JP2013072836A5 - - Google Patents
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- JP2013072836A5 JP2013072836A5 JP2011214087A JP2011214087A JP2013072836A5 JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5 JP 2011214087 A JP2011214087 A JP 2011214087A JP 2011214087 A JP2011214087 A JP 2011214087A JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5
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- physical quantity
- quantity detector
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- base
- support
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Description
［適用例１］本適用例にかかる物理量検出器は、ベース部と、該ベース部に継ぎ手部を介して接続された板状の可動部と、前記継ぎ手部を跨いで前記ベース部と前記可動部とに架け渡された物理量検出素子と、前記可動部の両主面のうち少なくとも一方の前記主面に配置された質量部と、平面視において、前記ベース部から前記可動部に沿って延びる部位ならびに平面視において、前記質量部と重なる領域を有した支持部と、を備え、前記可動部が前記主面と交差する第１方向に加わる力に応じて、前記継ぎ手部を支点にして前記第１方向に変位可能なように、前記領域では、前記質量部と前記支持部との間に隙間を備え、前記支持部には、肉厚部と、前記肉厚部よりも第１方向の厚さが薄い肉薄部とを備えたことを特徴とする。また、別の態様では、ベース部と、該ベース部に接続された可動部と、前記ベース部と前記可動部とに架け渡されて配置された物理量検出素子と、前記可動部の主面に配置された質量部と、前記ベース部から延出し、且つ、前記可動部の主面の法線方向から見た平面視において前記質量部と重なる領域を有した支持部と、を備え、前記可動部は、前記法線方向に変位可能であり、前記支持部の前記質量部と重なる領域では、前記質量部と前記支持部との間に隙間があり、前記支持部には、肉厚部と、前記肉厚部よりも厚さが薄い肉薄部と、が備えられていることを特徴とする。
Application Example 1 A physical quantity detector according to this application example includes a base part, a plate-like movable part connected to the base part via a joint part, and the base part and the movable part straddling the joint part. A physical quantity detection element spanned between the two parts, a mass part disposed on at least one of the principal surfaces of the movable part, and the planar part extending from the base part along the movable part. A support part having a region overlapping with the mass part in a part and a plan view, and the movable part serving as a fulcrum according to the force applied in the first direction intersecting the main surface In the region, a gap is provided between the mass part and the support part so as to be displaceable in the first direction, and the support part has a thick part and a thicker part in the first direction than the thick part. A thin portion having a thin thickness is provided. Further, in another aspect, a base part, a movable part connected to the base part, a physical quantity detection element arranged across the base part and the movable part, and a main surface of the movable part A movable portion that is disposed from the base portion and has a region that overlaps the mass portion in a plan view as viewed from the normal direction of the main surface of the movable portion. The portion is displaceable in the normal direction, and in a region overlapping the mass portion of the support portion, there is a gap between the mass portion and the support portion, and the support portion includes a thick portion and And a thin portion having a thickness smaller than that of the thick portion.
［適用例２］上記適用例にかかる物理量検出器において、前記肉薄部は、前記支持部の互いに表裏関係にある両方の面が括れて設けられていることが好ましい。
Application Example 2 In the physical quantity detector according to the application example described above, it is preferable that the thin portion is provided so that both surfaces of the support portion that are in a front-back relationship are bundled .
［適用例３］上記適用例にかかる物理量検出器において、前記肉薄部を、前記支持部は、前記ベース部から前記可動部に沿って延びる部位を備え、前記肉薄部は、前記部位に備えられていることが好ましい。
Application Example 3 In the physical quantity detector according to the application example described above, the thin portion, the support portion includes a portion extending from the base portion along the movable portion, and the thin portion is provided in the portion. It is preferable.
［適用例４］上記適用例にかかる物理量検出器において、前記肉薄部は、前記質量部と重なる領域に備えられていることが好ましい。
Application Example 4 In the physical quantity detector according to the application example described above, it is preferable that the thin portion is provided in a region overlapping the mass portion .
［適用例５］上記適用例にかかる物理量検出器において、前記支持部は、前記ベース部の一端から前記可動部に沿って延びる第１部位と、前記ベース部の他端から前記可動部に沿って延びる第２部位と、前記第１部位および前記第２部位の延出する方向と交差する方向に延出し且つ前記第１部位と前記第２部位とを連結する連結部位と、を備え、前記肉薄部は、前記第１部位および前記第２部位の少なくとも一方に備えられていることが好ましい。 Application Example 5 In the physical quantity detector according to the application example described above, the support portion includes a first portion extending along the movable portion from one end of the base portion, and along the movable portion from the other end of the base portion. A second part that extends in a direction that extends in a direction that intersects with the direction in which the first part and the second part extend, and that connects the first part and the second part, It is preferable that the thin part is provided in at least one of the first part and the second part .
Claims (7)
該ベース部に接続された可動部と、
前記ベース部と前記可動部とに架け渡されて配置された物理量検出素子と、
前記可動部の主面に配置された質量部と、
前記ベース部から延出し、且つ、前記可動部の主面の法線方向から見た平面視において前記質量部と重なる領域を有した支持部と、を備え、
前記可動部は、前記法線方向に変位可能であり、
前記支持部の前記質量部と重なる領域では、前記質量部と前記支持部との間に隙間があり、
前記支持部には、肉厚部と、前記肉厚部よりも厚さが薄い肉薄部と、が備えられていることを特徴とする物理量検出器。 A base part;
A movable part connected to the base part;
A physical quantity detection element disposed across the base part and the movable part;
A mass part disposed on the main surface of the movable part;
A support portion extending from the base portion and having a region overlapping the mass portion in a plan view as viewed from the normal direction of the main surface of the movable portion ,
The movable part is displaceable in the normal direction,
In the region of the support part that overlaps the mass part, there is a gap between the mass part and the support part,
The physical quantity detector, wherein the support part includes a thick part and a thin part having a thickness smaller than the thick part.
前記支持部は、前記ベース部から前記可動部に沿って延びる部位を備え、
前記肉薄部は、前記部位に備えられていることを特徴とする物理量検出器。 The physical quantity detector according to claim 1 ,
The support portion includes a portion extending from the base portion along the movable portion,
The physical quantity detector, wherein the thin portion is provided in the part.
前記肉薄部は、前記質量部と重なる領域に備えられていることを特徴とする物理量検出器。 The physical quantity detector according to claim 1 or 2 ,
The physical quantity detector, wherein the thin portion is provided in a region overlapping the mass portion .
前記支持部は、前記ベース部の一端から前記可動部に沿って延びる第１部位と、前記ベース部の他端から前記可動部に沿って延びる第２部位と、前記第１部位および前記第２部位の延出する方向と交差する方向に延出し且つ前記第１部位と前記第２部位とを連結する連結部位と、を備え、
前記肉薄部は、前記第１部位および前記第２部位の少なくとも一方に備えられていることを特徴とする物理量検出器。 The physical quantity detector according to any one of claims 1 to 3,
The support part includes a first part extending along the movable part from one end of the base part, a second part extending along the movable part from the other end of the base part, the first part, and the second part. A connecting portion extending in a direction intersecting with the extending direction of the portion and connecting the first portion and the second portion;
The physical quantity detector , wherein the thin portion is provided in at least one of the first part and the second part .
前記肉薄部は、前記支持部の互いに表裏関係にある両方の面が括れて設けられていることを特徴とする物理量検出器。The physical quantity detector, wherein the thin portion is provided so that both surfaces of the support portion which are in a front-back relationship are bundled.
前記物理量検出器を収容するパッケージと、
を備えたことを特徴とする物理量検出デバイス。 A physical quantity detector according to any one of claims 1 to 5,
A package containing the physical quantity detector;
A physical quantity detection device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011214087A JP5838694B2 (en) | 2011-09-29 | 2011-09-29 | Physical quantity detector, physical quantity detection device, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011214087A JP5838694B2 (en) | 2011-09-29 | 2011-09-29 | Physical quantity detector, physical quantity detection device, and electronic apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013072836A JP2013072836A (en) | 2013-04-22 |
| JP2013072836A5 true JP2013072836A5 (en) | 2014-10-30 |
| JP5838694B2 JP5838694B2 (en) | 2016-01-06 |
Family
ID=48477437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011214087A Expired - Fee Related JP5838694B2 (en) | 2011-09-29 | 2011-09-29 | Physical quantity detector, physical quantity detection device, and electronic apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5838694B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6897187B2 (en) * | 2017-03-16 | 2021-06-30 | セイコーエプソン株式会社 | Physical quantity detectors, physical quantity detection devices, electronic devices and mobiles |
| JP2019158476A (en) * | 2018-03-09 | 2019-09-19 | セイコーエプソン株式会社 | Physical quantity sensor device, clinometer using physical quantity sensor device, inertia measuring device, structure monitoring device, and moving body |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63165572U (en) * | 1987-04-15 | 1988-10-27 | ||
| JP2600393B2 (en) * | 1989-09-25 | 1997-04-16 | 日産自動車株式会社 | Manufacturing method of semiconductor acceleration sensor |
| JPH07229924A (en) * | 1994-02-21 | 1995-08-29 | Tokai Rika Co Ltd | Acceleration sensor and its manufacture |
| JP2009133807A (en) * | 2007-10-30 | 2009-06-18 | Kyocera Corp | Sensor and sensor system |
| JP2011064652A (en) * | 2009-09-18 | 2011-03-31 | Seiko Epson Corp | Acceleration detector |
-
2011
- 2011-09-29 JP JP2011214087A patent/JP5838694B2/en not_active Expired - Fee Related
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