JP5712947B2 - Wire electrical discharge machine - Google Patents

Description

  The present invention relates to a wire electric discharge machining apparatus for machining a workpiece by generating an electric discharge between an electrode on the wire and the workpiece.

  As a method for slicing a workpiece into a thin plate by wire electric discharge machining, a discharge wire saw method has been proposed. In this method, a wire electrode is wound around a plurality of guide rollers, and a plurality of wire electrodes are arranged with tension applied in parallel. The workpiece is relatively moved in a direction orthogonal to the plane including the central axis of the plurality of wire electrodes, and cutting is performed by simultaneously discharging each of the plurality of wire electrodes and the workpiece. In order to apply a constant tension to the portion of the wire electrode to be processed, a wire guide is provided near the portion facing the workpiece, and the processing accuracy is maintained. Here, since the electrical discharge machining needs to be performed in a machining liquid such as deionized water, a machining tank is disposed so as to immerse the workpiece and the wire guide in the machining liquid (for example, see Patent Document 1).

In addition, a processing tank for immersing the workpiece in the processing liquid and a wire cleaning liquid tank disposed before and after the processing tank are provided between the groove rollers for guiding the wire saw to mechanically cut the workpiece. A wire saw method has also been proposed. In this method, the wire saw group is passed through the side wall of the processing tank, and abrasive grains and chips adhering to the wire saw are removed (for example, see Patent Document 2).
In addition, there is a method in which a partition plate is provided between at least one of the workpiece and the wire saw and a supply portion to which the machining liquid is supplied into the machining tank (see, for example, Patent Document 3).

Japanese Patent Laid-Open No. 9-248719 (page 3, FIG. 1) Japanese Patent Laid-Open No. 2-15264 (2nd page, FIG. 2) JP 2007-54913 A (pages 11-12, FIG. 2)

  In the method described in Patent Document 1, a presser bar-shaped wire guide is provided in the vicinity of the workpiece to suppress the vibration generated in the wire in order to maintain the processing accuracy. However, in this method, as the machining progresses, a groove is generated on the surface of the wire guide and the pitch between the wires is shifted, so that the machining accuracy is deteriorated. Even if the wire guide is configured with a positioning roller having a groove, the wire guide portion is always immersed in the machining fluid, so that the positioning mechanism is clogged with machining waste or the metal portion is rusted. As a result, the life of the parts is shortened, and there is a problem that the mounting accuracy of the wire electrode position mechanism cannot be maintained for a long time.

In the one described in Patent Document 2, the abrasives attached to the wire saw are removed by a cleaning tank, so that the life of the wire saw and the roller portion can be increased, but the machining fluid is always supplied to the machining portion. Therefore, it is difficult to apply to wire electric discharge machining. Therefore, it is impossible to perform electric discharge machining at high speed with the one described in Patent Document 2.
In what is described in Patent Document 3, the vibration of the wire saw is reduced by providing a partition plate in the processing tank. However, as in Patent Document 2, the processing liquid supply unit can always supply the processing liquid. Therefore, this method is also difficult to apply to wire electric discharge machining. Therefore, it is difficult to apply this structure to wire electric discharge machining when performing electric discharge machining at high speed.

  The present invention has been made in order to solve the above-described problems. In performing electric discharge machining at high speed, the mounting accuracy of the wire electrode positioning mechanism is maintained over a long period of time, and the length of the components constituting the wire electrode positioning mechanism is long. It aims at obtaining the wire electric discharge machining apparatus which implement | achieves lifetime improvement.

  A wire electric discharge machining apparatus according to the present invention includes a plurality of guide rollers arranged at intervals, and a space between a pair of guide rollers of the plurality of guide rollers by winding each of the plurality of guide rollers. A wire electrode for forming a plurality of cutting wire portions, a processing power source for applying a voltage to the plurality of cutting wire portions via a power supply unit, a processing tank for immersing a workpiece in a processing liquid, and the above A workpiece moving mechanism that moves the workpiece relative to the plurality of cutting wire portions, and a supply that is provided on a side wall of the processing tank and supplies a processing liquid to the plurality of cutting wire portions and the workpiece. A machining liquid nozzle that has a passage and the plurality of cutting wire portions are passed through the supply path; and a groove that holds each of the plurality of cutting wire portions at a predetermined interval. A wire electrode positioning mechanism provided between the pair of guide rollers, and a rectifying plate provided between the machining liquid nozzle and the wire electrode positioning mechanism and blocking the machining liquid leaking from the machining tank. It is a thing.

