JP5796622B2 - Wire electric discharge machining apparatus and wire electric discharge machining method - Google Patents

Description

The present invention is a wire electrical discharge machining apparatus, a wire electric discharge machining how, in particular, to a technique for reducing the flow rate of the working fluid supplied to the machining fluid tank.

  In recent years, a method has been developed in which a plurality of work materials such as semiconductor materials, solar cell materials, and hard materials are simultaneously cut out in a short time by electric discharge machining.

  For example, in order to cut the workpiece material into a thin plate shape, the wire electrical discharge machining device is run while applying a voltage to the wire via a power supply, and an electric discharge phenomenon is generated by bringing the workpiece material close to the wire. The work material is subjected to electric discharge machining.

  Patent Literature 1 describes that a workpiece is cut by electric discharge machining with a plurality of traveling wires to cut into thin pieces.

JP 2010-260151 A

  However, conventionally, for example, as the speed of the traveling wire increases, as the number of wire electrodes increases, and as the interval between the wires decreases, the processing liquid in the processing water tank is processed by the traveling wire. In some cases, it is not possible to ensure a sufficient amount of machining liquid necessary for wire electric discharge machining in the machining water tank.

  Therefore, when a sufficient amount of machining fluid required for electric discharge machining cannot be secured between the workpiece (work) and the wire, which is an electric discharge generation unit, for example, air discharge occurs and the workpiece is processed. There is a possibility that the workpiece or the wire, which is an object, is damaged, and the workpiece cannot be appropriately subjected to electric discharge machining.

  In addition, when the flow of the machining fluid supplied to the machining water tank hits the wire directly, the distance between the wires fluctuates due to the flow of the machining fluid (the wire is shaken), and the workpiece is appropriately discharged. There was a possibility that it could not be processed. That is, the wire is shaken by the jet of the processing liquid supplied to the processing liquid tank, and it is difficult to process the workpiece uniformly.

  An object of the present invention is to provide a mechanism for reducing electric wire machining of a workpiece by reducing the flow rate of a machining fluid supplied to a machining fluid tank, thereby reducing wire blurring due to the machining fluid. To do.

The present invention is a wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece, and stores a machining fluid used for electric discharge between the workpiece and the wire. A machining liquid tank provided so that the machining liquid in the machining liquid tank is located between the workpiece and the wire, and a machining liquid supplied to the machining liquid tank. A flow velocity reduction mechanism including a member having a plurality of porous holes provided in the machining liquid tank, which reduces the flow velocity.

Further, the present invention is a wire electric discharge machining method by a wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece, wherein a machining liquid tank includes the workpiece and the wire. Is stored so that the machining liquid in the machining liquid tank is located between the workpiece and the wire, and is provided in the machining liquid tank. A flow rate reduction mechanism including a member having a plurality of porous holes reduces the flow rate of the processing liquid supplied to the processing liquid tank.

  According to the present invention, by reducing the flow rate of the machining liquid supplied to the machining liquid tank, wire blurring due to the machining liquid can be reduced, and the workpiece can be appropriately subjected to electric discharge machining.

It is the external view which looked at the multi-wire electric discharge machining system from the front. It is an enlarged view in the dotted-line 16 frame shown in FIG. It is a figure which shows the structure of the process liquid tank 6, the enclosure board 12, and the wire 7 with which the multi-wire electric discharge machining apparatus 1 is provided. It is a figure for demonstrating that the quantity of the process liquid required for electric discharge machining is stored in the enclosure board 12 with which the multi-wire electric discharge machining apparatus 1 is provided. It is a figure for demonstrating the structure of the surrounding board 12, the water supply part 13, and the baffle plate 14 with which the multi-wire electric discharge machining apparatus 1 is provided. It is a figure explaining the structure of the baffle plate 14 and the wire 7 with which the multi-wire electric discharge machining apparatus 1 is provided. It is a figure for demonstrating the machining fluid supply port 701 with which the machining fluid is supplied to the machining fluid tank 6 with which the multi-wire electric discharge machining apparatus 1 is provided. An example of the flow of the machining liquid in the machining liquid tank 6 when the machining liquid is supplied from the machining liquid supply port 701 to the machining liquid tank 6 not provided with the flux dispersion control mechanism 801 and the machining liquid is supplied. FIG. An example of the flow of the machining liquid in the machining liquid tank 6 when the machining liquid is supplied from the machining liquid supply port 701 to the machining liquid tank 6 including the flux dispersion control mechanism 801 and the machining liquid is supplied. FIG. FIG. 6 is a cross-sectional view of a flux dispersion control mechanism 801 and an example of a water flow in which machining water flows into the working fluid tank 6 through pores of the flux dispersion control mechanism 801. By changing the hole diameter of the tube inside the flux dispersion control mechanism 801 in accordance with the distance from the outlet of the machining liquid supply port 7, the entire surface of the machining liquid is ejected from the tube into the machining liquid tank 6. FIG.

  Hereinafter, the present invention will be described in detail according to preferred embodiments with reference to the accompanying drawings.

  FIG. 1 is an external view of a multi-wire electric discharge machining apparatus 1 according to an embodiment of the present invention as viewed from the front. The configuration of each mechanism shown in FIG. 1 is an example, and it goes without saying that there are various configuration examples depending on the purpose and application.

  The multi-wire electric discharge machining system according to the embodiment of the present invention includes a multi-wire electric discharge machining apparatus 1, a power supply unit (power supply apparatus) 15, and a machining fluid supply apparatus 18.

  The multi-wire electric discharge machining system can slice a work piece (silicon ingot 5 in the example of FIG. 1) into thin pieces at intervals of a plurality of wires 7 (wire electrodes) arranged in parallel by electric discharge.

