JP5856398B2 - Belt-like sheet support device - Google Patents

Description

The present invention relates to a support equipment of the belt-like sheet.

Conventionally, in a pasting device for feeding a belt-like adhesive sheet and sticking it to a wafer, a data carrier is provided on the shaft core member around which the adhesive sheet is wound, and the data written on the data carrier is read to appropriately set the pasting conditions. A configuration to be set is known (see, for example, Patent Document 1).
In the configuration described in Patent Document 1, a data carrier is provided on the inner surface of the shaft member, and a tape data read / write device is provided on the unwinding shaft on which the shaft member is mounted. When the shaft core member is attached to the unwinding shaft, the alignment between the data carrier and the tape data read / write device is accurately performed by the alignment portion of the shaft core member.

JP 2007-12807 A

  However, in the configuration described in Patent Document 1, if the data carrier is separated from the tape data read / write device, data cannot be read or written (data communication). Therefore, there is a problem that it is necessary to accurately perform the positioning of the shaft member, and the mounting work of the shaft core member is troublesome.

An object of the present invention is that when a shaft core member around which a belt-like sheet is wound and a data carrier is supported by a support shaft, accurate alignment for appropriately performing data communication with the data carrier is unnecessary. and to provide a supporting equipment of the belt-like sheet.

In order to achieve the above object, a belt-like sheet support device according to the present invention is a belt-like sheet support device that supports a belt-like sheet wound around an open-ended cylindrical member so that the belt-like sheet can be fed. A support shaft that supports the cylindrical member by being inserted from one end side of the hollow portion, and a frame that supports the support shaft, and inside the cylindrical member, among the storage and transmission of predetermined data An intermediate wall capable of attaching a data carrier capable of at least one is provided, the intermediate wall is provided with a wall center hole centering on the axis of the cylindrical member, and the tip surface of the support shaft has the A configuration is adopted in which an antenna capable of communicating with the data carrier and a through shaft penetrating the wall center hole are provided while facing the intermediate wall.

According to the present invention as described above, since the antenna facing the intermediate wall of the cylindrical member is provided on the tip surface of the support shaft that supports the cylindrical member, the data carrier attached to the intermediate wall is supported. The data carrier can be positioned at the passing position of magnetic flux generated almost parallel to the axis of the support shaft, regardless of the angle attached to the axis, so that data communication with the data carrier can be performed appropriately. the exact alignment of that Do not required. Moreover, if a through-shaft is provided in the front end surface of a support shaft, a cylindrical member can be supported on both sides and the shake of a cylindrical member can be suppressed and it can support stably.

The side view of the sticking apparatus which concerns on 1st, 2nd embodiment of this invention. The fragmentary sectional view of the support apparatus of the sticking apparatus in the said 1st Embodiment. The fragmentary sectional view of the support apparatus of the sticking apparatus in the said 2nd Embodiment.

Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
In addition, in 2nd Embodiment, the same code | symbol as the structural member of 1st Embodiment is attached | subjected to the same structural member as the structural member demonstrated in the following 1st Embodiment, and the structural member which has the same function, and those The description of is omitted or simplified. Moreover, in each figure, in order to make the content of the present invention easy to understand, the shape and arrangement state of each component are exaggerated. Further, for example, when directions such as up, down, left, right, front, and back are shown without giving a reference figure in the present embodiment, all are based on FIG.

[First Embodiment]
In FIG. 1, a sticking apparatus 1 sticks an adhesive sheet S to a semiconductor wafer (hereinafter referred to as “wafer”) W. Here, the adhesive sheet S has an adhesive layer AD laminated on one surface of the base sheet BS, and an original fabric R as a belt-like sheet temporarily attached to the release sheet RL via the adhesive layer AD. And wound around the outer periphery of the hollow cylindrical shaft core member 25 and prepared in advance.
And the sticking apparatus 1 is a support device 2 that supports the adhesive sheet S so that the adhesive sheet S can be fed, a feeding means 3 that feeds the adhesive sheet S, and a pressing means 4 that presses and sticks the fed adhesive sheet S to the wafer W. The moving means 5 for relatively moving the wafer W and the pressing means 4 is provided, and the overall operation is controlled by the control means 6 such as a personal computer or a sequencer.

