JP5912623B2 - Moving route creation device, inspection device, and moving route creation method - Google Patents

Description

  The present invention relates to a movement path creation apparatus that creates a movement path for moving a probe, an inspection apparatus that includes the movement path creation apparatus, and a movement path creation method that creates a movement path for moving a probe.

  As an apparatus for inspecting a circuit board by bringing a probe into contact with a probing point provided on the circuit board, a circuit board inspection apparatus disclosed by the applicant in Japanese Patent Application Laid-Open No. 9-230005 is known. The circuit board inspection apparatus includes a substrate holder that holds a circuit board to be inspected, a moving mechanism that moves a probe, and a control device that controls the moving mechanism and performs a quality inspection of the circuit board. In this case, the control device controls the moving mechanism in accordance with the movement control data, moves the probe along a predetermined moving path, and sequentially probes the probe to each probing point provided on the circuit board.

  On the other hand, when inspecting a circuit board provided with a large number of probing points, it is necessary to create an efficient movement route (a movement route with less useless movement) in order to improve inspection efficiency. Here, as a method for creating an efficient travel route, various methods (for example, “the solution of the traveling salesman problem”) have been conventionally known. The larger the number of points, the longer it takes to create the movement route. For example, the time required for the creation process increases in proportion to the square of the number of probing points. For this reason, the inventor has already developed a circuit board inspection apparatus having a movement path creation function for creating a movement path by the following method. In this circuit board inspection apparatus, the surface of the circuit board on which the probing points are provided is partitioned into a plurality of grids, and a movement path passing through all the probing points included in each partitioned area is defined for each partitioned area. Identify. Next, the movement paths for the entire circuit board are created by connecting the movement paths specified for each partition area. Since the number of probing points included in one partition area is reduced by partitioning into a plurality of partition areas in this way, it is possible to shorten the time for specifying a movement path for one partition area. For this reason, in this circuit board inspection apparatus, it is possible to shorten the time for creating the movement path.

Japanese Patent Laid-Open No. 9-230005 (page 4-6, FIG. 1)

  However, the circuit board inspection apparatus having the above-described moving path creation function has the following problems to be improved. That is, in this circuit board inspection apparatus, the movement paths for the entire circuit board can be created in a short time by connecting the movement paths specified for each partitioned area. However, for example, when the end point of the movement path for one of the two adjacent divided areas is away from the start point of the movement path for the other of the two divided areas, The distance from the end point of one partition area to the start point of the other partition area becomes longer. Therefore, when there are many such locations, the movement path of the entire circuit board becomes long, and it may be difficult to improve inspection efficiency.

  The present invention has been made in view of such a problem to be improved, and provides a moving path creation device, an inspection apparatus, and a moving path creation method capable of creating a probe movement path capable of improving inspection efficiency in a short time. The main purpose is to do.

In order to achieve the above object, the movement path creation device according to claim 1 moves the probe along a plane parallel to the surface of the probing object, and sequentially moves the probe to a plurality of probing points provided on the surface. A processing unit for creating a movement path of the probe for probing, and the processing unit performs once all the probing points included in each of the plurality of first regions in which the surface is partitioned in a grid pattern. The probing object is obtained by executing, for each first area, a specifying process for specifying the movement path that passes through each of the first areas, and connecting each movement path for each first area in a connection order defined for each first area. a movement path creating apparatus for creating a whole of said movement path for the connecting sequence, each first region between the rank of the linking sequence is continuous Is defined so as to be adjacent to one of the directions of the vertical and horizontal directions, wherein the processing unit is configured to the initial position of the probe with the first region is divided into the respective squares shape into four second regions In the specifying process for the first first area, the connection order of the first areas closest to the first position is the closest to the initial position of the four second areas in the first area. One of the probing points included in one of the second regions is defined as a starting point, and any one of the probing points included in the other second region located at a diagonal of the second region is defined as In the specifying process for each of the first regions whose connection order is second or later, specifying the movement path from the start point to the end point by defining as an end point The probing point included in one second region that is closest to the end point in the first region in which the connection order of the four second regions in each first region is the closest higher is the starting point And defining any one of the probing points included in the other second region located diagonally of the second region as an end point, and each of the movement paths from the start point to the end point. In accordance with the connection order, the end point of each of the first areas and the start point of the first area of which the connection order is immediately below are connected to create the entire movement path.

  Moreover, the movement route creation device according to claim 2 is the movement route creation device according to claim 1, wherein the processing unit is included in the one second region in the first region where the connection order is the first. The probing point closest to the initial position among the probing points is defined as the starting point.

  Further, the movement route creation device according to claim 3 is the movement route creation device according to claim 1 or 2, wherein the processing unit is configured to perform the other one second region in the first region in which the connection order is the first. The probing point farthest from the initial position among the probing points included in is defined as the end point.

  According to a fourth aspect of the present invention, there is provided the movement path creation device according to any one of the first to third aspects, wherein the processing unit is configured to perform the first region in the first region in which the connection order is second or later. Among the probing points included in one second region, the probing point closest to the end point in the first region having the most recently connected order is defined as the start point.

