JPS6357121A - Electric discharge cutter - Google Patents

Abstract

PURPOSE:To secure such a highly accurate electric discharge cutter that is narrow in working groove width, by using a fine wire electrode, and repeating pulse discharge in space between opposed workpieces while making it travel between guides at the specified tension and speed, and cutting the workpiece. CONSTITUTION:An wire electrode 1 is of fine wire form of 0.02-0.5mmphi or so, plural pieces are paralleled, and they are guide horizontally by each guide 2 at both ends. And, the wire electrode is traveled by a brake 4 and a driving roller 5 at the specified tension and speed. Next, a workpiece 7 is clamped to a work table 8, and electric discharge machining takes place by machining feed when a pindle 9 goes up. And, as structure of a device, a full side wall 12 is able to be opened or closed, and at the time of this opening or closing, the work table 8 is traveled by drive of a loader motor 14. With this constitution, working groove width is narrowly cuttable, and since unmanned operation is made possible, setting and removing operations of the workpiece by a robot or the like is made so easy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a discharge cutting machine that performs discharge cutting using a thin wire electrode having a diameter of about 0.02 to 0.5 mm.

[Prior art]

Conventional electrical discharge cutting machines use a machining liquid such as water glass, a steel belt with a thickness of about 0.5 to 1 mm as an electrode, and a DC power source as a machining power source. ing.

〔problem〕

In the case of this conventional electric discharge cutting machine, the width of the cutting Igit8 is large and the material wear is large, and not only is it not practical to perform semiconductor engagement IfIi, etc., but also precision cutting cannot be performed. The cutting accuracy was extremely poor, with a steel bell having a thickness of 0.5 to 1 mm, the width of the machined groove being 0.7 to 1 mm, and 5111 m or more, and the cutting surface being 100 μmax. Furthermore, it is extremely difficult to set the workpieces, particularly to fix and set a plurality of micro workpieces and cut each one with precision.

〔problem〕

The present invention has been proposed in order to improve the above-mentioned drawbacks, and includes a guide mechanism that uses a thin wire as an electrode, guides the wire electrode at both ends, and a guide mechanism that supplies the wire electrode from a reel and moves the guide mechanism to a predetermined position. a drive device that runs with a tension and speed of , a processing table that supports the workpiece opposite to the wire electrode guided by the guide F3 groove with a minute gap, and a required cutting distance between the processing table and the guide mechanism. The present invention is characterized in that it is provided with a feed control device that provides processing feed of a shape, and a loader that moves the processing table to a work loading position in front of a processing position facing the wire electrode. This eliminates obstacles such as wire electrodes when loading and unloading the workpiece, making it possible to load and unload the workpiece by the robots 1 and the like.

〔Example〕

The present invention will be explained below with reference to an embodiment of the drawings.

Figure 1 is a side view, Figure 2 is a front view, and 1 is 0.02 to 0.
．． A plurality of thin wire electrodes with a diameter of about 5 mm are guided in parallel. Reference numerals 2 denote guides at both ends, and the wire electrode 1 supplied from a reel 3 is guided horizontally by the guide 2, and is moved by a brake 4 and a drive roller 5 with the required tension and speed. 6 is a tank for storing the used wire 1, and γ is a workpiece, which is fixedly supported on the processing table 8.

Reference numeral 9 denotes a spindle to which vertical machining feed is applied, and a machining table 8 is mounted and fixed on the tip of this spindle, and the machining feed is controlled by a machining feed device 10 constituted by a servo motor or the like. Reference numeral 11 denotes a processing tank whose entire side wall 12 can be opened and closed about a lower end pivot by a drive motor 13 as shown in the dotted line diagram. 14 is a loader motor that moves the processing table 8 from the processing position indicated by the solid line to the work loading position indicated by the dotted line; 15 is a nozzle that sprays and supplies processing fluid (for example, water) along the wire electrode 1; The stored liquid is pumped up and supplied, and the processing liquid flowing down from the processing tank 11 is circulated and supplied to be stored in the tank 17.

As described above, the workpiece 7 fixed on the processing table 8 is suspended together with the processing table 8 by the spindle 9, so that the gaps between the three wire electrodes 1 running horizontally and parallel to each other are equal. On the other hand, electric discharge machining is performed while following the machining gap and maintaining a minute gap by the rising machining feed of the spindle 9. Three machining fluid supply nozzles 15 are provided so as to spray a jet onto each of the three horizontally running wire electrodes 1, and are supplied to the gap between each wire electrode 1 and the workpiece 7, and are connected to a machining power source (not shown). A machining pulse is supplied to each gap from 1 to 3, and the pulse discharge is repeated to perform machining. The machining feed given to the spindle 9 by the motor 10 is controlled by a servo or constant speed feed based on the difference voltage between the detection signal voltage and the reference voltage while detecting the electric discharge machining state such as the voltage and current between the wire electrode 1 and the workpiece 1. However, the knife whose gap is short-circuited is controlled to move backward to maintain a constant machining gap and continue stable machining. Processing feed is not limited to simply 1@feed up and down, but an NG control device (not shown) is also provided.
By controlling the two axes of the vertical axis, the axis perpendicular to the traveling axis of the wire electrode 1, and the vertical movement axis of the spindle 9, the workpiece 1 can be cut into any complex shape.