  The multi-wire electric discharge machining apparatus 1 is connected to the power supply unit 15 via an electric wire (voltage application line), and is operated by electric power supplied from the power supply unit 15.

  The multi-wire electric discharge machining apparatus 1 is bonded to the work feeding apparatus 3 with an adhesive (adhesive of the bonding portion 4) when the work feeding apparatus 3 driven by a servo motor (not shown) moves in the vertical direction. A workpiece (the workpiece indicates a workpiece, which is the silicon ingot 5 in the example of FIG. 1) can be moved in the vertical direction.

  The multi-wire electric discharge machining apparatus 1 is an application example of the wire electric discharge machining apparatus of the present invention, and works a workpiece by electric discharge generated between the wire and the workpiece.

  In the embodiment of the present invention, when the silicon ingot 5 moves downward, the silicon ingot 5 and the wire 7 approach each other, and a discharge occurs between the silicon ingot 5 and the wire 7. Perform electrical discharge machining. At this time, the space between the silicon ingot 5 and the wire 7 (discharge gap (gap between the silicon ingot 5 and the wire 7)) is filled with the processing liquid, and this processing liquid has an electrical resistance of a predetermined width. Since it has a value, electric discharge is generated between the silicon ingot 5 and the wire 7, and the electric discharge machining of the silicon ingot 5 can be performed. That is, the machining fluid is a machining fluid used as a material for electrical resistance necessary for discharge between the workpiece and the wire.

  It is also possible to cause electric discharge machining between the silicon ingot 5 and the wire 7 by providing the workpiece feeding device 3 below the wire 7 and moving the silicon ingot 5 upward. .

  In this embodiment, the silicon ingot 5 is described as an example of a workpiece, but other materials (conductor or semiconductor) that are not insulators, such as SIC (silicon carbide), can also be used.

  As shown in FIG. 1, the multi-wire electric discharge machining apparatus 1 includes a block 19 that functions as a base of the multi-wire electric discharge machining apparatus 1, a block 2 that is installed in an apparatus above the block 19, and a work feeding device 3, an adhesive part 4, a silicon ingot 5, a processing liquid tank 6, a main roller 8, a wire 7, a main roller 9, a power supply unit 10, a power supply 11, a surrounding plate 12, and a water supply part 13, a current plate 14, and a flux dispersion control mechanism 801.

  The flux dispersion control mechanism 801 is an application example of the dispersion mechanism of the present invention, and disperses the water flow of the machining liquid supplied to the machining liquid tank 6 by the machining liquid supply device 18 and supplies the machining liquid to the machining liquid tank 6. It is a mechanism to do.

  That is, the flux dispersion control mechanism 801 is an application example of the flow velocity reduction mechanism of the present invention, and disperses the water flow of the machining liquid supplied to the machining liquid tank and supplies the machining liquid to the machining liquid tank. This is a mechanism for reducing the flow rate of the processing liquid supplied to the liquid tank.

  15 is a power supply unit (power supply device), and 2 is a discharge servo control circuit for controlling the servo motor so that the discharge gap is kept constant in order to efficiently generate discharge according to the state of discharge. Control and position the workpiece, and advance EDM.

  18 is a machining fluid supply device that feeds machining fluid necessary for cooling the electrical discharge machining section and removing machining chips (scraps) to the silicon ingot 5 and the wire 7 by a pump, and for machining chips in the machining fluid. Removal, management of specific resistance or conductivity (1 μS to 250 μS) by ion exchange resin, and management of liquid temperature (around 20 ° C.) are performed. Water is mainly used as the machining fluid, but electric discharge machining oil can also be used. In the present embodiment, water is used as an example of the machining fluid, but electric discharge machining oil may be used.

  Reference numerals 8 and 9 denote main rollers. Grooves are formed on the main rollers at a predetermined pitch and number so as to be processed at a desired thickness, and two wires whose tension is controlled from the wire supply bobbin are provided. The necessary number of rolls are wound around one main roller and sent to a take-up bobbin. A wire speed of about 100 m / min to 900 m / min is used.

  The main roller 9 is an application example of the guide roller of the present invention, and the wire 7 wound around the main roller 9 is caused to travel as the main roller 9 rotates.

  As the two main rollers rotate in the same direction and at the same speed, one wire 7 sent from the wire feeding portion circulates around the outer periphery of the main rollers (two) and is arranged in parallel. A plurality of wires 7 can run in the same direction.

  The wire 7 is a single connected wire, which is fed out from a bobbin (not shown) and fitted into a guide groove (not shown) on the outer peripheral surface of the main rollers 8 and 9, while being turned many times (maximum) outside the main roller. After being wound spirally, it is wound around a bobbin (not shown).

  The machining liquid tank 6 is formed by replacing ion-exchanged water controlled to have a specific resistance (electrical conductivity) within a predetermined range with a position of a discharge gap where the wire 7 (also referred to as a wire electrode) and the silicon ingot 5 are arranged in parallel. (Discharge point) is supplied as a machining fluid.

  The machining fluid tank 6 is an application example of the machining fluid tank of the present invention, and stores a machining fluid used for electrical discharge machining between a workpiece and a wire.

  That is, the machining liquid tank 6 is a machining liquid tank in which a machining liquid used for discharge between the workpiece and the wire is stored, and the machining liquid in the machining liquid tank is interposed between the workpiece and the wire. Is located.

  The specific resistance of the cooling water sprayed from the water supply unit 13 is almost equal to the specific resistance of the ion exchange water (working fluid), and the specific resistance of the cooling water is managed by the ion exchange resin similarly to the processing liquid. This is because even if the cooling water and the machining fluid are mixed, the discharge is not affected.

