JP5828378B2 - 圧力センサーデバイスの製造方法 - Google Patents

圧力センサーデバイスの製造方法 Download PDF

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JP5828378B2
JP5828378B2 JP2011136010A JP2011136010A JP5828378B2 JP 5828378 B2 JP5828378 B2 JP 5828378B2 JP 2011136010 A JP2011136010 A JP 2011136010A JP 2011136010 A JP2011136010 A JP 2011136010A JP 5828378 B2 JP5828378 B2 JP 5828378B2
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film
pressure sensor
substrate
forming
region
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JP2013003031A5 (enExample
JP2013003031A (ja
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勇介 松澤
勇介 松澤
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Seiko Epson Corp
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Seiko Epson Corp
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  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2011136010A 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法 Expired - Fee Related JP5828378B2 (ja)

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JP2011136010A JP5828378B2 (ja) 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法

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JP2011136010A JP5828378B2 (ja) 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法

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JP2013003031A JP2013003031A (ja) 2013-01-07
JP2013003031A5 JP2013003031A5 (enExample) 2014-07-31
JP5828378B2 true JP5828378B2 (ja) 2015-12-02

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6824504B2 (ja) * 2015-03-06 2021-02-03 株式会社ＢｌｕｅＳｐｉｎ 磁気メモリ、磁気メモリへのデータ書き込み方法及び半導体装置
JP6541066B2 (ja) * 2015-06-08 2019-07-10 セイコーＮｐｃ株式会社 圧力センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
EP0702221A3 (en) * 1994-09-14 1997-05-21 Delco Electronics Corp Sensor integrated on a chip
US6928879B2 (en) * 2003-02-26 2005-08-16 Robert Bosch Gmbh Episeal pressure sensor and method for making an episeal pressure sensor
JP2009139340A (ja) * 2007-12-10 2009-06-25 Seiko Epson Corp 圧力センサの製造方法、圧力センサ、半導体装置、電子機器
JP5220866B2 (ja) * 2008-11-17 2013-06-26 アルプス電気株式会社 半導体圧力センサ

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