JP5856396B2 - Belt-like sheet supporting apparatus and supporting method - Google Patents

Description

  The present invention relates to a belt-like sheet support device and a support method.

Conventionally, in a pasting device for feeding a belt-like adhesive sheet and sticking it to a wafer, a data carrier is provided on the shaft core member around which the adhesive sheet is wound, and the data written on the data carrier is read to appropriately set the pasting conditions. A configuration to be set is known (see, for example, Patent Document 1).
In the configuration described in Patent Document 1, a data carrier is provided on the inner surface of the shaft member, and a tape data read / write device is provided on the unwinding shaft on which the shaft member is mounted. When the shaft core member is attached to the unwinding shaft, the alignment between the data carrier and the tape data read / write device is accurately performed by the alignment portion of the shaft core member.

JP 2007-12807 A

  However, in the configuration described in Patent Document 1, if the data carrier is separated from the tape data read / write device, data cannot be read or written (data communication). Therefore, there is a problem that it is necessary to accurately perform the positioning of the shaft member, and the mounting work of the shaft core member is troublesome.

  An object of the present invention is that when a shaft core member around which a belt-like sheet is wound and a data carrier is supported by a support shaft, accurate alignment for appropriately performing data communication with the data carrier is unnecessary. An object of the present invention is to provide a belt sheet support device and a support method.

In order to achieve the above object, a belt-like sheet support device according to the present invention is a belt-like sheet support device that supports a belt-like sheet wound around a hollow cylindrical shaft core member so that the belt-like sheet can be fed out. A support shaft that can be inserted into the hollow portion; and a frame that supports the support shaft. The shaft core member is provided with a data carrier capable of storing and transmitting predetermined data. Is provided with an antenna arrangement member having an antenna surface orthogonal to the axis of the support shaft, and an adjusting means for adjusting the position of the antenna arrangement member with respect to the shaft core member along the axis of the support shaft , wherein the antenna surface, the loop antenna wound in a loop shape surrounding the axis are provided, that it adopts the configuration that.
Another belt-like sheet support device of the present invention is a belt-like sheet support device that supports a belt-like sheet wound around a hollow cylindrical shaft core member so that the belt-like sheet can be fed out, and can be inserted into the hollow portion of the shaft core member. A support shaft; and a frame for supporting the support shaft, wherein the shaft core member is provided with a data carrier capable of storing and transmitting predetermined data, and the frame includes the support shaft. An antenna surface orthogonal to the axis is provided, and the antenna surface is provided with a loop antenna wound in a loop shape surrounding the axis, and a protection member covering the loop antenna, and the protection member includes the shaft core A configuration is adopted in which positioning of the support shaft in the belt-like sheet in the axial direction is performed by contacting the member.

On the other hand, the method for supporting a belt-like sheet of the present invention is a method for supporting a belt-like sheet that supports a belt-like sheet wound around a hollow cylindrical shaft core member so that the belt-like sheet can be fed out. Using a support shaft and a frame that supports the support shaft, the shaft core member is provided with a data carrier capable of storing and transmitting predetermined data, and the frame is orthogonal to the axis of the support shaft An antenna arrangement member having an antenna surface is provided, a loop antenna wound in a loop shape surrounding the axis is provided on the antenna surface, and the support shaft is inserted into a hollow portion of the shaft core member to thereby form the shaft core member The position of the antenna arrangement member with respect to the supported shaft core member is adjusted along the axis of the support shaft .

According to the present invention as described above, the loop antenna surrounding the axis is provided on the antenna surface orthogonal to the axis of the support shaft, and the shaft core member provided with the data carrier is supported by the support shaft. Therefore, no matter what angle the shaft core member is attached to the support shaft, the data carrier can be positioned at the passage position of the magnetic flux generated substantially parallel to the axis of the support shaft. Accurate alignment for proper communication is not necessary. In addition, if the position of the antenna arrangement member having the antenna surface can be adjusted along the axis of the support shaft, the distance between the data carrier and the loop antenna can be adjusted so that data communication can be appropriately performed as necessary. Can be set.