  According to this invention, the wire electrode positioning mechanism having a groove for holding each of the plurality of cutting wire portions at a predetermined interval and provided between the machining liquid nozzle and the pair of guide rollers, and the machining liquid nozzle Since the wire electrode positioning mechanism is provided between the wire electrode positioning mechanism and includes a rectifying plate that blocks the processing liquid leaking from the processing tank, the wire electrode positioning mechanism has a structure that is not immersed in the processing liquid. The mounting accuracy of the wire electrode position mechanism can be maintained over a long period of time.

It is a figure which shows the structure of the wire electric discharge machining apparatus in Embodiment 1 of this invention. It is a perspective view which shows the state which wound the wire electrode 1 in guide roller 8a-8d in Embodiment 1 of this invention. It is a figure which shows the structure of the baffle plate 7 in Embodiment 1 of this invention. It is a figure which shows the structure of the baffle plate 7 in Embodiment 1 of this invention. It is a figure which shows the structure which provided the interruption | blocking part 21 in the baffle plate 7 in Embodiment 1 of this invention. It is a perspective view which shows the structure of the positioning guide roller 5 in Embodiment 1 of this invention. It is a block diagram of the positioning guide roller 5 in Embodiment 1 of this invention. It is explanatory drawing of the process condition which slices the to-be-processed object 2 with the wire electric discharge machining apparatus in Embodiment 1 of this invention. In the wire electrical discharge machining apparatus in Embodiment 1 of this invention, it is explanatory drawing of the condition which interrupts | blocks the leaked liquid flow from the machining liquid nozzle 3 with the baffle plate 7. FIG. It is a block diagram of the positioning guide roller 5 in Embodiment 1 of this invention. It is a block diagram of the positioning guide roller 5 in Embodiment 1 of this invention. It is a block diagram of the wire electric discharge machining apparatus in Embodiment 2 of this invention. In the wire electrical discharge machining apparatus in Embodiment 2 of this invention, it is explanatory drawing of the condition which interrupts | blocks the leaked liquid flow from the machining-fluid nozzle 3 with the baffle plate 7. FIG. It is a figure which shows the path | route of the process liquid flow from the process liquid nozzle 3 at the time of making a baffle plate immersed in an auxiliary process tank in the wire electrical discharge machining apparatus in Embodiment 2 of this invention.

  The wire electric discharge machining apparatus according to the present invention will be described in detail below with reference to the drawings. The following embodiment is an exemplification, and the present invention is not limited to the following embodiment. Moreover, what attached | subjected the same code | symbol in the figure shown below is the same or it corresponds, This is common in the whole text of a specification.

Embodiment 1 FIG.
FIG. 1 shows the configuration of a wire electric discharge machining apparatus according to Embodiment 1 for carrying out the present invention. This figure shows the configuration of the wire electric discharge machining apparatus according to the present embodiment as viewed from the side.
In FIG. 1, a single wire electrode 1 is wound around a plurality of guide rollers 8b, 8c, 8d, and 8a (hereinafter collectively referred to as guide rollers 8a to 8d) from a wire electrode delivery bobbin 9 multiple times. Finally, the wire is taken up by the wire take-up bobbin 10. When the wire electrode 1 is wound up, the wire electrode 1 moves along the longitudinal direction of the wire electrode 1. A system from the wire electrode delivery bobbin 9 to the guide rollers 8a to 8d and the wire electrode take-up bobbin 10 is called a wire electrode travel system. Moreover, the operation | movement in which the wire electrode 1 is wound up may be called running of a wire electrode.

  The guide rollers 8a to 8d are main guide rollers constituting the wire electrode traveling system. In the configuration shown in FIG. 1, four guide rollers 8a to 8d having the same diameter are arranged in parallel with each other at intervals. . The wire electrode 1 delivered from the wire electrode delivery bobbin 9 is sequentially and repeatedly wound at a constant pitch between the four guide rollers 8a to 8d. The wire electrode 1 travels along the longitudinal direction according to the rotation of the guide rollers 8a to 8d. As long as the wire electrode 1 is wound around the plurality of guide rollers 8, the number of guide rollers 8 is not limited to four shown in FIG. There should be at least two guide rollers 8. Further, the diameter of each guide roller is not limited to the same case as shown in FIG.

