JP6143626B2 - Inspection procedure data generation device, board inspection device, and inspection procedure data generation method - Google Patents

Description

  The present invention relates to an inspection procedure data generation apparatus, a substrate inspection apparatus, and an inspection procedure data generation method that determine the execution order of inspection steps and generate inspection procedure data.

  As an inspection procedure data generation device that generates inspection procedure data according to this type of inspection procedure data generation method, and a substrate inspection device that inspects a substrate to be inspected according to the generated inspection procedure data, the applicant has a probe movable in-circuit tester ( The following “Patent Document 1” is also disclosed simply as “in-circuit tester”. The in-circuit tester disclosed by the applicant includes three probes connected to any one of a signal source, a measurement circuit, and a ground via a scanner, and an XY unit that drives each probe to an arbitrary measurement point. An XYZ drive circuit for probing (probing point), a controller (CPU) for controlling a scanner, a signal source, a measurement circuit, an XYZ drive circuit, etc. A storage unit (RAM) for storing the XY coordinate data of each measurement point defined in the above is provided, and a probe is probed at each measurement point in the order determined according to the step inspection order setting processing program, and a substrate to be inspected It is comprised so that it can test | inspect electrically.

  When inspecting a substrate to be inspected by the in-circuit tester, first, the execution order of each inspection step to be executed (probing order for each measurement point) is determined. Specifically, the number of the inspection step to be executed first among all the inspection steps to be executed is designated by key operation. Thereby, the first (first) inspection step is determined as the reference step. Next, the CPU calculates the distance between the measurement point of the first inspection step and the measurement point of the other inspection step for which the execution order is not determined, and calculates the distance between the measurement point of the first inspection step. The inspection step for the measurement point located at the shortest distance is specified. This establishes the second inspection step. Subsequently, for each of the third and subsequent inspection steps, the CPU performs the measurement located at the shortest distance from the measurement point of the inspection step determined immediately before in the same manner as the determination procedure of the second inspection step. A point inspection step is identified, and the identified inspection step is determined as the next inspection step. Thereafter, the CPU repeatedly executes the above processing until there is no inspection step whose execution order is not fixed. Thereby, the inspection order of all inspection steps is determined.

  On the other hand, at the time of inspecting the substrate to be inspected, the inspection for each inspection step is sequentially executed in the execution order determined by the above processing. In this case, in the in-circuit tester disclosed by the applicant, the inspection order (execution order of the inspection steps) is performed so that the inspection steps with the shortest distance between the measurement points at which the probe should be probed are sequentially executed for each inspection step. Has been determined. Therefore, in the in-circuit tester disclosed by the applicant, since the distance to move the probe is short until the inspection of one board to be inspected is completed, the inspection requires only the time required for moving the probe. Time has been shortened.

Japanese Patent No. 3034583 (page 3-5, FIG. 1-13)

  However, the in-circuit tester disclosed by the applicant has the following problems to be improved. In other words, in the in-circuit tester disclosed by the applicant, the total moving distance for moving the probe until the inspection of one substrate to be inspected is completed (the time required for moving the probe is shortened). In order to shorten the inspection time, for each inspection step to be executed, a configuration / method for determining the execution order so that the inspection step where the measurement point (probing point) where the probe is to be probed is positioned closest is executed in order. Adopted. In addition, in an in-circuit tester such as an in-circuit tester disclosed by the applicant, an insulation test for inspecting an insulation state between a pair of conductor patterns with respect to a plurality of conductor patterns formed on a substrate to be inspected (substrate to be inspected). A configuration is adopted in which, when processing is performed and an insulation failure occurs between the two conductor patterns, the substrate to be inspected is determined to be defective.

  In this case, a plurality of probing points (measurement points) for probing the probe during the insulation inspection process are defined on each conductor pattern of the substrate to be inspected (substrate to be inspected). However, in order to inspect the insulation state between a pair of conductor patterns, any one of the probing points on one conductor pattern and any one of the probing points on the other conductor pattern In this type of board inspection apparatus, one of a plurality of probing points for each conductor pattern is defined as a representative point of the conductor pattern in accordance with a predetermined standard. A configuration / method for inspecting an insulation state between representative points in a pair of conductor patterns is generally employed during the insulation inspection process. Therefore, when inspecting the insulation state between each conductor pattern in the in-circuit tester disclosed by the applicant, the inspection is performed for each inspection step in the order in which the moving distance of the probe to the representative point is the shortest. It becomes.

  As a specific example, like the inspection target substrate 10 shown in FIG. 2, the conductor pattern 11 where the probing points P1a and P1b exist, the conductor pattern 12 where the probing points P2a to P2c exist, and the probing points P3a to P3d exist. The existing conductor pattern 13 exists, and the insulation state between the conductor patterns 11 and 12, the insulation state between the conductor patterns 12 and 13, and the insulation state between the conductor patterns 11 and 13 are inspected, respectively. In this case, when the probing point P1a is defined as the representative point of the conductor pattern 11, the probing point P2a is defined as the representative point of the conductor pattern 12, and the probing point P3a is defined as the representative point of the conductor pattern 13, In the in-circuit tester disclosed by the applicant, the insulation state between the probing points P1a and P2a, the insulation state between the probing points P2a and P3a, and the insulation state between the probing points P3a and P1a are checked. An execution order of inspection steps for inspecting the insulation state between the conductor patterns is defined so as to be executed in order.