  That is, the cooling water sprayed from the water supply unit 13 is a processing liquid that cools the main rollers 8 and 9 and the wire 7.

  Further, the machining liquid sprayed from the water supply unit 13 is a machining liquid having the same or substantially the same specific resistance as the machining liquid stored in the machining liquid tank 6.

  Further, the rectifying plate 14 is a mechanism for pouring the machining liquid sprayed from the water supply unit 13 into the machining liquid tank 6 by the traveling wire 7. The configuration of the current plate 14 will be described in detail later.

  Further, the surrounding plate 12 is provided above the machining liquid tank 6 and the wire 7 so that the interface (liquid level) of the machining liquid flowing into the machining liquid tank 6 is positioned higher than the wire 7. By using the surrounding plate 12 surrounding the work, the water level of the machining liquid can be made higher than that of the wire 7.

  The shroud 12 is an application example of the outflow suppression plate of the present invention, and is provided above the machining liquid tank, and suppresses outflow of the machining liquid stored in the machining liquid tank from the machining liquid tank. Further, a traveling wire is provided in the gap between the outflow suppression plate and the machining liquid tank.

  The shroud 12 shown in FIG. 3 is provided on the edge of the machining liquid tank 6, but may be provided not on the edge of the machining liquid tank 6 but on the inside or outside of the machining liquid tank 6. it can.

  Moreover, although the outflow suppression plate shown in FIG. 3 is configured so as to surround the machining liquid in the machining liquid tank 6, the machining liquid tank is provided at least on the wire traveling direction side with respect to the workpiece. 6 prevents the machining fluid in the wire 6 from being carried out in the direction in which the wire travels and out of the machining fluid tank 6, and machining necessary for electrical discharge machining is performed in the gap (discharge gap) between the workpiece and the wire. The amount of liquid water can be secured.

  The outflow suppression plate is provided above the edge of the working fluid tank on the wire running direction side with respect to the workpiece.

  In addition, a flux dispersion control mechanism 801 for controlling the water flow from the machining liquid supply port 701 is provided inside the machining liquid tank 6.

  The machining liquid is supplied into the machining liquid tank 6 from a machining liquid supply section (the machining liquid supply port 701 is also referred to as a machining liquid supply section) provided in the lower part of the machining liquid tank 6. Therefore, the machining liquid supplied from the machining liquid supply unit directly hits the wire 7 from the lower part of the wire 7, and the interval between the wires fluctuates due to the water flow of the machining liquid (the wire is shaken). It may be difficult to uniformly process the.

  Therefore, as will be described later with reference to FIG. 9, in order to suppress an increase in non-uniformity in the processing of the workpiece due to the water flow of the processing water, the processing liquid supplied from the processing liquid supply unit is A flux dispersion control mechanism 801 is provided in the machining liquid tank 6 so as not to hit the wire 7 directly from below.

  Details of the flux dispersion control mechanism 801 will be described later with reference to FIG.

  Next, FIG. 2 will be described.

  FIG. 2 is an enlarged view within a dotted line 16 frame shown in FIG.

  The block 2 is joined to the work feeding device 3. The work feeding device 3 is bonded (bonded) to the silicon ingot 5 (work) and the bonding portion 4.

  In the present embodiment, a silicon ingot 5 will be described as an example of a workpiece (workpiece).

  The bonding part 4 may be anything as long as it is for bonding (joining) the work feeding device 3 and the silicon ingot 5 (work), and for example, a conductive adhesive is used.

  The work feeding device 3 is a device having a mechanism for moving the silicon ingot 5 bonded (bonded) by the bonding portion 4 in the vertical direction, and the silicon ingot 5 is moved by moving the work feeding device 3 downward. Can be brought closer to the wire 7.

  The processing liquid tank 6 is a container for storing the processing liquid. The working fluid is, for example, deionized water having a high resistance value. By providing the machining liquid between the wire 7 and the silicon ingot 5, electric discharge is generated between the wire 7 and the silicon ingot 5, and the silicon ingot 5 can be shaved.

  As described with reference to FIG. 1, the multi-wire electric discharge machining apparatus 1 includes a surrounding plate 12 on the upper part of the machining liquid tank 6.

  The enclosure plate 12 is provided between the workpiece and the wire (discharge gap), which is a discharge generating portion, in order to secure an amount of machining liquid necessary for electric discharge machining.

  The shroud 12 is a shroud according to the present invention, is provided on the upper part of the machining liquid tank 6 and stores the water level of the machining liquid stored in the machining liquid tank 6 so that it is higher than the wire 7. It functions to reduce the amount of outflow of the machining fluid in the machining fluid tank to the outside of the machining rod due to traveling.

  Further, there is a gap between the enclosure plate 12 and the machining liquid tank 6, and a wire that travels through the gap is provided.

  Details of the surrounding plate 12 will be described later with reference to FIGS. 3, 4, and 5.

  As shown in FIG. 2, a surrounding plate 12 is provided on the upper portion of the processing liquid tank 6, and further, the processing liquid is supplied from the water supply unit 13 to the main roller 9 and / or the processing liquid tank 6 or the surrounding plate 12. The injected working fluid is sprayed onto the wire 7 and passes through the current plate 14 and is stored in the working fluid tank 6. Thus, the machining liquid stored in the machining liquid tank 6 can be stored so that the level of the machining liquid is higher than that of the wire 7. The amount of outflow can be reduced.

  As a result, the amount of machining fluid required for electric discharge machining can be secured between the workpiece and the wire (electric discharge gap), which is the electric discharge generating portion, and electric discharge machining can be performed stably. It becomes possible to prevent the occurrence of defects in the workpiece.