The cutting speed is approximately 250 mm2/ll1in or more using a BS wire electrode of 0.3IiIIIlφ, and according to this, semiconductor materials have recently increased in size from 6″φ to 8″φ. However, it is possible to process this at high speed and with high efficiency. Also, the cutting groove width is 0.3m
mφ wire electrode, approximately 0.33 to 0.35IIll
It can be processed with high precision. In the cutting process, three pieces of the workpiece 7 can be cut at the same time using the three parallel wire electrodes 1, thereby increasing the cutting efficiency.

In addition, the structure of the device is such that the entire side wall 12 can be opened and closed around the lower end pivot, and when this is opened and closed, the processing table 8
By driving the loader motor 14 to move the workpiece 1 from the processing position indicated by the solid line to the work loading position indicated by the dotted line, the workpiece 1 can be mounted and set on the processing table 8 very easily. The work load can be set by loading the table 8 from the dotted line position to the solid line machining position.The drive control of this loader motor 14 can also be automatically controlled by the NC control m+ device, and the machining can be automatically performed. When the predetermined cutting process is started and the predetermined cutting process is completed, the cut workpiece chips can be automatically taken out.

Incidentally, in the above embodiment, the processing table 8 has a spindle 9.
The cutting machine is placed on the L-shaped tip of the machine and lifted up, and processing is performed while applying relative cutting feed to the spindle 9 by a drive device provided on the head corresponding to the horizontally running wire electrode 1. As another embodiment, the processing table may be provided on the bed of the mechanical device, and the processing and feeding device may be provided on the bed side for processing and feeding.

〔Effect of the invention〕

As described above, the present invention uses a thin wire electrode as an electrode, guides it at both ends with a guide mechanism, supplies it from one reel, and runs it between the guides with a predetermined tension and speed while facing the opposite target. Since cutting is performed by repeating pulsed discharge between the wire electrode and the workpiece, the width of the processing groove can be narrowed and the cutting process can be performed with high precision, and the machining feed given relative to the wire electrode and the workpiece can be If the shape is controlled by an arbitrary program using an NO device or the like, it is possible to cut not only a simple straight line but also any complex shape. Further, if a plurality of wire electrodes are guided and run in parallel and electrical discharge machining is performed using each wire electrode, a plurality of chips having the same shape can be cut at the same time, thereby improving efficiency.

In addition, the processing table for fixedly supporting the workpiece in the apparatus of the present invention is equipped with a loader that moves the workpiece to the work loading position in front of the processing position facing the wire electrode, so that the workpiece cannot be fixedly set. It can be done extremely easily and accurately, and has the effect of making it easier to mount and remove workpieces by robots, etc. to enable unmanned operation of electrical processing equipment, etc., and at the same time, to facilitate the cutting of semiconductor chips, etc.

[Brief explanation of the drawing]

FIG. 1 is a side view of an embodiment of the present invention, and FIG. 2 is a front view thereof. 1...Wire electrode 2...Guide 3...Reel 4...Brake 5... ..... Drive roller 7 ..... Workpiece 8 ..... Machining table 9 ..... Spindle 10 .... ...Processing feed device 11...Processing tank 14...Loader motor 15...
...Processing liquid nozzle patent applicant Kiyoshi Inoue, Representative of Inoue Japax Laboratory Co., Ltd.

Claims (2)

[Claims] (1) In an electric discharge cutting machine that supplies machining fluid between an electrode and a workpiece and cuts by repeating pulse discharge, a wire is used as the electrode, and a guide mechanism that guides the wire electrode at both ends; a drive device that supplies a wire electrode from a reel and causes the guide mechanism to run with a predetermined tension and speed;
a processing table that supports the workpiece opposite to a wire electrode guided by the guide mechanism with a minute gap; a feed control device that provides processing feed for a required cutting shape between the processing table and the guide mechanism; An electrical discharge cutting machine comprising: a loader that moves the processing table to a work loading position in front of a processing position facing the wire electrode. (2) The electric discharge cutting machine according to claim 1, further comprising a guide device that guides two or more wire electrodes in parallel.