JP2015005561A - Sheet sticking apparatus and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking apparatus and method, capable of sticking an adhesive sheet to an adherend so that an orientation of the adherent can be recognized by another apparatus.SOLUTION: A sheet sticking apparatus 1 includes: supply means 2 for supplying an adhesive sheet AS having an orientation specifying part capable of specifying an orientation of an adherend WF; orientation specifying part detection means 3 for detecting the orientation specifying part; adhesive sheet positioning means 4 for positioning the adhesive sheet AS so that the orientation specifying part is positioned to a predetermined position having predetermined regularity with respect to an adherend surface WA of the adherend WF, on the basis of the detection result by the orientation specifying part detection means 3; and pressing means 5 for pressing the adhesive sheet AS to the adherend surface WA to stick the adhesive sheet AS to the adherend surface WA.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

2. Description of the Related Art Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 is provided with a supply means for feeding an adhesive sheet so as to face a wafer (adhered body) having a notch (reference portion) formed on the outer edge, and the adhesive sheet is pressed against the wafer for pasting. Pressing means for cutting and cutting means for cutting the adhesive sheet, and the adhesive sheet affixed to the wafer is cut along the outer edge of the wafer.

JP 2011-198979 A

By the way, the adherend on which the adhesive sheet is pasted by the conventional sheet pasting apparatus as described in Patent Document 1 is used as a reference by the detection means even after being transported to another apparatus such as a grinding apparatus or a cutting apparatus. The part is detected, the direction is specified based on the position of the reference part, and various processes are performed.
However, when a crack or damage occurs in the adherend, the detection means of another device misrecognizes the crack or damage as a reference part, and the orientation of the adherend cannot be specified. There is an inconvenience that the treatment of the adherend is hindered.
In addition, although the method of forming a notch along the reference | standard part in the adhesive sheet stuck with the sheet sticking apparatus of patent document 1 and detecting the said notch with the detection means of another apparatus is also considered, an adhesive sheet is transparent or semi-transparent In some cases, the incision of the adhesive sheet may not be detected, and the above inconvenience may not be completely eliminated.

  An object of the present invention is to provide a sheet sticking device and a sticking method capable of sticking an adhesive sheet to an adherend so that the orientation of the adherend can be recognized by another device.

  The sheet sticking apparatus of the present invention includes a supply unit that supplies an adhesive sheet having an orientation specifying unit that can specify the orientation of an adherend, an orientation specifying unit detection unit that detects the orientation specifying unit, and the orientation specifying An adhesive sheet positioning means for positioning the adhesive sheet based on the detection result of the part detecting means so that the orientation specifying part is at a predetermined position having a predetermined law with respect to the adherend surface of the adherend; And a pressing unit that presses and adheres the adhesive sheet to the adherend surface.

  In the sheet sticking device of the present invention, the orientation specifying part detecting means includes first detecting means for detecting the position of the orientation specifying part on one end side of the adhesive sheet, and the position of the orientation specifying part on the other end side of the adhesive sheet. Second adhesive detecting means, and the adhesive sheet positioning means, based on a detection result of the first detection means, a first positioning means for positioning a position of the azimuth specifying portion on the one end side, and the first It is preferable to include a second positioning unit that positions the position of the azimuth specifying unit on the other end side based on the detection result of the second detecting unit.

  The sheet sticking method of the present invention includes a step of supplying an adhesive sheet having an orientation specifying portion capable of specifying the orientation of an adherend, a step of detecting the orientation specifying portion, and a step of detecting the orientation specifying portion. A step of positioning the adhesive sheet so that the orientation specifying portion is at a predetermined position having a predetermined law with respect to the adherend surface of the adherend based on the detection result of And a step of pressing and adhering to the adherend surface.

According to the present invention as described above, since the adhesive sheet having the orientation specifying portion is positioned with a predetermined law with respect to the adherend surface, the orientation of the adherend can be recognized by another apparatus. The adhesive sheet can be attached to the adherend.
Moreover, if the positions of the orientation specifying portions on one end side and the other end side of the adhesive sheet are positioned, the positioning accuracy of the adhesive sheet can be improved.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. The perspective view which shows an adhesive sheet and a to-be-adhered body.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, the Y axis, and the Z axis in this specification are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the arrow direction of the Y axis, and “Back” is the opposite direction.