  As shown in FIG. 2, the multi-wire electric discharge machining apparatus 1 includes a rectifying plate 14 and a water supply unit 13.

  The water supply unit 13 causes the processing liquid to flow on the upper part of the main roller 9 and on the upper part of the wire wound around the main roller 9 and / or on the upper part of the wire between the main roller 9 and the processing liquid tank 6. Are located at the top of these.

  The water supply unit 13 is an application example of the water supply mechanism of the present invention, and jets the processing liquid onto the wire and / or the main roller 9 that travels between the main roller 9 and the processing liquid tank.

  This water supply mechanism injects the machining liquid onto the wire 7 and / or the main roller 9 between the main roller 9 and the machining liquid tank 6 provided in the direction opposite to the traveling direction of the wire 7.

  Further, the water supply mechanism is provided above the wire 7 and / or the main roller 9 between the main roller 9 and the processing liquid tank 6 provided in the direction opposite to the traveling direction of the wire 7.

  In order to protect the main roller 9 from the heat generated from the wire electrode (wire 7) when the wire 7 is supplied with power, the water supply unit 13 is wound around the main roller 9 above the main roller 9. A processing liquid as cooling water is sprayed on the upper part of the wire.

  Here, in order to ensure the amount of machining fluid required for electric discharge machining in the gap between the workpiece (silicon ingot 5) and the wire 7, the machining fluid as the cooling water is used. For this purpose, a rectifying plate 14 is provided so that the cooling working fluid transmitted through the main roller 9 is conveyed to the working fluid tank 6. This makes it possible to secure the amount of machining fluid in the machining fluid tank 6 necessary for electric discharge machining from the stationary state of the wire to the running state of the wire.

  For example, when the wire is run without spraying the machining fluid from the water supply unit 13, the air is moved into the machining fluid tank 6 by the wire running in the gap between the enclosure 12 and the machining fluid tank 6. In addition to entering a large amount, the machining liquid in the machining liquid tank 6 may leak out from the gap between the shroud 12 and the machining liquid tank 6 and the water level in the machining liquid tank 6 may be lowered.

  In order to solve such a problem, the multi-wire electric discharge machining apparatus 1 includes a rectifying plate 14 and a water supply unit 13.

  The main rollers 8 and 9 (also referred to as guide rollers) are formed with a plurality of rows of grooves for attaching the wires 7, and the wires 7 are attached to the grooves. And the main roller 8 and 9 rotates right or left, and the wire 7 travels.

  The wire 7 is wound around the main roller a plurality of times, and the wires 7 are aligned at a predetermined pitch according to the grooves carved in the main roller.

  The main rollers 8 and 9 have a structure in which metal is used in the center and the outside is covered with resin.

  The power supply 11 is resistant to mechanical wear and is required to have electrical conductivity, and a cemented carbide is used.

  A silicon ingot 5 is disposed at the upper part of the central portion between the main rollers, and the silicon ingot 5 is attached to the work feeding device 3. The silicon ingot 5 is moved up and down by moving the work feeding device 3 in the vertical direction. The silicon ingot 5 is processed by moving in the direction.

  Further, a machining liquid tank 6 is provided in the central portion between the main rollers, the wire 7 and the silicon ingot 5 are immersed, and the electric discharge machining portion is cooled and the machining chip is removed.

  As shown in FIG. 2, the wire 7 is attached to the main rollers 8 and 9, and forms a wire row on the upper side and the lower side of the main rollers 8 and 9.

  Further, the wire 7 is a conductor, and the supplied voltage of the power supply unit 10 to which the voltage is supplied from the power supply unit 15 and the wire 7 are brought into contact with the wire 7. To be applied. (The power supply 11 applies a voltage to the wire 7.)

  Then, an electric discharge occurs between the wire 7 and the silicon ingot 5, and the silicon ingot 5 is shaved (electric discharge machining is performed), so that a thin silicon (silicon wafer) (workpiece) can be formed.

  Next, the structure of the processing liquid tank 6, the surrounding board 12, and the wire 7 is demonstrated using FIG.

  FIG. 3 is a diagram illustrating the configuration of the machining liquid tank 6, the surrounding plate 12, and the wire 7 provided in the multi-wire electric discharge machining apparatus 1.

  As shown in FIG. 3, there is a gap between the machining liquid tank 6 and the surrounding plate 12, and the wire 7 travels in the gap.

  The machining fluid supplied into the machining fluid tank 6 flows out from this gap, but a machining fluid having a flow rate higher than that flowing out from this gap is supplied to the machining fluid tank 6.

  Therefore, the amount of machining liquid necessary for electric discharge machining is also stored in the enclosure plate 12.

  Next, it will be described with reference to FIG. 4 that the amount of machining liquid necessary for electric discharge machining is stored in the enclosure plate 12.

  FIG. 4 is a diagram for explaining that the amount of machining liquid necessary for electric discharge machining is stored in the surrounding plate 12 included in the multi-wire electric discharge machining apparatus 1.

  FIG. 4A is a view showing a state in which the machining liquid is stored in the machining liquid tank 6 not provided with the surrounding plate 12 and the wire 7 is not traveling.

  As shown in FIG. 4A, since the wire 7 is not running, the wire 7 and the machining liquid in the machining liquid tank 6 come into contact with each other by the machining liquid supplied into the machining liquid tank 6. It becomes a state.

  4B is a view showing a state in which the machining liquid is stored in the machining liquid tank 6 that does not include the surrounding plate 12 and the wire 7 is traveling.