  However, when the inspections of the respective inspection steps are performed in such an order, for example, after the inspection of the insulation state between the probing points P1a and P2a due to the large separation of the probing points P1a and P3a. It takes a long time to move the probe from the probing point P1a to the probing point P3a, and the probing points P2a and P1a are also far away from each other. It takes a long time to move the probe from the probe to the probing point P1a. For this reason, it is difficult to further shorten the inspection time, and it is preferable to improve this point.

  The present invention has been made in view of such a problem to be improved, and an inspection procedure data generation device, a substrate inspection device, and an inspection capable of generating inspection procedure data capable of sufficiently reducing the time required for inspecting a substrate to be inspected. The main purpose is to provide a procedure data generation method.

  In order to achieve the above object, a plurality of inspection procedure data generation apparatuses according to claim 1 are defined for each conductor pattern in an insulation inspection process for inspecting an insulation state between a plurality of conductor patterns formed on a substrate to be inspected. A pair of probes is probed at two of the probing points, and a first electrical parameter between the pair of conductor patterns is measured, and the pair of conductors based on the measured first electrical parameter Inspection provided with a processing unit for generating inspection procedure data that can specify the execution order of each insulation inspection step when the insulation inspection step for inspecting the insulation state between patterns is sequentially executed by changing the pair of conductor patterns In the procedure data generation device, the processing unit is the pair of conductor patterns to be inspected in each insulation inspection step. A first process for specifying all of the combinations of the probing points that can probe the probe, and a plurality of the combinations specified by the first process as a selection candidate. Processing for selecting any combination according to the selection criteria and excluding other combinations for the pair of conductor patterns from which the insulation state can be inspected in a state where the selected probe is probed with the selected combination. And the second process of repeatedly executing until the selection candidate disappears, the execution order of the insulation inspection step is determined based on the selection order of the combinations in the second process, and the inspection procedure data is Generate.

  Further, the inspection procedure data generation device according to claim 2 is the inspection procedure data generation device according to claim 1, wherein the processing unit inspects a conduction state between the probing points for each conductor pattern. In the inspection process, two of the probing points are probed with a pair of the probes, and a second electrical parameter between the pair of probing points on any of the conductor patterns is measured and measured. It is possible to specify the execution order of the continuity test steps when the continuity test step for inspecting the continuity state between the pair of probing points is sequentially executed by changing the pair of probing points based on the electrical parameters of 2. When generating the inspection procedure data, the inspection object of each continuity inspection step A third process for identifying all combinations of the pair of probing points, respectively, prior to the second process, and each insulation inspection step identified by the first process in the second process. By selecting the combination according to the selection criterion from the selection candidates as the selection candidate, the combination for the continuity test step specified by the third process, and the insulation inspection by selecting the combination The execution order is determined by mixing the steps and the continuity test step.

  Further, the substrate inspection apparatus according to claim 3 is an input / output device for the probing point via the probe, the probe, the moving mechanism for moving the probe, the inspection procedure data generation apparatus according to claim 1. A measurement unit that measures the first electrical parameter based on the electrical signal, and the probe is probed to the probing point by controlling the moving mechanism according to the inspection procedure data, and is measured by the measurement unit An inspection processing unit that inspects an insulation state between the pair of conductor patterns based on the first electrical parameter.

  Furthermore, the substrate inspection apparatus according to claim 4 is the substrate inspection apparatus according to claim 3, wherein the inspection procedure data generation device according to claim 2, the probe, a moving mechanism for moving the probe, and the probe are arranged. A measurement unit for measuring the first electrical parameter and the second electrical parameter based on an electrical signal input / output to / from the probing point, and controlling the moving mechanism according to the inspection procedure data. And probing the probe to the probing point, and inspecting an insulation state between the pair of conductor patterns based on the first electrical parameter measured by the measurement unit, and measuring the measurement unit by the measurement unit. Inspecting the continuity between the pair of probing points based on a second electrical parameter And a 査 processor.

  Further, the inspection procedure data generation method according to claim 5 is a probing point defined for each conductor pattern in an insulation inspection process for inspecting an insulation state between a plurality of conductor patterns formed on a substrate to be inspected. Two of them are probed with a pair of probes to measure a first electrical parameter between the pair of conductor patterns and insulation between the pair of conductor patterns based on the measured first electrical parameter An inspection procedure data generation method for generating inspection procedure data capable of specifying the execution order of the respective insulation inspection steps when the insulation inspection step for inspecting the state is sequentially executed by changing the pair of conductor patterns, The probe capable of probing the probe for each pair of conductor patterns to be inspected in each insulation inspection step A first process for specifying all combinations of roving points, and a plurality of the combinations specified by the first process as selection candidates, and selecting any combination according to a selection criterion defined in advance from the selection candidates The process of selecting and excluding the other combinations of the pair of conductor patterns that can be inspected for the insulation state with the probe probing the selected combination from the selection candidates is repeated until there is no selection candidate. A second process to be executed is executed, an execution order of the insulation test steps is determined based on a selection order of the combinations in the second process, and the test procedure data is generated.

