JP5830670B2 - テーパを有しない、または逆テーパを有する穴を開ける装置および方法 - Google Patents
テーパを有しない、または逆テーパを有する穴を開ける装置および方法 Download PDFInfo
- Publication number
- JP5830670B2 JP5830670B2 JP2010269452A JP2010269452A JP5830670B2 JP 5830670 B2 JP5830670 B2 JP 5830670B2 JP 2010269452 A JP2010269452 A JP 2010269452A JP 2010269452 A JP2010269452 A JP 2010269452A JP 5830670 B2 JP5830670 B2 JP 5830670B2
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- Prior art keywords
- light guide
- guide element
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- dimensions
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/632,143 US8338745B2 (en) | 2009-12-07 | 2009-12-07 | Apparatus and methods for drilling holes with no taper or reverse taper |
| US12/632,143 | 2009-12-07 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011121119A JP2011121119A (ja) | 2011-06-23 |
| JP2011121119A5 JP2011121119A5 (enExample) | 2013-08-15 |
| JP5830670B2 true JP5830670B2 (ja) | 2015-12-09 |
Family
ID=44081008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010269452A Active JP5830670B2 (ja) | 2009-12-07 | 2010-12-02 | テーパを有しない、または逆テーパを有する穴を開ける装置および方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8338745B2 (enExample) |
| JP (1) | JP5830670B2 (enExample) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120132629A1 (en) * | 2010-11-30 | 2012-05-31 | Electro Scientific Industries, Inc. | Method and apparatus for reducing taper of laser scribes |
| WO2014079478A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
| EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
| CN105163897A (zh) * | 2013-03-15 | 2015-12-16 | 伊雷克托科学工业股份有限公司 | 锥度控制的射束角协调及工件运动 |
| EP2781296B1 (de) | 2013-03-21 | 2020-10-21 | Corning Laser Technologies GmbH | Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser |
| DE102013222834A1 (de) * | 2013-11-11 | 2015-05-13 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Führung eines Laserstrahls |
| US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
| US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
| US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
| US20150165560A1 (en) * | 2013-12-17 | 2015-06-18 | Corning Incorporated | Laser processing of slots and holes |
| US9815730B2 (en) | 2013-12-17 | 2017-11-14 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
| US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
| KR102445217B1 (ko) | 2014-07-08 | 2022-09-20 | 코닝 인코포레이티드 | 재료를 레이저 가공하는 방법 및 장치 |
| TWI659793B (zh) * | 2014-07-14 | 2019-05-21 | 美商康寧公司 | 用於使用可調整雷射束焦線來處理透明材料的系統及方法 |
| US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
| WO2016010991A1 (en) | 2014-07-14 | 2016-01-21 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
| WO2016010943A2 (en) | 2014-07-14 | 2016-01-21 | Corning Incorporated | Method and system for arresting crack propagation |
| EP3021153B1 (en) | 2014-11-13 | 2018-12-12 | Canon Kabushiki Kaisha | Optical apparatus, processing apparatus, and article manufacturing method |
| US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
| EP3245166B1 (en) | 2015-01-12 | 2020-05-27 | Corning Incorporated | Laser cutting of thermally tempered substrates using the multi photon absorption method |
| US10399171B2 (en) | 2015-01-29 | 2019-09-03 | Messer Cutting Systems Inc. | Systems and methods for cutting a plow bolt hole with a cutting torch |
| EP3848334A1 (en) | 2015-03-24 | 2021-07-14 | Corning Incorporated | Alkaline earth boro-aluminosilicate glass article with laser cut edge |
| WO2016160391A1 (en) | 2015-03-27 | 2016-10-06 | Corning Incorporated | Gas permeable window and method of fabricating the same |
| US11186060B2 (en) | 2015-07-10 | 2021-11-30 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
| CN204913053U (zh) * | 2015-08-28 | 2015-12-30 | 李俊豪 | 双向加工的激光机台 |
| MY194570A (en) | 2016-05-06 | 2022-12-02 | Corning Inc | Laser cutting and removal of contoured shapes from transparent substrates |
| US10410883B2 (en) | 2016-06-01 | 2019-09-10 | Corning Incorporated | Articles and methods of forming vias in substrates |
| US10794679B2 (en) | 2016-06-29 | 2020-10-06 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
| CN109803934A (zh) | 2016-07-29 | 2019-05-24 | 康宁股份有限公司 | 用于激光处理的装置和方法 |
