriately subjected to electric discharge machining.

  In order to prevent such aerial discharge or the like, it is necessary to fill a space between the workpiece (workpiece) and the wire (electric discharge generating portion) of the wire electric discharge machining apparatus with a machining liquid. Therefore, in order to fill the discharge generation part with the machining liquid, when a large amount of machining liquid is supplied from the lower part of the machining liquid tank to the discharge generation part, a large amount of machining liquid supplied from the lower part of the machining liquid tank There was a possibility that the wire would be shaken by the jet flow. When the wire is shaken by a jet of a large amount of machining liquid, the workpiece cannot be processed uniformly, and the workpiece cannot be appropriately discharged.

  Moreover, in an electric discharge machining apparatus, a large workpiece may be sliced or a small workpiece may be sliced.

  Therefore, in the case of slicing a large workpiece, many wires are required, and it is conceivable to use a main roller having a size corresponding to the number of wires.

  That is, when slicing a large workpiece, the main roller is large and heavy, while when slicing a small workpiece, the main roller is small, so that the main roller is small. Depending on the size, it is conceivable to replace the main roller.

  However, when replacing the main roller, a very complicated operation is required, for example, the wire must be removed from the main roller and the wire must be re-wound around the main roller to be replaced again.

  Therefore, in order to eliminate the need to replace the main roller as much as possible, even when slicing a small workpiece, it is considered to install a main roller having a size (large) used for slicing a large workpiece. It is done.

  By the way, in order for the wire wound around the main roller 8 and the main roller 9 shown in FIG. 1 to run while maintaining a constant tension, each main roller is connected to each of the main roller 8 and the main roller 9. Although it is conceivable to provide drive motors for rotation, if drive motors are provided for both the main roller 8 and the main roller 9, not only the number of drive motors is required for the number of main rollers, but each drive motor is completely Therefore, an expensive drive motor that rotates in synchronism with the motor and its system are required. As a result, the production cost increases and a lot of electricity is consumed.

  Therefore, in order to save energy and reduce production costs, a motor (drive motor 23) that rotates the main roller is provided only on one main roller (9) of the plurality of main rollers (8, 9) wound with wires. It is possible.

  However, in order to run the wire between the main rollers (8, 9) and to keep the tension of the wire during running of the wire constant, it is necessary to rotate the main roller 8 provided with no drive motor.

  Then, since the wire used by discharge is wound between each main roller (8, 9), it can be considered that the main roller (8) is rotated along with the travel of the wire used for the discharge.

  However, even when slicing a small workpiece so that the main roller need not be exchanged as much as possible, the number of wires used for discharge is still large if a large heavy main roller (8, 9) is attached. Therefore, it is difficult to rotate the main roller (8) with only the wire.

  Therefore, the same wire as that used in the discharge, which is a wire for rotating the main roller 8 (rotating wire) is wound between the plurality of main rollers (8, 9) to drive the drive motor 23. The main roller 8 can be rotated according to the traveling speed of the wire.

  However, when the rotating wire travels in the machining liquid tank, the flow of the machining liquid in the machining liquid tank increases, and the distance between the wires used for machining fluctuates due to the flow of the machining liquid (the wire is This increases the possibility that the workpiece cannot be appropriately electrodischarge machined.

  Therefore, the wire for rotating the main roller 8 to which the drive motor is not connected (rotating wire) travels in the processing liquid tank, eliminating the water flow of the processing liquid in the processing liquid tank, A mechanism for appropriately electrical discharge machining of objects is required.

  An object of this invention is to provide the structure for reducing the blurring of the wire by the process liquid in a process liquid tank, and performing an electrical discharge machining of the workpiece appropriately.

The present invention is a wire electric discharge machining apparatus for machining a workpiece by electric discharge between a wire and the workpiece, and is connected to a driving unit that rotates a roller, and is rotated by driving by the driving unit. And a second roller that is not connected to the drive unit, and that is rotated by a wire that travels as the first roller rotates by being driven by the drive unit. The first roller and the second roller rotate together with the wire used for discharging the workpiece and the second roller not used for discharging the workpiece. A traveling wire is a roller wound to be stretched between the first roller and the second roller, and the wire electric discharge machine further includes a wire between the workpiece and the wire. Due to discharge A machining fluid tank that stores a machining fluid used for machining the workpiece, and is provided so that a wire used for discharging the workpiece is in contact with the machining fluid in the machining fluid tank. And a machining liquid tank provided so that a wire not used for discharging with the workpiece is not in contact with the machining liquid in the machining liquid tank, and the machining liquid tank is connected to the workpiece. A first wire traveling port that is an outlet of the wire used for electric discharge from the inside of the working fluid tank, and the upper portion of the first wire traveling port are stored in the working fluid tank by traveling the wire. a working fluid the working fluid to suppress the outflow from the tank first outflow inhibition plate that further includes and wherein Rukoto a.

The present invention is also a wire electric discharge machining method by a wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece, the first roller provided in the wire electric discharge machining apparatus, and The second roller includes a wire used for discharging the workpiece and a wire that is not used for discharging the workpiece and is used to rotate the second roller. A roller wound to be stretched between a roller and the second roller, and the machining liquid tank provided in the wire electric discharge machining apparatus is caused by electric discharge between the wire used for electric discharge with the workpiece. A machining fluid tank that stores a machining fluid used for machining the workpiece, and is provided so that a wire used for discharging the workpiece is in contact with the machining fluid in the machining fluid tank. And before A machining fluid tank wire not used for discharge is provided so as not to be in contact with the working fluid of the working fluid within the tank with the workpiece, the machining fluid tank is used wherein the discharge of the workpiece A first wire traveling port that is an outlet of the wire from the machining fluid tank, and a portion of the machining liquid that is stored in the machining fluid tank by traveling the wire above the first wire traveling port. A first outflow suppression plate that suppresses outflow from the processing liquid tank, and the first roller is connected to a driving unit that rotates the roller, and is rotated by driving by the driving unit, and the driving The second roller that is not connected to a portion is rotated by a wire that travels as the first roller is rotated by driving by the driving portion.

  ADVANTAGE OF THE INVENTION According to this invention, the blurring of the wire by a process liquid can be reduced and a workpiece can be appropriately electric discharge processed.