The support device 2 includes a frame 21 and a support portion 22 provided on one surface of the frame 21. The support portion 22 includes a support shaft 221 that supports the shaft core member 25 by being inserted from one end side of the hollow portion of the shaft core member 25.
The feeding means 3 is entirely supported by the frame 21 and peels the adhesive sheet S from the release sheet RL by folding back the plurality of guide rollers 32 and 33 for guiding the original fabric R and the release sheet RL of the original fabric R. A peeling plate 34, a driving roller 36 driven by a rotating motor 35 as a driving device, a pinch roller 37 sandwiching the peeling sheet RL between the driving roller 36, and a peeling sheet 39 by a rotating motor 39 as a driving device. And a collection roller 38 for collecting RL.
The pressing means 4 is made of an elastically deformable member such as rubber or resin, is rotatably supported by a support member (not shown), and can be moved up and down by a linear motion motor (not shown) as a drive device.
The moving means 5 includes a table 51 on which a wafer W is placed and capable of sucking and holding the wafer W by suction holding means (not shown) such as a decompression pump and a vacuum ejector, and a driving device in which a slider 52 is fixed to the lower surface of the table 51. The table 51 can be moved in the left-right direction by sliding the slider 52.

Next, the support device 2 will be described in detail.
As shown in FIG. 2, the support portion 22 located on the one surface (right surface in FIG. 2) side of the frame 21 includes a support shaft 221 and a base shaft 222 extending from one end (left end in FIG. 2) of the support shaft 221. The base end shaft 222 is rotatably supported by a rotary bearing 23 provided on the other surface (the left surface in FIG. 2) of the frame 21. The frame 21 has a through hole (not shown) through which the base end shaft 222 passes. In the case of the present embodiment, the support shaft 221 is a cylindrical thick shaft portion 221 </ b> A provided on the left side in FIG. 2 so as to be in sliding contact with the inner periphery of the shaft core member 25. Further, on the tip surface 221C of the other end (the right end in FIG. 2) of the thick shaft portion 221A, a thin shaft portion 221B as a cylindrical penetrating shaft that is thinner than the thick shaft portion 221A, and a view of this thin shaft portion 221B 2 and an elastic member 224 provided at the right end of the elastic member 224, and a portion from the tip region of the thin shaft portion 221B to the right end of the elastic member 224 is formed in a tapered shape. Further, the end portion (left end portion in FIG. 2) of the support shaft 221 on the base end shaft 222 side is formed to be slightly thicker, and a step portion 221D is configured.

  In addition, a loop antenna 24 in which a conductor is wound in a loop shape is provided on the tip surface 221C of the other end (right end in FIG. 2) of the thick shaft portion 221A so as to surround the thin shaft portion 221B. A protective member for protecting the loop antenna 24 may be provided.

The shaft member 25 includes a cylindrical member 251 that is open at both ends and can be wound with the adhesive sheet S, and an intermediate wall 252 provided inside the cylindrical member 251. The intermediate wall 252 is made of an elastically deformable member such as rubber or resin, and is formed in a surface direction orthogonal to the axis D at the approximate center of the cylindrical member 251 in the axis D direction.
In addition, a wall center hole 253 that is formed around the axis D and has an inner diameter slightly larger than the diameter of the thin shaft portion 221B is provided at the center of the intermediate wall 252. Furthermore, the opening edge of the wall center hole 253 is provided with a guide portion 254 having a conical cylindrical shape whose inner diameter increases as the distance from both surfaces (the left and right surfaces in FIG. 2) of the intermediate wall 252 increases.
A plurality of air vent holes 255 for venting air between the support shaft 221 and the intermediate wall 252 are provided outside the wall center hole 253 in the intermediate wall 252.

  In addition, the thin shaft portion 221B has an insertion hole 262 through which the thin shaft portion 221B can be inserted on the right side in FIG. 2, and is provided so as to be movable along the thin shaft portion 221B. Positioning means 26 provided with a movable contact plate 261 that regulates the position of the shaft core member 25 is provided so that the shaft core member 25 can be positioned in the axial direction.

Further, a data carrier 27 including a chip and an antenna is provided on the intermediate wall 252 of the shaft core member 25. The data carrier 27 is a non-contact type capable of reading and storing data without contact and transmitting data without contact using electromagnetic waves as a communication medium. As such a non-contact type data carrier 27, for example, a so-called RF memory, RFID tag, or the like, which is constituted by an IC chip and a transmission / reception conductive coil connected to the IC chip, can be used. .
The conductive coil may be disposed at any position where the magnetic flux M generated from the loop antenna 24 passes, and is a surface of the intermediate wall 252 that is orthogonal to the axis D and can face the antenna surface of the loop antenna 24. It is preferable.