  Furthermore, the inspection procedure data generation method according to claim 6 is the inspection procedure data generation method according to claim 5, wherein each of the conductors in the continuity inspection process for inspecting the continuity state between the probing points for each conductor pattern. Probing a pair of probes to two of the probing points to measure a second electrical parameter between a pair of the probing points on any of the conductor patterns and the measured second electrical parameter The inspection procedure data that can specify the execution order of the continuity test steps when the continuity test step for inspecting the continuity state between the pair of probing points is sequentially executed by changing the pair of probing points based on When generating, the pair of inspection targets of each continuity inspection step Prior to the second process, a third process for specifying all combinations of probing points is executed prior to the second process, and the combination for each of the insulation inspection steps specified by the first process in the second process , And selecting the combination for each continuity test step specified by the third process as the selection candidate from the selection candidates according to the selection criteria, the insulation test step and the continuity step The execution order is determined by mixing inspection steps.

  In the inspection procedure data generation device according to claim 1 and the inspection procedure data generation method according to claim 5, all combinations of probing points that can probe the probe for each pair of conductor patterns to be inspected in each insulation inspection step. A first process for identifying each of the combinations, and selecting a plurality of combinations identified by the first process as selection candidates from the selection candidates according to a predetermined selection criterion, and probing the probe to the selected combination A second process of repeatedly executing the process of excluding other combinations of the pair of conductor patterns that can be inspected in the insulated state from the selection candidates until there are no more selection candidates, and in each of the second processes Based on the combination selection order, the execution order of insulation inspection steps is determined to generate inspection procedure data. To.

  Therefore, according to the inspection procedure data generation device according to claim 1 and the inspection procedure data generation method according to claim 5, any one of the plurality of probing points defined on each conductor pattern is a representative point. A configuration / method for generating inspection procedure data so as to inspect the insulation state between representative points during the insulation inspection step, that is, a configuration for generating inspection procedure data so that the probe is moved from the representative point to the representative point Compared with the method, the combination that makes the probe moving distance shortest can be selected from all the combinations of probing points that can probe the pair of conductor patterns to be inspected in the insulation inspection step. Therefore, the time required for moving the probe can be shortened, and the time required for inspecting the inspection target substrate can be sufficiently shortened. It is possible to provide an inspection procedure data.

  According to a third aspect of the present invention, the substrate inspection apparatus includes the inspection procedure data generation device according to the first aspect, and controls the moving mechanism according to the generated inspection procedure data to cause the probe to be probed to the probing point and to measure the measurement unit. By providing an inspection processing unit that inspects the insulation state between the pair of conductor patterns based on the first electrical parameter measured by the above, it is possible to sufficiently shorten the time required for moving the probe at each inspection step. The time required for the inspection of the inspection target substrate can be sufficiently shortened.

  In the inspection procedure data generation device according to claim 2 and the inspection procedure data generation method according to claim 6, a third process for specifying all combinations of a pair of probing points to be inspected in each continuity inspection step is provided. Prior to the second process, the combination for each insulation test step specified by the first process in the second process and the combination for each continuity test step specified by the third process are selected candidates. By selecting an arbitrary combination from the selection candidates according to the selection criteria, the execution order is determined by mixing the insulation inspection step and the continuity inspection step.

  Therefore, according to the inspection procedure data generation device according to claim 2 and the inspection procedure data generation method according to claim 6, among the combination of probing points at the insulation inspection step and the combination of probing points at the continuity inspection step Therefore, it is possible to select a combination that makes the probe movement distance shortest, so that it is possible to provide inspection procedure data that can further reduce the time required to move the probe and further reduce the time required to inspect the inspection target substrate. it can.

  According to a fourth aspect of the present invention, the substrate inspection apparatus includes the inspection procedure data generation device according to the second aspect, and controls the moving mechanism according to the generated inspection procedure data to cause the probe to be probed to the probing point and to measure the measurement unit. The time required for moving the probe for each inspection step of the insulation inspection and the continuity inspection is provided by including the inspection processing unit that inspects the continuity state between the pair of probing points based on the second electrical parameter measured by Thus, the time required for the inspection of the substrate to be inspected can be further shortened.

1 is a configuration diagram showing a configuration of a substrate inspection apparatus 1. 1 is a plan view showing an example of a substrate 10 to be inspected. It is explanatory drawing for demonstrating the continuity test step data D3a produced | generated when determining the execution order of each test | inspection step. It is explanatory drawing for demonstrating the insulation test step data D3b produced | generated when determining the execution order of each test | inspection step. It is explanatory drawing for demonstrating the test | inspection step data D3 produced | generated based on the continuity test step data D3a and the insulation test step data D3b. It is explanatory drawing for demonstrating the test | inspection procedure data D4 produced | generated according to the determined execution order.

  Embodiments of an inspection procedure data generation device, a substrate inspection device, and an inspection procedure data generation method according to the present invention will be described below with reference to the accompanying drawings.

  A substrate inspection apparatus 1 shown in FIG. 1 is an example of a “substrate inspection apparatus” provided with an “inspection procedure data generation apparatus”, and includes a substrate holding unit 2, moving mechanisms 3a and 3b, probes 4a and 4b, and a measuring unit 5. , An operation unit 6, a display unit 7, a control unit 8 and a storage unit 9, and generates inspection procedure data D4 for inspecting the inspection target substrate 10 according to the “inspection procedure data generation method” described later, and the generated inspection The inspection target substrate 10 is configured to be electrically inspected according to the procedure data D4. In this case, in the substrate inspection apparatus 1 of this example, the operation unit 6, the display unit 7, the control unit 8, and the storage unit 9 constitute an “inspection procedure data generation device”.