The guide rollers 8c and 8d are arranged at positions sandwiching the workpiece 2, and a plurality of wire electrodes 1 are wound at a constant pitch in a direction parallel to the axis of the guide rollers 8a to 8d (y-axis direction in the figure). The parallel wire electrode portion 1a is configured. Hereinafter, as the parallel wire electrode portion 1a, the portion from the guide roller 8c to the portion wound around the guide roller 8d is shown. Specifically, the portion from the circumferential surface constituting the side surface of the guide roller 8c to the portion in contact with the circumferential surface constituting the side surface of the guide roller 8d is the parallel wire electrode portion 1a.
In the parallel wire electrode portion 1a, a region facing the workpiece 2 is referred to as a cutting wire portion 1b. FIG. 1 shows a state in which cutting of the workpiece 2 is started and the cutting wire portion 1 b has advanced inside the workpiece 2.

  The power supply units 6a and 6b are arranged in contact with the parallel wire electrode portion 1a and apply a voltage pulse supplied from the machining power supply 40 to the parallel wire electrode portion 1a. Since the power supply units 6a and 6b are in contact with each parallel wire electrode constituting the parallel wire electrode portion 1a, voltage pulses can be individually supplied to the respective wire electrodes. In the configuration shown in FIG. 1, each of the parallel wire electrode portions 1 a is arranged at two places, the power supply units 6 a and 6 b, but processing is possible even when only one of them is arranged.

Positioning guide rollers 5a and 5b are arranged as wire electrode positioning mechanisms between the power supply units 6a and 6b and the workpiece 2. The positioning guide rollers 5a and 5b have wire positioning grooves in order to dampen the parallel wire electrode portion 1a and maintain the pitch between the wire electrodes constituting the parallel wire electrode portion 1a with high accuracy. The positioning guide rollers 5a and 5b always maintain contact with the wire electrode 1 to guide the wire electrode 1, and the position in the direction parallel to the axis of the wire guide rollers 8a to 8d (y-axis direction) is highly accurate. Hold on.
Accordingly, the parallel wire electrode portion 1a between the positioning guide rollers 5a and 5b faces the workpiece 2 and forms a plurality of cutting wire portions 1b provided in parallel. The positioning guide rollers 5a and 5b suppress the wire vibration and the pitch deviation of the cutting wire portion 1b, so that the electrical discharge machining is highly accurate and stabilized.

  The machining liquid nozzles 3a and 3b are arranged between the positioning guide roller 5a and the workpiece 2 and between the positioning guide roller 5b and the workpiece 2, respectively, with the machining liquid ejection holes facing each other, and the workpiece The machining liquid can be ejected toward the second machining portion. The cutting wire portion 1b penetrates the machining liquid nozzles 3a and 3b, but does not contact the inner surface of the nozzle. The processing liquid is supplied from a processing liquid holding container (not shown) using the processing liquid supply hoses 14a and 14b. As described above, since the cutting wire portion 1b passes through the machining liquid nozzles 3a and 3b, the machining liquid leaks in the direction of the positioning guide rollers 5a and 5b.

  In general, since electric discharge machining is performed in a machining liquid, high-speed and stable machining is realized. Therefore, it is necessary to immerse the workpiece 2 in the machining liquid. In the present embodiment, a processing tank 4 having a structure in which only the workpiece 2 between the processing liquid nozzles 3a and 3b is immersed in the processing liquid is provided. The machining liquid nozzles 3 a and 3 b are provided on the side wall of the machining tank 4. When the machining liquid nozzles 3a and 3b supply the machining liquid to the workpiece 2, the machining liquid leaks in the direction of the positioning guide rollers 5a and 5b. Therefore, the rectifying plates 7a and 7b are disposed between the machining liquid nozzles 3a and 3b and the positioning guide rollers 5a and 5b (the side where the machining liquid leaks to the opposite side of the workpiece 2), and the leaked machining is performed. The liquid is not directly applied to the positioning guide rollers 5a and 5b.

As shown in FIG. 1, the workpiece 2 is fixed in a machining tank 4 on a stage (workpiece moving mechanism) 11 that moves up and down in the z-axis direction (vertical direction). As the electric discharge machining progresses, the stage 11 rises in the direction indicated by the arrow A in FIG.
FIG. 2 is a perspective view showing a state in which the wire electrode 1 is wound around the guide rollers 8a to 8d in the wire electric discharge machining apparatus according to the present embodiment. In the figure, only components necessary for explaining the operation of the wire electrode traveling are shown. The wire electrode 1 is wound around a part of the outer periphery of the guide rollers 8b, 8c, 8d, and 8a (about ¼ circumference), and wraps around the entire four guide rollers 8a to 8d. To do. The guide rollers 8a to 8d form a path from the wire electrode delivery bobbin 9 to the wire electrode take-up bobbin 10, and are configured to ensure a space where the workpiece 2 and other peripheral elements do not interfere with each other. Guide rollers 8c and 8d are drive type guide rollers.