It is the front view which looked at the multi-wire electric discharge machining system from the front. It is an enlarged view in the dotted-line 16 frame shown in FIG. FIG. 2 is an example of a perspective view of a main roller 8 around which wires 7 and 17 are wound and a main roller 9 rotated by a drive motor 23. It is an example of the perspective view of the processing liquid tank 6 shown to FIG. 1, FIG. It is an example of the front view of the processing liquid tank 6 shown in FIG. It is an example of the side view of the processing liquid tank 6 shown in FIG. FIG. 3 is an example of a side view of the machining liquid tank 6 in which the wire 7 and the wire 17 are configured to be able to travel through the wire travel port 402 of the machining liquid tank 6. FIG. 8 is an example of a top view of the machining liquid tank 6 and main rollers 8 and 9 shown in FIG. 7. It is an example of the top view of the processing liquid tank 6 and the main rollers 8 and 9 which are shown in FIG. 4, FIG. FIG. 10 is an enlarged view of a dotted line 801 shown in FIG. 8 and a dotted line 802 in FIG. 9, showing the flow of the machining liquid and the direction thereof. 10 is an example of a cross-sectional view of a cross-section B shown in FIG. 10 and a cross-sectional view of a cross-section C shown in FIG. 10 (the same cross-section as the cross-section C shown in FIG. 4). It is a figure which shows a direction. FIG. 5 is an example of a cross-sectional view of a cross section A shown in FIG. FIG. 13 is an example of a sectional view of a section D shown in FIG. 4 and FIG. FIG. 5 is an example of a cross-sectional view of a cross section C shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section A shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section D shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section C shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section A shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section D shown in FIG. FIG. 5 is an example of a cross-sectional view of a cross section C shown in FIG. 4 is a cross-sectional view of the cross section C shown in FIG. 4 of the machining liquid tank 6 provided with the enclosure plate 12 having an inclined portion, and the cross section C of the machining liquid tank 6 provided with the enclosure plate 12 not having an inclined portion shown in FIG. It is a figure which shows an example of these sectional drawings, Comprising: It is a figure which shows the flow of the process liquid in the surrounding board 12, and its direction. FIG. 5 is a diagram for explaining the size of a liquid supply port (hole) for injecting a processing liquid from the liquid supply pipe 20 into the machining liquid tank 6 and the interval at which the liquid supply port (hole) is provided in the liquid supply pipe 20. is there. It is an example of the side view which shows the process liquid tank 6, the main roller 9, the baffle plate 24, and the water supply part 13 which injects a process liquid to the main roller 9 and the baffle plate 24. It is a figure which shows the flow direction of the process liquid which flows through the upper part and the lower part of the wire 7 which runs on the baffle plate.

  Hereinafter, the present invention will be described in detail according to preferred embodiments with reference to the accompanying drawings.

  FIG. 1 is a front view of a multi-wire electric discharge machining system as viewed from the front. The configuration of each mechanism shown in FIG. 1 is an example, and it goes without saying that there are various configuration examples depending on the purpose and application.

  The multi-wire electric discharge machining system according to the embodiment of the present invention includes a multi-wire electric discharge machining apparatus 1, a power supply unit (power supply apparatus) 15, and a machining fluid supply apparatus 18.

  The multi-wire electric discharge machining system can slice a work piece (silicon ingot 5 in the example of FIG. 1) into thin pieces at intervals of a plurality of wires 7 (wire electrodes) arranged in parallel by electric discharge.

  The multi-wire electric discharge machining apparatus 1 can slice a large workpiece or slice a small workpiece.

  The multi-wire electric discharge machining apparatus 1 is connected to the power supply unit 15 via an electric wire (voltage application line), and is operated by electric power supplied from the power supply unit 15.

  The multi-wire electric discharge machining apparatus 1 is bonded to the work feeding apparatus 3 with an adhesive (adhesive of the bonding portion 4) when the work feeding apparatus 3 driven by a servo motor (not shown) moves in the vertical direction. A workpiece (the workpiece indicates a workpiece, which is the silicon ingot 5 in the example of FIG. 1) can be moved in the vertical direction.

  The multi-wire electric discharge machining apparatus 1 is an application example of the wire electric discharge machining apparatus of the present invention, and works a workpiece by electric discharge generated between the wire and the workpiece.

  In the embodiment of the present invention, when the silicon ingot 5 moves downward, the silicon ingot 5 and the wire 7 approach each other, and a discharge occurs between the silicon ingot 5 and the wire 7. Perform electrical discharge machining. At this time, the space between the silicon ingot 5 and the wire 7 (discharge gap (gap between the silicon ingot 5 and the wire 7)) is filled with the processing liquid, and this processing liquid has an electrical resistance of a predetermined width. Since it has a value, electric discharge is generated between the silicon ingot 5 and the wire 7, and the electric discharge machining of the silicon ingot 5 can be performed.

  It is also possible to cause electric discharge machining between the silicon ingot 5 and the wire 7 by providing the workpiece feeding device 3 below the wire 7 and moving the silicon ingot 5 upward. .

  In this embodiment, the silicon ingot 5 is described as an example of a workpiece, but other materials (conductor or semiconductor) that are not insulators, such as SIC (silicon carbide), can also be used.

  As shown in FIG. 1, the multi-wire electric discharge machining apparatus 1 includes a block 19 that functions as a base of the multi-wire electric discharge machining apparatus 1, a block 2 that is installed in an apparatus above the block 19, and a work feeding device 3, the bonding portion 4, the silicon ingot 5, the processing liquid tank 6, the main roller 8, the wires 7 and 14, the main roller 9, the power supply unit 10, the power supply 11, the shroud 12, A water supply unit 13, a current plate 24, machining liquid supply ports 21 and 22, and a liquid supply pipe 20 provided in the machining liquid tank 6 are provided.

  Reference numeral 15 is a power supply unit (power supply device), and 3 is a discharge servo control circuit for controlling the servo motor so that the discharge gap is kept constant in order to efficiently generate discharge according to the state of discharge. In addition, the workpiece is positioned and electric discharge machining is advanced.

  18 is a machining fluid supply device that feeds machining fluid necessary for cooling the electrical discharge machining section and removing machining chips (scraps) to the silicon ingot 5 and the wire 7 by a pump, and for machining chips in the machining fluid. Removal, management of specific resistance or conductivity (1 μS to 250 μS) by ion exchange resin, and management of liquid temperature (around 20 ° C.) are performed. Water is mainly used as the machining fluid, but electric discharge machining oil can also be used. In the present embodiment, water is used as an example of the machining fluid, but electric discharge machining oil may be used.

  Reference numerals 8 and 9 denote main rollers. Grooves are formed on the main rollers at a predetermined pitch and number so as to be processed at a desired thickness, and two wires whose tension is controlled from the wire supply bobbin are provided. The necessary number of rolls are wound around one main roller and sent to a take-up bobbin. A wire speed of about 100 m / min to 900 m / min is used.

  The main roller 9 is an application example of the first roller of the present invention, and the wire 7 wound around the main roller 9 is caused to travel as the main roller 9 rotates.

  As the two main rollers rotate in the same direction and at the same speed, one wire 7 sent from the wire feeding portion circulates around the outer periphery of the main rollers (two) and is arranged in parallel. A plurality of wires 7 can run in the same direction.

  The wires 7 and 14 are one and the same wire connected to each other. The wires 7 and 14 are fed out from a bobbin (not shown) and fitted into a guide groove (not shown) on the outer peripheral surface of the main rollers 8 and 9 while being outside the main roller. After being wound spirally many times (up to about 2000 times), it is wound around a bobbin (not shown).

  The machining liquid tank 6 is formed by replacing ion-exchanged water controlled to have a specific resistance (electrical conductivity) within a predetermined range with a position of a discharge gap where the wire 7 (also referred to as a wire electrode) and the silicon ingot 5 are arranged in parallel. (Discharge point) is supplied as a machining fluid.

  The machining fluid tank 6 is an application example of the machining fluid tank of the present invention, and stores a machining fluid used for electrical discharge machining between a workpiece and a wire.