  In addition, the inspection target substrate 10 is an example of an “inspection target substrate”, and the conductor patterns 11 to 13 are formed as described above. In addition, although various conductor patterns other than said conductor patterns 11-13 are formed in the board | substrate 10 to be actually inspected, "inspection procedure data generation apparatus", "board inspection apparatus", and "inspection procedure data generation method" In order to facilitate understanding of "", illustrations and explanations regarding conductor patterns other than the conductor patterns 11 to 13 are omitted. Further, the conductor patterns 11 to 13 define a plurality of probing points for probing the probes 4a and 4b when inspecting the conduction state.

  Specifically, in the inspection target substrate 10 of this example, the probing points P1a and P1b are defined on the conductor pattern 11, the probing points P2a to P2c are defined on the conductor pattern 12, and the probing points P3a to P3d are defined on the conductor pattern 13. Is stipulated. The probing points P1a, P1b, P2a to P2c, and P3a to P3d (hereinafter also referred to as “probing points P” when not distinguished) are defined in advance based on the design data of the inspection target substrate 10 as an example. Since the method for defining the probing point P is well known, detailed description thereof is omitted.

  On the other hand, the substrate holding unit 2 sucks or sandwiches the inspection target substrate 10 and holds it at the inspection position. The moving mechanisms 3a and 3b (hereinafter also referred to as “moving mechanism 3” when not distinguished from each other) are examples of the “moving mechanism” and are moved by the substrate holding unit 2 by moving the probes 4a and 4b according to the control of the control unit 8. Probing is performed at each probing point P in the conductor patterns 11 to 13 of the held substrate 10 to be inspected. Probes 4 a and 4 b (hereinafter also referred to as “probe 4” when not distinguished from each other) are examples of “probes” and are attached to the moving mechanism 3 and connected to the measurement unit 5.

  The measurement unit 5 controls the probing points P and P based on the electrical signals input to and output from the probing points P and P of the inspection target substrate 10 via both probes 4a and 4b according to the control of the control unit 8. The electrical parameters (current value, voltage value, resistance value, phase, etc .: one example of “first electrical parameter” and “second electrical parameter”) are measured and measurement data Ds is output. The operation unit 6 includes an operation switch for setting the operation condition of the substrate inspection apparatus 1, an operation switch for instructing start / stop of the inspection process (not shown), and controls an operation signal according to the switch operation. Output to unit 8. The display unit 7 displays the inspection result and the like for the inspection target substrate 10 under the control of the control unit 8.

  The control unit 8 comprehensively controls the substrate inspection apparatus 1. Specifically, the control unit 8 corresponds to a “processing unit” and, as will be described later, a continuity inspection step to be performed on each conductor pattern 11 to 13 of the inspection target substrate 10 based on the probing point data D1 and the like. The inspection procedure data D4 is generated by determining the execution order of the inspection steps such as the insulation inspection step. The control unit 8 corresponds to an “inspection processing unit”, controls the moving mechanisms 3a and 3b according to the inspection procedure data D4, and sets the probes 4a and 4b to the probing points P and P associated with each inspection step. In addition to probing, the measurement unit 5 is controlled to execute measurement processing. Further, the control unit 8 uses the probing points P and P for probing the probes 4a and 4b based on the measurement data Ds output from the measurement unit 5 and the inspection reference data D2 stored in the storage unit 9. The quality of the conduction state (inspection of the continuity inspection step) and the insulation state (inspection of the insulation inspection step) are inspected.

  Next, a method for generating inspection procedure data D4 by the substrate inspection apparatus 1 and an inspection method for inspecting the inspection target substrate 10 according to the inspection procedure data D4 will be described with reference to the accompanying drawings.

  When the control unit 8 is instructed to generate the inspection procedure data D4 by operating the switch of the operation unit 6, the control unit 8 starts the inspection procedure data generation process according to the operation program. Specifically, the control unit 8 first reads the probing point data D1 from the storage unit 9. The probing point data D1 is, for example, data generated based on the design data of the inspection target substrate 10, and the position of each probing point P defined on the inspection target substrate 10 and each probing point P. Is recorded in association with information (for example, a number that can individually identify each conductor pattern: a network number) that can specify which conductor pattern is defined on which conductor pattern.

  Next, as an example, the control unit 8 specifies all the combinations of the pair of probing points P and P that are to be inspected in the continuity inspection step for inspecting the continuity states of the respective conductor patterns 11 to 13 ("third" An example of “processing”). Specifically, as shown in FIG. 2, for the conductor pattern 11 in which two probing points P1a and P1b are defined, the conduction state is inspected by inspecting the conduction state between the probing points P1a and P1b. it can. Therefore, based on the probing point data D1, the control unit 8 identifies the combination of the probing points P1a and P1b as the probing point at the time of the continuity test step for the conductor pattern 11, as shown in FIG. 3, and the continuity test step data D3a Store in the storage unit 9.

  On the other hand, for the conductor pattern 12 in which three probing points P2a to P2c are defined, the conduction state can be inspected by inspecting the conduction state between the probing points P2a and P2b. However, the probing point data D1 includes information that can specify that the three probing points P2a to P2c are the probing points P defined on the conductor pattern 12, and information that can specify the position (coordinates) of each probing point P. Although recorded, it is possible to specify the connection relationship between the three probing points P2a to P2c (identifying that the probing point P2a is connected to the probing point P2c and the probing point P2c is connected to the probing point P2b. Since the information to be obtained is not recorded, the probing points P2a and P2b cannot be specified as the probing points P located at both ends of the conductor pattern 12.