  As shown in FIG. 4B, since the wire 7 is traveling, the machining liquid in the machining liquid tank 6 is carried out in the direction in which the wire is traveling, and the machining liquid in the machining liquid tank 6 is In this state, the wire 7 is not partially in contact. The arrows in the machining liquid tank 6 shown in FIG. 4B indicate the flow of the machining liquid in the machining liquid tank 6. Since the wire is running, the machining liquid in the machining liquid tank 6 flows as shown by the arrow shown in FIG. 4B, and the machining liquid in the machining liquid tank 6 is running on the wire. It is carried out in the direction and goes out of the processing liquid tank 6. Therefore, the machining liquid in the machining liquid tank 6 cannot even come into contact with the wire 7, and it becomes difficult to secure the amount of machining liquid necessary for electric discharge machining between the workpiece and the wire (discharge gap). End up.

  Therefore, in the present embodiment, as shown in FIGS. 4C and 4D, an enclosure plate 12 is provided on the upper part of the machining liquid tank 6, and discharge is performed between the workpiece and the wire (discharge gap). The amount of processing liquid required for processing is secured.

  FIG. 4C is a diagram showing a state in which the machining liquid is stored in the machining liquid tank 6 and the enclosure plate 12 and the wire 7 is not running.

  FIG. 4D is a diagram showing a state in which the machining liquid is stored in the machining liquid tank 6 and the surrounding plate 12 and the wire 7 is traveling.

  As shown in FIG. 4D, since the wire 7 between the processing liquid tank 6 and the enclosure 12 is traveling, the processing liquid in the processing liquid tank 6 is in the direction in which the wire is traveling. Although being carried out, the enclosure plate prevents the carried working liquid from being carried out of the machining liquid tank 6 and the enclosure plate 12.

  Therefore, it becomes possible to secure the amount of machining liquid necessary for electric discharge machining in the gap (discharge gap) between the workpiece and the wire.

  An arrow in the machining liquid tank 6 shown in FIG. 4D indicates the flow of the machining liquid in the machining liquid tank 6.

  Further, when the water flow in the machining liquid tank 6 increases due to an increase in the wire speed or the like, the height of the shroud is increased (adjusted) to carry out (outflow) of water to the outside of the machining liquid tank 6. It is possible to reduce.

  Next, the structure of the surrounding board 12, the water supply part 13, and the baffle plate 14 with which the multi-wire electric discharge machining apparatus 1 is provided is demonstrated using FIG.

  FIG. 5 is a diagram for explaining the configuration of the enclosure plate 12, the water supply unit 13, and the rectifying plate 14 included in the multi-wire electric discharge machining apparatus 1.

  Using FIG. 5, the machining fluid as cooling water sprayed from the water supply unit 13 is caused to flow into the machining fluid tank 6 and the enclosure plate 12 by the travel of the wire 7 and the rectifying plate 14, Securing the amount of machining fluid necessary for electric discharge machining in the gap between the two will be described.

  As described above, in FIG. 4B, when the wire travels, the machining liquid in the machining liquid tank 6 comes out of the machining liquid tank 6, and the wire 7 is not immersed in the machining liquid. Become.

  Moreover, in order to improve this subject, it was set as the structure provided with the enclosure board 12, However Air enters from the clearance gap (gap for a wire to travel) between the enclosure board 12 and the process liquid tank 6. In addition, the machining liquid may leak, and the wire in the machining liquid tank 6 on the side opposite to the direction in which the wire travels may be partially immersed in the machining liquid.

  Therefore, a mechanism for securing the amount of machining fluid necessary for electric discharge machining between the workpiece and the wire will be described with reference to FIG.

  As shown in FIG. 5, the water supply unit 13 injects a working fluid as cooling water onto the main roller 9 in order to protect the main roller 9 from heat generated from the wire. Further, the machining liquid can be sprayed onto the wire 7 between the main roller 9 and the machining liquid tank 6.

  From the water supply unit 13, the machining liquid is jetted onto the wire 7 traveling by the main roller 9, and the jetted machining liquid flows into the gap between the machining liquid tank 6 and the surrounding plate 12 by the traveling wire 7. Go.

  At that time, since the machining liquid dropped from the wire 7 also flows into the gap between the machining liquid tank 6 and the enclosure plate 12, the rectifying plate 14 is connected to the main roller 9 and the machining liquid tank as shown in FIG. 6 and / or below the wire 7 in transit with the shroud 12.

  In this way, the processing liquid is jetted from the water supply unit 13 to the traveling wire 7 / main roller 9, and the traveling wire 7 surrounds the processing water in the current plate 14 and the wire 7 with the processing liquid tank 6. It flows in the gap between the plate 12.

  The configuration of the rectifying plate 14 and the wire 7 provided in the multi-wire electric discharge machining apparatus 1 will be described with reference to FIG.

  FIG. 6 is a diagram illustrating the configuration of the rectifying plate 14 and the wire 7 provided in the multi-wire electric discharge machining apparatus 1.

  As shown in FIG. 6, the rectifying plate 14 is provided at the lower part of the wire 7, and the running liquid in which the machining liquid dropped from the wire 7 is accumulated by the bottom plate (bottom surface) and the side plate (side surface) of the rectifying plate The sprayed machining liquid can be carried to the machining liquid tank 6 and / or the enclosure plate 12 by the traveling of the wire 7 on the upper and lower surfaces of the sheet 7.

  The rectifying plate 14 is an application example of the rectifying plate of the present invention, and the machining liquid sprayed by the water supply mechanism provided below the wire 7 between the main roller 9 and the machining liquid tank 6 is used as the machining liquid tank. Send it out.

  Then, the machining liquid carried to the machining liquid tank 6 and / or the enclosure plate 12 passes through the gap between the machining liquid tank 6 and the enclosure plate 12, enters the machining liquid tank 6 and the enclosure plate 12, Between the workpiece and the wire, it is possible to secure the amount of machining liquid necessary for electric discharge machining.