  The loop antenna 24 is connected to a reader / writer 7 that can read data stored in the data carrier 27 and write data to the data carrier 27 based on control by the control means 6. The data communicated between the data carrier 27 and the loop antenna 24 includes the type, material, product name, code, thickness, length, width, diameter, and other standard dimensions of the adhesive sheet S, Lot number, length using original fabric R, remaining length of original fabric R, quality guarantee period of adhesive sheet S, remaining number of adhesive sheets S before and after the start of delivery, number of delivered adhesive sheets S, adhesion Consultation on the adhering conditions of the adhering sheet S such as the recommended feeding speed at which the sheet S can be optimally fed out, the recommended adhering tension and the recommended pressing force capable of optimally adhering the adhesive sheet S, the adhesive sheet S and the raw material R The contact information of the window can be exemplified. And the data read from the data carrier 27 can be displayed on the monitor (not shown) provided in the sticking apparatus 1, or the sticking conditions of the sticking apparatus 1 can be set based on the read data.

In the pasting apparatus 1 described above, when the adhesive sheet S is pasted on the wafer W, first, the shaft core member 25 is supported by the support shaft 221 and the positioning means 26.
At this time, the portion from the tip region of the thin shaft portion 221B to the tip of the elastic member 224 is tapered, and the inner diameter increases as the guide portion 254 moves away from the intermediate wall 252, so that the shaft core member 25 is supported. The troublesomeness when making it possible can be reduced.
Further, since the air between the thick shaft portion 221A and the intermediate wall 252 is released from the air vent hole 255, the shaft core member 25 can be supported smoothly.
Then, the thin shaft portion 221 </ b> B is inserted into the insertion hole 262 of the movable contact plate 261 to position the shaft core member 25. Thereby, since the axial core member 25 is supported on both sides, it is supported stably without wobbling.
Since the tip region of the thin shaft portion 221B is made of an elastic member 224, the impact is reduced even if it hits the data carrier 27 or the intermediate wall 252, and the intermediate wall 252 is also made of an elastic member. Impact is reduced.
Further, when the shaft core member 25 is positioned by the stepped portion 221D of the thick shaft portion 221A and the movable contact plate 261, the loop antenna 24 and the data carrier 27 are opposed to each other. Appropriate positioning with the carrier 27 can be easily performed.
After that, the adhesive sheet S is fed out by rotating the shaft member 25 together with the support shaft 221 and the positioning means 26 by driving the rotation motor 35 and the rotation motor 39, and the adhesive sheet S is conveyed by the moving means 5. Affixed to the wafer W.

Here, the control means 6 controls the reader / writer 7 before starting the pasting, generates a magnetic flux M by passing a current through the loop antenna 24, reads the data written on the data carrier 27, and converts the read data into the read data. Based on this, the whole sticking apparatus 1 is controlled. This control is performed, for example, based on the recommended feeding speed of the adhesive sheet S in the data written in the data carrier 27, the rotational speed of the rotational motor 35 and the rotational motor 39, or the table 51 by the single-axis robot 53. It is possible to determine the moving speed at which the moving unit is moved, or to determine the amount of lift of a direct acting motor (not shown) that moves the pressing means 4 up and down based on the recommended pressing force, and to set the pressing force. At this time, since the opposing surface 271 of the data carrier 27 and the antenna surface are provided to face each other, the data carrier 27 is independent of the angle around the axis D when the shaft core member 25 is supported by the support shaft 221. Exists at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately read the data of the data carrier 27 regardless of the mounting angle of the shaft core member 25.
Further, the control means 6 can also control the reader / writer 7 to generate the magnetic flux M and write data on the data carrier 27 during rotation of the shaft member 25 after the start of sticking. Thus, even when the shaft core member 25 is rotating, the data carrier 27 is always present at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately write data to the data carrier 27. it can. Examples of data to be written at this time include the number of sheets using the adhesive sheet S, the length using the original fabric R, and the like. Note that the length using the raw fabric R can be calculated based on the number of rotations and pulses of the rotation motor 35.
When the adhesive sheet S is pasted on the predetermined number of wafers W, the reader / writer 7 can be controlled to write data to the data carrier 27. As data to be written at this time, for example, the remaining number of the adhesive sheets S after the start of feeding, which is obtained by subtracting the number of sheets using the adhesive sheets S from the remaining number of the adhesive sheets S before the start of feeding, or the remaining length of the original fabric R Examples of this can be given.
Furthermore, since the intermediate wall 252 is provided in the approximate center of the cylindrical member 251 in the direction of the axis D, the above data is appropriately read even if any opening end of the shaft core member 25 is supported by the support shaft 221. The effect can be expected.

  According to the present embodiment as described above, since the loop antenna 24 is provided on the front end surface 221C of the support shaft 221 so as to face the data carrier 27 provided on the intermediate wall 252 in the cylindrical member 251, the support antenna 221 is supported. Regardless of the angle at which the cylindrical member 251 is attached to the shaft 221, the data carrier 27 can be positioned at the position where the magnetic flux M passes, and accurate data communication with the data carrier 27 can be performed. Neat alignment is not necessary.