  In FIG. 2, the guide rollers 8b and 8a arranged above the guide rollers 8c and 8d are driven guide rollers. The drive type guide rollers (8c and 8d) are rotationally driven with the shaft connected to the motor, and the driven type guide rollers (8b and 8a) do not generate a driving force and are driven as the wire electrode 1 travels. Rotate.

The guide rollers 8a to 8d are formed by winding urethane rubber or the like around a cylindrical core metal, and the center of the core metal part is supported by a bearing (not shown) and rotates. Since urethane rubber has a large coefficient of friction with the wire electrode, it is highly effective in preventing the wire electrode 1 from slipping on the guide rollers 8a to 8d. In addition, the material of the raw material wound around the metal core is not limited to urethane rubber, and any material having a large friction coefficient with the wire electrode 1 may be used.
On the roller surface where the guide rollers 8a to 8d and the wire electrode 1 are in contact, a plurality of grooves are formed at equal intervals so as to have a desired wire pitch, and the wire is wound around each groove.

  FIG. 3 shows a configuration of the rectifying plate 7 in the present embodiment using a perspective view (FIG. (A)), a front view (FIG. (B)), and a side view (FIG. (C)). It is. As shown in FIGS. 3A to 3C, the rectifying plate 7 is composed of two separable members and does not contact the wire electrode 1, that is, the wire electrode 1 through the space with the wire electrode 1. It is comprised so that it may pinch from the upper and lower sides. Therefore, the rectifying plate 7 indicates the processing liquid leaking from the processing liquid nozzles 3a and 3b (in FIG. 3A and FIG. 3C, the direction in which the processing liquid proceeds is indicated by an arrow 30. Hereinafter, the processing liquid 30 may be described. )). In order not to affect the positional accuracy of the wire electrode 1, the wire electrode 1 is disposed without contact (via a space). Note that the number of members constituting the rectifying plate 7 is not limited to two, and may be three or more as long as it is sandwiched from above and below without contacting the wire electrode 1. Thus, since the current plate 7 has a simple structure, it can be easily mounted on a wire electric discharge machining apparatus.

  In FIG. 3C, if the angle θ formed by the rectifying plate 7 and the wire electrode 1 is configured to be 90 ° or larger, there is a possibility that the machining liquid 30 will bounce off the rectifying plate 7 and scatter. Therefore, by adjusting θ to be an acute angle (0 ° <θ <90 °), it becomes possible to release the leaked liquid flow downward, and the cutting effect of the machining liquid flow is improved. If the angle of the rectifying plate 7 is variable, an optimum blocking effect can be realized according to the ejection condition of the machining liquid 30. The current plate 7 is made of a non-conductive material such as ceramics or resin. This prevents machining defects caused by discharge between the wire electrode 1 and the rectifying plate 7 when the wire electrode 1 is too close to the rectifying plate 7 due to disturbances during processing, errors in adjustment of the setup, and the like. It is to do.

  In FIG. 4, the structural example of the baffle plate 7 in this Embodiment is shown. FIG. 4A is a side view of a configuration example of the rectifying plate 7, and FIG. As shown in FIGS. 4 (a) and 4 (b), in this configuration example, the parts constituting the lower part of the rectifying plate 7 are fixed to the base, and the parts constituting the upper part are easy to attach and detach with screws. It is said. By configuring in this way, a gap generated in the rectifying plate 7 can be accurately determined while minimizing the space through which the wire electrode 1 passes, so that the effect of blocking the machining fluid flow is increased.

  FIG. 5 shows a configuration in which the flow rectifying plate 7 according to the present embodiment is provided with a blocking portion 21 for blocking the flow of the machining liquid. In FIG. 5A, a blocking portion 21 made of sponge is added to a portion where the rectifying plate 7 is adjacent to the wire electrode 1 as a material that does not affect the positioning accuracy of the wire electrode 1 even if it contacts the wire electrode 1. This is the configuration. Moreover, the same figure (b) adds the interruption | blocking part 21 comprised with the brush. Here, the sponge is made of a synthetic resin such as general polyurethane and may be any non-conductive one. Similarly, any non-conductive brush made of synthetic fiber or the like may be used. As a special one, a brush made of a conductive material such as a conductive sponge or metal may cause electric discharge between the wire electrode 1 when these conductive materials come into contact with the wire electrode 1, Since processing defects occur, it cannot be used in this embodiment. In both configurations of FIGS. 5A and 5B, the gap region through which the wire electrode 1 passes can be further reduced, thereby increasing the cutting fluid flow blocking effect.