  The specific resistance of the cooling water sprayed from the water supply unit 13 is almost equal to the specific resistance of the ion exchange water (working fluid), and the specific resistance of the cooling water is managed by the ion exchange resin similarly to the processing liquid. This is because even if the cooling water and the machining fluid are mixed, the discharge is not affected.

  That is, the cooling water sprayed from the water supply unit 13 is a processing liquid that cools the main rollers 8 and 9 and the wires 7 and 14.

  Further, the machining liquid sprayed from the water supply unit 13 is a machining liquid having the same or substantially the same specific resistance as the machining liquid stored in the machining liquid tank 6.

  Further, the rectifying plate 24 is a mechanism for pouring the machining liquid sprayed from the water supply unit 13 into the machining liquid tank 6 by the traveling wire 7. The configuration of the rectifying plate 24 will be described in detail later.

  Further, the surrounding plate 12 is provided above the machining liquid tank 6 and the wire 7 so that the interface (liquid level) of the machining liquid flowing into the machining liquid tank 6 is positioned higher than the wire 7. By using the surrounding plate 12 surrounding the work, the water level of the machining liquid can be made higher than that of the wire 7.

  The shroud 12 is an application example of the outflow suppression plate of the present invention, and is provided above the machining liquid tank, and suppresses outflow of the machining liquid stored in the machining liquid tank from the machining liquid tank. Further, a traveling wire is provided in the gap between the outflow suppression plate and the machining liquid tank.

  Although the surrounding plate 12 is provided on the edge of the machining liquid tank 6, it can be provided not on the edge of the machining liquid tank 6 but on the inside or outside of the machining liquid tank 6.

  In addition, the outflow suppression plate is configured to surround the machining liquid in the machining liquid tank 6, but at least the machining in the machining liquid tank 6 is provided on the side of the workpiece in the traveling direction of the wire. It prevents the liquid from being carried out in the direction in which the wire is traveling and out of the machining liquid tank 6, and the amount of machining liquid necessary for electric discharge machining is reduced in the gap (discharge gap) between the workpiece and the wire. It will be possible to secure.

  The outflow suppression plate is provided above the edge of the working fluid tank on the wire running direction side with respect to the workpiece.

  Further, a water flow control mechanism (also referred to as a water flow suppression mechanism) for dispersing and suppressing the water flow from the processing liquid supply port 701 is provided inside the processing liquid tank 6.

  The machining liquid is supplied into the machining liquid tank 6 from a liquid supply pipe 20 (also simply referred to as a pipe) provided at the lower part of the machining liquid tank 6.

  The pipe is provided with a port (also referred to as a liquid supply port) that supplies the machining liquid into the machining liquid tank 6 from the machining liquid supply device 18 that conducts to the machining liquid tank and supplies the machining liquid.

  Therefore, the water flow of the machining liquid supplied from the liquid supply port hits the wire 7 from the lower part of the wire 7, and the distance between the wires fluctuates due to the water flow of the machining liquid (the wire is shaken), and the workpiece is made uniform. It may be difficult to process them.

  Therefore, as will be described later, in order to suppress the increase in non-uniformity in the processing of the workpiece due to the water flow of the processing water, a water flow control mechanism is provided to decelerate the water flow of the processing liquid supplied from the liquid supply port. In the processing liquid tank 6.

  The machining liquid supply ports 21 and 22 are provided on the left and right sides of the lower part of the machining liquid tank 6, respectively, and supply the machining liquid from the left and right to the liquid supply pipe 20 in the machining liquid tank 6. Thus, the machining liquid tank 6 is provided with a plurality of machining liquid supply ports for supplying the machining liquid into the machining liquid tank 6.

  When the processing liquid is supplied to the liquid supply pipe 20 from the left and right processing liquid supply ports 21 and 22 of the processing liquid tank 6, the processing liquid tank 6 is supplied from a plurality of ports (liquid supply ports) provided in the liquid supply pipe 20. Is supplied with machining fluid.

  Next, FIG. 2 will be described.

  FIG. 2 is an enlarged view within a dotted line 16 frame shown in FIG.

  The block 2 is joined to the work feeding device 3. The work feeding device 3 is bonded (joined) by the silicon ingot 5 and the bonding portion 4.

  In this embodiment, a silicon ingot 5 will be described as an example of a material to be processed.

  The bonding part 4 may be anything as long as it is for bonding (joining) the work feeding device 3 and the silicon ingot 5 (work), and for example, a conductive adhesive is used.

  The work feeding device 3 is a device having a mechanism for moving the silicon ingot 5 bonded (bonded) by the bonding portion 4 in the vertical direction, and the silicon ingot 5 is moved by moving the work feeding device 3 downward. Can be brought closer to the wire 7.

  The processing liquid tank 6 is a container for storing the processing liquid. The working fluid is, for example, deionized water having a high resistance value. By providing the machining liquid between the wire 7 and the silicon ingot 5, electric discharge is generated between the wire 7 and the silicon ingot 5, and the silicon ingot 5 can be shaved.

  As described with reference to FIG. 1, the multi-wire electric discharge machining apparatus 1 includes a surrounding plate 12 on the upper part of the machining liquid tank 6.

  The enclosure plate 12 is provided between the workpiece and the wire (discharge gap), which is a discharge generating portion, in order to secure an amount of machining liquid necessary for electric discharge machining.

  The shroud 12 is provided in the upper part of the machining liquid tank 6 and stores the machining liquid stored in the machining liquid tank 6 so that the water level is higher than that of the wire 7. It functions to reduce the outflow amount of the machining fluid in the tank to the outside of the processing trough.

  Further, there is a gap (wire travel ports 401 and 402) between the enclosure plate 12 and the machining liquid tank 6, and a wire that travels through the gap is provided.

  As shown in FIG. 2, a surrounding plate 12 is provided on the upper part of the processing liquid tank 6. Further, the processing liquid is injected from the water supply unit 13 onto the main roller 9 and the wires 7 and 14, and the injected processing liquid is Then, it passes through the current plate 24 and further passes through the wire travel ports 401 and 402 and is stored in the machining liquid tank 6. Thus, the machining liquid stored in the machining liquid tank 6 can be stored so that the level of the machining liquid is higher than that of the wire 7. The amount of outflow can be reduced.

  As a result, the amount of machining fluid required for electric discharge machining can be secured between the workpiece and the wire (electric discharge gap), which is the electric discharge generating portion, and electric discharge machining can be performed stably. It becomes possible to prevent the occurrence of defects in the workpiece.

  As shown in FIG. 2, the multi-wire electric discharge machining apparatus 1 includes a rectifying plate 24 and a water supply unit 13.

  The water supply unit 13 causes the processing liquid to flow on the upper part of the main roller 9 and on the upper part of the wire wound around the main roller 9 and / or on the upper part of the wire between the main roller 9 and the processing liquid tank 6. Are located at the top of these.

  The water supply unit 13 injects the processing liquid onto the traveling wire and / or the main roller 9 between the main roller 9 and the processing liquid tank.

  The water supply unit 13 injects the machining liquid onto the wires 7 and 14 and / or the main roller 9 between the main roller 9 and the machining liquid tank 6 provided in the direction opposite to the traveling direction of the wires 7 and 14. .

  Further, the water supply mechanism is provided above the wires 7 and 14 and / or the main roller 9 between the main roller 9 and the machining liquid tank 6 provided in the direction opposite to the traveling direction of the wires 7 and 14. ing.

