JP5843491B2 - 塗布液、光学部品の製造方法および撮影光学系 - Google Patents

塗布液、光学部品の製造方法および撮影光学系 Download PDF

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Publication number
JP5843491B2
JP5843491B2 JP2011135603A JP2011135603A JP5843491B2 JP 5843491 B2 JP5843491 B2 JP 5843491B2 JP 2011135603 A JP2011135603 A JP 2011135603A JP 2011135603 A JP2011135603 A JP 2011135603A JP 5843491 B2 JP5843491 B2 JP 5843491B2
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Japan
Prior art keywords
film
coating
fluorine
magnesium
coating solution
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Expired - Fee Related
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JP2011135603A
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English (en)
Japanese (ja)
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JP2012025937A5 (enExample
JP2012025937A (ja
Inventor
田中　博幸
博幸 田中
小林　本和
本和 小林
榊原　悌互
悌互 榊原
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Canon Inc
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Canon Inc
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Priority to JP2011135603A priority Critical patent/JP5843491B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C33/00—Unsaturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
    • C07C33/02—Acyclic alcohols with carbon-to-carbon double bonds
    • C07C33/025—Acyclic alcohols with carbon-to-carbon double bonds with only one double bond
    • C07C33/035—Alkenediols
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/003—Compounds containing elements of Groups 2 or 12 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
    • C07C39/02—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring monocyclic with no unsaturation outside the aromatic ring
    • C07C39/08—Dihydroxy benzenes; Alkylated derivatives thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Paints Or Removers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
JP2011135603A 2010-06-24 2011-06-17 塗布液、光学部品の製造方法および撮影光学系 Expired - Fee Related JP5843491B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011135603A JP5843491B2 (ja) 2010-06-24 2011-06-17 塗布液、光学部品の製造方法および撮影光学系

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010144280 2010-06-24
JP2010144280 2010-06-24
JP2011135603A JP5843491B2 (ja) 2010-06-24 2011-06-17 塗布液、光学部品の製造方法および撮影光学系

Publications (3)

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JP2012025937A JP2012025937A (ja) 2012-02-09
JP2012025937A5 JP2012025937A5 (enExample) 2014-07-31
JP5843491B2 true JP5843491B2 (ja) 2016-01-13

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JP2011135603A Expired - Fee Related JP5843491B2 (ja) 2010-06-24 2011-06-17 塗布液、光学部品の製造方法および撮影光学系

Country Status (5)

Country Link
US (1) US9227897B2 (enExample)
EP (1) EP2585471A2 (enExample)
JP (1) JP5843491B2 (enExample)
CN (1) CN102971331B (enExample)
WO (1) WO2011162400A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140147594A1 (en) * 2012-11-27 2014-05-29 Intermolecular Inc. Magnesium Fluoride and Magnesium Oxyfluoride based Anti-Reflection Coatings via Chemical Solution Deposition Processes
JP6961775B2 (ja) * 2016-05-12 2021-11-05 キヤノン株式会社 光学膜
JP6818433B2 (ja) * 2016-05-12 2021-01-20 キヤノン株式会社 トリフルオロ酢酸マグネシウムゾル溶液
JP6768346B2 (ja) * 2016-05-12 2020-10-14 キヤノン株式会社 光学膜
US11332824B2 (en) * 2016-09-13 2022-05-17 Lam Research Corporation Systems and methods for reducing effluent build-up in a pumping exhaust system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8301652A (nl) * 1983-05-10 1984-12-03 Philips Nv Werkwijze voor het aanbrengen van magnesiumfluoridelagen en antireflectieve lagen verkregen met deze werkwijze.
US5165960A (en) * 1991-07-29 1992-11-24 Ford Motor Company Deposition of magnesium fluoride films
FR2727103B1 (fr) 1994-11-23 1996-12-27 Kodak Pathe Procede de preparation des halogenures metalliques par voie sol-gel
JP2001031681A (ja) 1999-07-16 2001-02-06 Noritake Co Ltd 金属有機化合物および金属酸化物膜形成方法
US6458718B1 (en) * 2000-04-28 2002-10-01 Asm Japan K.K. Fluorine-containing materials and processes
JP2003166047A (ja) 2001-09-20 2003-06-13 Shin Meiwa Ind Co Ltd ハロゲン化合物の成膜方法及び成膜装置、並びにフッ化マグネシウム膜
JP2003155566A (ja) 2001-11-15 2003-05-30 Asahi Denka Kogyo Kk 薄膜の製造方法及び化学気相成長用原料
CN100480736C (zh) 2004-09-16 2009-04-22 尼康股份有限公司 MgF2光学薄膜和具备该薄膜的光学组件以及该薄膜的制造方法
JP5243221B2 (ja) 2008-12-18 2013-07-24 北越紀州製紙株式会社 多層繊維シート及びその製造方法
EP2325675A2 (en) * 2009-07-30 2011-05-25 Canon Kabushiki Kaisha Method for producing optical film, optical film, and optical component

Also Published As

Publication number Publication date
US9227897B2 (en) 2016-01-05
US20130094090A1 (en) 2013-04-18
CN102971331A (zh) 2013-03-13
CN102971331B (zh) 2015-11-25
EP2585471A2 (en) 2013-05-01
WO2011162400A2 (en) 2011-12-29
WO2011162400A3 (en) 2012-03-01
JP2012025937A (ja) 2012-02-09

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