  FIG. 6 is a perspective view showing the configuration of the positioning guide roller 5. The positioning guide roller 5 is a driven guide roller having higher shape accuracy, rotation accuracy, and mounting accuracy than the guide rollers 8a to 8d. Here, as shown in FIG. 1, the positioning guide rollers 5 are arranged at two places (5a, 5b) with the workpiece 2 interposed therebetween. Since the positioning guide roller 5 (5a, 5b) is required to have high rotational accuracy, the bearing unit 23 that affects the rotational accuracy is also required to maintain high accuracy over a long period of time.

  As shown in FIG. 1, the positioning guide rollers 5a and 5b are pushed into the parallel wire electrode portion 1a provided with tension by the guide rollers 8c and 8d and the power supply units 6a and 6b, and the parallel wire electrode portion 1a. Is applied to a part of the outer periphery. As a result, the wire electrode 1 between the positioning guide rollers 5a and 5b is stretched linearly, and the traveling direction of the wire electrode 1 is kept constant between the positioning guide rollers 5a and 5b. Further, the wire electrode 1 is always kept on the positioning guide roller while the wire electrode 1 is traveling. Even if vibration is generated in the wire electrode 1, vibration is suppressed in the cutting wire portion 1b stretched between the positioning guide rollers 5a and 5b.

  7A and 7B are diagrams showing the configuration of the positioning guide roller 5. FIG. 7A shows a side view of the guide roller, and FIG. 7B shows a cross-sectional view in the XX direction in FIG. . FIG. 4C is an enlarged view of a cross section in the vicinity of the surface of the positioning guide roller 5 at a portion indicated by a broken-line circle P in FIG. As shown in FIG. 7C, a plurality of wire guide grooves 24 are provided on the surface of the positioning guide roller 5, thereby maintaining the distance between each of the wire electrodes 1 arranged in parallel with high accuracy. can do.

Next, the operation will be described.
In the electric discharge machining setup operation, the wire electrode 1 is pulled out from the wire electrode delivery bobbin 9 and wound a plurality of times in the order of guide rollers 8b, 8c, 8d, and 8a, and a part thereof is wound around the wire electrode winding bobbin 10. Is set. At that time, the interval between the wire electrodes constituting the cutting wire portion 1 is set to a predetermined pitch by the grooves of the positioning guide rollers 5a and 5b. In addition, the workpiece 2 is fixed to the stage 11.
Next, power is individually supplied from the power supply units 6a and 6b to each of the parallel wire electrode portions 1a. Further, the stage 11 causes the workpiece to approach along the z-axis in FIG. 1, and the wire electrode 1 is driven by guide rollers 8c and 8d that are drive guide rollers. Further, the machining liquid is ejected from the machining liquid nozzles 3 a and 3 b toward the workpiece 2.

When the workpiece 2 approaches the wire cutting portion 1b, a discharge is generated between the workpiece 2 and the wire cutting portion 1b, and a part of the workpiece 2 is removed, as shown in FIG. Processing is performed.
FIG. 8 shows a state in the middle of processing for slicing a workpiece into a thin plate by the wire electric discharge machining apparatus according to the present embodiment. As shown in the figure, a plurality of plates are processed at once by the cutting wire portions 1b provided in parallel, and electric discharge slicing is performed.
By using a semiconductor material such as silicon as the workpiece 2, a plurality of semiconductor wafers can be accurately manufactured by a single process, and an efficient manufacturing method can be realized.

  FIG. 9 shows a situation where the flow of leakage liquid from the processing nozzle 3 is blocked by the current plate 7. The machining fluid is supplied from the machining fluid supply hose 14 and is ejected toward the workpiece 2 through the machining fluid nozzle 3. At that time, the machining fluid leaks also in the direction of the positioning guide roller 5, but the machining fluid flow can be blocked by the rectifying plate 7. Most of the machining fluid is blocked by the rectifying plate 7 whose angle is adjusted with respect to the leaked liquid flow, and is guided downward and falls. There is a possibility that part of the machining fluid flow leaks through the rectifying plate 7, but the flow velocity is lowered by the rectifying plate 7 and further by the blocking portions 21 and 22. In this way, the rectifying plate 7 prevents the leaked machining fluid from reaching the positioning guide roller 5.

