JP2013072836A5 - - Google Patents

Download PDF

Info

Publication number
JP2013072836A5
JP2013072836A5 JP2011214087A JP2011214087A JP2013072836A5 JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5 JP 2011214087 A JP2011214087 A JP 2011214087A JP 2011214087 A JP2011214087 A JP 2011214087A JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5
Authority
JP
Japan
Prior art keywords
physical quantity
quantity detector
movable
base
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011214087A
Other languages
English (en)
Japanese (ja)
Other versions
JP5838694B2 (ja
JP2013072836A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011214087A priority Critical patent/JP5838694B2/ja
Priority claimed from JP2011214087A external-priority patent/JP5838694B2/ja
Publication of JP2013072836A publication Critical patent/JP2013072836A/ja
Publication of JP2013072836A5 publication Critical patent/JP2013072836A5/ja
Application granted granted Critical
Publication of JP5838694B2 publication Critical patent/JP5838694B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011214087A 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器 Expired - Fee Related JP5838694B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011214087A JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011214087A JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Publications (3)

Publication Number Publication Date
JP2013072836A JP2013072836A (ja) 2013-04-22
JP2013072836A5 true JP2013072836A5 (enrdf_load_stackoverflow) 2014-10-30
JP5838694B2 JP5838694B2 (ja) 2016-01-06

Family

ID=48477437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011214087A Expired - Fee Related JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Country Status (1)

Country Link
JP (1) JP5838694B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6897187B2 (ja) * 2017-03-16 2021-06-30 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス、電子機器および移動体
JP2019158476A (ja) * 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165572U (enrdf_load_stackoverflow) * 1987-04-15 1988-10-27
JP2600393B2 (ja) * 1989-09-25 1997-04-16 日産自動車株式会社 半導体加速度センサの製造方法
JPH07229924A (ja) * 1994-02-21 1995-08-29 Tokai Rika Co Ltd 加速度センサ及びその製造方法
JP2009133807A (ja) * 2007-10-30 2009-06-18 Kyocera Corp センサおよびセンサ装置
JP2011064652A (ja) * 2009-09-18 2011-03-31 Seiko Epson Corp 加速度検出器

Similar Documents

Publication Publication Date Title
JP2012247403A5 (ja) 応力検出素子、センサーモジュール、電子機器、及び把持装置
JP2012222546A5 (enrdf_load_stackoverflow)
JP2012189480A5 (enrdf_load_stackoverflow)
EP2505456A3 (en) Steering device
JP2012235098A5 (ja) 半導体装置
JP2018155531A5 (enrdf_load_stackoverflow)
JP2013213754A5 (enrdf_load_stackoverflow)
JP2011524534A5 (enrdf_load_stackoverflow)
WO2010114766A3 (en) Thermoelectric devices including thermoelectric elements having off-set metal pads and related structures, methods, and systems
WO2010118154A3 (en) Mass sensing device for liquid environment
MX2014009007A (es) Un elemento de encuadernacion y metodo asociado para encuadernar.
JP2017142376A5 (enrdf_load_stackoverflow)
JP2009239261A5 (enrdf_load_stackoverflow)
JP2004213667A5 (enrdf_load_stackoverflow)
JP2011247768A5 (enrdf_load_stackoverflow)
WO2009067833A3 (de) Bauteil für kraft- oder druckmessungen und sensor umfassend ein solches bauteil
JP2012199861A5 (enrdf_load_stackoverflow)
JP2011199661A5 (enrdf_load_stackoverflow)
JP2013072836A5 (enrdf_load_stackoverflow)
JP2013238437A5 (enrdf_load_stackoverflow)
JP2014085233A5 (enrdf_load_stackoverflow)
JP2014033389A5 (enrdf_load_stackoverflow)
JP2017020898A5 (enrdf_load_stackoverflow)
JP2012195631A5 (ja) 携帯端末
JP2012220461A5 (enrdf_load_stackoverflow)