  This makes it possible to secure the amount of machining liquid in the machining tank necessary for electric discharge machining from the wire stationary state to the wire running state.

  Next, the machining liquid supply port 701 provided in the multi-wire electric discharge machining apparatus 1 and supplied with the machining liquid to the machining liquid tank 6 will be described with reference to FIG.

  FIG. 7 is a view for explaining a machining liquid supply port 701 provided in the multi-wire electric discharge machining apparatus 1 for supplying the machining liquid to the machining liquid tank 6.

  As shown in FIG. 7, the machining liquid tank 6 is provided with machining liquid supply ports 701 on the left and right sides of the front side of the lower part of the machining liquid tank 6.

  As described above, the machining liquid tank 6 is provided with a plurality of machining liquid supply ports 701 for supplying the machining liquid into the machining liquid tank 6.

  The machining liquid is supplied into the machining liquid tank 6 from the respective machining liquid supply ports 701.

  The machining liquid supply port 701 may be located at other positions such as the bottom surface of the machining tank, and the number of installation is not limited to two.

  The machining fluid supply port 701 is electrically connected to the machining fluid supply device 18, and the machining fluid is supplied from the machining fluid supply device 18 to the machining fluid supply port 701. Is supplied with a machining fluid.

  The machining liquid supply port 701 is an application example of the machining liquid supply mechanism of the present invention, and supplies the machining liquid into the machining liquid tank 6.

  FIG. 8 shows that the machining liquid is supplied from the machining liquid supply port 701 to the machining liquid tank 6 not provided with the flux dispersion control mechanism 801, and the machining liquid in the machining liquid tank 6 is supplied by supplying the machining liquid. It is the figure which showed the flow.

  An arrow in the machining liquid tank 6 shown in FIG. 8A represents the flow of the machining liquid in the machining liquid tank 6 when the machining liquid is supplied.

  In FIG. 8A, when the machining fluid is supplied from the machining fluid supply ports 701 on both side surfaces of the machining fluid tank 6, two water flows collide with each other and spring up as a jet in the water surface direction. The said jet stream directly hits the wire 7, and there is a possibility that the interval between the wires stretched at equal intervals may be disturbed.

  FIG. 8B is a diagram when the number of machining liquid supply ports 701 is one instead of two. The arrow represents the flow of the machining liquid in the machining liquid tank 6 when the machining liquid is supplied.

  As shown in FIG. 8B, when the machining liquid is supplied from the machining liquid supply port 701 on one side of the machining liquid tank 6, the water flow hits the side surface opposite to the machining liquid supply port 701, and then the water surface. Since it spouts as a jet in the direction, the spacing between the wires may be disturbed as in FIG.

  Next, referring to FIG. 9, the processing liquid is supplied from the processing liquid supply port 701 to the processing liquid tank 6 including the flux dispersion control mechanism 801, and the processing liquid tank 6 is supplied by supplying the processing liquid. The flow of the machining fluid inside will be described.

  FIG. 9 shows that the machining liquid is supplied from the machining liquid supply port 701 to the machining liquid tank 6 provided with the flux dispersion control mechanism 801, and the machining liquid in the machining liquid tank 6 is supplied by the machining liquid being supplied. It is the figure which showed the flow.

  The arrow in the machining liquid tank 6 shown in FIG. 9 represents the flow of the machining liquid in the machining liquid tank 6 when the machining liquid is supplied.

  As shown in FIG. 9, the flux dispersion control mechanism 801 installs the machining liquid supply port 701 in the vicinity of the bottom of the machining liquid tank 6 so as to be isolated from the wire extending portion (wire 7), so that the water flow is reduced. In order to reach the water surface in a state where the flow rate is relaxed without directly rising from the bottom of the processing liquid tank 6 in the direction of the water surface where the plurality of wires 7 are stretched, the distance between the wires stretched at equal intervals is set. Disturbance is reduced and more stable electric discharge machining is possible. That is, since the flux dispersion control mechanism 801 (flow rate reduction mechanism) reduces the flow rate of the machining liquid supplied to the machining liquid tank, more stable electric discharge machining is possible.

  (C) and (D) of FIG. 9 are views showing the same machining liquid tank 6, respectively, and the directions in which the machining liquid tank 6 is viewed are different. FIG. 9C is a view as seen from the front, and FIG. 9D is a view as seen from the right side.

  As shown in FIG. 9, the machining liquid supplied from the machining liquid supply port 701 is supplied to the flux dispersion control mechanism 801, and the machining liquid is supplied from the flux dispersion control mechanism 801 into the machining liquid tank 6. .

  Further, as shown in FIG. 9, the machining liquid is supplied to the flux dispersion control mechanism 801 from the left and right (a plurality of) machining liquid supply ports 701.

  As will be described in detail with reference to FIG. 10, the flux dispersion control mechanism 801 includes a tube 802 and a sponge 803 that is a member of a porous material (porous material) that covers the tube 802. The tube 802 is an application example of the pipe of the present invention, and is a conduit that connects to the machining fluid supply port 701 and passes the machining fluid supplied from the machining fluid supply port 701. It is the same pipe | tube which lets the process liquid supplied from a mouth pass. As will also be described with reference to FIG. 11, the pipe is provided with a supply port (hole) for supplying the processing liquid from the pipe to the processing liquid tank at an interval according to the distance from the processing liquid supply port.

  Here, a sponge has been described as an example of a porous material (porous material) member. However, the porous material member is a member having a plurality of holes, and the processing liquid supplied to the processing liquid tank. Any other member may be used as long as it is a member that lowers the flow rate.

  Since the processing water having a weak water flow is supplied to the processing liquid tank 6 from the hole provided in the tube 802, it is possible to suppress wire blurring due to the jet of the processing liquid.

  That is, this hole provided in the tube 802 is an application example of the supply port of the present invention, and the supply port is provided at intervals according to the distance from the machining liquid supply port. The supply port is a port for supplying the processing liquid from the inside of the tube (tube 802) to the processing liquid tank.

  Furthermore, since the processing water coming out of the hole provided in the tube 802 passes through the sponge 803 that is a porous material covering the tube 802 and the processing liquid is supplied into the processing liquid tank 6, the water flow is further increased. It becomes weak and it becomes possible to suppress the blurring of the wire due to the jet of the machining fluid.

  Thus, the flux dispersion control mechanism 801 controls the water flow of the machining liquid so as to reduce the force that the wire 7 receives the water flow of the machining liquid supplied from the machining liquid supply port (machining liquid supply mechanism).

  In other words, the flux dispersion control mechanism 801 controls the flow of the machining fluid supplied from the machining fluid supply port (machining fluid supply mechanism) so as to reduce the force that the wire 7 receives the water flow of the machining fluid. To do.

  As shown in FIG. 9D, a flux dispersion control mechanism 801 is provided at the outlet (hole, ie, supply port) of the machining liquid supply port 701 (machining liquid supply mechanism).

  The flux dispersion control mechanism 801 is an application example of the water flow control mechanism of the present invention, and the jet of the processing liquid in the processing liquid tank 6 by the processing liquid supplied from the processing liquid supply port 701 (processing liquid supply mechanism). In order to reduce, the water flow of the machining fluid supplied from the machining fluid supply port 701 (machining fluid supply mechanism) is controlled.

  Further, the flux dispersion control mechanism 801 is provided at the outlet of the machining fluid supply port 701 (machining fluid supply mechanism), and the machining fluid supplied from the machining fluid supply port 701 is inside the flux dispersion control mechanism 801. It is arranged at the position where the momentum of the water flow is suppressed and the water flows in the direction of the water surface.

  Further, a machining liquid supply port 701 is provided below the wire 7 that travels near the water surface of the machining liquid in the machining liquid tank 6, and a flux dispersion control mechanism 801 is provided at the outlet of the machining liquid supply port 701. It is a tube.

  FIG. 10 is an external view of the flux dispersion control mechanism 801, a cross-sectional view of the flux dispersion control mechanism 801, and processing water flows into the machining liquid tank 6 through the pores of the sponge of the flux dispersion control mechanism 801. It is a figure which shows an example of a water flow.

  As shown in the external view of the flux dispersion control mechanism 801 in FIG. 10, the surface of the flux dispersion control mechanism 801 is constituted by a cylindrical (tubular) sponge 803 made of a porous material. The sponge 803 includes a tubular (tubular) tube 802 in accordance with the shape of the sponge 803. That is, a porous material is provided around the tube.

  The tube 802 is configured to pass the processing water supplied from a plurality of processing liquid supply ports 701 provided in the processing liquid tank 6 through the same tube.

  FIG. 10 also shows a cross-sectional view of A-A ′ of the flux dispersion control mechanism 801.

  As shown in this cross-sectional view, the flux dispersion control mechanism 801 is composed of a tube and a porous material surrounding (enclosing) the tube.

  The material used here is PVC (vinyl chloride) for the tube and urethane for the porous material. This porous material is a sponge made of urethane.

  The configuration of the flux dispersion control mechanism 801 shown in FIG. 10 is an example, and it goes without saying that there are various configuration examples and materials according to the purpose and application.

  Further, an image diagram of the processing water flowing through the pores of the sponge shown in FIG. 10 will be described.

  The processing water is supplied from the processing liquid supply port, passes through the tube, and the processing water is ejected from the hole of the tube.

  Then, the processing water coming out of the hole of the tube is buffered (relaxed) by the pores of the sponge, and flows out from the sponge to the processing liquid tank 6.

  FIG. 11 shows a processing liquid having a uniform flow rate from the tube into the processing liquid tank 6 by changing the hole diameter of the tube inside the flux dispersion control mechanism 801 according to the distance from the outlet of the processing liquid supply port 701. It is a figure which shows ejecting.

  FIG. 11A is an external view of a tube 802 in which holes having the same diameter are provided at equal intervals, and a cross-sectional view of the tube in which holes having the same diameter are provided at equal intervals.

  The tube shown in FIG. 11 (A) is perforated at a uniform distance with the same hole diameter. Therefore, when the machining liquid is supplied into the tube 802 from both the machining liquid supply ports 701 at both ends, the hydraulic pressure of the machining water coming out from the center of the tube or the hole near the center becomes the highest, and from the center. The hydraulic pressure of the processing water coming out from the hole decreases in the end direction (direction of the processing liquid supply port 701).

  As a result, the amount of processing water ejected at the center of the tube is the largest, and the amount ejected decreases toward the end.

  For this reason, the amount of processing water ejected from the hole in the central portion of the tube increases, and the jet flow may increase the blurring of the wire.

  Therefore, in this embodiment, the tube shown in FIG.

  (B) of FIG. 11 is an external view of the tube 802 having a narrow interval between the holes (supply ports) provided in the tube, the diameter of the holes (supply ports) provided in the tube is reduced toward the center. It is a figure which shows sectional drawing of the tube.

  As shown in the drawing, the tube shown in FIG. 11B is provided with holes (supply ports) so that the diameter decreases from the machining fluid supply ports 701 at both ends toward the center. The holes are provided so that the intervals at which the holes (supply ports) are provided are narrowed toward the center.

