JP2017056502A - Wire electric discharge machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent respective wire rows of a cutting area of a work divided into a plurality from respectively variably traveling.SOLUTION: A wire electric discharge machine for making juxtaposed wire rows travel in the same direction by revolving one connected wire around a plurality of guide rollers, is provided with wire flying means for changing the travel direction of the one connected wire from the travel direction of the wire rows in a partial area in the wire rows existing on a second surface of not slicing a work so as to become a wider interval than an interval of the wire rows in a partial area in a wire rows existing on a first surface for slicing the work, and changes the travel direction of the wire on a revolving orbital plane where the one connected wire revolves around the plurality of guide rollers.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a technique of a wire electric discharge machining apparatus.

  Conventionally, there is a wire saw technique in which a plurality of workpieces are arranged and cut simultaneously.

  In Patent Document 1, in the wire saw technique, a work cutting area and a wire flying area are provided, and two wire blowing rollers are arranged in the wire flying area so that no wire exists in the wire flying area. Techniques to do this are disclosed.

JP 2010-253664 A

  However, in Patent Document 1, when two wire blowing rollers are arranged in the wire skipping area and the wire is not present in the wire skipping area, the wire skipping roller is provided at any position. However, it is not disclosed at all whether it is necessary to provide a wire skipping area.

If the wire blowing roller is provided outside the circulation track of the plurality of main rollers that circulate around the plurality of main rollers as in Patent Document 1, the wire tension by the wire blowing roller provided outside the circulation track is 1 The wire connected to the book will be affected, and as a result, the tension of the wire in the cutting area of each work will not be uniform. The problem of running will occur.
An object of the present invention is to provide a mechanism for preventing each wire row in a cutting area of each work divided into a plurality of parts from traveling with variation.

  The present invention is a wire electric discharge machining apparatus for slicing a workpiece at an interval between parallel wire rows, in which one connected wire goes around a plurality of guide rollers, and the parallel wire rows are arranged in the same direction. And a second surface that does not slice the workpiece so as to have an interval wider than the interval between the wire rows in a partial region in the wire row on the first surface that slices the workpiece. In a partial area in the wire row, a wire skipping means for changing the traveling direction of the one connected wire from the traveling direction of the wire row, and a plurality of wires arranged side by side in a direction intersecting the wire row Each of the workpieces is sliced into a plurality of wire rows divided by the wire blowing means on the first surface, and the wire blowing means is connected to one connected wire. There in orbit plane orbiting the plurality of guide rollers, characterized in that changing the traveling direction of the wire.

  According to the present invention, it is possible to provide a mechanism for preventing the wire rows in the cutting area of each workpiece from running with variations.

The figure which looked at the wire electric discharge machining apparatus of this invention from the apparatus front direction. It is the figure which looked at the wire skipping mechanism of this invention from the front of the wire electric discharge machining apparatus. It is the figure which looked at the wire blowing mechanism of this invention from the wire electric discharge machining apparatus upper part. It is the figure which looked at the wire skipping mechanism of this invention from the bottom part of the wire electric discharge machining apparatus. It is the figure which looked at the operation | movement which rotates with the suitable arrangement | positioning location of the wire blowing mechanism of this invention, and a wire's run from the bottom part of the wire electric discharge machining apparatus. It is the figure which looked at the wire blowing mechanism of this invention from the right side surface of the wire electric discharge machining apparatus. It is the figure which looked at the guide roller of this invention from the right side surface of the wire electric discharge machining apparatus. It is the figure which showed the relative position of the running direction of a wire and a V-groove in the case of not providing the wire blow-off mechanism of this invention, and was the figure seen from the relative position the wire electric discharge machining apparatus bottom part.

  Referring to FIG.

  FIG. 1 is a diagram showing a configuration of a wire electric discharge machining system according to the present invention. The wire electric discharge machining system includes a wire electric discharge machining device 1, a power supply device 2, and a machining fluid supply device 12. The configuration of each mechanism shown in FIG. 1 is an example, and it goes without saying that there are various configuration examples depending on the purpose and application.