  Moreover, the movement route creation device according to claim 5 is the movement route creation device according to any one of claims 1 to 4, wherein the processing unit is configured to perform the other in the first region in which the connection order is second or later. Among the probing points included in one second region, the probing point farthest from the end point in the first region having the most recently connected order is defined as the end point.

  Further, the movement route creation device according to claim 6 is the movement route creation device according to any one of claims 1 to 5, wherein the processing unit assigns each of the first regions to the four areas prior to the specific processing. Each is divided into second regions.

  Moreover, the movement path | route preparation apparatus of Claim 7 is a movement path | route preparation apparatus in any one of Claim 1 to 6. WHEREIN: The said process part makes the said 1st area | region the said surface prior to the said specific process. Divide into

The movement path creation device according to claim 8 is the movement path creation device according to claim 7, wherein the processing unit is along at least one of a vertical direction and a horizontal direction in the arrangement direction of the first regions. wherein the first region is partitioning the surface so as to line up an odd number Te, before Symbol said consolidated so rank are continuous in the connecting order of the respective first regions arranged in one direction in which the first region are aligned odd number Specify the order.

  An inspection apparatus according to a ninth aspect includes a movement path creation device according to any one of the first to eighth aspects, a movement mechanism that moves the probe to perform probing on the probing object, and the movement mechanism. A control unit for controlling, and an inspection unit for inspecting the probing object based on an electrical signal input via the probe, wherein the control unit is arranged along the movement path created by the movement path creation device. To move the probe.

The moving path creation method according to claim 10 is for causing a probe to move along a plane parallel to the surface of the probing object and sequentially probing the probe to a plurality of probing points provided on the surface. When creating the movement path of the probe, a specifying process for specifying the movement path that passes through all the probing points included in each of the plurality of first regions that divide the surface in a grid pattern once. A movement path that is executed for each first area and connects the movement paths for each first area in a connection order defined for each first area to create the entire movement path for the probing object. a generation method, each first region between the rank in the connection order successive adjacent to one of the directions of the vertical and horizontal directions The coupling sequence defined, as the first of the connecting order of the closest first region to the initial position of the probe with the partitioning respective squares shape into four second regions each first region, the In the specifying process for the first first region, any one of the probing points included in the second region closest to the initial position of the four second regions in the first region is selected. The moving path from the starting point to the end point is defined by defining any one of the probing points included in the other second region located at the diagonal of the second region as an end point. In the specifying process for each of the first regions that are identified and connected in the second order or later, the continuous of the four second regions in each of the first regions. One of the probing points included in one of the second regions closest to the end point in the first region in the nearest higher order is defined as a starting point and another one located at the diagonal of the second region One of the probing points included in the two second regions is defined as an end point, the movement paths from the start point to the end point are respectively specified, and according to the connection order, the end points of the first regions The whole moving path is created by connecting the start point of the first area with the connection order immediately below.

  In the movement route creation device according to claim 1, the inspection device according to claim 9, and the movement route creation method according to claim 10, in the specifying process for each first region after the second connection order, One probing point included in one second region that is closest to the end point in the first region of the most recently higher first region in the second region is defined as the start point, and other points located at the diagonal of the second region One probing point included in one second area is defined as an end point, and a movement path from the start point to the end point is specified. In this case, in the configuration in which the start and end points of the movement route for each first region are not provided, the end point of the movement route for one first region and the other first regions adjacent to the first region In some cases, the distance from the start point to the next start point becomes long. On the other hand, in this movement route creation device, inspection device, and movement route creation method, the distance from the end point to the next start point can be sufficiently shortened by defining the start point and the end point as described above. For this reason, according to this movement path | route preparation apparatus, test | inspection apparatus, and movement path | route creation method, the useless movement of a probe can be restrained few enough. Further, in this movement path creation device, inspection apparatus, and movement path creation method, the movement path is specified for each first region in which the surface of the circuit board is divided into a plurality of areas, and the movement paths are connected to form the entire probing object. Create a travel route for. For this reason, it is possible to sufficiently shorten the overall travel route creation time compared to a configuration in which the entire travel route is directly created without partitioning. Therefore, according to this movement path creation device, inspection apparatus, and movement path creation method, the probe movement path that can sufficiently improve the inspection efficiency when probing the probe and inspecting the probing object is shortened. Can be created.

  Further, according to the movement path creation device according to claim 2 and the inspection device according to claim 9, by defining the probing point closest to the initial position of the probe as the starting point in the first region where the connection order is the first. Since the distance from the initial position to the first probing point for probing can be sufficiently shortened, it is possible to create a moving path that can further improve the inspection efficiency.

  According to the movement path creation device according to claim 3 and the inspection device according to claim 9, the probing point farthest from the initial position is defined as the end point in the first region where the connection order is the first. Since the distance between the end point in the first region having the first order and the start point in the first region having the second connecting order can be sufficiently shortened, a moving path capable of further improving the inspection efficiency is provided. Can be created.