  Therefore, in the board inspection apparatus 1 of the present example, when three or more probing points P are defined on one conductor pattern, as an example, any one of the probing points P is used as a reference. In addition, a configuration is employed in which the conduction state between the one probing point P and the other probing point P is inspected. Therefore, for example, for the conductor pattern 12 in which three probing points P2a to P2c are defined, the control unit 8 defines the probing point P2a as the reference probing point P, the combination of the probing points P2a and P2b, and the probing Two combinations of the points P2a and P2c are specified as probing points at the time of the continuity test step, and are stored in the storage unit 9 as continuity test step data D3a.

  Similarly, the control unit 8 defines the probing point P3a as a reference probing point P as an example for the conductor pattern 13 in which four probing points P3a to P3d are defined, and a combination of the probing points P3a and P3b, Three combinations of the probing points P3a and P3c and the probing points P3a and P3d are specified as probing points at the time of the continuity test step, and are stored in the storage unit 9 as continuity test step data D3a. Thus, the “third process” is completed.

  Next, the control unit 8 specifies all the combinations of the pair of probing points P and P to be inspected in the insulation inspection step for inspecting the insulation state between the respective conductor patterns 11 to 13 (“first” An example of “processing” is started. When the actual inspection procedure data D4 is generated, the probing points P and P to be inspected in the insulation inspection step are specified at a distance where the possibility of insulation failure is low for the purpose of reducing the number of inspection steps. The process of excluding the probing points P and P between the conductor patterns to be performed and the probing points P and P between the conductor patterns located between the other conductor patterns from the target is executed. Since it is publicly known, detailed description is omitted.

  For example, for the conductor pattern 11, it is necessary to inspect the insulation state between the conductor pattern 11 and the conductor pattern 12. Therefore, as shown in FIG. 4, the control unit 8 uses a combination of probing points P1a and P2a, a combination of probing points P1a and P2b, and a probing as probing points P and P at the time of an insulation inspection step between the conductor patterns 11 and 12. The combination of points P1a and P2c, the combination of probing points P1b and P2a, the combination of probing points P1b and P2b, and the combination of probing points P1b and P2c are specified as probing points at the time of the insulation inspection step, and insulation inspection step data It memorize | stores in the memory | storage part 9 as D3b.

  Further, regarding the conductor pattern 12, it is necessary to inspect the insulation state with the conductor pattern 13 in addition to the conductor pattern 11 described above. Therefore, the control unit 8 uses the combination of probing points P2a and P3a, the combination of probing points P2a and P3b, the combination of probing points P2a and P3c as the probing points P and P at the time of the insulation inspection step between the conductor patterns 12 and 13. Combination of probing points P2a and P3d, combination of probing points P2b and P3a, combination of probing points P2b and P3b, combination of probing points P2b and P3c, combination of probing points P2b and P3d, combination of probing points P2c and P3a, probing point Twelve of the combinations of P2c and P3b, the combination of probing points P2c and P3c, and the combination of probing points P2c and P3d Identified as roving point in the storage unit 9 as an insulation test step data D3b. Thus, the “first process” is completed.

  Subsequently, as shown in FIG. 5, the control unit 8 combines the above-described continuity test step data D3a and insulation test step data D3b to generate test step data D3. At this time, the control unit 8 sets the value of the insulation inspection flag to “0” for the combination relating to the continuity inspection step, as an example, in order to be able to identify the combination relating to the continuity inspection step and the combination relating to the insulation inspection step. For the combination relating to the insulation inspection step, the value of the insulation inspection flag is set to “1”. Thereby, the identification of the combination of the probing points P and P regarding all the inspection steps to be performed on the inspection target substrate 10 is completed.

  Next, the control unit 8 executes “second processing” for optimizing the execution order of each combination of the inspection step data D3. Specifically, the control unit 8 determines the combination of probing points P and P at each continuity test step specified by the “third process” and each insulation test specified by the “first process”. A combination of probing points P and P at the time of step is selected as a selection candidate, and an arbitrary combination of probing points P and P in which the moving distance of the probes 4a and 4b is the shortest is selected from the selection candidates. At this time, as an example, the control unit 8 specifies a combination of the probing points P and P closest to the probing points P and P of the inspection step determined immediately before according to the nearest neighbor method, and specifies the specified probing points P and P Is selected as the next inspection step to be executed (determination of the inspection procedure by the nearest neighbor method which is an example of “predetermined selection criterion”).

  More specifically, as an example, when the probing points P1a and P1b are selected by the switch operation of the operation unit 6 as the probing points P and P at the time of the inspection step to be executed first (the operator selects the first combination). The control unit 8 generates the inspection procedure data D4 as a combination of the probing points P and P at the time of the inspection step in which the probing points P1a and P1b are first executed, and stores the inspection procedure data D4 in the storage unit 9 and the probing As a combination of the probing points P and P having the shortest moving distance of the probes 4a and 4b from the points P1a and P1b, a combination of the probing points P1a and P2c that only needs to move the probe 4b only slightly is selected. As shown, the selected combination is added to the inspection procedure data D4. Serial to.