  The wire electric discharge machining system can slice a workpiece, which is a workpiece, into a thin plate shape at intervals between the arranged wire rows by electric discharge machining. The present invention relates to a wire electric discharge machining apparatus for machining a workpiece with a parallel wire array. In the wire electric discharge machining apparatus 1, a workpiece feed unit 3 driven by a servo motor is provided at an upper portion of the wire array and is vertically moved. Can move a work (also called an ingot). In the present embodiment, the workpiece is fed downward and the electric discharge machining is performed. However, as a modification, the workpiece feeding unit 3 is provided at the lower part of the wire row, and the workpiece may be moved upward to perform the electric discharge machining. .

  The power supply device 2 applies electrical discharge machining to the workpiece by applying a pulse voltage between the poles of the wire row and the workpiece arranged in parallel. The power supply device 2 moves the work feed unit 3 to an appropriate distance at which discharge is efficiently generated between the poles according to the state of discharge (voltage between the poles) detected by the discharge servo control circuit that controls the servo motor. The discharge gap (distance between the poles) is controlled to be kept at an appropriate distance, relative positioning between the workpiece and the wire row is performed, and the discharge machining of the workpiece is repeated little by little until the slicing is completed.

  The power supply device 2 applies a pulse voltage for electric discharge machining to a wire through a power supply 104 from a machining power source (not shown). Furthermore, in order to adapt to conditions such as a short circuit that occurs between the poles, a servo control signal is sent to the workpiece feed unit 3 so that the discharge servo control circuit keeps the discharge gap (distance between the poles) at an appropriate distance that does not cause a short circuit. send.

  The wire electric discharge machining apparatus 1 is connected to a power supply device 2 via a wiring 11 for machining power supply. The wire electric discharge machining apparatus 1 uses electric power (product of machining voltage and machining current) supplied from the power supply device 2. , EDM the workpiece.

  The machining fluid supply device 12 uses a pump (not shown) to feed the machining fluid used for cooling the workpiece and wire by heat generated by the discharge between the electrodes and removing the machining waste remaining after the discharge into the machining tank 6. While feeding the liquid, the removal of the machining waste accumulated in the machining liquid, the management of conductivity (1 μS to 250 μS) by ion exchange, and the management of the liquid temperature (around 20 ° C.) are performed. Although water is mainly used, electric discharge machining oil can also be used.

  The main rollers 8 and 9 are formed with a number of V-grooves having a predetermined pitch so that the workpiece can be sliced with a desired thickness and a predetermined pitch number so that the workpiece can be sliced with a desired number of pieces. A necessary number of wires from a wire supply bobbin (not shown) are wound around two main rollers and sent to a take-up bobbin (not shown). The traveling speed of the wire at this time is, for example, about 100 m / min to 900 m / min.

  The two main rollers 8 and 9 rotate in the same direction and at the same speed, so that one wire sent from the wire feeding portion (not shown) moves around the outer periphery of the main roller (two). By circling, it is possible to run the wires in the same direction by arranging the wires in a plurality of rows. The wire is a single connected wire that is drawn out from the feeding portion and wound helically around the outer side of the main roller a number of times (up to about 2000 times) while being fitted into the V groove on the outer peripheral surface of the main roller. After that, it is wound on a winding bobbin.

In the present embodiment, two main rollers 8 and 9 are shown for convenience. However, the number of main rollers is three or more, and one main roller is fed from a wire feeding portion (not shown). These wires may circulate around the outer periphery of the main roller (three or more), so that the wires may be arranged in a plurality of rows and run in the same direction.
In this way, a single connected wire circulates around the outer periphery of the left and right guide rollers, so that the parallel wire trains travel in the same direction (traveling means).

  The main rollers 8 and 9 have a structure in which a metal is used for the central axis and the outside is covered with a resin material. By having a structure in which the outside is covered with the resin material in this way, even when one wire circulates around the outer periphery of the main roller at a high speed, the wire does not detach from the V groove and does not jump out of each V groove. Like.

  In the lower part of the outer side of the wire orbit of the main roller 8.9, a power supply 104 is provided to supply the pulse voltage from the power supply device 2 to the wire. This is a power supply for supplying power.