The side view of the sticking device concerning one embodiment of the present invention. The fragmentary sectional view of the support apparatus of the said sticking apparatus. The perspective view of the principal part of FIG. The fragmentary sectional view of the support device concerning the modification of the present invention. The fragmentary sectional view of the support device concerning other modifications of the present invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In each of the drawings, the shape and arrangement of each component are exaggerated for easy understanding of the contents of the present invention. Further, for example, when directions such as up, down, left, right, front, and back are shown without giving a reference figure in the present embodiment, all are based on FIG.
In FIG. 1, a sticking apparatus 1 sticks an adhesive sheet S to a semiconductor wafer (hereinafter referred to as “wafer”) W. Here, the adhesive sheet S has an adhesive layer AD laminated on one surface of the base sheet BS, and an original fabric R as a belt-like sheet temporarily attached to the release sheet RL via the adhesive layer AD. And wound around the outer periphery of the hollow cylindrical shaft core member 24 and prepared in advance.
And the sticking apparatus 1 is a support device 2 that supports the adhesive sheet S so that the adhesive sheet S can be fed, a feeding means 3 that feeds the adhesive sheet S, and a pressing means 4 that presses and sticks the fed adhesive sheet S to the wafer W. The moving means 5 for relatively moving the wafer W and the pressing means 4 is provided, and the overall operation is controlled by the control means 6 such as a personal computer or a sequencer.

The support device 2 includes a frame 21 and a support portion 22 provided on one surface of the frame 21. The support portion 22 includes a support shaft 221 that supports the shaft core member 24 by being inserted from one end side of the hollow portion of the shaft core member 24.
The feeding means 3 is entirely supported by the frame 21 and peels the adhesive sheet S from the release sheet RL by folding back the plurality of guide rollers 32 and 33 for guiding the original fabric R and the release sheet RL of the original fabric R. A peeling plate 34, a driving roller 36 driven by a rotating motor 35 as a driving device, a pinch roller 37 sandwiching the peeling sheet RL between the driving roller 36, and a peeling sheet 39 by a rotating motor 39 as a driving device. And a collection roller 38 for collecting RL.
The pressing means 4 is made of an elastically deformable member such as rubber or resin, is rotatably supported by a support member (not shown), and can be moved up and down by a linear motion motor (not shown) as a drive device.
The moving means 5 includes a table 51 on which a wafer W is placed and capable of sucking and holding the wafer W by suction holding means (not shown) such as a decompression pump and a vacuum ejector, and a driving device in which a slider 52 is fixed to the lower surface of the table 51. The table 51 can be moved in the left-right direction by sliding the slider 52.

Next, the support device 2 will be described in detail.
As shown in FIGS. 2 and 3, the support portion 22 located on the one surface (the right surface in FIG. 2) side of the frame 21 includes a columnar support shaft 221 and one end of the support shaft 221 (the left end in FIG. 2). And the base end shaft 222 is rotatably supported by a rotary bearing 23 provided on the other surface of the frame 21 (left surface in FIG. 2). The frame 21 has a through hole (not shown) through which the base end shaft 222 passes.

  On the frame 21 side of the support shaft 221, a fixing plate 251 that restricts the movement of the shaft core member 24 inserted into the support shaft 221 in the left direction in FIG. 2 and a support plate 221 that is movable along the support shaft 221 are provided. In addition, a positioning means 25 provided with a movable abutting plate 252 that restricts the movement of the clamper 253 by tightening the clamper 253 is provided.

The shaft core member 24 is provided with a chip-shaped data carrier 26. The data carrier 26 is a non-contact type capable of reading and storing data in a non-contact manner and transmitting data in a non-contact manner using an electromagnetic wave not affected by the material of the shaft core member 24 as a communication medium. It is. As such a non-contact type data carrier 26, for example, a so-called RF memory, RFID tag or the like composed of an IC chip and a transmitting / receiving conductive coil connected to the IC chip can be used.
The conductive coil may be disposed at any position where a magnetic flux M generated from a loop antenna 274, which will be described later, passes, and may be a facing surface 261 facing the outer peripheral surface of the support shaft 221 or a support. The orthogonal surface 262 orthogonal to the outer peripheral surface of the shaft 221 may be used.

  An antenna unit 27 is attached to one surface of the frame 21 via an adjusting unit 28. The antenna unit 27 includes a substrate 271 as an annular antenna arrangement member having a substrate opening 272 having an inner diameter larger than that of the support shaft 221. One surface of the substrate 271 is an antenna surface 273 on which a circuit (not shown) is formed. The antenna surface 273 is provided with a loop antenna 274 formed by winding a conductor in a loop shape. A protective member that protects the loop antenna 274 may be provided.

The adjusting means 28 includes two bolts 281 that are fixed to the surface of the substrate 271 opposite to the antenna surface 273 and inserted into the frame 21, and four nuts that are screwed into the respective bolts 281. 282, and the position of the antenna unit 27 along the axis C of the support shaft 221 can be adjusted.
In this embodiment, the substrate 271 has the base shaft 222 inserted through the substrate opening 272, the axis C of the support shaft 221 and the antenna surface 273 are orthogonal, and the axis C and the center of the loop antenna 274 coincide. The position has been adjusted to.

  The antenna unit 27 is connected to a reader / writer 7 that can read data stored in the data carrier 26 and write data to the data carrier 26 based on control by the control means 6. The data communicated between the data carrier 27 and the loop antenna 24 includes the type, material, product name, code, thickness, length, width, diameter, and other standard dimensions of the adhesive sheet S, Lot number, length using original fabric R, remaining length of original fabric R, quality guarantee period of adhesive sheet S, remaining number of adhesive sheets S before and after the start of delivery, number of delivered adhesive sheets S, adhesion Consultation on the adhering conditions of the adhering sheet S such as the recommended feeding speed at which the sheet S can be optimally fed out, the recommended adhering tension and the recommended pressing force capable of optimally adhering the adhesive sheet S, the adhesive sheet S and the raw material R The contact information of the window can be exemplified. And the data read from the data carrier 26 can be displayed on the monitor which is not shown in figure provided in the sticking apparatus 1, and the sticking conditions of the said sticking apparatus 1 can be set based on the read data.

In the pasting apparatus 1 described above, when the adhesive sheet S is pasted on the wafer W, first, the shaft core member 24 is supported by the support shaft 221 and the shaft core member 24 is positioned by the positioning means 25 and then necessary. By adjusting the adjustment means 28 according to the above, the distance between the antenna unit 27 and the data carrier 26 is set to a length that can appropriately read and write data.
Then, by driving the rotation motor 35 and the rotation motor 39, the shaft core member 24 is rotated together with the support shaft 221 to feed out the adhesive sheet S, and the adhesive sheet S is attached to the wafer W conveyed by the moving means 5. To do.

  Here, the control means 6 controls the reader / writer 7 before starting the application, generates a magnetic flux M by passing a current through the loop antenna 274, reads the data written on the data carrier 26, and converts the read data into the read data. Based on this, the whole sticking apparatus 1 is controlled. This control is performed, for example, based on the recommended feeding speed of the adhesive sheet S in the data written in the data carrier 26, the rotational speed of the rotational motor 35 and the rotational motor 39, or the table 51 by the single-axis robot 53. It is possible to determine the moving speed at which the moving unit is moved, or to determine the amount of lift of a direct acting motor (not shown) that moves the pressing means 4 up and down based on the recommended pressing force, and to set the pressing force. At this time, since the position of the antenna portion 27 is adjusted so that the axis C of the support shaft 221 and the antenna surface 273 are orthogonal, the angle around the axis C when the shaft core member 24 is supported by the support shaft 221 is set. Regardless, the data carrier 26 is present at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately read the data on the data carrier 26 regardless of the mounting angle of the shaft core member 24.

The control means 6 can also write the data on the data carrier 26 by controlling the reader / writer 7 to generate the magnetic flux M during the rotation of the shaft core member 24 after the start of sticking. Thus, even when the shaft core member 24 is rotating, the data carrier 26 is always present at the position where the magnetic flux M passes, and the reader / writer 7 can appropriately write data to the data carrier 26. it can. Examples of data to be written at this time include the number of sheets using the adhesive sheet S, the length using the original fabric R, and the like. Note that the length using the raw fabric R can be calculated based on the number of rotations and pulses of the rotation motor 35.
When the adhesive sheet S is pasted on the predetermined number of wafers W, the reader / writer 7 can be controlled to write data to the data carrier 26. As data to be written at this time, for example, the remaining number of the adhesive sheets S after the start of feeding, which is obtained by subtracting the number of sheets using the adhesive sheets S from the remaining number of the adhesive sheets S before the start of feeding, or the remaining length of the original fabric R Examples of this can be given.

  According to the present embodiment as described above, the loop antenna 274 that surrounds the axis C is provided on the antenna surface 273 orthogonal to the axis C of the support shaft 221, so that the angle of the axis relative to the support shaft 221 can be increased. Even if the core member 24 is attached, the data carrier 26 can be positioned at the passing position of the magnetic flux M, and accurate alignment for appropriately performing data communication with the data carrier 26 becomes unnecessary.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, as shown by a two-dot chain line in FIG. 2, an output shaft 292A of a rotation motor 291A as a driving device held by a bracket 293A is connected to a base end shaft 222 via a coupling 294A, and the rotation motor The support shaft 221 may be rotated by 291A.
Alternatively, a predetermined region on the surface of the frame 21 on the support shaft 221 side may be used as an antenna surface, and the loop antenna 274 may be provided on the antenna surface.

Moreover, it is good also as a support apparatus 2A as shown in FIG. In this support device 2A, a protective member 275A is provided on the antenna surface 273 of the substrate 271 constituting the antenna unit 27A so as to cover the loop antenna 274, and the support shaft 221 is inserted into the substrate opening 272 of the substrate 271. The positioning is performed by the adjusting means 28. Further, the shaft core member 24 and the original fabric R are positioned by the protective member 275A and the movable contact plate 252A.
In such a configuration, the rotation of the rotation motor 35 and the rotation motor 39 causes the shaft core member 24 and the original fabric R to rotate together with the support shaft 221, while the substrate 271 does not rotate. However, since the loop antenna 274 is covered with the protective member 275A, the loop antenna 274 can be prevented from being damaged, and data can be written to and read from the data carrier 26. There is no adverse effect.
Furthermore, it is good also as a support apparatus 2B as shown in FIG. In this support device 2B, the adhesive sheet S is wound around the shaft member 24B except for the left end side portion in FIG. 5, and the data carrier 26 is wound around the portion where the adhesive sheet S is not wound. Is provided.
The substrate 271B constituting the antenna portion 27B includes an annular portion having the antenna surface 273 and a cylindrical portion standing in a cylindrical shape from the outer edge of the annular portion. The cylindrical portion of the substrate 271B is provided so as to surround the portion of the shaft core member 24B where the data carrier 26 is provided (the portion where the adhesive sheet S is not provided), and the inner surface of the cylindrical portion includes the loop antenna 277B. An outer peripheral surface 276B is provided. Further, the annular portion of the substrate 271 </ b> B has a function of positioning the shaft core member 24.

  2, 4, and 5, when the support shaft 221 is provided so as not to rotate with respect to the frame 21, the shaft core members 24, 24 </ b> B may be rotatable with respect to the support shaft 221. . 2, 4, and 5, the antenna portions 27, 27A, and 27B may be provided on the movable contact plate 252 and 252A side.