  Next, the control unit 8 determines whether the insulation test flag of the selected combination is “0” or “1”. When the flag is “1” (when the probing points P and P are related to the insulation test step), The combination of probing points P and P related to other insulation inspection steps that can inspect the insulation state in the state where the probe 4a and 4b are probed to the combination of the probing points P and P is excluded from the selection candidates. Specifically, the control unit 8 is a combination other than the probing points P1a and P2c for the conductor patterns 11 and 12 that can inspect the insulation state by a combination of the probing points P1a and P2c, that is, a combination of the probing points P1a and P2a. And two combinations of the probing points P1a and P2b are excluded from the selection candidates for the next inspection step.

  Subsequently, the control unit 8 selects a combination of the probing points P2a and P2c that requires only a slight movement of the probe 4a as the combination of the probing points P and P having the shortest moving distance from the probing points P1a and P2c. As shown in FIG. 6, the selected combination is added to the inspection procedure data D4. Next, since the insulation test flag of the selected combination is “0” (the combination of the probing points P and P related to the continuity test step), the control unit 8 performs the probing with the shortest moving distance from the probing points P2a and P2c. As a combination of points P and P, a combination of probing points P2a and P2b that only requires a slight movement of probe 4b is selected, and the selected combination is added to inspection procedure data D4 as shown in FIG.

  Subsequently, since the insulation inspection flag of the selected combination is “0”, the control unit 8 slightly sets only the probe 4a as the combination of the probing points P and P having the shortest moving distance from the probing points P2a and P2b. A combination of probing points P3c and P2b that only needs to be moved is selected, and the selected combination is added to inspection procedure data D4 as shown in FIG. At this time, since the insulation test flag of the selected combination is “1”, the control unit 8 determines the probing points P3c, P3c for the conductor patterns 13, 12 that can inspect the insulation state by the combination of the probing points P3c, P2b. Combinations other than P2b are excluded from selection candidates for the next inspection step.

  Thereafter, the control unit 8 repeatedly executes the above processing until there is no selection candidate regarding the combination of probing points P and P for the next inspection step to be executed. As a result, when there are no selection candidates, the movement distances of the probes 4a and 4b are the shortest with respect to the combinations of probing points P and P for every continuity test step and insulation test step to be performed on the inspection target substrate 10. Inspection procedure data D4 in which each combination is recorded in a simple order is completed. Thus, the generation process of the inspection procedure data D4 is completed.

  On the other hand, when inspecting the substrate 10 to be inspected, the control unit 8 sequentially executes the continuity inspection steps and the insulation inspection steps in accordance with the inspection procedure data D4. Specifically, for each inspection step, the control unit 8 controls the moving mechanisms 3a and 3b to probe the probes 4a and 4b to the specified probing points P and P, and also insulates the inspection procedure data D4. When the flag is “0”, the conduction state between the probing points P and P is inspected based on the measurement data Ds output from the measurement unit 5 and the inspection reference data D2 stored in the storage unit 9. Further, when the insulation inspection flag in the inspection procedure data D4 is “1”, the control unit 8 is based on the measurement data Ds output from the measurement unit 5 and the inspection reference data D2 stored in the storage unit 9, The insulation state between the probing points P and P is inspected.

  More specifically, the control unit 8 controls the moving mechanism 3a to probe the probe 4a to the probing point P1a and controls the moving mechanism 3b according to the data of the first inspection step in the inspection procedure data D4. Probing 4b to the probing point P1b and controlling the measurement unit 5 to execute the measurement process. Since the insulation inspection flag is “0”, the measurement data Ds output from the measurement unit 5 and the storage unit 9 are stored. Based on the inspection reference data D2, the conduction state between the probing points P1a and P1b (that is, the conduction state of the conductor pattern 11) is inspected.

  Next, the control unit 8 controls the moving mechanism 3b while maintaining the state in which the probe 4a is probed to the probing point P1a by controlling the moving mechanism 3a according to the data of the second inspection step in the inspection procedure data D4. The probe 4b is moved from the probing point P1b to the probing point P2c for probing, and the measurement unit 5 is controlled to execute measurement processing. Since the insulation inspection flag is “1”, measurement output from the measurement unit 5 is performed. Based on the data Ds and the inspection reference data D2 stored in the storage unit 9, the insulation state between the probing points P1a and P2c (that is, the insulation state between the conductor patterns 11 and 12) is inspected.

  At this time, in this example, when the combination of the probing points P1a and P2c is selected when the inspection procedure data D4 is generated, the conductor pattern 11 that can inspect the insulation state by the combination of the probing points P1a and P2c. The combinations other than the probing points P1a and P2c for 12 are excluded from the selection candidates for the next inspection step. For this reason, in this inspection procedure data D4, since the insulation inspection step is not defined by a combination other than the probing points P1a and P2c for the inspection of the insulation state between the conductor patterns 11 and 12, the probes 4a and 4b are probed. When the above-described insulation inspection step performed with the points P1a and P2c being probed is completed, the inspection of the insulation state between the conductor patterns 11 and 12 is completed.

  Subsequently, the control unit 8 performs the continuity inspection step in the state in which the probes 4a and 4b are probed to the probing points P2a and P2c according to the data of the third and subsequent inspection steps in the inspection procedure data D4, and the probe to the probing points P2a and P2b. The continuity inspection step in the state where the probes 4a and 4b are probed, the insulation inspection step in the state where the probes 4a and 4b are probed at the probing points P3c and P2b, and the like are sequentially executed. Thereby, the quality of the inspection target substrate 10 is electrically inspected.