  In the case of this collective power supply, one power supply 104 is brought into contact with a wire row (for example, 10 to 100 wires) arranged in parallel, so that one wire feeder (for example, 10 to 100 wires) is provided. It is only necessary to provide a machining power source, and even when power is supplied to a large number (100, etc.), the cost is low.

As a modified example, each wire (one piece) may be fed with an individual pulse voltage in contact with each wire in the wire array arranged in parallel per one power supply. In this case, it is necessary to provide a separate processing power source for each wire (one). When power is supplied to a large number (100, etc.), the cost increases due to the individual processing power source.
Since the material of the power supply 104 is required to be strong against mechanical wear and conductive, a cemented carbide or the like is preferable.
The workpiece is attached to the workpiece feeding unit 3 located on the outer side of the wire circulation path of the main roller 8.9, and the workpiece is moved downward to perform electric discharge machining.

  A machining tank 6 for storing a machining fluid is provided in the central portion inside the wire orbit of the main roller 8.9. During the electric discharge machining, the wire and the workpiece are immersed in the machining fluid, thereby discharging the machining fluid. Cools parts and removes processing debris.

  A machining power source (not shown) in the power supply device 2 supplies a machining voltage V that is set to supply a machining current I necessary for electric discharge machining, and the machining voltage V is set to an arbitrary voltage. be able to.

  The voltage between the electrodes is a voltage value between the wire and the workpiece at the time of occurrence of discharge. When an appropriate voltage between the electrodes is reached, the wire is discharged from the wire to the workpiece. The interelectrode current is a current value that flows between the wire and the workpiece when a discharge occurs.

  The power supply 104 supplies power to the wire row at once. In this embodiment, a case is shown in which electric discharge machining is performed by applying a pulse voltage from the power supply 104 arranged at one lower position outside the wire circulation track of the main roller 8.9. The wire current that flows from the power supply 104 to the gap between the power supply 104 through the wire by the power supply 104 that is fed in one place is divided into two paths on the left and right sides of the main rollers 8 and 9 and flows between the poles.

  The workpiece feeding unit 3 is a device having a mechanism for moving the workpiece fixed by the conductive adhesive 300 in the vertical direction, and the workpiece feeding unit 3 is moved downward (gravity direction) with the workpiece fixed. By moving in stages, the work can be brought closer to the wire row in stages.

  The processing tank 6 is a container for storing a processing liquid. The working fluid is, for example, deionized water having a high resistance value. The presence of a high-resistance machining fluid between the wire and the workpiece makes it possible to generate a good discharge between the wire and the workpiece and slice the workpiece.

  As shown in FIG. 7, a plurality of rows of V grooves for winding the wire are formed on the surfaces of the main rollers 8 and 9, and the wires are wound around the V grooves. After the wire is wound around the V-groove, both the main rollers 8 and 9 are rotated right or left, so that one connected wire travels as a wire row.

  The material of the wire is an electric conductor, and the power supply 104 to which the pulse voltage is applied and the wire come into contact with each other to supply power to the wire, and a wire current flows through the wire. In this way, the discharge is generated between the electrodes, so that the workpiece can be shaved and a thin plate-like workpiece (for example, a wafer) can be produced. The main component of the wire material is iron, the wire has a diameter of about 0.12 mm and a cross-sectional area of about 0.06 × 0.06 × π mm 2.

  The power supply 104 is fixed to the power supply unit 10. The power supply unit 10 can move the position of the entire power supply unit 10 in the direction of gravity in order to adjust the contact pressure between the power supply 104 and the wire.

In this specification, the upper and lower directions correspond to the upper and lower directions in the direction of gravity, the left and right correspond to the left and right when viewed from the front of the wire electric discharge machine, and the front and rear correspond to wire discharge. A description will be given corresponding to the front and back surfaces when viewed from the top of the processing apparatus.
The block 5 is a part of the housing of the wire electric discharge machining apparatus 1. A work feed unit 3 is welded to the block 5.
FIG. 2 will be described.
It is the figure which looked at the wire blowing mechanism of this invention from the front of the wire electric discharge machining apparatus.