  In order to protect the main roller 9 from heat generated from the wire electrodes (wires 7 and 14) when power is supplied to the wires 7 and 14, the water supply unit 13 is provided above the main roller 9 and to the main roller 9 A processing liquid as cooling water is sprayed on the upper part of the wound wire.

  Here, in order to ensure the amount of machining liquid necessary for electric discharge machining in the gap between the silicon ingot 5 and the wire 7, the machining liquid as cooling water is used. For this purpose, a rectifying plate 24 is provided so that the cooling working fluid transmitted through the main roller 9 is conveyed to the working fluid tank 6. This makes it possible to secure the amount of machining fluid in the machining fluid tank 6 necessary for electric discharge machining from the stationary state of the wire to the running state of the wire.

  For example, when the machining fluid is not ejected from the water supply unit 13 and the wire travels, the air is processed by the wire traveling in the gap (wire travel port) between the enclosure plate 12 and the processing fluid tank 6. In addition to entering a large amount into the liquid tank 6, the processing liquid in the processing liquid tank 6 leaks from the gap (wire travel port) between the enclosure plate 12 and the processing liquid tank 6, and the water level in the processing liquid tank 6 changes. May decrease.

  In order to solve such a problem, the multi-wire electric discharge machining apparatus 1 includes a rectifying plate 24 and a water supply unit 13.

  A plurality of grooves for attaching the wires 7 and 14 are formed in the main rollers 8 and 9 (also referred to as guide rollers), and the wires 7 and 14 are attached to the grooves. Then, when the main rollers 8 and 9 are rotated right or left, the wires 7 and 14 travel.

  The wires 7 and 14 are wound around the main roller a plurality of times, and the wires 7 and 14 are aligned at a predetermined pitch according to the grooves carved in the main roller.

  The main rollers 8 and 9 have a structure in which metal is used in the center and the outside is covered with resin.

  The power supply 11 is resistant to mechanical wear and is required to have electrical conductivity, and a cemented carbide is used.

  A silicon ingot 5 is disposed at the upper part of the central portion between the main rollers, and the silicon ingot 5 is attached to the work feeding device 3. The silicon ingot 5 is moved up and down by moving the work feeding device 3 in the vertical direction. The silicon ingot 5 is processed by moving in the direction.

  Further, a machining liquid tank 6 is provided at the center between the main rollers, and the wire 7 and the silicon ingot 5 are immersed in the machining liquid tank 6 to cool the electric discharge machining part and remove the machining chips.

  As shown in FIG. 2, the wires 7 and 14 are attached to the main rollers 8 and 9, and form wire rows on the upper side and the lower side of the main rollers 8 and 9.

  The wires 7 and 14 are conductors, and the supplied voltage is supplied from the power supply 11 when the power supply 11 of the power supply unit 10 supplied with the voltage from the power supply unit 15 and the wire 7 come into contact with each other. Applied to the wire 7. (The power supply 11 applies a voltage to the wire 7, but the power supply 11 does not apply a voltage directly to the wire 14.)

  Then, an electric discharge occurs between the wire 7 and the silicon ingot 5, and the silicon ingot 5 is shaved (electric discharge machining is performed), so that a thin silicon (silicon wafer) (workpiece) can be formed.

  Next, the main roller 8 around which the wire 7 and the wire 17 are wound and the main roller 9 rotated by the drive motor 23 will be described with reference to FIG.

  When slicing a large workpiece, the main rollers 8 and 9 are large and heavy, while when slicing a small workpiece, the main roller is a small one. It is possible to replace the main rollers 8 and 9 according to the size.

  That is, the main rollers 8 and 9 are configured to be detachable from the multi-wire electric discharge machining apparatus 1.

  However, when the main rollers 8 and 9 are replaced, it is necessary to perform a very complicated operation such as removing the wires from the main rollers 8 and 9 and rewinding the wires around the main roller to be replaced again.

  Therefore, in order not to replace the main roller, a main roller having a size used for slicing a large workpiece is attached to the multi-wire electric discharge machining apparatus 1 even when slicing a small workpiece.

  That is, the main rollers 8 and 9 shown in the present embodiment are heavy main rollers having a large size used for slicing a relatively large workpiece.

  FIG. 3 is an example of a perspective view of the main roller 8 around which the wire 7 and the wire 17 are wound, and the main roller 9 rotated by the drive motor 23.

  The wire 7 is a wire used for discharge with the workpiece, and the wire 17 is a wire that is not used for discharge with the workpiece and travels to rotate the main roller 8.

  That is, the wire 7 used for discharge with the workpiece is provided so as to be in contact with the machining liquid in the machining liquid tank 6, and the wire 17 is provided so as not to be in contact with the machining liquid in the machining liquid tank. .

  The main roller 9 (first roller) is connected to a drive motor 23 (drive unit) that rotates the roller, and is rotated by being driven by the drive motor.

  The drive motor 23 (drive unit) has a reversing unit that reverses the rotation direction of the main roller 9 (rotates in the reverse direction).

  The main roller 8 (second roller) is a roller that is not connected to the drive motor 23 and is rotated by the wires 7 and 17 that travel when the main roller 9 is rotated by the drive of the drive motor 23.

  The main roller 8 and the main roller 9 include a wire 7 that is used for discharging the workpiece and a wire 17 that is not used for discharging the workpiece and that only runs to rotate the main roller 8. It is a roller that is wound to be stretched between the roller 8 and the main roller 9.

  As shown in FIG. 3, the drive motor 23 is not provided in each of the main roller 8 and the main roller 9, and the drive motor 23 is provided only in the main roller 9, so that the production cost can be reduced, Power consumption can be reduced.

  In addition, in order to eliminate the need to replace the main roller as much as possible, large and heavy main rollers 8 and 9 are attached, so that the wire 7 used for discharging between the main rollers 8 and 9 (this wire is It is difficult to rotate the main roller 8 only because it is the number of wires used in the case of slicing a small workpiece and the number of wires is small) (because the number of wires is small). A wire 17 connected with the same wire 7 used in the above, and a wire 17 (rotating wire 17) for rotating the main roller 8 is wound between the plurality of main rollers 8 and 9 to drive the motor. By rotating 23, the main roller 8 can also be rotated according to the traveling speed of the wire.

  In addition, a belt (a material such as rubber) that is not shown in the present embodiment is wound around each main roller (8, 9), and the main roller is interlocked with the rotation of the main roller (9). It is also conceivable to carry around (8).

  However, in order not to replace the main roller, even when slicing a small workpiece, when the main rollers (8, 9) of a size used for slicing a large workpiece are attached, When the main roller 9 is rotated at a high speed, slip occurs between the belt and the heavy main roller.

  As a result, the traveling of the wire and the traveling of the belt are not synchronized, and the tension of the wire changes as the rotation of the main roller and the traveling of the wire progress. And it becomes difficult for the wire to travel stably, and there is a possibility that appropriate electric discharge machining cannot be performed.

  One reason why the main roller 8 suitable for the wire traveling speed cannot be rotated with the belt alone is that the belt (made of a material such as rubber) and the main roller (the surface of the main roller is made of urethane or the like) The friction force between the belt and the main roller is different from the friction force with the main roller of the wire (the center is made of iron and the surface is made of brass). A plurality of wires (smaller than the friction force between the main roller).