  According to the movement path creation device according to claim 4 and the inspection device according to claim 9, the probing point closest to the end point in the first region having the most recently connected order is defined as the start point of the next first region. By doing so, since the distance between the end point in the first region in the most recently connected order and the start point of the next first region can be further shortened, a moving path that can further improve the inspection efficiency is provided. Can be created.

  Further, according to the movement route creation device according to claim 5 and the inspection device according to claim 9, the probing point farthest from the end point in the first region having the highest connection order is defined as the end point of the next first region. By doing so, the distance between the end point of the next first area and the start point of the next first area can be sufficiently shortened, so a moving path that can further improve the inspection efficiency is created. can do.

  Moreover, according to the movement path | route preparation apparatus of Claim 6, and the inspection apparatus of Claim 9, a process part divides each 1st area | region into 4 2nd areas, respectively, and divides into 2nd area | regions. Compared with a configuration in which work is performed manually, the movement path can be created in a shorter time and more easily.

  According to the movement path creation device according to claim 7 and the inspection device according to claim 9, the processing unit partitions the surface of the probing object into a plurality of first regions, thereby partitioning into the first regions. Compared with a configuration in which work is performed manually, the movement path can be created in a shorter time and more easily.

According to the movement path creation device according to claim 8 and the inspection device according to claim 9, the first region is an odd number along at least one of the vertical direction and the horizontal direction in the arrangement direction of the first regions. pieces with defining the surface of the probing subject to line up, by the first region defines a connecting order so rank are continuous in the connection sequence of the first regions arranged in the odd number arranged in one direction, connecting The second region including the end point of the first region in the nearest higher order can be always adjacent to the second region closest to the last higher end point in each second region in the next first region. For this reason, according to this moving route creation device and inspection device, the distance between the nearest higher end point and the next starting point can always be shortened, resulting in a moving route that can further improve inspection efficiency. Create It is possible.

1 is a configuration diagram showing a configuration of a substrate inspection apparatus 1. FIG. It is the 1st explanatory view explaining the movement course creation processing performed by substrate inspection device 1. It is the 2nd explanatory view explaining the movement course creation processing performed by substrate inspection device 1. It is the 3rd explanatory view explaining the movement course creation processing performed by substrate inspection device 1. It is the 4th explanatory view explaining the movement course creation processing performed by substrate inspection device 1. It is the 5th explanatory view explaining the movement course creation processing performed by substrate inspection device 1. It is the 6th explanatory view explaining the movement course creation processing performed by substrate inspection device 1.

  Hereinafter, embodiments of a movement route creation device, an inspection device, and a movement route creation method will be described with reference to the accompanying drawings.

  First, the configuration of the substrate inspection apparatus 1 will be described. A board inspection apparatus 1 shown in FIG. 1 is an example of an inspection apparatus, and includes a fixed base 2, a moving mechanism 3, a measurement unit 4, a storage unit 5, and a control unit 6 as shown in FIG. The circuit board 100 as a body can be inspected for quality. In this case, a plurality of conductor patterns (not shown) are formed on the surface of the circuit board 100 (upper surface in the figure). Further, as shown in FIG. 4, each conductor pattern is provided with a probing point P for probing the probe 31 at the time of inspection. The storage unit 5 and the control unit 6 constitute a movement route creation device.

  As shown in FIG. 1, the fixing base 2 includes a plate-like electrode 2 a disposed on the upper part. In this case, an intake port (not shown) is formed in the electrode 2a, and the circuit board 100 placed on the electrode 2a can be fixed by intake air from the intake port. .

  The moving mechanism 3 is controlled by the control unit 6 in a direction along a plane parallel to the electrode 2a of the fixed base 2 (that is, the surface of the circuit board 100 placed on the electrode 2a) and a direction perpendicular to the electrode 2a. The probe 31 is moved (in the vertical direction), and the probe 31 is probed to each probing point P of the circuit board 100 fixed to the fixing base 2.

  The measurement unit 4 supplies a measurement signal between the probing point P of the circuit board 100 on which the probe 31 is probed and the electrode 2a of the fixed base 2, and detects a signal generated by the supply of the measurement signal. Then, based on the signal (detection signal), the capacitance between the probing point P of the circuit board 100 on which the probe 31 is probed and the electrode 2a of the fixed base 2 is measured.

  The storage unit 5 stores the measured capacitance value measured by the measurement unit 4 and reference data used in the inspection process executed by the control unit 6. Further, the storage unit 5 stores travel route data Dr indicating a travel route R, which will be described later, created by the control unit 6. The storage unit 5 stores substrate data Db used for creating the movement route R. In this case, the board data Db includes, as an example, information indicating the shape and size of the surface of the circuit board 100 on which the probing point P is provided, and information indicating the position of each probing point P.

  The control unit 6 controls the moving mechanism 3 and the measurement unit 4. Further, the control unit 6 functions as an inspection unit together with the measurement unit 4 and compares the measured capacitance value measured by the measurement unit 4 with a predetermined reference range to inspect the quality of the circuit board 100. Execute the inspection process. The control unit 6 functions as a processing unit, and the probe 31 travel path R (hereinafter referred to as the entire circuit board 100) when probing the probes 31 sequentially at all probing points P provided on the circuit board 100. The movement route creation process for creating the movement route R of the other is also referred to as “movement route Rw” is executed.