  Thus, in this board | substrate inspection apparatus 1 and the production | generation method of the test procedure data D4 by the board | substrate inspection apparatus 1, the probing point P which can probe the probe 4 for every pair of conductor pattern made into the test object of each insulation test step. “First process” for specifying all of the combinations and selecting a plurality of combinations specified by “first process” as selection candidates from the selection candidates according to a predetermined selection criterion A “second process” in which the process of excluding other combinations of a pair of conductor patterns that can be inspected for insulation with the probe 4 probed in the selected combination from the selection candidates is repeatedly executed until there is no selection candidate. And the execution order of the insulation inspection steps based on the selection order of each combination in the “second process” It determines and generates the inspection procedure data D4.

  Therefore, according to the board inspection apparatus 1 and the method for generating the inspection procedure data D4 by the board inspection apparatus 1, any one of a plurality of probing points defined on each conductor pattern is defined as a representative point. Configuration and method for generating inspection procedure data so as to inspect the insulation state between representative points during an insulation inspection step, that is, a configuration and method for generating inspection procedure data so as to move a probe from a representative point to a representative point In comparison, the combination in which the moving distance of the probes 4a and 4b is the shortest among all the combinations of probing points P and P that can probe the probes 4a and 4b for each pair of conductor patterns to be inspected in the insulation inspection step. Since the time required for moving the probes 4a and 4b can be shortened, the inspection target substrate 10 can be selected. It is possible to provide an inspection procedure data D4 which can sufficiently reduce the time required for the inspection.

  Moreover, according to this board | substrate inspection apparatus 1, while providing the "inspection procedure data generation apparatus" which has the operation part 6, the display part 7, the control part 8, and the memory | storage part 9, according to the produced | generated inspection procedure data D4, moving mechanism 3a, 3b is controlled so that the probes 4a and 4b are probed to the probing point P and the insulation processing state between the pair of conductor patterns can be inspected based on the “first electrical parameter” measured by the measurement unit 5 By configuring the control unit 8 as described above, it is possible to sufficiently shorten the time required for moving the probes 4a and 4b for each inspection step and sufficiently reduce the time required for the inspection of the inspection target substrate 10.

  Further, in the board inspection apparatus 1 and the method for generating the inspection procedure data D4 by the board inspection apparatus 1, all combinations of the pair of probing points P and P to be inspected in each continuity inspection step are specified. "Process" is executed prior to "Second process", and the combination of each insulation inspection step specified by "First process" in "Second process" and specified by "Third process" The combination for each continuity test step is selected as a selection candidate, and an arbitrary combination is selected from the selection candidates according to the selection criterion, so that the execution order is determined by mixing the insulation test step and the continuity test step.

  Therefore, according to the board inspection apparatus 1 and the method for generating the inspection procedure data D4 by the board inspection apparatus 1, the combination of the probing points P and P during the insulation inspection step and the probing points P and P during the continuity inspection step. Since the combination in which the moving distances of the probes 4a and 4b are the shortest can be selected from the combinations, the time required for moving the probes 4a and 4b can be further shortened to further reduce the time required for inspecting the inspection target substrate 10. Possible inspection procedure data D4 can be provided.

  Moreover, according to this board | substrate inspection apparatus 1, while providing the "inspection procedure data generation apparatus" which has the operation part 6, the display part 7, the control part 8, and the memory | storage part 9, according to the produced | generated inspection procedure data D4, moving mechanism 3a, 3b is controlled so that the probes 4a and 4b are probed to the probing point P and the conduction state between the pair of probing points P and P can be inspected based on the “second electrical parameter” measured by the measuring unit 5 By configuring the control unit 8 as the inspection processing unit, the time required for moving the probes 4a and 4b for each inspection step of the insulation inspection and the continuity inspection is further shortened, and the time required for the inspection of the inspection target substrate 10 is further increased. It can be shortened.

  As for the configurations of the “inspection procedure data generation device” and the “substrate inspection device” and the specific procedure of the “inspection procedure data generation method”, the configuration of the substrate inspection device 1 and its “inspection procedure data generation” It is not limited to the procedure of “Method”. For example, the “predetermined selection criterion” is not limited to the “combination specified by the nearest neighbor method”, and adopts a known determination procedure such as the space filling method, the 2-opt method, and the 3-opt method. Can do. In addition, the generation of the inspection procedure data D4 for inspecting the inspection target substrate 10 using the two probes 4a and 4b has been described. However, the number of “probes” used when inspecting the inspection target substrate 10 is as follows. The inspection procedure data for inspecting the “substrate to be inspected” using three or more “probes” is not limited, and is similar to the procedure for generating the inspection procedure data D4 by the substrate inspection apparatus 1 described above. Can be generated by the following procedure.

  Further, a configuration / method for generating inspection procedure data D4 to be sequentially executed by mixing a conduction inspection step for inspecting the conduction state of each conductor pattern and an insulation inspection step for inspecting an insulation state between the conductor patterns, and an inspection procedure The configuration / method of sequentially executing the continuity test step and the insulation test step in accordance with the data D4 has been described as an example. However, the test procedure data D4 for sequentially executing each insulation test step after sequentially executing each continuity test step. Or after each execution of the continuity test steps in accordance with the test procedure data D4. Each insulation inspection step is sequentially executed, or each insulation inspection step is performed according to inspection procedure data D4. It is possible to use a construction, method or perform the continuity test step sequentially after next execution. When adopting these configurations / methods, the “first process” and the “second process” are executed in this order to define the execution order of each insulation test step. It is possible to sufficiently shorten the time required to execute the insulation inspection process.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 3a, 3b Moving mechanism 4a, 4b Probe 5 Measuring part 8 Control part 9 Memory | storage part 10 Inspection object board | substrate 11-13 Conductor pattern D1 Probing point data D2 Inspection reference data D3 Inspection step data D3a Continuity inspection step data D3b Insulation inspection step data D4 Inspection procedure data Ds Measurement data P1a, P1b, P2a to P2c, P3a to P3d Probing points