[Second Embodiment]
In FIG. 3, the support device 2 </ b> A constituting the sticking device 1 </ b> A (see FIG. 1) includes a support portion 22 </ b> A supported by the frame 21. The difference between the support portion 22A and the support portion 22 of the first embodiment is that the support shaft 225A is configured by only the thick shaft portion 221A, and the thin shaft portion 221B and the elastic member 224 are not provided.
Further, a loop antenna 24 is provided on the tip surface 221C of the other end (right end in FIG. 3) of the support portion 22A.
An intermediate wall 252A is provided on the cylindrical member 251 of the shaft core member 25A. A plurality of air vent holes 255 are provided on the outer edge side of the intermediate wall 252A, and one data carrier 27A is provided on the intermediate wall 252A. A conductive coil is provided on the facing surface 271A that can face the antenna surface of the data carrier 27A.
In the second embodiment, the shaft core member 25A is cantilevered by the support shaft 225A.

In the pasting apparatus 1A, since the data carrier 27A and the antenna surface are provided to face each other, the data carrier 27A does not depend on the angle around the axis D when the shaft core member 25A is supported by the support shaft 225A. Exists at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately read the data of the data carrier 27A regardless of the mounting angle of the shaft core member 25A.
Even when the shaft core member 25A is rotating, the data carrier 27A is always present at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately write data to the data carrier 27A. .

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, as shown by a two-dot chain line in FIGS. 2 and 3, the output shaft 292B of the rotation motor 291B as a driving device held by the bracket 293B is connected to the base shaft 222 via the coupling 294B, The support shafts 221 and 225A may be rotated by the rotation motor 291B.
When the support shafts 221 and 225A are provided so as not to rotate with respect to the frame 21, the shaft core members 25 and 25A may be rotatable with respect to the support shafts 221 and 225A.
Further, the intermediate walls 252 and 252A may be provided in the vicinity of the end of the cylindrical member 251. In this case, the length of the support shafts 221 and 225A is set so that the front end surfaces of the support shafts 221 and 225A are the intermediate walls 252 The length may be such that it is located in the vicinity of 252A. At this time, the thin shaft portion 221B of the support shaft 221 and the wall center hole 253 of the intermediate wall 252 need not be provided.
Further, the antenna is not limited to the loop antenna, and it is sufficient that the antenna can communicate with the data carrier by radio waves. Furthermore, the data carriers 27 and 27A may be arranged on both surfaces of the intermediate walls 252 and 252A, or one or more data carriers may be arranged on each surface.

Further, the positioning means 26 may not be provided. Further, the support shafts 221 and 225 </ b> A may have a shape whose diameter does not change in the length direction, or the elastic member 224 may not be provided.
The data carriers 27 and 27A may be capable of only storing data, or may be capable of only transmitting data.

In addition, the type and material of the adhesive sheet S in the present invention are not particularly limited. For example, the adhesive sheet S has three layers such as an intermediate layer between the base sheet BS and the adhesive layer AD and other layers. The above may be used. The adhesive sheet S may be a protective sheet, a dicing tape, a die attach film, or the like. Examples of the semiconductor wafer include a silicon semiconductor wafer and a compound semiconductor wafer. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, film, or tape. An adhesive sheet having an arbitrary use and shape can be applied. Further, the plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. As described above, as a plate-like member, not only a glass plate, a steel plate, a resin plate, and other members, but also members and articles of any form can be targeted.
The pressing means 4 may employ a pressing member made of blade material, air spray, rubber, resin, sponge, or the like.
Further, the pressing means 4 may be configured by other than those shown in the above embodiment, and the pressing means 4 is not limited as long as an adhesive sheet can be attached to the plate-like member.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

2, 2A ... support device 21 ... frame 24 ... loop antenna (antenna)
26 ... Positioning means 27, 27A ... Data carrier 221, 225A ... Support shaft 221A ... Thick shaft (support shaft)
221B ... Fine shaft (through shaft)
224 ... Elastic member 251 ... Cylindrical member 252, 252A ... Intermediate wall 253 ... Wall center hole 262 ... Insertion hole S ... Adhesive sheet (band-like sheet)

Claims (1)

In the belt-like sheet supporting device that supports the belt-like sheet wound around the both-end-opened cylindrical member so that it can be fed out,
A support shaft that supports the cylindrical member by being inserted from one end of the hollow portion of the cylindrical member;
A frame that supports the support shaft,
Inside the tubular member is provided an intermediate wall to which a data carrier capable of at least one of storing and transmitting predetermined data can be attached,
The intermediate wall is provided with a wall center hole centered on the axis of the cylindrical member,
A belt-like sheet characterized in that an antenna capable of communicating with the data carrier and a penetrating shaft penetrating through the wall center hole are provided on a front end surface of the support shaft. Support device.

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