  Therefore, the main roller 8, which is a single wire 17 made of the same material as the wire 7 used for discharging and to which the main roller 8 is rotated, is not connected to the drive motor 23 (also simply referred to as a motor). A wire 17 (carrying wire) is wound between the plurality of main rollers 8 and 9 and the drive motor 23 is rotated, so that the main roller 8 also carries out rotation according to the traveling speed of the wire. It becomes possible.

  Next, the machining liquid tank 6 shown in FIGS. 1 and 2 will be described.

  FIG. 4 is an example of a perspective view of the processing liquid tank 6 shown in FIGS. 1 and 2.

  The machining liquid tank 6 shown in FIG. 4 is configured to be detachable from the wire electric discharge machining apparatus 1, and the machining liquid tank 6 shown in FIG. 7 to be described later is also detachable from the wire electric discharge machining apparatus 1. The machining liquid tank 6 shown in FIG. 4 is suitable for use when electric discharge machining is performed on a small workpiece, and the machining liquid tank 6 shown in FIG. 7 described later is used when electric discharge machining is performed on a large workpiece. Is suitable.

  The machining liquid tank 6 is a machining liquid tank in which a machining liquid used for machining a workpiece by electric discharge between the workpiece and the wire 7 is stored.

  As shown in FIG. 4, the wire 7 used for the discharge with the workpiece is provided in contact with the machining fluid in the machining fluid tank 6, and the wire 17 that is not used for the discharge with the workpiece is It is provided so as not to come into contact with the machining liquid in the machining liquid tank 6.

  That is, as shown in FIG. 4, the wire 7 used for the discharge with the workpiece is provided at a position in the machining liquid tank 6, and the wire 17 not used for the discharge with the workpiece is processed. It is provided at a position outside the liquid tank 6.

  By providing the multi-wire electric discharge machining apparatus 1 with such a configuration, it is possible to reduce wire blurring due to the machining liquid in the machining liquid tank and to appropriately perform electric discharge machining on the workpiece.

  That is, since the multi-wire electric discharge machining apparatus 1 is provided with such a configuration, the flow of the machining liquid in the machining liquid tank is increased by the traveling wire 17 traveling in the machining liquid tank. As a result, the distance between the wires 7 used for processing fluctuates due to the water flow of the processing liquid (the wires are shaken), and there is an increased possibility that the workpiece cannot be appropriately subjected to electric discharge machining. Can be eliminated.

  That is, the flow of the machining liquid in the machining liquid tank 6 caused by the wire 17 (rotating wire) 17 for rotating the main roller 8 not connected to the drive motor 23 traveling in the machining liquid tank 6 is eliminated. Thus, the workpiece can be appropriately subjected to electric discharge machining.

  As shown in FIG. 4, the machining liquid tank 6 includes an enclosure plate 12, and the enclosure plate 12 is a wire travel port that is an outlet from the machining liquid tank of the wire 7 used for discharge with the workpiece. A first outflow suppression plate 403 that suppresses outflow of the machining liquid stored in the machining liquid tank 6 from the machining liquid tank 6 due to the traveling of the wire 7 above the 401 (first wire running port). Contains.

  Moreover, the 1st outflow suppression board 403 provided in the upper part of the 1st wire running port has the inclination part which inclines in the running direction of a wire.

  Further, the shroud 12 travels above the wire travel port 402 (second wire travel port), which is the entrance of the wire 7 used for discharge with the workpiece into the machining liquid tank 6. The 2nd outflow suppression board 404 which suppresses the outflow from the processing liquid tank 6 of the processing liquid stored in the processing liquid tank 6 is included.

  Further, the second outflow suppression plate 404 has an inclined portion that is inclined in the traveling direction of the wire 7 wound around the main roller 9 (first roller) whose rotation direction is reversed by the reversing means of the drive motor 23. ing.

  FIG. 5 is an example of a front view of the machining liquid tank 6 shown in FIG.

  As shown in FIG. 5, the processing liquid tank 6 has a surrounding plate 12. The processing liquid tank 6 may include the enclosure plate 12, or the enclosure plate 12 may be provided separately from the processing liquid tank 6.

  As shown in FIG. 5, the first outflow suppression plate 403 and the second outflow suppression plate 404 of the shroud 12 have inclined portions, and the machining liquid tank 6 has the wire 7 as the machining liquid tank 6. A wire traveling port 402 for traveling inside and a wire traveling port 401 are provided.

  FIG. 6 is an example of a side view of the machining liquid tank 6 shown in FIG.

  As shown in FIG. 6, the machining liquid is supplied from the machining liquid supply port 22 to the machining liquid tank 6, and the machining liquid is accumulated from the lower side of the machining liquid tank 6.

  Then, the wire 7 enters the wire traveling port 402 of the machining liquid tank 6 and travels. Since the surrounding plate 12 is provided in the upper part of the processing liquid tank 6, it becomes possible to put sufficient processing liquid between the wire 7 and the workpiece.

  Moreover, since the wire 17 which does not discharge is not arrange | positioned in the process liquid tank 6, since the water flow of the process liquid in the process liquid tank 6 is not enlarged by the traveling wire 17, it becomes easy to perform appropriate electric discharge machining.

  The machining fluid tank 6 is a workpiece insertion portion of the machining fluid tank 6 in which the wire 7 comes into contact with the machining fluid and enters the workpiece in a direction perpendicular to the traveling direction of the wire 7 used for discharge with the workpiece. The width is provided so as to be shorter than the width of the main roller 9 (first roller) and the width of the main roller 8 (second roller) in the direction perpendicular to the traveling direction of the wire 7. .

  The workpiece insertion portion shown in FIG. 6 is a portion where the workpiece moves from the upper part to the machining liquid tank 6 and the cut workpiece enters the machining liquid tank 6. Therefore, the depth is such that the work piece enters.

  FIG. 7 is an example of a side view of the machining liquid tank 6 configured such that the wire 7 and the wire 17 can travel through the wire travel port 402 of the machining liquid tank 6.

  FIG. 7 is a view in which not only the wire 7 used for the discharge with the workpiece but also the wire 17 not used for the discharge with the workpiece is placed in the machining liquid tank 6.

  FIG. 8 is an example of a top view of the machining liquid tank 6 and the main rollers 8 and 9 shown in FIG.

  As shown in FIG. 8, not only the wire 7 used for the discharge with the workpiece but also the wire 17 not used for the discharge with the workpiece is contained in the machining liquid tank 6.

  FIG. 9 is an example of a top view of the machining liquid tank 6 and the main rollers 8 and 9 shown in FIGS. 4 and 6.

  As shown in FIG. 9, only the wire 7 used for discharge with the workpiece is provided in contact with the machining fluid in the machining fluid tank 6, and the wire 17 not used for discharge with the workpiece is It is provided so as not to come into contact with the machining liquid in the machining liquid tank 6.

  FIG. 10 is an enlarged view of the dotted line 801 shown in FIG. 8 and the dotted line 802 of FIG. 9, showing the flow of the machining liquid and the direction thereof.

  The enlarged view of the dotted line 801 shown in FIG. 8 includes not only the wire 7 used for the discharge with the workpiece but also the wire 17 not used for the discharge with the workpiece in the machining liquid tank 6. The water flow in the machining liquid tank 6 becomes faster and more turbulent as the wire travels.

  For this reason, the wire 7 used for the electric discharge with the workpiece is likely to be shaken by the water flow caused by the traveling of a large number of wires, making it difficult to perform an appropriate electric discharge machining (for example, it becomes difficult to obtain a flat wafer).

  On the other hand, in the enlarged view of the dotted line 802 in FIG. 9, only the wire 7 used for the discharge with the workpiece is provided in contact with the machining liquid in the machining liquid tank 6 and is used for the discharge with the workpiece. Since no wire 17 is provided so as not to come into contact with the machining liquid in the machining liquid tank 6, only a water flow is generated by the travel of the minimum necessary wire, and therefore, compared to the enlarged view of the dotted line 801 shown in FIG. 8. The wire 7 is less likely to be shaken, and it is easy to perform an appropriate electric discharge machining (for example, it is easy to obtain a flat wafer).

  11 is an example of a cross-sectional view of the cross section B shown in FIG. 10 and a cross-sectional view of the cross section C shown in FIG. 10 (the same cross section as the cross section C shown in FIG. 4). It is a figure which shows a flow and its direction.

  As shown in FIG. 11, the cross section B shows that when the wires 7 and 17 travel in the machining liquid tank 6, the water flow of the machining liquid in the machining liquid tank 6 easily rotates and the water flow becomes strong. It is easy to shake and it is difficult to perform appropriate electric discharge machining.

  In addition, since only the wire 7 travels in the machining liquid tank 6 in the cross section C, the water flow of the machining liquid in the machining liquid tank 6 does not rotate as compared with the case of the cross section B, and the wire 7 is less likely to shake. It shows that appropriate electric discharge machining is facilitated.

  FIG. 12 is an example of a cross-sectional view of the cross section A shown in FIG. 4, and is a diagram illustrating the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 13 is an example of a cross-sectional view of the cross section D shown in FIGS. 4 and 12, and shows the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 14 is an example of a cross-sectional view of the cross section C shown in FIG. 4, and shows the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  As shown in FIGS. 12 and 13, the liquid supply pipe 20 is electrically connected to the machining liquid tank 6, and supplies a machining liquid from the machining liquid supply device 18 that supplies the machining liquid into the machining liquid tank 6 (liquid supply). It is a tube provided with a mouth.

  The machining liquid is supplied into the machining liquid tank 6 from the opening (liquid supply port) of the liquid supply pipe 20.

  As shown in FIGS. 12, 13, and 14, the liquid supply pipe 20 and the mouth (liquid supply port) of the liquid supply pipe 20 are provided in the lower part of the processing liquid tank 6. As shown by the arrows in FIG. 14, the machining liquid rises to the upper part of the workpiece insertion portion of the machining liquid tank 6, resulting in a liquid level as shown in FIGS. 12 and 14.

  As shown in FIGS. 12 and 14, since a large amount of machining fluid is required for electric discharge machining, a strong water flow hits some of the wires 7. Therefore, some wires may be shaken.

  A mechanism for improving such problems will also be described below.

  FIG. 15 is an example of a cross-sectional view of the cross section A shown in FIG. 4, and is a diagram illustrating the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 16 is an example of a cross-sectional view of the cross section D shown in FIG. 4, and shows the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 17 is an example of a cross-sectional view of the cross section C shown in FIG. 4, and is a diagram showing the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  15, 16, and 17 are diagrams in which a water flow control plate 1401 and a water flow control plate 1402 are further provided in the machining liquid tank 6 of FIGS. 12, 13, and 14.

  The water flow control plate 1401 and the water flow control plate 1402 are water flow suppression plates that disperse the flux of the machining liquid supplied from the mouth (liquid supply port) into the machining liquid tank 6 and decelerate the flow velocity of the machining liquid.

  By providing the processing liquid tank 6 with the water flow control plate 1401 and the water flow control plate 1402, the processing liquid supplied into the processing liquid tank 6 bypasses the water flow control plate 1401 and the water flow control plate 1402, and the processing liquid tank Since it flows to the upper part of 6, it becomes possible to decelerate the flow rate of a process liquid, the wire 7 becomes difficult to shake, and it becomes easy to perform an appropriate electric discharge machining.

  As shown in FIG. 17, the liquid level in FIG. 17 is more stable than the liquid level in FIG. 14 because the flux of the machining liquid is dispersed and the flow rate of the machining liquid is reduced.

  FIG. 18 is an example of a cross-sectional view of cross section A shown in FIG. 4, and is a diagram showing the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 19 is an example of a cross-sectional view of the cross section D shown in FIG. 4, and shows the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  FIG. 20 is an example of a cross-sectional view of the cross section C shown in FIG. 4, and shows the flow of the processing liquid in the processing liquid tank 6 and the direction thereof.

  18, 19 and 20 are diagrams in which a sponge 1701 is further provided as a porous material in the processing liquid tank 6 of FIGS. 15, 16, and 17. FIG.

  The sponge 1701 is a dispersion mechanism that disperses the flux of the machining liquid supplied from the mouth (liquid supply port) into the machining liquid tank 6 and decelerates the flow rate of the machining liquid.

  The sponge 1701 is made of a material containing a porous material. The porous material is made of a material containing urethane.

  In this way, by providing the processing liquid tank 6 with the sponge 1701, the flux of the processing liquid supplied into the processing liquid tank 6 is dispersed by the sponge 1701, and the flow speed of the processing liquid can be reduced. The wire 7 is less likely to be shaken, and appropriate electric discharge machining is easily performed.

  The processing water is buffered (relaxed) by the pores of the sponge, and flows out from the sponge to the workpiece insertion portion of the processing liquid tank 6.

  As shown in FIG. 20, the liquid level in FIG. 20 disperses the flux of the machining liquid, and the flow rate of the machining liquid is reduced, so that it is more stable than the liquid level in FIGS. Yes.

  The machining liquid tank 6 was installed so as to suppress the flow of the machining liquid supplied into the machining liquid tank 6 from the liquid supply port provided in the liquid supply pipe in the direction of the water surface of the machining liquid in the machining liquid tank. A water flow control mechanism is provided. This water flow control mechanism is provided between the wire 7 and the liquid supply port, and includes a sponge 1701, a water flow control plate 1401, and a water flow control plate 1402.

  FIG. 21 is a cross-sectional view of section C shown in FIG. 4 of the machining liquid tank 6 provided with the enclosure plate 12 having the inclined portion, and FIG. 4 of the machining liquid tank 6 provided with the enclosure plate 12 not having the inclined section. It is a figure which shows an example of sectional drawing of the cross section C shown in, Comprising: It is a figure which shows the flow of the process liquid in the surrounding board 12, and its direction.

  4 is a cross-sectional view of the cross section C shown in FIG. 4 of the machining liquid tank 6 provided with the enclosure plate 12 having no inclined portion. As shown in FIG. 21, the machining liquid flowing in the direction of the arrow on the wire 7 is The first outflow suppression plate 403 or the second outflow suppression plate 404 will bounce off and easily hit the wire 7, and as a result, the wire will be easily shaken.

  In order to improve this, as shown in the cross-sectional view of the cross section C shown in FIG. 4 (the left view of FIG. 12) of the machining liquid tank 6 provided with the enclosure plate 12 having the inclined portion, the first outflow suppression plate 403 is provided. Or, since the second outflow suppression plate 404 is inclined in the traveling direction of the wire, it is possible to reduce the bounce off the first outflow suppression plate 403 or the second outflow suppression plate 404. Become. As a result, it is possible to reduce the bounce of the wire by reducing the bounce of the first outflow suppression plate 403 or the second outflow suppression plate 404 and hitting the wire 7 again.

  FIG. 22 illustrates the size of the liquid supply port (hole) through which the processing liquid is injected from the liquid supply pipe 20 into the processing liquid tank 6 and the interval at which the liquid supply port (hole) is provided in the liquid supply pipe 20. FIG.

  In FIG. 22, the diameter of the liquid supply port (hole) of the liquid supply pipe 20 is changed in accordance with the distance from the outlet of the machining liquid supply ports 21 and 22, so that the entire surface of the liquid supply pipe 20 enters the machining liquid tank 6. It shows that a machining fluid having a uniform flow rate is ejected.

  FIG. 22A shows an external view of a liquid supply pipe 20 in which liquid supply ports (holes) having the same diameter are provided at equal intervals, and a supply in which liquid supply ports (holes) having the same diameter are provided at equal intervals. 2 is a cross-sectional view of a liquid pipe 20. FIG.

  The liquid supply pipe 20 shown in FIG. 22A is provided with liquid supply ports (holes) at a uniform distance with the same hole diameter. Therefore, when the machining liquid is supplied into the liquid supply pipe 20 from both the machining liquid supply ports 21 and 22 at both ends, the liquid comes out from the liquid supply opening (hole) near or in the center of the liquid supply pipe 20. The water pressure of the processing water becomes the highest, and the water pressure of the processing water coming out from the liquid supply port (hole) decreases from the center toward the end direction (direction of the processing liquid supply ports 21 and 22).

  As a result, the amount of processing water ejected at the center of the liquid supply pipe 20 is the largest, and the amount ejected decreases toward the end.

  Therefore, the amount of processing water ejected from the liquid supply port (hole) in the central portion of the liquid supply pipe 20 increases, and the jet flow may increase the blurring of the wire.

  Therefore, in this embodiment, a liquid supply pipe 20 shown in FIG. 22B is used.

  In FIG. 22B, the liquid supply port (hole) provided in the liquid supply pipe 20 has a smaller diameter as it goes closer to the center, and the interval at which the liquid supply port (hole) is provided is narrower. It is a figure which shows the external view of the pipe | tube 20, and sectional drawing of the tube.

  As shown in the figure, the liquid supply pipe 20 shown in FIG. 22B is provided with liquid supply ports (holes) so that the diameter decreases from the machining liquid supply ports 21 and 22 at both ends toward the center. Furthermore, the liquid supply port (hole) is provided so that the space | interval in which the liquid supply port (hole) is provided becomes narrow near the center.

  That is, the liquid supply port (hole) near the center is made smaller, the number of liquid supply ports (holes) near the center is further increased, and the liquid supply ports in the end direction (directions of the machining liquid supply ports 21 and 22) ( The hole) is made larger than the central liquid supply port (hole), and the number of liquid supply ports (holes) is also reduced.

  As described above, by using the liquid supply pipe 20 shown in FIG. 22B, the water flow, water pressure, and ejection amount of the processing water coming out from which liquid supply port (hole) of the liquid supply pipe 20 become uniform. .

  As described above, the diameter of the liquid supply port (hole) provided in the liquid supply pipe 20 is reduced toward the center, and the liquid supply pipe 20 having a narrow interval between the liquid supply ports (holes) is used. Thereby, the jet of the machining liquid entering the machining liquid tank from the liquid supply pipe 20 is dispersed, and the amount of machining water ejected from the liquid supply port (hole) in the central portion of the liquid supply pipe 20 is reduced. Wire jetting can be reduced by the jet. As a result, the workpiece can be appropriately subjected to electric discharge machining.

  Thus, the liquid supply pipe 20 is a liquid supply port (hole) provided at an interval according to the distance from the plurality of machining liquid supply ports 21 and 22, and from the plurality of machining liquid supply ports 21 and 22. The liquid supply port (hole) has a size corresponding to the distance. That is, the liquid supply pipe 20 is far away from the plurality of machining liquid supply ports 21 and 22, so the liquid supply port (hole) provided in the liquid supply pipe 20 is small and provided in the liquid supply pipe 20. The number of liquid supply ports (holes) is increased.

  The liquid supply pipe 20 is the same pipe through which the processing water supplied from the plurality of processing liquid supply ports (21, 22) provided in the processing liquid tank 6 is passed.

  The liquid supply ports (a, b, c) for supplying the machining liquid provided in the liquid supply pipe 20 into the machining liquid tank are provided at intervals according to the distance from the plurality of machining liquid supply ports (21, 22). A mouth having a size corresponding to the distance from the plurality of machining fluid supply ports.

  The liquid supply pipe 20 (also simply referred to as “pipe”) has a greater distance from the plurality of machining liquid supply ports (21, 22). Therefore, the liquid supply port provided in the liquid supply pipe 20 (also simply referred to as “mouth”) is small. In addition, the number of liquid supply ports provided in the liquid supply pipe 20 is large.

  FIG. 23 is an example of a side view illustrating the processing liquid tank 6, the main roller 9, the rectifying plate 24, and the water supply unit 13 that injects the processing liquid onto the main roller 9 and the rectifying plate 24.

  FIG. 24 is a diagram illustrating the flow direction of the machining fluid that flows through the upper part and the lower part of the wire 7 that runs on the current plate 24.

  In order to cool the main roller 9 and the wire 7 from the water supply unit 13 to cool the main roller 9 and the wire 7, the working liquid is injected and supplied.

  And since the baffle plate 24 is provided in the lower part of the wire 7 between the main roller 9 and the process liquid tank 6, the process liquid injected to the wire 7 from the water supply part 13 is as shown in FIG. Then, the wire 7 passes through the upper or lower rectifying plate 24 of the wire 7, enters the wire traveling port 402 of the machining liquid tank 6, and enters the machining liquid tank 6.

  In this way, the rectifying plate 24 is provided so that the machining liquid sprayed to the wire 7 from the water supply unit 13 enters the wire travel port 402 of the machining liquid tank 6, so that the main roller 9 and the wire 7 are cooled. At the same time, it is possible to allow a sufficient amount of machining liquid to flow into the machining liquid tank 6, and to reduce the entry of gas such as air from the wire travel port 402 into the machining liquid tank 6. As a result, it is possible to prevent aerial discharge and the like, and to easily remove a piece after the workpiece is scraped off, and to appropriately perform electric discharge machining.

  As mentioned above, according to this invention, the blurring of the wire by a process liquid can be reduced and a workpiece can be appropriately electric discharge processed.

  Further, according to the present invention, it is possible to secure an amount of machining fluid necessary for electric discharge machining in the electric discharge machining portion (electric discharge gap) and appropriately electric discharge machine the workpiece.