  Next, FIG. 10 shows a configuration example of the positioning guide roller 5 in the present embodiment. The positioning guide roller 5 can be removed when the wire electrode 1 is passed, and can be attached to the machine base with reproducibility (that is, at a fixed position) by using a screw 25 at the top. However, even in such a structure, if the portion including the positioning guide roller 5 is immersed in the machining fluid, machining waste or the like accumulates in the gaps between the components, and the reproducibility of the mounting position is maintained over a long period of time. It becomes difficult. When the wire electrode 1 is disconnected during processing and the wire electrode 1 is reconnected, it is necessary to remove the positioning guide roller 5 once and reattach the positioning guide roller 5 with good reproducibility after the connection. If the reproducibility is poor, the position of the processing groove in the positioning guide roller 5 is shifted after the processing is resumed, so that the processing becomes unstable and the wire electrode 1 is disconnected again.

Moreover, when the bearing part 23 which influences the damping performance of the positioning guide roller 5 is immersed in the machining liquid mixed with machining waste, there is a possibility that the reliability cannot be maintained for a long time. That is, there is a possibility that machining scraps are caught in the bearing portion 23 and smooth rotation cannot be maintained, or that a failure such as rattling of the bearing portion 23 occurs during machining.
In the present embodiment, since only the workpiece 2 is immersed in the machining liquid, the accuracy and reliability of the portion of the positioning guide roller 5 can be maintained over a long period of time.

  FIG. 11 shows a configuration example in which a vertical slide mechanism is provided on the positioning guide roller 5 in order to shorten the setup time when passing the wire electrode 1 and to improve and improve positioning reproducibility. The figure (a) is the figure seen from the side. As shown in FIG. 2A, the positioning guide roller is slid up and down using a pair of left and right vertical slide mechanisms. FIG. 4B is a plan view of the left portion of the pair of left and right vertical slide mechanisms as viewed from above. In FIG. 11, the positioning guide roller 5 and the base portion 32 are connected by a linear guide mechanism 26 and have a structure capable of sliding up and down. The linear guide mechanism 26 is composed of a movable guide 26a and a fixed guide 26b, which are connected by a ball screw 33 and can be moved up and down by rotating a driving screw 28.

  Since the movable-side and fixed-side guides 26a and 26b are in contact with each other via the bearings 34, it is possible to slide up and down with high accuracy. Therefore, when the base portion 32 is used as a reference, the pitch of the grooves 24 in the positioning guide roller 5 hardly changes even when the positioning guide roller 5 is moved up and down by the linear guide mechanism 26. Since the movable guide 26a can be fixed to the fixed guide 26b by the fixing screw 29, the position of the positioning guide roller 5 in the vertical direction can be fixed.

The high-precision linear guide mechanism 26 as described above cannot stably move up and down when immersed in the machining fluid. Therefore, conventionally, such a highly accurate linear guide mechanism 26 could not be used as the wire positioning mechanism 5 of the wire electric discharge machining apparatus. However, in the present embodiment, since the high-precision component in the wire positioning mechanism 5 can be cut off from the machining fluid, the configuration shown in FIG. 11 can be taken. Thereby, the setup time at the time of re-connection of the wire electrode 1 is shortened, and the parallel wire electrode portion 1a is positioned with high accuracy in the y-axis direction (direction parallel to the axes of the guide rollers 8a to 8d) shown in FIG. Can be realized with good reproducibility.

According to the present embodiment, a plurality of guide rollers 8a to 8d arranged at intervals and a pair of the plurality of guide rollers 8a to 8d by winding each of the plurality of guide rollers 8a to 8d. A wire electrode 1 that forms a plurality of cutting wire portions 1b between the guide rollers 8c and 8d, and a machining power supply 40 that applies a voltage to the plurality of cutting wire portions 1b individually via the power supply unit 6, A processing tank 4 for immersing the workpiece 2 in the processing liquid, a workpiece moving mechanism 11 for moving the workpiece 2 relative to the plurality of cutting wire portions 1b,
Provided on the side wall of the processing tank 4 and having a plurality of cutting wire portions 1b and supply paths 14a and 14b for supplying a processing liquid to the workpiece 2, the plurality of cutting wire sections 1b are passed through the supply paths 14a and 14b. And a groove for holding each of the plurality of cutting wire portions 1b at a predetermined interval, provided between the machining liquid nozzles 3a, 3b and the pair of guide rollers 8c, 8d. By providing a wire electrode positioning mechanism 5 and a current plate 7 provided between the machining liquid nozzles 3a and 3b and the wire electrode positioning mechanism 5 and blocking the machining liquid leaking from the machining tank 4, the wire electrode positioning is provided. The mechanism can be structured so as not to be immersed in the working fluid. Therefore, it is possible to maintain the mounting accuracy of the components constituting the wire electrode positioning mechanism (positioning guide roller) 5 over a long period of time and to extend the life of the wire electrode positioning mechanism.