  In this case, in this movement path creation process, the control unit 6 uses a plurality of (for example, twelve) rectangular first areas A1 to A12 (see FIG. 2 below) when the surface of the circuit board 100 is not distinguished. (Also referred to as “Area A”) in a grid pattern (virtual section). In addition, in this movement route creation process, the control unit 6 performs a specific process for identifying the movement route R that passes through all the probing points P included in each first region A once for each first region A. (In the following description, the movement route R for one first region A is also referred to as “movement route Ra”), and each movement route Ra for each first region A is connected (described later in each movement route Ra). A travel route Rw is created by connecting an end point Pe to be performed and a later-described start point Ps in the next travel route Ra).

  Next, a method for inspecting the circuit board 100 using the substrate inspection apparatus 1 will be described with reference to the drawings.

  In this board inspection apparatus 1, in order to improve the inspection efficiency when inspecting the circuit board 100 on which many probing points P for probing the probe 31 are provided, the probe 31 is moved efficiently (uselessness). It has a function of creating a movement route R (with little movement). Specifically, in this board inspection apparatus 1, when an instruction to create a movement route R is given to an operation unit (not shown), the control unit 6 executes a movement route creation process.

  In this movement path creation process, the control unit 6 reads the substrate data Db from the storage unit 5. Next, the control unit 6 specifies the shape and size of the surface of the circuit board 100 based on the board data Db. Subsequently, as illustrated in FIG. 2, the control unit 6 partitions (virtually partitions) the surface of the circuit board 100 into a plurality of (for example, 12) rectangular first regions A <b> 1 to A <b> 12. . In this case, as an example, the control unit 6 partitions the first regions A1 to A12 into the same shape and the same size. Further, as an example, the control unit 6 arranges an odd number (three in this example) of first regions A along the vertical direction (an example of at least one of the vertical direction and the horizontal direction) in the grid, The first region A is partitioned so that an even number (four in this example) are arranged along the lateral direction of the eyes.

Next, the control unit 6 defines a connection order for each first area A when the movement paths Ra for each first area A are connected to create the movement path Rw. In this case, the control unit 6 defines the first region A (in this example, the first region A1 shown in FIG. 2) closest to the initial position L of the probe (see FIG. 2) as the first connection order, The first regions A having consecutive ranks in the connecting order are adjacent to each other (that is, the first regions A having the connecting order before and after are adjacent), and the vertical direction in the arrangement direction of the first regions A (the first region A is an odd number). The order of connection is defined so that the order of the first regions A arranged in the direction in which they are arranged is continuous. As an example, the control part 6 prescribes | regulates ascending order of the code | symbol (code | symbol of "A1-A12") attached | subjected to each 1st area | region A as a connection order, as shown by the arrow in the figure. In addition, the control unit 6 performs a specific process (specific process for each first area A) for each first area A according to this connection order (that is, according to the ascending order of the codes of the first areas A1 to A12). Are executed sequentially.

  Subsequently, as shown in FIG. 3, the control unit 6 divides each first area A into four second areas Ba to Bd (hereinafter also referred to as “second areas B” when not distinguished), respectively. Partition. In this case, the control unit 6 partitions each second region B into the same shape and the same size.

  Next, the control unit 6 executes the first specific process (specific process for processing the first region A having the first connection order). In the first specific process, the control unit 6 is closest to the initial position L of the four rectangular second areas B (second areas Ba1 to Bd1 shown in FIG. 4) in the first area A1 to be processed. Any one probing point P included in one second region B (in this example, the second region Ba1) is defined as the starting point (hereinafter also referred to as “starting point Ps”) of the movement path Ra. In this case, as shown in the figure, the control unit 6 defines the probing point P closest to the initial position L among the probing points P included in the second region Ba1 as the start point Ps.

  Subsequently, the control unit 6 moves any one of the probing points P included in the other second region B (second region Bc1 shown in FIG. 4) located diagonally to the second region Ba1 to the travel route Ra. Defined as an end point (hereinafter also referred to as “end point Pe”). In this case, as shown in the figure, the control unit 6 defines the probing point P farthest from the initial position L among the probing points P included in the second region Bc1 as the end point Pe.

  Next, the control unit 6 specifies a travel route Ra that passes through all the probing points P included in the first area A1 from the start point Ps to the end point Pe once. In this case, as an example, the control unit 6 specifies the movement route Ra by the following method (algorithm).

  In this method, a number that is the order in which the probe 31 is moved is assigned to each probing point P included in the first region A1. First, “1” is assigned to the starting point Ps. Subsequently, among the other probing points P in the first area A1 excluding the start point Ps and the end point Pe (hereinafter also simply referred to as “other probing points P”), the probing point P closest to the start point Ps (FIG. 4). The probing point P2) shown in FIG. Next, the probing point P closest to the probing point P2 (probing point P3 shown in the figure) is identified from other probing points P excluding the probing point P2, and "3" is assigned.

  Subsequently, the probing point P (probing point P4 shown in FIG. 4) closest to the probing point P3 is identified from the other probing points P excluding the probing points P2 and P3, and the number “4” is assigned. To do. In the same manner, a larger number is sequentially assigned to the other probing points P one by one, and finally, the end point Pe is assigned. Next, the probing points P numbered in this way are arranged in the order of the numbered number and are set as the movement route Ra. This completes the specification of the movement route Ra. Subsequently, the control unit 6 generates travel route data Dr indicating the identified travel route Ra and stores the travel route data Dr in the storage unit 5.

  Next, the control unit 6 executes a second specific process (a specific process for processing the first region A2 having the second connection order). In the second specific process, the control unit 6 has the most recently connected order in the four rectangular second areas B (second areas Ba2 to Bd2 shown in FIG. 4) in the first area A2 to be processed. Any one probing point P included in one second region B (in this example, the second region Bd2) closest to the end point Pe in the first region A1 is defined as the start point Ps in the first region A2. In this case, as shown in the figure, the control unit 6 defines the probing point P closest to the end point Pe in the first area A1 among the probing points P included in the second area Bd2 as the start point Ps.

  Next, the controller 6 moves any one of the probing points P included in the other second region B (second region Bb2 shown in FIG. 4) located diagonally to the second region Bd2 to the movement path Ra. It is defined as the end point Pe. In this case, as shown in the figure, the control unit 6 sets the probing point P farthest from the end point Pe in the first region A1 among the probing points P included in the second region Bb2 as the end point in the first region A2. It is defined as Pe.

  Subsequently, the control unit 6 specifies the travel route Ra that passes through all the probing points P included in the first area A2 from the start point Ps to the end point Pe by the above-described method, and travel route data indicating the travel route Ra. Dr is generated and stored in the storage unit 5.

  Next, in the same manner as the second specifying process, the control unit 6 executes the specifying process for each of the first areas A3 to A12 and specifies the movement route Ra for each of the first areas A3 to A12. The storage unit 5 stores the movement route data Dr indicating each movement route Ra.

  Subsequently, as conceptually indicated by arrows in FIG. 3, the control unit 6 connects the moving paths Ra according to the connecting order to create the moving path Rw as the entire circuit board 100. Specifically, the control unit 6 identifies each movement route Ra based on the movement route data Dr stored in the storage unit 5. In addition, "No." attached | subjected to the arrow in the same figure represents the connection order. Next, as shown in FIG. 5, the control unit 6 connects (connects) the end point Pe in each first region A and the start point Ps in each first region A in which the connection order is closest to each other to connect each movement route Ra. Are connected. Thereby, as shown in the figure, the movement route Rw is created. Next, the control unit 6 generates travel route data Dr indicating the travel route Rw and stores it in the storage unit 5. Thus, the creation of the movement route Rw is completed.

  In this board inspection apparatus 1, by defining the start point Ps and the end point Pe in each first region A as described above, the distance from the end point Pe of the movement route Ra to the start point Ps of the next movement route Ra is sufficiently short. Therefore, it is possible to sufficiently shorten the length of the movement route Rw connecting the movement routes Ra.

  Next, when the inspection of the circuit board 100 is started, the operation unit is instructed to start the inspection. In response to this, the control unit 6 starts an inspection process.

  In this inspection process, the control unit 6 reads the movement route data Dr from the storage unit 5. Subsequently, the control unit 6 specifies the first probing point P (probing point P to be probed first) based on the movement route data Dr. Next, the controller 6 controls the moving mechanism 3 to cause the probe 31 to probe at the first probing point P (in this example, the probing point P defined as the start point Ps of the first region A1 (see FIG. 4)).

  Subsequently, the control unit 6 controls the measurement unit 4 to execute measurement processing. In this measurement process, the measurement unit 4 detects the electrical signal supplied to the probe 31 and the electrode 2a and the electrical signal generated by the supply of the electrical signal, and the probe 31 is probed based on both electrical signals. The capacitance between the probing point P and the electrode 2a is measured. Next, the control unit 6 reads the reference data from the storage unit 5, and then compares the capacitance measured by the measurement unit 4 with the reference range specified by the reference data. In this case, as an example, when the measured value is within the reference range, the control unit 6 determines that there is no defect at the probing point P. On the other hand, when the measured value is smaller than the reference range (the lower limit value of the reference range), there is a possibility that the conductor pattern provided with the probing point P is disconnected. In addition, when the measured value is larger than the reference range (the upper limit value of the reference range), there is a possibility that the conductor pattern provided with the probing point P and another conductor pattern are short-circuited. For this reason, at these times (when the measured value is outside the reference range), the control unit 6 determines that there is a defect at the probing point P.

  Next, the control unit 6 specifies the next probing point P based on the movement path data Dr, and then controls the movement mechanism 3 to cause the probe 31 to probe the probing point P. Next, the control unit 6 controls the measurement unit 4 to execute the measurement process, and compares the measured capacitance value measured by the measurement unit 4 with the reference value to determine whether there is a defect at the probing point P. Is determined. Hereinafter, the control unit 6 controls the moving mechanism 3 to sequentially move the probes 31 to new probing points P specified by the moving path data Dr (that is, to move the probes 31 along the moving path Rw). The presence or absence of a defect at each probing point P is determined. Subsequently, when the control unit 6 finishes determining the presence or absence of defects at all probing points P of the circuit board 100, the control unit 6 determines the quality of the circuit board 100 based on the presence or absence of the defects. In this case, when there is no defect, the circuit board 100 is determined to be good, and when there is a defect, the circuit board 100 is determined to be defective.

  In this case, in the substrate inspection apparatus 1, since the probe 31 is moved along the movement route Rw created by the movement route creation process described above, the probe 31 can be moved efficiently. . For this reason, according to this board | substrate inspection apparatus 1, it is possible to fully improve inspection efficiency.

  Thus, in this movement path | route preparation apparatus, the board | substrate inspection apparatus 1, and the movement path | route creation method, in the specific process about each 1st area | region A whose connection order is 2nd or subsequent, connection of each of the four 2nd area | regions B is carried out. One probing point P included in one second region B closest to the end point Pe in the first region A in the immediately higher order is defined as the start point Ps, and another one located at the diagonal of the second region B One probing point P included in two second regions B is defined as an end point Pe, and a movement route Ra from the start point Ps to the end point Pe is specified. In this case, in the configuration in which the definition of the start point Ps and the end point Pe of the movement route Ra for each first region A is not provided, the end point Pe of the movement route Ra for one first region A and the first region A The start point Ps of the movement route Ra for another adjacent first region A may be separated, and the distance from the end point Pe to the next start point Ps may become long. On the other hand, in the movement path creation device, the substrate inspection apparatus 1 and the movement path creation method, by defining the start point Ps and the end point Pe as described above, a sufficient distance from the end point Pe to the next start point Ps can be obtained. Can be shortened. For this reason, according to this movement path | route preparation apparatus, the board | substrate inspection apparatus 1, and the movement path | route creation method, the useless movement of the probe 31 can be restrained sufficiently few. Moreover, in this movement path | route preparation apparatus, the board | substrate inspection apparatus 1, and the movement path | route creation method, the movement path | route Ra is specified for every 1st area | region A which divided the surface of the circuit board 100 into several, and each movement path | route Ra is connected. The movement route Rw as a whole of the circuit board 100 is created. For this reason, it is possible to sufficiently shorten the creation time of the travel route Rw as compared with the configuration in which the travel route Rw as a whole is directly created without partitioning. Therefore, according to this movement path creation device, board inspection apparatus 1 and movement path creation method, the movement of the probe 31 that can sufficiently improve the inspection efficiency when the circuit board 100 is inspected by probing the probe 31. The route Rw can be created in a short time.

  Further, according to the movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, by defining the probing point P closest to the initial position L as the start point Ps in the first region A having the first connection order, Since the distance from the initial position L to the probing point P where the first probing is performed can be made sufficiently short, it is possible to create the movement route Rw that can further improve the inspection efficiency.

  Further, according to the movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, by defining the probing point P farthest from the initial position L as the end point Pe in the first region A having the first connection order, Since the distance between the end point Pe in the first region A having the first connection order and the start point Ps in the first region A having the second connection order can be sufficiently shortened, the inspection efficiency can be further improved. Possible travel route Rw can be created.

  Further, according to the movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, the probing point P that is closest to the end point Pe in the first area A in the most recently connected order is set as the start point Ps of the next first area A. By defining as follows, the distance between the end point Pe in the first region A, which is the most recently connected order, and the start point Ps of the next first region A can be further shortened, thereby further improving the inspection efficiency. Can be created.

  Further, according to the movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, the probing point P farthest from the end point Pe in the first region A in the most recently connected order is set as the end point Pe of the next first region A. Since the distance between the end point Pe of the next first area A and the start point Ps of the next first area A can be sufficiently shortened, the inspection efficiency can be further improved. Possible travel route Rw can be created.

  Moreover, according to this movement path | route production apparatus and the board | substrate inspection apparatus 1, the control part 6 divides each 1st area | region A into four 2nd area | regions B, respectively, The operation | work which divides into the 2nd area | region B manually is carried out. Compared to the configuration to be performed, the movement route Rw can be created in a shorter time and easily.

  Moreover, according to this movement path | route production apparatus and the board | substrate inspection apparatus 1, the control part 6 divides the surface of the circuit board 100 into the some 1st area | region A, and performs the operation | work which divides into the 1st area | region A manually. Compared with the configuration, the travel route Rw can be created in a shorter time and more easily.

In addition, according to the movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, an odd number of first areas A is provided along at least one of the vertical direction and the horizontal direction in the arrangement direction of the first areas A. The surface of the circuit board 100 is partitioned so that the first regions A are adjacent to each other in the order of connection, and the first regions A are arranged in an odd number of first regions A. Of the second region B including the end point Pe of the first region A with the most recently connected order and the second regions B in the next first region A. The second region B closest to the nearest higher-order end point Pe can always be adjacent. Therefore, according to this movement path creation device, the substrate inspection apparatus 1, and the movement path creation method, With the starting point Ps The results can be the distance always shorter, it is possible to create a movement path Rw capable of further improving the inspection efficiency.

