JP5824454B2 - 制御された結晶構造を有する電解プロセス用電極 - Google Patents

制御された結晶構造を有する電解プロセス用電極 Download PDF

Info

Publication number
JP5824454B2
JP5824454B2 JP2012530263A JP2012530263A JP5824454B2 JP 5824454 B2 JP5824454 B2 JP 5824454B2 JP 2012530263 A JP2012530263 A JP 2012530263A JP 2012530263 A JP2012530263 A JP 2012530263A JP 5824454 B2 JP5824454 B2 JP 5824454B2
Authority
JP
Japan
Prior art keywords
ruthenium
electrode
deposition
coating
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012530263A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013505363A (ja
JP2013505363A5 (enExample
Inventor
ウルジェゲ,クリスチャン
モーラ,ステファニア
アントッジ,アントニオ・ロレンツォ
Original Assignee
インドゥストリエ・デ・ノラ・ソチエタ・ペル・アツィオーニ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インドゥストリエ・デ・ノラ・ソチエタ・ペル・アツィオーニ filed Critical インドゥストリエ・デ・ノラ・ソチエタ・ペル・アツィオーニ
Publication of JP2013505363A publication Critical patent/JP2013505363A/ja
Publication of JP2013505363A5 publication Critical patent/JP2013505363A5/ja
Application granted granted Critical
Publication of JP5824454B2 publication Critical patent/JP5824454B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/075Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/028Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00Electrolytic production of inorganic compounds or non-metals
    • C25B1/01Products
    • C25B1/02Hydrogen or oxygen
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/075Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
    • C25B11/081Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound the element being a noble metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Catalysts (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Electrolytic Production Of Metals (AREA)
JP2012530263A 2009-09-23 2010-09-23 制御された結晶構造を有する電解プロセス用電極 Expired - Fee Related JP5824454B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2009A001621 2009-09-23
IT001621A ITMI20091621A1 (it) 2009-09-23 2009-09-23 Elettrodo per processi elettrolitici con struttura cristallina controllata
PCT/EP2010/064081 WO2011036225A1 (en) 2009-09-23 2010-09-23 Electrode for electrolytic processes with controlled crystalline structure

Publications (3)

Publication Number Publication Date
JP2013505363A JP2013505363A (ja) 2013-02-14
JP2013505363A5 JP2013505363A5 (enExample) 2015-04-23
JP5824454B2 true JP5824454B2 (ja) 2015-11-25

Family

ID=42138977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012530263A Expired - Fee Related JP5824454B2 (ja) 2009-09-23 2010-09-23 制御された結晶構造を有する電解プロセス用電極

Country Status (17)

Country Link
US (1) US9090982B2 (enExample)
EP (1) EP2480705B1 (enExample)
JP (1) JP5824454B2 (enExample)
KR (1) KR101742011B1 (enExample)
CN (1) CN102575363B (enExample)
AR (1) AR078442A1 (enExample)
AU (1) AU2010299850B2 (enExample)
BR (1) BR112012006530A2 (enExample)
CA (1) CA2769824C (enExample)
DK (1) DK2480705T3 (enExample)
EA (1) EA023083B1 (enExample)
IL (1) IL217859A (enExample)
IT (1) ITMI20091621A1 (enExample)
MX (1) MX2012003517A (enExample)
TW (1) TWI490372B (enExample)
WO (1) WO2011036225A1 (enExample)
ZA (1) ZA201201825B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20122035A1 (it) * 2012-11-29 2014-05-30 Industrie De Nora Spa Elettrodo per evoluzione di ossigeno in processi elettrochimici industriali
DK3351659T3 (da) * 2015-09-18 2019-12-16 Asahi Chemical Ind Positiv elektrode til vandelektrolyse, elektrolysecelle og fremgangsmåde til at fremstille en positiv elektrode til vandelektrolyse
WO2019204578A1 (en) * 2018-04-18 2019-10-24 Materion Corporation Electrodes for biosensors
CN113073336B (zh) * 2021-03-26 2022-07-08 浙江工业大学 一种RuO2泡沫镍复合电极及其制备方法和应用