  1 and 2, the sheet sticking apparatus 1 includes a supply unit 2 that supplies an adhesive sheet AS having an orientation specifying unit PD that can specify the orientation of the wafer WF, and an orientation specifying unit detection that detects the orientation specifying unit PD. Based on the detection result of the means 3 and the direction specifying part detecting means 3, the direction specifying part PD is set at a predetermined position having a predetermined law with respect to the adherend surface WA of the wafer WF as the adherend. Adhesive sheet positioning means 4 for positioning the adhesive sheet AS, pressing means 5 for pressing and adhering the adhesive sheet AS to the adherend surface WA, and a reference for detecting a notch VN as a reference portion indicating the crystal orientation of the wafer WF A part detecting means 6, a supporting means 7 for supporting the wafer WF, a conveying means 8 for conveying the wafer WF, and a cutting means 9 for cutting the adhesive sheet AS are provided. Note that the adhesive sheet AS is formed by laminating an adhesive AD layer on one surface of the base sheet BS, and as shown in FIG. 2, the orientation specifying portion PD is formed by a straight line along the feeding direction of the adhesive sheet AS. Yes.

  The supply means 2 places the adhesive sheet AS between a support roller 21 that supports the adhesive sheet AS, a guide roller 22 that guides the adhesive sheet AS, and a drive roller 23 that is rotated by a rotation motor 23A as a drive device. A pinch roller 27 that sandwiches the adhesive sheet AS between a pinch roller 24 that is sandwiched and a driving roller 26 that is rotated by a rotation motor 26A serving as a driving device, and a plurality of sheets that guide an unnecessary sheet US that is generated by cutting the adhesive sheet AS. The guide roller 28 and a collection roller 29 that is driven by a rotation motor 29A as a drive device and collects the unnecessary sheet US are provided. The rollers 21 to 24 are supported by the frame 2A, the rollers 26 and 27 are supported by the frame 2B, and the rollers 28 and 29 are supported by the frame 2C.

  The direction specifying part detecting means 3 includes a first detecting means 31 for detecting the position of the direction specifying part PD on one end side (left side) of the adhesive sheet AS, and an orientation on the other end side (right side) of the adhesive sheet AS. 2nd detection means 32 which detects the position of specific part PD. Examples of the first detection means 31 and the second detection means 32 include non-contact sensors such as optical sensors and ultrasonic sensors, contact sensors such as limit switches, pressure sensors, and imaging means such as cameras.

  The adhesive sheet positioning means 4 is a first positioning means for positioning the position of the azimuth specifying part PD on one end side based on the detection result of the first detection means 31, and a linear motor 41 as a driving device, and a second detection. Based on the detection result of the means 32, a second positioning means for positioning the position of the orientation specifying part PD on the other end side and a linear motor 42 as a driving device are provided. The frame 2A is supported on the slider 41A of the linear motor 41. The linear motor 42 is supported by a slider 25A of a linear motor 25 as a driving device, and the frame 2B is supported by the slider 42A.

  The pressing unit 5 includes a linear motor 51 as a driving device supported by the slider 25 </ b> B of the linear motor 25, and a pressing roller 52 supported by the slider 51 </ b> A of the linear motor 51.

  The reference part detection means 6 is configured by a non-contact type sensor such as an optical sensor or an ultrasonic sensor, a contact type sensor such as a limit switch, a pressure sensor, an imaging means such as a camera, or the like.

  The support means 7 includes an outer table 71 having a recess 72 recessed from the upper surface 71A side, and an inner surface having a support surface 73A that is provided in the recess 72 and can be sucked and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector. And a table 73.

  The conveying means 8 is detachably provided on the articulated robot 81 as a driving device and the tip (working arm) of the articulated robot 81, and can be connected to a decompression means (not shown) such as a decompression pump or a vacuum ejector. 82. The multi-joint robot 81 is a so-called 6-axis robot that can be displaced at any position and at any angle within the working range.

  The cutting means 9 includes an articulated robot 81 and a cutter tool 92 having a cutter blade 91 that is detachably provided at the tip (working arm) of the articulated robot 81.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, the adhesive sheet AS is set as shown by a solid line in FIG. Next, the transfer unit 8 drives the articulated robot 81 and a decompression unit (not shown), and the suction tool 82 sucks and holds the wafer WF, and the reference unit detection unit 6 detects the outer edge of the wafer WF and the notch VN. Next, the transfer unit 8 drives the articulated robot 81, and based on the detection result of the reference unit detection unit 6, the position of the center WC of the wafer WF overlaps the center of the support surface 73A, and the center of the notch VN is The wafer WF is placed on the support surface 73A of the inner table 73 so as to be positioned on the right side of a straight line parallel to the X axis passing through the center of the support surface 73A.