Claims (6)

A pair of probes is probed by probing two of the plurality of probing points defined for each conductor pattern in the insulation inspection process for inspecting the insulation state between the plurality of conductor patterns formed on the inspection target substrate. Measuring the first electrical parameter between the conductor patterns and inspecting the insulation state between the pair of conductor patterns based on the measured first electrical parameter. An inspection procedure data generation device including a processing unit that generates inspection procedure data that can specify the execution order of the respective insulation inspection steps when sequentially changing and executing,
The processing unit includes: a first process for specifying all the combinations of probing points that can probe the probe for each of the pair of conductor patterns to be inspected in each insulation inspection step; and the first process A plurality of the combinations specified by (1) are selected as candidates for selection, and an arbitrary combination is selected from the selection candidates according to a predetermined selection criterion, and the insulation state is inspected in a state where the selected probe is probed with the selected combination. And a second process of repeatedly executing the process of excluding the other combinations of the pair of conductor patterns that can be selected from the selection candidates until there is no more selection candidate, and for each combination in the second process The inspection procedure data by determining the execution order of the insulation inspection steps based on the selection order Test procedure data generating apparatus to generate.   The processing unit probing a pair of the probes to two of the probing points in a continuity inspection process for inspecting a continuity state between the probing points for each of the conductor patterns, and either of the conductors A continuity test step of measuring a second electrical parameter between the pair of probing points on the pattern and inspecting a continuity state between the pair of probing points based on the measured second electrical parameter. When generating the inspection procedure data that can specify the execution order of the continuity test steps when the probing points are sequentially executed and changed, the pair of probing points to be inspected by the continuity test steps are generated. A third process for specifying all the combinations is referred to as the second process. The combination for each of the insulation test steps specified by the first process in the second process and the combination for each of the continuity test steps specified by the third process. The inspection procedure data generation according to claim 1, wherein an execution order is determined by mixing the insulation inspection step and the continuity inspection step by selecting an arbitrary combination from the selection candidates as the selection candidate according to the selection criterion. apparatus.   The inspection procedure data generation device according to claim 1, the probe, a moving mechanism for moving the probe, and the electric signal input / output to / from the probing point via the probe. A measuring unit for measuring a physical parameter; and controlling the moving mechanism according to the inspection procedure data to cause the probe to probe the probing point, and based on the first electrical parameter measured by the measuring unit. A board inspection apparatus comprising: an inspection processing unit that inspects an insulation state between the conductor patterns.   3. The inspection procedure data generation device according to claim 2, the probe, a moving mechanism for moving the probe, and the electric signal input / output to / from the probing point via the probe. A measurement unit for measuring the measurement parameter and the second electrical parameter; and controlling the moving mechanism according to the inspection procedure data to cause the probe to probe the probing point and to measure the first parameter measured by the measurement unit. Inspection for inspecting an insulation state between the pair of conductor patterns based on an electrical parameter, and for inspecting a conduction state between the pair of probing points based on the second electrical parameter measured by the measurement unit A substrate inspection apparatus comprising a processing unit. A pair of probes is probed by probing two of the plurality of probing points defined for each conductor pattern in the insulation inspection process for inspecting the insulation state between the plurality of conductor patterns formed on the inspection target substrate. Measuring the first electrical parameter between the conductor patterns and inspecting the insulation state between the pair of conductor patterns based on the measured first electrical parameter. An inspection procedure data generation method for generating inspection procedure data capable of specifying the execution order of the respective insulation inspection steps when sequentially executed after being changed,
A first process for identifying all combinations of the probing points that can probe the probe for each of the pair of conductor patterns to be inspected in each of the insulation inspection steps; and a plurality of processes identified by the first process. The pair of pairs that can select the combination as a selection candidate according to a predetermined selection criterion from among the selection candidates and can inspect the insulation state in a state in which the probe is probed to the selected combination. A second process of repeatedly executing the process of excluding other combinations of the conductor patterns from the selection candidates until the selection candidates disappear, and based on the selection order of the combinations in the second process Inspection for determining the execution order of the insulation inspection steps and generating the inspection procedure data Order data generation method.   In the continuity inspection process for inspecting the continuity state between the probing points for each of the conductor patterns, a pair of probes are probed at two of the probing points, and a pair of the conductor patterns on the conductor pattern is paired. Measure the second electrical parameter between the probing points and change the pair of probing points in the continuity test step for inspecting the continuity between the pair of probing points based on the measured second electrical parameter Then, when generating the inspection procedure data that can specify the execution order of the continuity test steps when sequentially executed, all combinations of the pair of probing points to be inspected in the continuity test steps are each The third process to be identified is executed prior to the second process. In addition, the combination of the insulation test steps specified by the first process in the second process and the combination of the continuity test steps specified by the third process are selected as the selection candidates. 6. The inspection procedure data generation method according to claim 5, wherein an execution order is determined by mixing the insulation inspection step and the continuity inspection step by selecting an arbitrary combination from the selection candidates according to the selection criterion.

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