  Note that the movement path creation device, the inspection apparatus, and the movement path creation method are not limited to the above configuration and method. For example, in the above example, the probing point P closest to the initial position L is defined as the start point Ps in the first area A having the first connection order, but is included in the second area B closest to the initial position L. Any other probing point P can be defined as the starting point Ps. In the above example, the probing point P farthest from the initial position L is defined as the end point Pe in the first area A having the first connection order, but the diagonal of the second area B closest to the initial position L is used. Any other probing point P included in the second region B located at can be defined as the end point Pe.

  In the above example, the probing point P that is closest to the end point Pe in the first region A that is the most recently connected order is defined as the start point Ps of the next first region A. Any other probing point P included in the second region B closest to the end point Pe can be defined as the start point Ps of the next first region A. In addition, the probing point P farthest from the end point Pe in the first region A in the most recently connected order is defined as the end point Pe of the next first region A. Any other probing point P included in the second region B located at the opposite corner of the second region B can be defined as the start point Ps of the next first region A.

  Moreover, the connection order which connects each movement path | route Ra for every 1st area | region A is not limited to the above-mentioned connection order (ascending order of the code | symbol attached | subjected to each 1st area | region A), It can prescribe | regulate arbitrarily. For example, as indicated by arrows in FIG. 6, it is preferable to define the connection order so that the first regions A are adjacent to each other.

  In this case, as shown in FIG. 6, when the connection order is defined so that the order of the first regions A arranged in the horizontal direction (the direction in which the first regions A are evenly arranged) is continuous, each movement route Ra Are connected as conceptually shown by arrows in FIG. In addition, "No." attached | subjected to the arrow in the same figure represents the connection order. In this case, as shown in the figure, between the first region A12 having the fourth connecting order and the first region A11 having the fifth connecting order, the second region Bd including the end point Pe of the first region A12 is included. And the second region Bd of the first region A11 closest to the end point Pe are separated from each other. Further, between the first area A2 having the eighth connecting order and the first area A3 having the sixth connecting order, the second area Ba including the end point Pe of the first area A2 is closest to the end point Pe. The second area Ba of the first area A3 is separated. On the other hand, between the first regions A that are adjacent in the horizontal direction, the second region B including the end point Pe of the first region A with the highest connection order and the latest upper end point Pe in the next first region A. Is adjacent to the second region B closest to. For this reason, since the distance from the end point Pe to the next start point Ps can be sufficiently shortened at least between the first regions A adjacent in the lateral direction, the length of the movement path Rw as a whole of the circuit board 100 It is possible to shorten the length sufficiently.

  Further, although the example in which the surface of the circuit board 100 is partitioned into 12 first regions A has been described above, it can be partitioned into a plurality of first regions A other than 12 in a grid shape. Further, in the above example, the first area A is arranged in an odd number along the vertical direction in the grid, and the first area A is arranged in an even number along the horizontal direction in the grid. It is also possible to partition the first area A so that an even number of first areas A are arranged and an odd number of first areas A are arranged along the horizontal direction. Further, the first area A can be divided in an odd number along the vertical direction, and the first area A can be divided along the horizontal direction. In this case, when the odd number of the first regions A is arranged along at least one of the vertical direction and the horizontal direction as described above, the odd number of the first regions A is arranged (when the odd number is arranged along both the vertical direction and the horizontal direction, It is preferable to define the connection order so that the order of the first regions A is continuous in one direction. Furthermore, it can be partitioned so that an even number of first regions A are arranged along the vertical direction and an even number of first regions A are arranged along the horizontal direction.

  In the above example, the control unit 6 defines the connection order. However, a configuration and a method in which the user inputs the connection order using the operation unit may be employed. In addition, although the example in which the control unit 6 performs the process of dividing the surface of the circuit board 100 into the plurality of first regions A has been described above, a configuration and a method in which the user performs this process using the operation unit may be employed. it can. In addition, the example in which the control unit 6 performs the process of dividing the first area A into the four second areas B has been described above. However, a configuration and a method in which the user performs this process using the operation unit may be employed. it can.

  Further, the example of creating the movement path Rw used in the configuration and method for moving one probe 31 has been described above, but the movement path Rw for each probe 31 is created in the configuration and method for moving two or more probes 31. Of course, this is applicable. Moreover, although the example applied to the board inspection apparatus 1 for inspecting the quality of the circuit board 100 based on the capacitance measured using the probe 31 is described above, the resistance value between the probing points P is measured using the probe 31. In addition, the present invention can be applied to an inspection apparatus that inspects the circuit board 100 based on the resistance value.

  Further, the above-described method (algorithm) used when specifying the movement route Ra is an example, and other methods can be used. For example, at the time of numbering in the above method, weighting is performed by multiplying the coordinates indicating the position of each probing point P by a weighting coefficient corresponding to the distance from the straight line connecting the start point Ps and the end point Pe to each probing point P. A method of numbering the probing point P having the closest distance calculated based on the weighted coordinates as the next probing point P may be employed.