Furthermore, the center of the loop antenna 274 and the axis C of the support shaft 221 do not have to coincide with each other.
Further, the data carrier 26 may be arranged so as to be exposed from the outer surface of the shaft core members 24, 24 B, or not to be exposed from any of the inner surface and the outer surface. It may be arranged at any position along the axial direction.
Furthermore, the antenna is not limited to the loop antenna, and it is sufficient that the antenna can communicate with the data carrier by radio waves.
The data carrier 26 may be one that can only store data, or one that can only transmit data.

In addition, the type and material of the adhesive sheet S in the present invention are not particularly limited. For example, the adhesive sheet S has three layers such as an intermediate layer between the base sheet BS and the adhesive layer AD and other layers. The above may be used. The adhesive sheet S may be a protective sheet, a dicing tape, a die attach film, or the like. Examples of the semiconductor wafer include a silicon semiconductor wafer and a compound semiconductor wafer. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, film, or tape. An adhesive sheet having an arbitrary use and shape can be applied. Further, the plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. As described above, as a plate-like member, not only a glass plate, a steel plate, a resin plate, and other members, but also members and articles of any form can be targeted.
Further, the pressing means 4 may be composed of other than those shown in the above embodiment, and the pressing means 4 is not limited in any way as long as an adhesive sheet can be attached to a plate-like member. A pressing member made of a material, air spray, rubber, resin, sponge or the like can be employed.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

2, 2A, 2B ... support device 21 ... frame 24, 24B ... shaft core member 26 ... data carrier 28 ... adjustment means 221 ... support shaft 273 ... antenna surface 274, 277B ... loop antenna 276B ... outer peripheral surface S ... adhesive sheet (band-like) Sheet)

Claims (3)

In the support device for the belt-like sheet that supports the belt-like sheet wound around the hollow cylindrical shaft core member so that it can be fed out,
A support shaft that can be inserted into the hollow portion of the shaft core member;
A frame that supports the support shaft,
The shaft core member is provided with a data carrier capable of at least one of storing and transmitting predetermined data,
The frame includes an antenna arrangement member having an antenna surface orthogonal to the axis of the support shaft, and adjustment means for adjusting the position of the antenna arrangement member with respect to the shaft core member along the axis of the support shaft. Provided,
A device for supporting a belt-shaped sheet, wherein a loop antenna wound in a loop shape surrounding the axis is provided on the antenna surface. In the support device for the belt-like sheet that supports the belt-like sheet wound around the hollow cylindrical shaft core member so that it can be fed out,
  A support shaft that can be inserted into the hollow portion of the shaft core member;
  A frame that supports the support shaft,
  The shaft core member is provided with a data carrier capable of at least one of storing and transmitting predetermined data,
  The frame is provided with an antenna surface orthogonal to the axis of the support shaft,
  The antenna surface is provided with a loop antenna wound in a loop surrounding the axis, and a protective member covering the loop antenna,
  The belt-shaped sheet supporting device, wherein the protection member positions the support shaft in the axial direction of the belt-shaped sheet by the shaft core member coming into contact therewith. In the support method of the belt-like sheet that supports the belt-like sheet wound around the hollow cylindrical shaft core member so that it can be fed out,
A support shaft that can be inserted into the hollow portion of the shaft core member;
Using a frame that supports the support shaft,
The shaft core member is provided with a data carrier capable of at least one of storing and transmitting predetermined data,
The frame is provided with an antenna arrangement member having an antenna surface orthogonal to the axis of the support shaft,
Provided on the antenna surface a loop antenna wound in a loop surrounding the axis,
The support shaft is inserted into a hollow portion of the shaft core member to support the shaft core member, and the position of the antenna arrangement member with respect to the supported shaft core member is adjusted along the axis of the support shaft. A method for supporting a belt-like sheet.

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