  Next, the direction specifying unit detection unit 3 drives the first detection unit 31 and the second detection unit 32 to detect the front-rear direction position of the direction specifying unit PD. Next, the adhesive sheet positioning means 4 drives the linear motors 41 and 42 so that the orientation specifying portion PD is at a predetermined position with a predetermined law with respect to the adherend surface WA, that is, the center of the notch VN. The adhesive sheet AS is positioned so that the orientation specifying portion PD overlaps the straight line WL passing through the VC and the center WC of the wafer WF.

  Next, the pressing means 5 drives the linear motor 25 to move the pressing roller 52 while rolling it on the adhesive sheet AS to the position indicated by the two-dot chain line in FIG. 1 to press the adhesive sheet AS against the surface of the wafer WF. And paste it. After that, the cutting means 9 drives the articulated robot 81, exchanges the tool from the suction tool 82 to the cutter tool 92, and moves the cutter blade 91 along the outer edge of the wafer WF, whereby the adhesive sheet AS is removed from the wafer WF. Cut along the outer edge.

  Next, after the transfer means 8 drives the articulated robot 81 and exchanges the tool from the cutter tool 92 to the suction tool 82, the decompression means (not shown) is driven, and the wafer WF to which the adhesive sheet AS is attached is sucked into the suction tool. Adsorbed and held at 82 and transported to another device used in a separate process. In another apparatus, even when the notch VN cannot be detected, the adhesive sheet AS is attached to the wafer WF with a predetermined law, that is, the orientation specifying portion PD is superimposed on the straight line WL. If the law property is stored in advance, the other apparatus can recognize the orientation of the wafer WF, for example, the position of the notch VN, via the orientation specifying unit PD.

  Next, the pressing means 5 drives the linear motor 51 and raises the pressing roller 52. Next, the supply means 2 drives the rotation motor 26A and the linear motor 25 and moves the drive roller 26 to the position indicated by the two-dot chain line in FIG. 1 to peel off the unnecessary sheet US from the upper surface 71A of the outer table 71. To do. Then, the supply means 2 drives the linear motor 25 and the rotation motors 23A and 29A, and moves the slider 25A to the right in a state where the rotation of the drive roller 26 is stopped, so that the unused portion of the adhesive sheet AS is removed. The unwinding sheet US is wound up by the collection roller 29 while being fed out. Thereafter, the pressing means 5 drives the linear motors 25 and 51 to move the pressing roller 52 to the position indicated by the solid line in FIG. 1, and thereafter the same operation as described above is repeated.

  According to the present embodiment as described above, since the adhesive sheet AS having the orientation specifying portion PD is positioned with a predetermined law with respect to the adherend surface WA, the orientation of the wafer WF can be recognized by another apparatus. In this way, the adhesive sheet AS can be attached to the wafer WF.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, in order to position the adhesive sheet AS with a predetermined law with respect to the adherend surface WA, in addition to the above embodiment, for example, the orientation specifying unit PD is centered on the center WC of the wafer WF with respect to the straight line WL. For example, a predetermined angle such as 10 degrees, 30 degrees, 45 degrees, and 90 degrees may be shifted in the clockwise direction or the counterclockwise direction. In short, the predetermined law is stored in advance in another device. As long as the other apparatus can recognize the orientation of the wafer WF via the orientation specifying unit PD.
Further, the adhesive sheet positioning unit 4 enables the inner table 73 to rotate and move in both the X and Y axis directions, and after the wafer WF is placed on the support surface 73A by the transfer unit 8, the orientation is specified. The orientation detection unit PD may be detected by the part detection unit 3, and the inner table 73 may be rotated or moved to position the adhesive sheet AS and the wafer WF.

  The supply means 2 may supply the adhesive sheet by peeling the adhesive sheet from the original fabric in which a plurality of adhesive sheets having a predetermined shape are temporarily attached to the release sheet, or supply a single-layer adhesive sheet on which the release sheet is not temporarily attached. May be.

  The pressing means 5 may employ a pressing member made of a blade material, rubber, resin, sponge, or the like instead of the pressing roller 52, or may be configured to press by air blowing.