Further, since the rectifying plate 7 is composed of two or more members that can be separated in the vertical direction and is sandwiched so as not to contact the wire electrode 1 from both the upper and lower sides of the wire electrode 1, it is easy for the wire electric discharge machining apparatus. Can be implemented.
Moreover, since the baffle plate 7 has a mechanism capable of adjusting the inclination with respect to the leaking direction of the leaked machining fluid, an optimum blocking effect can be realized according to the machining fluid ejection conditions.
Further, a portion of the rectifying plate 7 adjacent to the wire electrode 1 is made of a material that does not affect the wire positioning even if it comes into contact with the wire electrode 1, such as a sponge or brush, for the blocking portion 21 that blocks the leaked machining fluid flow. Can be configured and added. Thereby, since the clearance area | region which the wire electrode 1 passes can be made small, the interruption | blocking effect of the process fluid flow which leaks can be increased.

  Further, the rectifying plate 7 is made of a non-conductive material such as ceramic or resin, and even when the wire electrode 1 is too close to the rectifying plate 7 due to disturbance during electric discharge machining or setup adjustment error, the wire electrode 1 Can be prevented from occurring between the rectifying plate 7 and the current plate 7. Therefore, the occurrence of processing defects can be prevented.

Embodiment 2. FIG.
FIG. 12 shows a configuration of a wire electric discharge machining apparatus according to Embodiment 2 for carrying out the present invention. This figure is a side view of the wire electric discharge machining apparatus as in FIG.
In addition to the configuration described in the first embodiment, an auxiliary processing tank 13 (13a, 13b) is provided to collect the processing liquid blocked by the rectifying plate 7. FIG. 12 shows a configuration in which the auxiliary processing tanks 13 a and 13 b and the processing tank 4 are provided on both sides of the processing liquid nozzles 3 a and 3 b below the respective processing liquid nozzles. When the workpiece is viewed as the center, the auxiliary processing tank 13 may be provided on the side on which the machining liquid nozzle 3 is provided. Since the configuration other than this is the same as that of the first embodiment, the same reference numerals as those of the first embodiment are given, and the detailed description thereof is omitted.

Next, the operation will be described.
The path of the machining fluid flow from the machining fluid nozzle 3 in the configuration shown in the present embodiment is shown using arrows in FIG. The machining fluid is supplied from the machining fluid supply hose 14 as in FIG. 7 in the first embodiment, and is ejected toward the workpiece 2 through the machining fluid nozzle 3. At that time, the processing liquid leaks also in the direction of the positioning guide roller 5, but the liquid flow can be blocked by the rectifying plate 7.
As in the first embodiment, most of the machining liquid is blocked by the rectifying plate 7 whose angle is adjusted with respect to the leakage liquid flow, and is guided downward and falls. The liquid flow leaking from the rectifying plate 7 is also reduced in speed after passing through the rectifying plate 7 because the flow velocity is reduced. Thus, the machining fluid that has fallen below the rectifying plate 7 and the machining fluid nozzle can be reliably recovered by providing the auxiliary machining tank 13.

In FIG. 14, the height of the side wall of the auxiliary processing tank 13 (the depth of the auxiliary processing tank 13) is configured so that the rectifying plate 7 is immersed in the processing liquid 12, and the wire electrode 1 is the side wall of the auxiliary processing tank 13. The structure which provided the wire wire opening 31 in the side wall is shown so that it may not interfere.
In FIG. 14, the path of the machining fluid flow from the machining fluid nozzle 3 is indicated by an arrow. In electric discharge machining, there is a case where the machining fluid ejection amount is suddenly increased in the case of machining efficiency improvement or machining of a material that is difficult to machine. In such a case, the leakage of the machining fluid may not be blocked by the rectifying plate 7 alone. is assumed. In the configuration of FIG. 14, since the auxiliary processing tank 13 including the current plate 7 is filled with the processing liquid, the flow rate of the leaking processing liquid can be reduced by the processing liquid. Further, the machining fluid outflow rate from the wire connection port 31 is determined by the volume from the position of the wire connection port 31 to the liquid level, but in order to reduce the outflow rate, the processing liquid level in the auxiliary processing tank 13 is used. Is controlled to a minimum height at which the current plate is immersed.

