JP5865237B2 - 親水性部材およびその製造方法 - Google Patents
親水性部材およびその製造方法 Download PDFInfo
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- JP5865237B2 JP5865237B2 JP2012255257A JP2012255257A JP5865237B2 JP 5865237 B2 JP5865237 B2 JP 5865237B2 JP 2012255257 A JP2012255257 A JP 2012255257A JP 2012255257 A JP2012255257 A JP 2012255257A JP 5865237 B2 JP5865237 B2 JP 5865237B2
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- layer
- sio
- tio
- photocatalytic
- photocatalytic tio
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- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 78
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 74
- 230000001699 photocatalysis Effects 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 20
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 46
- 238000007740 vapor deposition Methods 0.000 description 24
- 239000011521 glass Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 238000009826 distribution Methods 0.000 description 11
- 239000002585 base Substances 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910001882 dioxygen Inorganic materials 0.000 description 8
- 238000011084 recovery Methods 0.000 description 8
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000011941 photocatalyst Substances 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000005660 hydrophilic surface Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005562 fading Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/063—Titanium; Oxides or hydroxides thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/08—Silica
-
- B01J35/31—
-
- B01J35/39—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0238—Impregnation, coating or precipitation via the gaseous phase-sublimation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/71—Photocatalytic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/75—Hydrophilic and oleophilic coatings
Description
光触媒TiO 2 層14 多孔質SiO 2 層16
ガラス板12の温度: 摂氏300度 摂氏300度
蒸着速度: 0.5nm/秒 0.2nm/秒
酸素ガス42の分圧: 0.016Pa 0.016Pa
(1)ガラス板12を基板ホルダ26に保持し、るつぼ30内に蒸着材32として例えばTi2O3を収容して真空槽20を閉じる。
(2)ロータリポンプ24および拡散ポンプ22を駆動して真空槽20内を真空引きする。
(3)ヒータ28を駆動して、基板ホルダ26を通してガラス板12を所定の温度に加熱する。
(4)酸素ボンベ40から酸素ガス42を真空槽20内に導入する。
(5)熱陰極34を駆動して、電子ビーム36を蒸着材32であるTi2O3に照射してTi2O3を蒸発させる。
(6)蒸発したTi2O3は酸素ガス42と反応してTiO2が生成され、ガラス板12上に堆積して成膜される。
(7)約100nm堆積したところで成膜を終了させる。
(1)るつぼ30内に蒸着材32として例えばSiO2を収容して真空槽20を閉じる。
(2)ロータリポンプ24および拡散ポンプ22を駆動して真空槽20内を真空引きする。
(3)ヒータ28を駆動して、基板ホルダ26を通してガラス板12を所定の温度に加熱する。
(4)酸素ボンベ40から酸素ガス42を真空槽20内に導入する。
(5)熱陰極34を駆動して、電子ビーム36を蒸着材32であるSiO2に照射してSiO2を蒸発させる。
(6)蒸発したSiO2がガラス板12の光触媒TiO2層14上に堆積して成膜される。
(7)約15nm堆積したところで成膜を終了させる。
Claims (5)
- 基材の表面に光触媒作用を示すTiO2層を3.33〜3.75g/cm3の密度に成膜し、該TiO2層の上に最表層として多孔質SiO2層を、10nm以上、50nm以下の膜厚で、かつ該TiO2層の全面を覆った状態に成膜した構造を有する親水性部材。
- 前記TiO2層の密度が3.47〜3.72g/cm3である請求項1に記載の親水性部材。
- 前記TiO2層の密度が3.54〜3.68g/cm3である請求項2に記載の親水性部材。
- 前記多孔質SiO2層が15nm以上、20nm以下であることを特徴とする請求項1から3のいずれか1つに記載の親水性部材。
- 基材の表面に光触媒作用を示すTiO2層を3.33〜3.75g/cm3の密度に成膜する工程と、該TiO2層の上に最表層として多孔質SiO2層を、10nm以上、50nm以下の膜厚で、かつ該TiO2層の全面を覆った状態に成膜する工程とを有する親水性部材の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012255257A JP5865237B2 (ja) | 2012-11-21 | 2012-11-21 | 親水性部材およびその製造方法 |