  In addition, the example in which one processing unit (in the above example, the control unit 6) sequentially executes the specifying process for all the first areas A has been described above, but the specifying for the first area A in which a plurality of processing units are different. A configuration in which the processes are executed in parallel can be employed. By adopting such a configuration, it is possible to further reduce the time for creating the movement route Rw.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 3 Movement mechanism 4 Measuring part 5 Memory | storage part 6 Control part 31 Probe 100 Circuit board A1-A12 1st area | region Ba-Bd 2nd area | region L Initial position P Probing point Pe End point Ps Start point Ra Movement path Rw Movement path

Claims (10)

A processing unit that creates a movement path of the probe for sequentially probing the probe to a plurality of probing points provided on the surface by moving the probe along a plane parallel to the surface of the probing object;
The processing unit performs, for each first area, a specific process for identifying the movement path that passes through all the probing points included in each of the plurality of first areas whose surfaces are partitioned in a grid pattern. The movement path creation device is configured to create the entire movement path for the probing object by connecting the movement paths for each first area in the connection order defined for each first area. ,
The connection order is defined such that the first regions in which the rank in the connection order is continuous are adjacent to each other in either the vertical direction or the horizontal direction,
The processing unit is configured such that each of the first regions is partitioned into four second regions in a grid shape and the connection order of the first regions closest to the initial position of the probe is the first, In the specifying process for the first region, any one of the four probing points included in the second region closest to the initial position of the four second regions in the first region is used as a starting point. The moving path from the start point to the end point is specified by defining as one end the probing point included in the other second region located at the diagonal of the second region. ,
In the specifying process for each first region after the second connection order, the connection order of the four second regions in each first region is the end point in the first region in the immediately higher order. Any one of the probing points included in the closest one of the second regions is defined as a starting point and included in the other one of the second regions located at the diagonal of the second region. Specify the probing point as the end point, specify the movement route from the start point to the end point,
According to the connection order, the movement path creation device creates the whole movement path by connecting the end point of each first area and the start point of the first area whose connection order is immediately below.   The said processing part prescribes | regulates the probing point nearest to the said initial position among the said probing points contained in the said 1st 2nd area | region in the 1st area | region where the said connection order is the 1st as the said starting point. Travel route creation device.   The processing unit defines a probing point farthest from the initial position among the probing points included in the other second region in the first region having the first connection order as the end point. Or the movement path | route preparation apparatus of 2 description.   The processing unit is closest to the end point in the first region with the highest connection order among the probing points included in the one second region in the first region after the second connection order. The movement path creation device according to claim 1, wherein a probing point is defined as the starting point.   The processing unit includes the probing points included in the other one second region in the first region with the second or later connection order from the end point in the first region in which the connection order is the closest higher. The movement path creation device according to claim 1, wherein the farthest probing point is defined as the end point.   6. The movement path creation device according to claim 1, wherein the processing unit partitions each of the first areas into the four second areas prior to the specifying process. 7.   The movement path creation device according to any one of claims 1 to 6, wherein the processing unit partitions the surface into the plurality of first regions prior to the specific processing. The processing unit partitions the surface so that an odd number of the first regions are arranged along at least one of a vertical direction and a horizontal direction in the arrangement direction of the first regions,
Before SL movement path generation device according to claim 7, wherein defining the connection order so rank are continuous in the connecting order of the respective first regions arranged in one direction in which the first region are aligned odd number. 9. The movement path creation device according to claim 1, a movement mechanism that moves the probe to perform probing on the probing object, a control unit that controls the movement mechanism, and the probe An inspection unit for inspecting the probing object based on the input electrical signal,
The control unit is an inspection apparatus that moves the probe along the movement path created by the movement path creation device. When creating a moving path of the probe for moving the probe along a plane parallel to the surface of the probing object and sequentially probing the probe to a plurality of probing points provided on the surface, the surface A specific process for specifying the moving path that passes through all the probing points included in each of the plurality of first areas partitioned in a grid pattern is executed for each first area. A movement path creation method for creating the entire movement path for the probing object by connecting each movement path in a connection order defined for each first region,
Prescribing the connection order such that the first regions having consecutive ranks in the connection order are adjacent to each other in either the vertical direction or the horizontal direction;
Each of the first regions is partitioned into four second regions in a grid shape, and the connection order of the first regions closest to the initial position of the probe is first, and the first first region In the specifying process, any one of the four probing points included in the second region closest to the initial position of the four second regions in the first region is defined as a start point and the second Specify any one of the probing points included in the other second region located at the diagonal of the region as an end point, and specify the movement path from the start point to the end point,
In the specifying process for each first region after the second connection order, the connection order of the four second regions in each first region is the end point in the first region in the immediately higher order. Any one of the probing points included in the closest one of the second regions is defined as a starting point and included in the other one of the second regions located at the diagonal of the second region. Specify the probing point as the end point, specify the movement route from the start point to the end point,
A movement path creation method for creating the entire movement path by linking the end point of each first area and the start point of the first area of which the connection order is immediately lower in accordance with the connection order.

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