According to the present embodiment, the auxiliary processing tank 13 is added to the processing tank 4 in which the workpiece 2 disposed between the processing liquid nozzles 3a and 3b is immersed in the processing liquid, so that it is blocked by the current plate 7. The leaked machining fluid can be reliably recovered.
Further, when the auxiliary processing tank 13 is configured so that the rectifying plate 7 is immersed in the machining liquid 12, when the discharge amount of the machining liquid needs to be rapidly increased during electric discharge machining, the rectifying plate 7 alone leaks. Even when it is difficult to shut off the liquid, the wire electrode positioning mechanism for positioning the wire electrode 1 with high accuracy can be shut off from the machining liquid.

DESCRIPTION OF SYMBOLS 1 Wire electrode, 1a Parallel wire electrode part, 1b Cutting wire part, 2 Workpiece, 3, 3a, 3b Processing liquid nozzle, 4 Processing tank, 5, 5a, 5b Wire electrode positioning mechanism (positioning guide roller), 6, 6a, 6b feeding unit, 7, 7a, 7b current plate,
8a, 8b, 8c, 8d Guide rollers, 8c, 8d A pair of guide rollers, 11 Workpiece moving mechanism (stage), 13 Auxiliary processing tank, 21 Shut-off section, 31 Connection port 40 Processing power source.

Claims (8)

A plurality of guide rollers arranged at intervals;
One wire electrode that forms a plurality of cutting wire portions between a pair of guide rollers of the plurality of guide rollers by being wound around each of the plurality of guide rollers,
A machining power source for applying a voltage to the plurality of cutting wire portions via a power supply unit;
A processing tank for immersing the workpiece in the processing liquid;
A workpiece moving mechanism for moving the workpiece relative to the plurality of cutting wire portions;
A machining liquid nozzle provided on a side wall of the machining tank, having a supply path for supplying a machining liquid to the plurality of cutting wire portions and the workpiece, and through which the plurality of cutting wire portions are passed through the supply path; ,
A wire electrode positioning mechanism having a groove for holding each of the plurality of cutting wire portions at a predetermined interval, and provided between the machining liquid nozzle and the pair of guide rollers;
It is provided between the machining liquid nozzle and the wire electrode positioning mechanism, and is composed of a plurality of separable members, and is arranged at a position sandwiched from the upper and lower sides of the plurality of cutting wire portions in a non-contact state with the plurality of cutting wire portions. is, wire electric discharge machining apparatus having a rectifying plate for blocking the working fluid leaking from the machining tank. 2. The wire electrical discharge machining apparatus according to claim 1, wherein the rectifying plate is installed with an inclination with respect to a leakage direction of the machining liquid leaking from the machining liquid nozzle. 3. The wire according to claim 1, wherein the rectifying plate includes a blocking portion that blocks a flow of the machining liquid leaking from the machining liquid nozzle at a portion facing the plurality of cutting wire portions. Electric discharge machine. 4. The wire electric discharge machining apparatus according to claim 3, wherein the blocking portion is made of a sponge. 4. The wire electric discharge machining apparatus according to claim 3 , wherein the blocking portion is made of a non-conductive material brush.   The wire electric discharge machining apparatus according to claim 1, further comprising an auxiliary machining tank for collecting the machining fluid blocked by the rectifying plate between the machining tank and the wire electrode positioning mechanism. The depth of the auxiliary processing tank is a depth capable of holding the machining liquid in which the entire current plate is immersed, and a wire that connects a plurality of wire electrodes to the side wall of the auxiliary processing tank in a non-contact state with the side wall The wire electric discharge machining apparatus according to claim 6 , further comprising a mouth.   A plurality of guide rollers arranged at intervals;
  One wire electrode that forms a plurality of cutting wire portions between a pair of guide rollers of the plurality of guide rollers by being wound around each of the plurality of guide rollers,
  A machining power source for applying a voltage to the plurality of cutting wire portions via a power supply unit;
  A processing tank for immersing the workpiece in the processing liquid;
  A workpiece moving mechanism for moving the workpiece relative to the plurality of cutting wire portions;
  A machining liquid nozzle provided on a side wall of the machining tank, having a supply path for supplying a machining liquid to the plurality of cutting wire portions and the workpiece, and through which the plurality of cutting wire portions are passed through the supply path; ,
  A wire electrode positioning mechanism having a groove for holding each of the plurality of cutting wire portions at a predetermined interval, and provided between the machining liquid nozzle and the pair of guide rollers;
  A rectifying plate provided between the machining liquid nozzle and the wire electrode positioning mechanism and blocking the machining liquid leaking from the machining tank;
  A wire electric discharge machining apparatus including an auxiliary machining tank for collecting a machining fluid blocked by a current plate between a machining tank and a wire electrode positioning mechanism.

Images