| WO2018044843A1 (en) | 2016-08-30 | 2018-03-08 | Corning Incorporated | Laser processing of transparent materials |
| CN109803786B (zh) | 2016-09-30 | 2021-05-07 | 康宁股份有限公司 | 使用非轴对称束斑对透明工件进行激光加工的设备和方法 |
| JP7066701B2 (ja) | 2016-10-24 | 2022-05-13 | コーニング インコーポレイテッド | シート状ガラス基体のレーザに基づく加工のための基体処理ステーション |
| US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
| US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
| US10580725B2 (en) | 2017-05-25 | 2020-03-03 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
| US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
| US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
| US10415338B2 (en) | 2017-07-27 | 2019-09-17 | Saudi Arabian Oil Company | Downhole high power laser scanner tool and methods |
| US12157184B2 (en) | 2017-10-25 | 2024-12-03 | Nikon Corporation | Processing apparatus, and manufacturing method of movable body |
| DE102017010055A1 (de) * | 2017-10-27 | 2019-05-02 | Lessmüller Lasertechnik GmbH | Laserstrahlschweißen von geometrischen Figuren mit OCT-Nahtführung |
| US12180108B2 (en) | 2017-12-19 | 2024-12-31 | Corning Incorporated | Methods for etching vias in glass-based articles employing positive charge organic molecules |
| US10705327B2 (en) | 2018-01-02 | 2020-07-07 | Industrial Technology Research Institute | Light emitting method and light emitting device |
| US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
| KR20210009720A (ko) * | 2019-07-17 | 2021-01-27 | 주식회사 레이저모션테크 | 레이저 드릴링 장치 |
| DE102020201207A1 (de) * | 2020-01-31 | 2021-08-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur Materialbearbeitung mit einem Laserstrahl, insbesondere zum Laserstrahl-Bohren |
| US12296399B2 (en) | 2020-12-15 | 2025-05-13 | Robert Bosch Gmbh | Electrical discharge machining assembly including electrode |
| US11585305B2 (en) | 2020-12-15 | 2023-02-21 | Robert Bosch Gmbh | Monolithic fuel rail structure and method of manufacture |
| CN114505602B (zh) * | 2022-04-19 | 2022-07-01 | 中国工程物理研究院激光聚变研究中心 | 一种多轴旋切扫描系统的使用方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51134997A (en) * | 1975-05-20 | 1976-11-22 | Toshiba Corp | Laser-utilizing processing device |
| US4135902A (en) * | 1978-03-03 | 1979-01-23 | Western Electric Co., Inc. | Method and apparatus for drawing optical fibers |
| US5973290A (en) * | 1997-02-26 | 1999-10-26 | W. L. Gore & Associates, Inc. | Laser apparatus having improved via processing rate |
| JPH10242617A (ja) * | 1997-02-28 | 1998-09-11 | Murata Mfg Co Ltd | セラミックグリーンシートの加工方法及びレーザ加工装置 |
| JP3769942B2 (ja) * | 1997-09-02 | 2006-04-26 | セイコーエプソン株式会社 | レーザー加工方法及び装置、並びに非導電性透明基板の回路形成方法及び装置 |
| JPH11267873A (ja) * | 1998-03-23 | 1999-10-05 | Seiko Epson Corp | レーザ光の走査光学系及びレーザ加工装置 |
| JP2002113711A (ja) * | 2000-10-11 | 2002-04-16 | Murata Mfg Co Ltd | セラミックグリーンシートの加工方法及びそれに用いるレーザ加工装置 |
| US6720567B2 (en) * | 2001-01-30 | 2004-04-13 | Gsi Lumonics Corporation | Apparatus and method for focal point control for laser machining |
| JP4069348B2 (ja) * | 2001-02-22 | 2008-04-02 | トヨタ自動車株式会社 | レーザ加工方法およびレーザ加工装置 |
| CN1299873C (zh) * | 2002-01-11 | 2007-02-14 | 电子科学工业公司 | 借助激光光斑放大来激光加工工件的方法 |
| JP2004160522A (ja) * | 2002-11-15 | 2004-06-10 | Mitsubishi Heavy Ind Ltd | レーザ加工方法及びその装置 |
| US7880117B2 (en) * | 2002-12-24 | 2011-02-01 | Panasonic Corporation | Method and apparatus of drilling high density submicron cavities using parallel laser beams |
| JP2004243404A (ja) * | 2003-02-17 | 2004-09-02 | Internatl Business Mach Corp <Ibm> | 穴形成方法および穴形成装置 |
| DE10317363B3 (de) * | 2003-04-15 | 2004-08-26 | Siemens Ag | Verfahren und Vorrichtung zum Bohren von Löchern in einem elektrischen Schaltungssubstrat |
| JP2008110384A (ja) * | 2006-10-31 | 2008-05-15 | Sumitomo Electric Ind Ltd | 多孔質樹脂膜とその穿孔方法、その樹脂膜を用いた異方性導電シート、電気検査方法及び回路接続方法 |
-
2009
- 2009-12-07 US US12/632,143 patent/US8338745B2/en not_active Expired - Fee Related
-
2010
- 2010-12-02 JP JP2010269452A patent/JP5830670B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20110132881A1 (en) | 2011-06-09 |
| JP2011121119A (ja) | 2011-06-23 |
| US8338745B2 (en) | 2012-12-25 |
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