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2088659A5 (enExample) * 1970-04-21 1972-01-07 Progil
AU5889880A (en) * 1979-07-02 1981-01-15 Olin Corporation Manufacture of low overvoltage electrodes by cathodic sputtering
EP0107612A3 (en) * 1982-09-02 1985-12-27 Eltech Systems Limited Method of conditioning a porous gas-diffusion electrode
CN1008543B (zh) * 1985-11-21 1990-06-27 中国科学院大连化学物理研究所 一种电解水方法
GB8617325D0 (en) * 1986-07-16 1986-08-20 Johnson Matthey Plc Poison-resistant cathodes
US6171460B1 (en) * 1993-05-10 2001-01-09 John L. Bill Chemically protected electrode system
FR2775486B1 (fr) * 1998-03-02 2000-04-07 Atochem Elf Sa Cathode specifique, utilisable pour la preparation d'un chlorate de metal alcalin et son procede de fabrication
WO2003016592A2 (en) * 2001-08-14 2003-02-27 3-One-2, Llc Electrolytic cell and electrodes for use in electrochemical processes
US6686308B2 (en) * 2001-12-03 2004-02-03 3M Innovative Properties Company Supported nanoparticle catalyst
BRPI0616332A2 (pt) * 2005-09-23 2011-06-14 Mecs Inc processo para a oxidaÇço catalÍtica de diàxido de enxofre em triàxido de enxofre e processo para fabricar Ácido sulférico e/ou àleo de um gÁs de fonte que compreende dÍàxido de enxofre
WO2010045483A2 (en) * 2008-10-15 2010-04-22 California Institute Of Technology Ir-doped ruthenium oxide catalyst for oxygen evolution
US8221599B2 (en) * 2009-04-03 2012-07-17 The Board Of Trustees Of The Leland Stanford Junior University Corrosion-resistant anodes, devices including the anodes, and methods of using the anodes
CN101525760B (zh) * 2009-04-17 2011-03-23 中南大学 一种用于制备超级电容器RuO2电极材料的电沉积工艺

Also Published As

Publication number Publication date
CN102575363A (zh) 2012-07-11
EP2480705B1 (en) 2018-11-21
WO2011036225A1 (en) 2011-03-31
ZA201201825B (en) 2013-05-29
IL217859A0 (en) 2012-03-29
KR101742011B1 (ko) 2017-05-31
AR078442A1 (es) 2011-11-09
ITMI20091621A1 (it) 2011-03-24
CN102575363B (zh) 2015-07-01
JP2013505363A (ja) 2013-02-14
EA023083B1 (ru) 2016-04-29
CA2769824A1 (en) 2011-03-31
EP2480705A1 (en) 2012-08-01
AU2010299850B2 (en) 2014-11-20
HK1172936A1 (en) 2013-05-03
US9090982B2 (en) 2015-07-28
BR112012006530A2 (pt) 2016-04-26
AU2010299850A1 (en) 2012-03-01
IL217859A (en) 2017-10-31
TW201114948A (en) 2011-05-01
EA201270451A1 (ru) 2012-08-30
DK2480705T3 (en) 2019-02-18
TWI490372B (zh) 2015-07-01
CA2769824C (en) 2017-12-19
KR20120085787A (ko) 2012-08-01
US20120175270A1 (en) 2012-07-12
MX2012003517A (es) 2012-04-19

Similar Documents

Publication Publication Date Title
KR102579080B1 (ko) 전기분해용 양극 및 이의 제조방법
JP5324501B2 (ja) 電気化学用電極とその製造方法
Yousefpour Electrodeposition of TiO2–RuO2–IrO2 coating on titanium substrate
JP5824454B2 (ja) 制御された結晶構造を有する電解プロセス用電極
Huang et al. Effect of precursor baking on the electrochemical properties of IrO2-Ta2O5/Ti anodes
JP4756572B2 (ja) 多孔性ダイヤモンド層及び多孔性ダイヤモンド粒子の製造方法及びそれらを使用する電気化学用電極
JP2013505363A5 (enExample)
RU2595900C1 (ru) Способ изготовления и модификации электрохимических катализаторов на углеродном носителе
KR101886032B1 (ko) 전해 전지용 전극
HK1172936B (en) Electrode for electrolytic processes with controlled crystalline structure
US10030300B2 (en) Substrate coating on one or more sides
Bakambo et al. Exploration of the thermally prepared Iridium oxide (IrO2) and tantalum pentoxide (Ta2O5) coated titanium anode in the oxygen evolution reactions (OER)
CN104480509A (zh) 有机水溶液体系等离子体电沉积氧化钛薄膜
KR101224191B1 (ko) 불용성 전극의 제조 방법 및 불용성 전극 제조용 중간층 코팅 장치
KR20200077927A (ko) 복합 금속 인화물을 포함하는 산화 전극 및 이의 제조방법
BR112012006530B1 (pt) Eletrodo para a evolução de hidrogênio, método para a fabricação de um eletrodo e uso de um eletrodo
HK1188264B (zh) 用於电解槽的电极
HK1188264A (zh) 用於电解槽的电极

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130724

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130724

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140903

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20141202

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20141209

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20141225

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150202

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20150303

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150911

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20151009

R150 Certificate of patent or registration of utility model

Ref document number: 5824454

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees