JP5921351B2 - 成膜装置 - Google Patents

成膜装置 Download PDF

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Publication number
JP5921351B2
JP5921351B2 JP2012134933A JP2012134933A JP5921351B2 JP 5921351 B2 JP5921351 B2 JP 5921351B2 JP 2012134933 A JP2012134933 A JP 2012134933A JP 2012134933 A JP2012134933 A JP 2012134933A JP 5921351 B2 JP5921351 B2 JP 5921351B2
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Japan
Prior art keywords
lens
film
lens holder
target
film forming
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Expired - Fee Related
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JP2012134933A
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Japanese (ja)
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JP2013256707A (ja
JP2013256707A5 (enExample
Inventor
矢崎　陽一
陽一 矢崎
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Canon Inc
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Canon Inc
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Priority to JP2012134933A priority Critical patent/JP5921351B2/ja
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Publication of JP2013256707A5 publication Critical patent/JP2013256707A5/ja
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  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP2012134933A 2012-06-14 2012-06-14 成膜装置 Expired - Fee Related JP5921351B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Publications (3)

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JP2013256707A JP2013256707A (ja) 2013-12-26
JP2013256707A5 JP2013256707A5 (enExample) 2015-08-06
JP5921351B2 true JP5921351B2 (ja) 2016-05-24

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ID=49953376

Family Applications (1)

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JP2012134933A Expired - Fee Related JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

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JP (1) JP5921351B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105549342B (zh) * 2016-03-08 2019-01-08 佛山市国星半导体技术有限公司 一种紫外激光光刻方法
CN105549343B (zh) * 2016-03-08 2019-02-01 佛山市国星半导体技术有限公司 一种光刻装置
JP7171270B2 (ja) 2018-07-02 2022-11-15 キヤノン株式会社 成膜装置およびそれを用いた成膜方法
CN111235539B (zh) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 一种小孔内壁薄膜沉积方法及装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4345869B2 (ja) * 1997-05-16 2009-10-14 Ｈｏｙａ株式会社 スパッタ成膜用の膜厚補正機構
AU741587B2 (en) * 1997-05-16 2001-12-06 Hoya Kabushiki Kaisha Mechanism for placing optical lens blank in holder
US5996792A (en) * 1997-07-23 1999-12-07 Eastman Kodak Company Optical lens tray
JP4474109B2 (ja) * 2003-03-10 2010-06-02 キヤノン株式会社 スパッタ装置
JP2004315014A (ja) * 2003-04-15 2004-11-11 Hitachi Maxell Ltd トレイならびに光学品の処理方法
JP2006328485A (ja) * 2005-05-26 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
JP2006328488A (ja) * 2005-05-27 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
JPWO2012133468A1 (ja) * 2011-03-28 2014-07-28 コニカミノルタ株式会社 対物レンズの製造方法

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Publication number Publication date
JP2013256707A (ja) 2013-12-26

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