  That is, the hole near the center is made smaller, the number of holes near the center (supply port) is increased, and the hole (supply port) in the end direction (direction of the machining fluid supply port 701) is the center hole (supply port). Larger) and fewer holes (supply ports).

  As described above, by using the tube shown in FIG. 11B, the water flow, the water pressure, and the ejection amount of the processing water coming out from which hole of the tube become uniform.

  As described above, the diameter of the hole (supply port) provided in the tube becomes smaller toward the vicinity of the center, and by using the tube 802 having a narrow interval in which the hole (supply port) is provided, the processing liquid is removed from the tube. The jet of the machining liquid entering the tank is dispersed, the amount of machining water ejected from the hole (supply port) in the center of the tube is reduced, and the jet blur can reduce wire blurring. As a result, the workpiece can be appropriately subjected to electric discharge machining.

  As described above, the tubes 802 are holes (supply ports) provided at intervals according to the distance from the plurality of machining liquid supply ports 701 and have a size corresponding to the distance from the plurality of machining liquid supply ports 701. With holes. That is, the tube 802 is configured such that the distance from the plurality of machining liquid supply ports 701 is increased, so that the holes (supply ports) provided in the tube 802 are small and the number of holes provided in the tube is large. Yes.

  As described above, according to the present invention, since the flow velocity reduction mechanism (flux dispersion control mechanism 801) is provided, the machining liquid tank is dispersed by dispersing the water flow of the machining liquid supplied to the machining liquid tank to reduce the flow velocity. The blurring of the wire due to the jet of the machining fluid supplied from the machining fluid supply mechanism inside can be suppressed.

  Further, according to the present invention, it is possible to secure an amount of machining fluid necessary for electric discharge machining in the electric discharge machining portion (electric discharge gap) and appropriately electric discharge machine the workpiece.

  Further, a workpiece processed by subjecting a workpiece to electric discharge machining by the wire electric discharge machining method described in the present embodiment is also a feature of the present invention.

1 Multi-wire EDM 2 Block 2
DESCRIPTION OF SYMBOLS 3 Work feeder 4 Bonding part 5 Silicon ingot 6 Processing liquid tank 7 Wire 8 Main roller 9 Main roller 10 Feeding unit 11 Feeder 12 Enclosure board 13 Water supply part 14 Current plate 15 Power supply unit 18 Processing liquid supply apparatus 19 Block

Claims (13)

A wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece,
A machining fluid tank in which a machining fluid used for electric discharge between the workpiece and the wire is stored, and the machining fluid in the machining fluid tank is located between the workpiece and the wire. A working fluid tank provided as follows:
A flow rate reduction mechanism including a member having a plurality of porous holes provided in the machining liquid tank, which reduces the flow rate of the machining liquid supplied to the machining liquid tank ;
A wire electric discharge machining apparatus comprising: Further comprising a supply port for supplying the machining liquid into the machining liquid tank;
It said porous member, wire electric discharge machining apparatus according to claim 1, characterized in that provided on the supply port. A machining fluid supply port for supplying the machining fluid;
The flow velocity reduction mechanism further includes a pipe connected to the machining liquid supply port and through which the machining liquid supplied from the machining liquid supply port passes.
It said tube at intervals in accordance with the distance from the working fluid supply port, from the tube according to claim 2, wherein said supply port for supplying the working fluid is provided in the machining fluid tank Wire electrical discharge machining equipment. The tube is a supply port provided at an interval according to a distance from the machining liquid supply port, and a supply port having a size corresponding to the distance from the machining liquid supply port is provided. The wire electric discharge machining apparatus according to claim 3 . A plurality of machining liquid supply ports for supplying the machining liquid are provided,
The pipe includes the same pipe for passing the machining liquid supplied from a plurality of machining liquid supply ports provided in the machining liquid tank,
The pipe is a supply port provided at intervals according to the distance from the plurality of machining liquid supply ports, and a supply port having a size corresponding to the distance from the plurality of machining liquid supply ports is provided. The wire electric discharge machining apparatus according to claim 4 , wherein the wire electric discharge machining apparatus is provided. The pipe is provided with the supply port so that the number of the supply ports is increased and the size of the supply port is reduced as the distance from the machining liquid supply port is increased. The wire electric discharge machining apparatus according to any one of claims 3 to 5 . It said porous member, wire electric discharge machining apparatus according to any of claims 3 to 6, characterized in that provided on the tube. It said porous member, wire electric discharge machining apparatus according to claim 7, characterized in that provided on the supply port of the tube. It said porous member, wire electric discharge machining apparatus according to any one of claims 1 to 8, characterized by being composed of a material containing urethane. The wire electric discharge machine according to any one of claims 1 to 9, wherein the member having a plurality of porous holes is a sponge. The flow velocity reduction mechanism reduces the flow velocity of the machining liquid supplied to the machining liquid tank by dispersing the water flow of the machining liquid supplied to the machining liquid tank and supplying the machining liquid to the machining liquid tank. wire electric discharge machining apparatus according to any one of claims 1 to 1 0, characterized in that a mechanism for. The said working fluid is a working fluid used as a material of the electrical resistance required for the discharge between the said workpiece and the said wire, The any one of Claims 1 thru | or 11 characterized by the above-mentioned. Wire electrical discharge machining equipment. A wire electric discharge machining method by a wire electric discharge machining apparatus for machining the workpiece by electric discharge between the wire and the workpiece,
A machining fluid tank stores machining fluid used for electrical discharge between the workpiece and the wire, and the machining fluid in the machining fluid tank is positioned between the workpiece and the wire. Provided,
A wire electrical discharge machining method characterized in that a flow velocity reduction mechanism including a member having a plurality of porous holes provided in the machining fluid tank reduces the flow velocity of the machining fluid supplied to the machining fluid tank .

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