In the drawing, the first surface is a surface formed by an upper wire row that is a slicing side in this embodiment. In addition, the second surface indicates a surface formed by a lower wire row that is a non-sliced side in this embodiment.
The arrow indicates the direction in which one connected wire travels, the IN side being the supply bobbin side and the OUT side being the take-up bobbin side.
FIG. 3 will be described.
It is the figure which looked at the wire skipping mechanism of this invention from the upper part of the wire electric discharge machining apparatus.
That is, you are looking at the first side.

  When viewed from the upper part of the wire electric discharge machining apparatus 1, a part of the wire row in the first surface described with reference to FIG. There is no wire row in the area.

  This partial region is defined as a wire absence region. Further, a wire row adjacent to the wire absence region is defined as a workpiece cutting region. The three workpiece cutting regions are wire rows divided into a plurality.

By preventing the wire row from existing in this partial region, a plurality of works (work A to C) arranged side by side in the direction intersecting the wire row as shown in FIGS. 3 and 4 are simultaneously discharged. When processing is performed, it is avoided that the cut pieces of the wafer sliced from both ends of each workpiece collide with the wire row and damage the wire row.
FIG. 4 will be described.
It is the figure which looked at the wire skipping mechanism of this invention from the lower part of the wire electric discharge machining apparatus.
That is, you are looking at the second side.

In order to provide a wire non-existing region in the first surface of FIG. 3, the traveling direction of one connected wire traveling in a partial region in the wire array in the second surface is defined as a wire row. It is necessary to change from the running direction to the diagonal direction. This partial area is defined as a wire skipping area.
In this embodiment, four wire skipping mechanisms (wire skipping means) are provided in order to create two wire skipping regions in the second plane.

  As can be seen from the composition of FIG. 2 and FIG. 4, the traveling direction of one connected wire is changed in the circular orbital surface that circulates the left and right guide rollers by two wire skipping mechanisms per one wire skipping region. I understand that

  By incorporating a wire blow-off mechanism in the surface of the orbit, the wire tension variation newly generated by installing the wire blow-off mechanism can be reduced, compared to the case where a wire blow-off mechanism is provided outside the orbit. In addition, since the wire row in each workpiece cutting area travels with a uniform tension, there is an effect that the difference between the workpiece cutting areas is reduced.

As a result, it is not necessary to additionally install a tension control mechanism for reducing newly generated wire tension fluctuations, and the cost is lower than that of providing a wire skipping mechanism outside the circuit track.
As described above, a pair (two) of wire skipping mechanisms are disposed per wire skipping region.

  Thus, by appropriately adjusting the relative position or relative distance of the pair of wire skipping mechanisms in the wire skipping region, the travel direction (or travel angle) of one connected wire is changed to the travel direction desired by the user. The width of the wire absence region can be arbitrarily set on the first surface.

  Further, as shown in FIG. 5, by adjusting the position of the end portion of one wire blowing mechanism to the groove bottom (or the center of the groove) of the V groove of the guide roller, the wires can be made parallel. Since the wire runs straight toward the groove bottom (or the center of the groove) of the V-groove, the frictional force against the V-groove is reduced at the portion where the wire and the V-groove are in contact with each other. Damage to the can be reduced.

  As shown in FIG. 8, without attaching the wire skipping mechanism of the present invention, the position of the V-groove around which one connected wire is wound is simply shifted by the required number of grooves to force the traveling direction of the wire. When the angle is changed obliquely, a frictional force is applied to the V-groove in which the wire is forcibly hooked, so that only the hooked V-groove has a large frictional force.

  Then, only the V groove gradually expands in the width direction of the V groove, and finally only the V groove is gradually cut in the groove bottom direction. As a result of cutting in the groove bottom direction, the outer circumference of the orbit is shortened by the V groove, and the outer circumference of the orbit is shortened. A defect occurs and only one wire is not discharged.

In addition, it fixes to the lower housing | casing 203 with a screw etc. so that each wire skipping mechanism may not move. Further, as described above, a slide rail or the like (not shown) that can slide a portion fixed by screwing or the like is provided so that each wire skipping mechanism can be disposed at an appropriate position in the width direction of the V-groove.
FIG. 5 will be described.
It is the figure which looked at the operation | movement which rotates with the suitable arrangement | positioning location of the wire blowing mechanism of this invention, and a wire's run from the bottom part of the wire electric discharge machining apparatus.
The rotating direction of the wire skipping mechanism is the same as the traveling direction of the wire because the traveling wire rotates the rotating unit 201.
FIG. 6 will be described.
It is the figure which looked at the wire skipping mechanism of this invention from the right side surface of the wire electric discharge machining apparatus.

