JP5838694B2 - 物理量検出器、物理量検出デバイス及び電子機器 - Google Patents
物理量検出器、物理量検出デバイス及び電子機器 Download PDFInfo
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- JP5838694B2 JP5838694B2 JP2011214087A JP2011214087A JP5838694B2 JP 5838694 B2 JP5838694 B2 JP 5838694B2 JP 2011214087 A JP2011214087 A JP 2011214087A JP 2011214087 A JP2011214087 A JP 2011214087A JP 5838694 B2 JP5838694 B2 JP 5838694B2
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011214087A JP5838694B2 (ja) | 2011-09-29 | 2011-09-29 | 物理量検出器、物理量検出デバイス及び電子機器 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011214087A JP5838694B2 (ja) | 2011-09-29 | 2011-09-29 | 物理量検出器、物理量検出デバイス及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013072836A JP2013072836A (ja) | 2013-04-22 |
| JP2013072836A5 JP2013072836A5 (enrdf_load_stackoverflow) | 2014-10-30 |
| JP5838694B2 true JP5838694B2 (ja) | 2016-01-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011214087A Expired - Fee Related JP5838694B2 (ja) | 2011-09-29 | 2011-09-29 | 物理量検出器、物理量検出デバイス及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5838694B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6897187B2 (ja) * | 2017-03-16 | 2021-06-30 | セイコーエプソン株式会社 | 物理量検出器、物理量検出デバイス、電子機器および移動体 |
| JP2019158476A (ja) * | 2018-03-09 | 2019-09-19 | セイコーエプソン株式会社 | 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63165572U (enrdf_load_stackoverflow) * | 1987-04-15 | 1988-10-27 | ||
| JP2600393B2 (ja) * | 1989-09-25 | 1997-04-16 | 日産自動車株式会社 | 半導体加速度センサの製造方法 |
| JPH07229924A (ja) * | 1994-02-21 | 1995-08-29 | Tokai Rika Co Ltd | 加速度センサ及びその製造方法 |
| JP2009133807A (ja) * | 2007-10-30 | 2009-06-18 | Kyocera Corp | センサおよびセンサ装置 |
| JP2011064652A (ja) * | 2009-09-18 | 2011-03-31 | Seiko Epson Corp | 加速度検出器 |
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2011
- 2011-09-29 JP JP2011214087A patent/JP5838694B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JP2013072836A (ja) | 2013-04-22 |
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