  Further, a workpiece processed by subjecting a workpiece to electric discharge machining by the wire electric discharge machining method described in the present embodiment is also a feature of the present invention.

1 Multi-wire EDM 2 Block 2
3 Work Feeder 4 Adhesion 5 Silicon Ingot (Workpiece)
6 Processing Fluid Tank 7 Wire 8 Main Roller 9 Main Roller 10 Power Supply Unit 11 Power Supply 12 Enclosure 13 Water Supply Unit 14 Wire 15 Power Supply Unit 18 Processing Fluid Supply Device 19 Block 20 Supply Fluid Pipe 21 Processing Fluid Supply Port 22 Processing Fluid Supply Port 24 Current plate

Claims (17)

A wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece,
A first roller connected to a driving unit that rotates the roller, and rotated by driving by the driving unit;
A second roller not connected to the driving unit, the second roller rotating by a wire that travels as the first roller rotates by driving by the driving unit;
With
The first roller and the second roller run together with a wire used for discharging with the workpiece and for rotating the second roller not used for discharging with the workpiece. A wire that is wound to be stretched between the first roller and the second roller;
The wire electrical discharge machining apparatus is further a machining fluid tank in which a machining fluid used for machining the workpiece by electric discharge between the workpiece and the wire is stored, and the workpiece The wire used for discharging with the machining fluid tank is provided in contact with the machining fluid in the machining fluid tank, and the wire not used for discharging with the workpiece is not in contact with the machining fluid in the machining fluid tank. Equipped with a processing liquid tank provided in
The processing liquid tank is
A first wire traveling port that is an outlet from the inside of the processing liquid tank of a wire used for discharge with the workpiece;
A first outflow suppression plate that suppresses outflow of the machining liquid stored in the machining liquid tank from the machining liquid tank due to running of the wire above the first wire running port;
Further comprising a wire electrical discharge machining apparatus according to claim Rukoto a. A wire wound around the first roller and the second roller;
The wire includes a wire used for discharging with the workpiece, and a wire that is not used for discharging with the workpiece and travels to rotate the second roller;
The wire used for discharge with the workpiece is provided so as to be in contact with the machining fluid in the machining fluid tank,
The wire electric discharge machining apparatus according to claim 1, wherein a wire that is not used for electric discharge with the workpiece is provided so as not to contact the machining liquid in the machining liquid tank.   The wire used for the discharge with the workpiece and the wire that is not used for the discharge with the workpiece and runs to rotate the second roller are the same single wire. The wire electric discharge machining apparatus according to claim 2, wherein   The machining fluid tank has a workpiece insertion portion of the machining fluid tank in which the wire comes into contact with the machining fluid and enters the workpiece in a direction perpendicular to the traveling direction of the wire used for discharge with the workpiece. And a width of the first roller and a width of the second roller in a direction perpendicular to the traveling direction of the wire. The wire electrical discharge machining apparatus according to any one of 1 to 3. First outflow inhibition plate provided on the upper portion of the first wire traveling ports, to any one of claims 1 to 4, characterized in that it comprises an inclined portion which is inclined in the running direction of the wire The wire electric discharge machining apparatus described. The drive unit further includes reversing means for reversing the rotation direction of the first roller,
The processing liquid tank is
A second wire travel opening that is an entrance into the working fluid tank of a wire used for discharge with the workpiece;
A second outflow suppression plate that suppresses outflow of the machining liquid stored in the machining liquid tank due to the running of the wire above the second wire running port;
Wire electric discharge machining apparatus according to any one of claims 1 to 5, further comprising a. The second outflow inhibition plate according to claim 6, characterized in that it comprises an inclined portion rotation direction is inclined in the running direction of the wire wound on the first roller which is inverted by said inverting means Wire electrical discharge machining equipment. Claims 1 to 7, wherein the conducting the machining fluid tank, further comprising a tube port for supplying is provided the working fluid into the working fluid tank from the machining fluid supply device for supplying the working fluid The wire electric discharge machining apparatus according to any one of the above. The machining liquid tank is installed so as to suppress the flow of the machining liquid supplied into the machining liquid tank from the mouth provided in the pipe in the direction of the water surface of the machining liquid in the machining liquid tank. A water flow control mechanism;
The wire electric discharge machining apparatus according to claim 8 , wherein the water flow control mechanism is provided between the wire and the mouth. The water flow control mechanism according to claim 9, characterized in that from the inlet to disperse the flux of working fluid supplied to the machining fluid tank, comprising a water suppression plate for decelerating the flow rate of the working fluid Wire electrical discharge machining equipment. The water flow control mechanism, the flux of working fluid supplied to the machining fluid tank from the outlet is distributed, according to claim 9 or 1 0, characterized in that it comprises a distribution mechanism for decelerating the flow rate of the working fluid The wire electric discharge machining apparatus according to 1. The dispersion mechanism, the wire electrical discharge machining apparatus according to claim 1 1, characterized by being composed of a material comprising a porous material. The porous material, wire electric discharge machining apparatus according to claim 1 2, characterized by being composed of a material containing urethane. The dispersion mechanism, the wire electrical discharge machining apparatus according to any one of claims 1 1 to 1 3, characterized in that a sponge. The machining liquid tank is provided with a plurality of machining liquid supply ports for supplying the machining liquid into the machining liquid tank.
The pipe is the same pipe through which the machining water supplied from a plurality of machining liquid supply ports provided in the machining liquid tank passes.
The port for supplying the machining fluid provided in the pipe into the machining fluid tank is a port provided at an interval according to the distance from the plurality of machining fluid supply ports, and the plurality of machining fluid supply wire electric discharge machining apparatus according to any one of claims 8 to 1 4, characterized in that the size of the mouth according to the distance from the mouth. The tube, the distance from the plurality of working-fluid supply ports becomes longer accordingly, the mouth provided in the tube is small, and, according to claim 1 5, wherein the number of mouth provided in the tube is greater The wire electric discharge machining apparatus according to 1. A wire electric discharge machining method by a wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece,
The first roller and the second roller included in the wire electric discharge machining device include the second roller that is not used for electric discharge with the workpiece together with the wire used for electric discharge with the workpiece. A wire that travels to rotate is a roller that is wound to be stretched between the first roller and the second roller;
The machining liquid tank provided in the wire electric discharge machining apparatus is a machining liquid tank in which a machining liquid used for machining the workpiece is stored by electric discharge between the wire and the wire used for the discharge with the workpiece. A wire used for electric discharge with the workpiece is provided in contact with the machining liquid in the machining liquid tank, and a wire not used for electric discharge with the workpiece is provided in the machining liquid tank. a machining fluid tank which is provided so as not to be in contact with the working fluid,
The processing liquid tank is
A first wire traveling port that is an outlet from the inside of the processing liquid tank of a wire used for discharge with the workpiece;
A first outflow suppression plate that suppresses outflow of the machining liquid stored in the machining liquid tank from the machining liquid tank due to running of the wire above the first wire running port;
Further comprising
The first roller is connected to a driving unit that rotates the roller, and is rotated by driving by the driving unit;
The wire electric discharge machining method, wherein the second roller that is not connected to the drive unit is rotated by a wire that travels as the first roller is rotated by the drive of the drive unit.

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