It is configured as a unit that combines parts of a rotating unit 201 that rotates as the wire travels and a holding unit 202 that holds the rotating unit, per one wire skipping means.
The holding part 202 is fixed to the lower housing 203 with screws or the like.

  As shown in FIG. 6, even when a plurality of workpieces (works A to C) are arranged side by side, when the workpiece feeding unit 3 is lowered, the number of workpiece cutting areas is the same as the number of workpieces A to C. Therefore, the workpieces A to C are simultaneously sliced in each workpiece cutting area.

As described above, the holding unit 202 connected to the rotating unit 201 is connected to a part of the lower housing 203 of the wire electric discharge machining apparatus, and the arrangement position of one wire skip is fixed.
As can be seen from FIG. 5 and FIG. 6, the arrangement position of the wire skip is fixed so that the surface of the rotating portion 201 stands perpendicular to the orbital surface.

Furthermore, the surface of the rotating part 201 has a cylindrical shape with a width, and the traveling wire rotates the rotating part 201 at an arbitrary place in the cylindrical surface with a width, so that the traveling wire becomes a circular orbit surface. Can be maintained at all times.
FIG. 7 will be described.
It is the figure which looked at the guide roller of this invention from the right side surface of the wire electric discharge machining apparatus.

  This figure shows the guide roller in a state where no wire is wound. A large number of rows of V-grooves are formed in the width direction of the guide roller so that the bottom of the multiple rows of grooves can be seen.

DESCRIPTION OF SYMBOLS 1 Wire electrical discharge machining apparatus 2 Power supply device 3 Work feeding unit 6 Processing tank 8 Guide roller 9 Guide roller 104 Electric supply 201 Rotating part 202 Holding part 203 Lower housing 204 Guide roller housing 205 Rotating shaft of guide roller

Claims (3)

A wire electrical discharge machining apparatus for slicing a workpiece at an interval between parallel wire rows,
One connected wire circulates around a plurality of guide rollers, and traveling means for traveling the juxtaposed wire rows in the same direction;
The one in the wire row on the second surface where the workpiece is not sliced so that the gap in the partial region in the wire row on the first surface slicing the workpiece is wider than the interval between the wire rows. In a partial area, wire blowing means for changing the traveling direction of the one connected wire from the traveling direction of the wire row;
Slicing a plurality of the workpieces arranged side by side in a direction intersecting with the wire row, respectively, in a wire row divided into a plurality by the wire blowing means on the first surface,
A wire electric discharge machining apparatus characterized in that the wire skipping means changes the traveling direction of a wire on a circular orbit surface in which a single connected wire circulates a plurality of guide rollers. The wire skipping means is
A rotating part that rotates as the one connected wire travels;
A holding part for holding the rotating shaft of the rotating part;
With
The holding part connected to the rotating part is connected to a part of the housing of the wire electric discharge machining apparatus, and the position of the wire blowing means is fixed,
A surface of the rotating portion is provided in a direction perpendicular to the parallel wire rows;
The said surface is a column shape, The traveling direction of the said one connected wire is changed by the said circular track surface by the said surface and the said one connected wire contacting. Wire electrical discharge machining equipment. In a partial region in the line of wires arranged side by side on the second surface, a pair of wire skipping means is disposed,
Depending on the relative position of the pair of wire blowing means, a part of the wire array arranged on the second surface in a part of the wire array arranged on the second surface. Changing the traveling direction of the one connected wire in a circular orbital surface in which the one connected wire circulates around the plurality of guide rollers in a region;
The juxtaposed wire rows on the second surface are formed in the juxtaposed wire rows on the second surface, depending on the arrangement positions of the pair of wire blowing means. The wire discharge according to any one of claims 1 and 2, wherein a traveling direction of the one connected wire is adjusted by a circular orbital surface so as to be parallel to the grooves of the plurality of guide rollers. Processing equipment.

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