CN201380060933.3A CN104797416B (zh) | 2012-11-21 | 2013-10-28 | 亲水性构件及其制造方法 |
DE112013005567.8T DE112013005567T5 (de) | 2012-11-21 | 2013-10-28 | Hydrophiles Element und Verfahren zu dessen Herstellung |
KR1020157006257A KR20150086228A (ko) | 2012-11-21 | 2013-10-28 | 친수성 부재 및 그 제조방법 |
PCT/JP2013/079136 WO2014080726A1 (ja) | 2012-11-21 | 2013-10-28 | 親水性部材およびその製造方法 |
US14/442,921 US10042090B2 (en) | 2012-11-21 | 2013-10-28 | Hydrophilic member and method for manufacturing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012255257A JP5865237B2 (ja) | 2012-11-21 | 2012-11-21 | 親水性部材およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014100871A JP2014100871A (ja) | 2014-06-05 |
JP5865237B2 true JP5865237B2 (ja) | 2016-02-17 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2012255257A Active JP5865237B2 (ja) | 2012-11-21 | 2012-11-21 | 親水性部材およびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10042090B2 (ja) |
JP (1) | JP5865237B2 (ja) |
KR (1) | KR20150086228A (ja) |
CN (1) | CN104797416B (ja) |
DE (1) | DE112013005567T5 (ja) |
WO (1) | WO2014080726A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017056598A1 (ja) * | 2015-09-29 | 2017-04-06 | 富士フイルム株式会社 | 親水性多層膜及びその製造方法、並びに、撮像システム |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0816466B1 (en) * | 1995-03-20 | 2006-05-17 | Toto Ltd. | Use of material having ultrahydrophilic and photocatalytic surface |
JP2901550B2 (ja) | 1996-07-26 | 1999-06-07 | 株式会社村上開明堂 | 防曇素子 |
JP2000053449A (ja) * | 1998-08-06 | 2000-02-22 | Murakami Corp | 防曇鏡およびその製造方法 |
JP3904355B2 (ja) * | 1998-12-03 | 2007-04-11 | 日本板硝子株式会社 | 親水性光触媒部材 |
US6193378B1 (en) * | 1999-06-25 | 2001-02-27 | Gentex Corporation | Electrochromic device having a self-cleaning hydrophilic coating |
JP2002201045A (ja) * | 2000-12-27 | 2002-07-16 | Toto Ltd | 親水性薄膜 |
JP2003098307A (ja) * | 2001-09-20 | 2003-04-03 | Moriroku Co Ltd | プラスチック光学基板への反射防止膜とその成膜方法 |
JP2004345223A (ja) * | 2003-05-22 | 2004-12-09 | Dainippon Printing Co Ltd | 光学機能性フィルム、および画像表示装置 |
JP2006257244A (ja) * | 2005-03-16 | 2006-09-28 | Matsushita Electric Works Ltd | 防曇防汚性材料及びその製造方法 |
US7842352B2 (en) | 2006-08-09 | 2010-11-30 | Massachusetts Institute Of Technology | Nanoparticle coatings and methods of making |
JP2009262049A (ja) * | 2008-04-24 | 2009-11-12 | Toshiba Corp | 光触媒構造体およびその製造方法 |
CN102582137B (zh) * | 2012-01-13 | 2015-10-21 | 苏州力合光电薄膜科技有限公司 | 自清洁防雾元件及其制造方法 |
-
2012
- 2012-11-21 JP JP2012255257A patent/JP5865237B2/ja active Active
-
2013
- 2013-10-28 US US14/442,921 patent/US10042090B2/en active Active
- 2013-10-28 CN CN201380060933.3A patent/CN104797416B/zh active Active
- 2013-10-28 DE DE112013005567.8T patent/DE112013005567T5/de active Pending
- 2013-10-28 WO PCT/JP2013/079136 patent/WO2014080726A1/ja active Application Filing
- 2013-10-28 KR KR1020157006257A patent/KR20150086228A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN104797416A (zh) | 2015-07-22 |
US10042090B2 (en) | 2018-08-07 |
US20150293268A1 (en) | 2015-10-15 |
JP2014100871A (ja) | 2014-06-05 |
DE112013005567T5 (de) | 2015-08-20 |
WO2014080726A1 (ja) | 2014-05-30 |
KR20150086228A (ko) | 2015-07-27 |
CN104797416B (zh) | 2016-07-06 |
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