JP5866907B2 - 力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法 - Google Patents
力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法 Download PDFInfo
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- JP5866907B2 JP5866907B2 JP2011202802A JP2011202802A JP5866907B2 JP 5866907 B2 JP5866907 B2 JP 5866907B2 JP 2011202802 A JP2011202802 A JP 2011202802A JP 2011202802 A JP2011202802 A JP 2011202802A JP 5866907 B2 JP5866907 B2 JP 5866907B2
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- piezoelectric element
- force
- force sensor
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
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- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
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- 238000005260 corrosion Methods 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011202802A JP5866907B2 (ja) | 2011-09-16 | 2011-09-16 | 力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011202802A JP5866907B2 (ja) | 2011-09-16 | 2011-09-16 | 力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013064623A JP2013064623A (ja) | 2013-04-11 |
| JP2013064623A5 JP2013064623A5 (enExample) | 2014-09-04 |
| JP5866907B2 true JP5866907B2 (ja) | 2016-02-24 |
Family
ID=48188263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011202802A Expired - Fee Related JP5866907B2 (ja) | 2011-09-16 | 2011-09-16 | 力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5866907B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6163900B2 (ja) * | 2013-06-13 | 2017-07-19 | セイコーエプソン株式会社 | 力検出装置およびロボット |
| JP6235283B2 (ja) | 2013-09-24 | 2017-11-22 | 株式会社東芝 | 照明装置 |
| JP2015184007A (ja) * | 2014-03-20 | 2015-10-22 | セイコーエプソン株式会社 | 力検出装置、ロボット、電子部品搬送装置および電子部品検出装置 |
| CH711167A1 (de) | 2015-06-05 | 2016-12-15 | Kistler Holding Ag | Komponentenaufnehmer und Mehrkomponentenaufnehmer mit solchen Komponentenaufnehmern sowie Verwendung eines solchen Mehrkomponentenaufnehmers in einer Maschinenstruktur. |
| CN105000395A (zh) * | 2015-07-24 | 2015-10-28 | 佛山市科立工业设备有限公司 | 一种自动堆叠机 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH472668A (de) * | 1967-09-05 | 1969-05-15 | Kistler Instrumente Ag | Einrichtung mit einer Mehrkomponenten-Piezomesszelle |
| JPS6034293A (ja) * | 1983-08-03 | 1985-02-21 | 株式会社日立製作所 | 皮膚感覚センサ |
| JP4011177B2 (ja) * | 1998-02-10 | 2007-11-21 | 日本特殊陶業株式会社 | 荷重センサ |
| JP3372024B2 (ja) * | 1998-03-27 | 2003-01-27 | リオン株式会社 | 圧電素子保持構造 |
| JP2011080586A (ja) * | 2009-09-10 | 2011-04-21 | Akebono Brake Ind Co Ltd | 電動式ディスクブレーキ |
| JP4912477B2 (ja) * | 2010-02-02 | 2012-04-11 | 公立大学法人高知工科大学 | 移動型床反力計測装置 |
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2011
- 2011-09-16 JP JP2011202802A patent/JP5866907B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013064623A (ja) | 2013-04-11 |
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