JP5866973B2 - 振動デバイスの製造方法 - Google Patents
振動デバイスの製造方法 Download PDFInfo
- Publication number
- JP5866973B2 JP5866973B2 JP2011236929A JP2011236929A JP5866973B2 JP 5866973 B2 JP5866973 B2 JP 5866973B2 JP 2011236929 A JP2011236929 A JP 2011236929A JP 2011236929 A JP2011236929 A JP 2011236929A JP 5866973 B2 JP5866973 B2 JP 5866973B2
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- Prior art keywords
- thermistor
- resistance value
- temperature
- crystal
- vibrating piece
- Prior art date
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
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- 239000010703 silicon Substances 0.000 description 3
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
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- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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- 229910052721 tungsten Inorganic materials 0.000 description 1
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Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011236929A JP5866973B2 (ja) | 2011-10-28 | 2011-10-28 | 振動デバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011236929A JP5866973B2 (ja) | 2011-10-28 | 2011-10-28 | 振動デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013098608A JP2013098608A (ja) | 2013-05-20 |
| JP2013098608A5 JP2013098608A5 (enExample) | 2014-11-27 |
| JP5866973B2 true JP5866973B2 (ja) | 2016-02-24 |
Family
ID=48620160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011236929A Expired - Fee Related JP5866973B2 (ja) | 2011-10-28 | 2011-10-28 | 振動デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5866973B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11218131B2 (en) | 2017-12-27 | 2022-01-04 | Nihon Dempa Kogyo Co., Ltd. | Crystal unit |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101532133B1 (ko) * | 2013-06-03 | 2015-06-26 | 삼성전기주식회사 | 압전 소자 패키지 및 그 제조 방법 |
| JP6644457B2 (ja) * | 2014-03-26 | 2020-02-12 | Tdk株式会社 | 圧電デバイス |
| JP2015220586A (ja) * | 2014-05-16 | 2015-12-07 | 京セラ株式会社 | 圧電振動素子搭載用基板および圧電装置 |
| JP6618675B2 (ja) | 2014-07-30 | 2019-12-11 | セイコーエプソン株式会社 | 振動デバイス、電子機器及び移動体 |
| JP6652459B2 (ja) * | 2016-07-27 | 2020-02-26 | 京セラ株式会社 | 水晶振動子 |
| JP6987589B2 (ja) * | 2017-10-02 | 2022-01-05 | 京セラ株式会社 | 水晶振動子 |
| CN109981102B (zh) * | 2017-12-27 | 2024-09-13 | 日本电波工业株式会社 | 晶体振荡器 |
| JP7375331B2 (ja) * | 2019-04-26 | 2023-11-08 | セイコーエプソン株式会社 | 振動デバイスおよび電子機器 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2597381Y2 (ja) * | 1991-12-26 | 1999-07-05 | 京セラ株式会社 | 温度補償型水晶発振器 |
| JP3831363B2 (ja) * | 2003-06-24 | 2006-10-11 | Ｔｄｋ株式会社 | 有機質正特性サーミスタ及びその製造方法並びにその酸素含有量の測定方法 |
| JP4871548B2 (ja) * | 2005-08-29 | 2012-02-08 | Ｓｅｍｉｔｅｃ株式会社 | 薄膜サーミスタ |
| JP5339681B2 (ja) * | 2007-02-21 | 2013-11-13 | 日本電波工業株式会社 | 表面実装用の水晶振動子 |
-
2011
- 2011-10-28 JP JP2011236929A patent/JP5866973B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11218131B2 (en) | 2017-12-27 | 2022-01-04 | Nihon Dempa Kogyo Co., Ltd. | Crystal unit |
| TWI769358B (zh) * | 2017-12-27 | 2022-07-01 | 日商日本電波工業股份有限公司 | 晶體振盪器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013098608A (ja) | 2013-05-20 |
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