  The cutting means 9 can adopt any configuration capable of cutting the adhesive sheet AS, for example, a laser cutter or a device that can be cut by water pressure or wind pressure, or a rotary cutter that rotates and cuts. Other cutter blades may be employed. Further, the cutting means 9 may be configured separately from the conveying means 8 and independent. Further, the adhesive sheet AS may be cut into a V shape along the notch VN by the cutting means 9.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend are not particularly limited. The adhesive sheet AS is, for example, a single layer having only an adhesive AD layer, an intermediate layer between the base sheet BS and the adhesive AD layer, a cover layer on the upper surface of the base sheet BS, etc. 3 It may be a layer or more, or a so-called double-sided adhesive sheet capable of peeling the base sheet BS from the adhesive AD layer. Or a single layer or multiple layers without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

Further, the configuration of the orientation specifying part PD is not particularly limited, and ink, paint, varnish, adhesive, paper, cloth, thread, resin, etc. are provided between the base sheet BS and the adhesive AD layer. Or may be formed in a concave or convex shape on the surface of the base sheet BS where the adhesive AD is laminated or on the opposite surface, or the adhesive AD layer has different characteristics. May be formed adjacent to each other in the in-plane direction of the base material sheet BS, or the surface or the inside of the base material sheet BS on the side of the adhesive AD layer or the base of the adhesive agent AD layer by laser or ultrasonic waves. You may form in the boundary of the surface by the side of material sheet BS, the inside, or base material sheet BS and adhesive agent AD layer. When the orientation specifying part PD is formed by a laser or ultrasonic wave, the base sheet BS and the adhesive AD layer are modified, altered, melted, or burned at the focal position of the output energy. By causing the color to develop, a chemical change can be caused to those constituting the adhesive sheet AS to form the orientation specifying portion PD.
Furthermore, the orientation specifying portion PD may be a planar shape having a narrow portion indicating an orientation such as an arrow, a V-shape, and a gradually narrowing straight line, or a point, a circle such as a perfect circle or an ellipse, or a cross A plurality of arbitrary planar shapes such as polygons, letters, numbers, and figures may be arranged in a predetermined direction. The point is that, regardless of the shape or shape of the orientation specifying portion PD, the adhesive sheet AS is positioned with a predetermined law with respect to the adherend surface WA, and the adhesive sheet is attached to the wafer WF with the predetermined law. It is only necessary that when the AS is attached, the orientation of the wafer WF can be recognized by another apparatus via the orientation specifying unit PD.

  Further, in the case of the wafer WF, the reference portion may be an orientation mark such as an orientation flat, a manufacturing number stamped on the wafer WF, a circuit pattern, a kerf, a street, or the like. It will not be limited at all as long as it serves as a mark that allows the position of the adherend to be specified with good characteristics.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the adhesive sheet positioning means positions the adhesive sheet with the predetermined law with respect to the adherend surface based on the detection result of the orientation specifying unit detection means, the common technical knowledge at the beginning of the application In view of the above, there is no limitation as long as it is within the technical scope (the description of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 Sheet sticking apparatus 2 Supply means 3 Orientation specific part detection means 4 Adhesive sheet positioning means 5 Pressing means 31 First detection means 32 Second detection means 41 Linear motor (first positioning means)
42 Linear motor (second positioning means)
AS Adhesive sheet PD Orientation specifying part WA Adhered surface WF Wafer (Adherent)

Claims (3)

Supply means for supplying an adhesive sheet having an orientation specifying portion capable of specifying the orientation of the adherend;
Azimuth specifying unit detecting means for detecting the azimuth specifying unit;
An adhesive sheet that positions the adhesive sheet based on the detection result of the azimuth specifying portion detection means so that the azimuth specifying portion is at a predetermined position having a predetermined law with respect to the adherend surface of the adherend. Positioning means;
A sheet sticking device, comprising: a pressing unit that presses and sticks the adhesive sheet to the adherend surface. The azimuth specifying part detection means includes first detection means for detecting the position of the azimuth specifying part on one end side of the adhesive sheet, and second detection means for detecting the position of the azimuth specifying part on the other end side of the adhesive sheet; With
The adhesive sheet positioning means is based on the detection result of the first detection means, based on the detection result of the first positioning means for positioning the orientation specifying portion on the one end side, and the detection result of the second detection means, The sheet sticking device according to claim 1, further comprising: a second positioning unit that positions a position of the orientation specifying unit on the other end side. Supplying an adhesive sheet having an orientation specifying portion capable of specifying the orientation of the adherend;
Detecting the orientation specifying unit;
Based on the detection result of the step of detecting the azimuth specifying portion, the adhesive sheet is positioned so that the azimuth specifying portion is at a predetermined position having a predetermined law with respect to the adherend surface of the adherend. Process,
And a step of affixing the adhesive sheet by pressing it onto the adherend surface.

Images