JP5798982B2 - 垂直磁気記録(pmr)装置およびその製造方法 - Google Patents
垂直磁気記録(pmr)装置およびその製造方法 Download PDFInfo
- Publication number
- JP5798982B2 JP5798982B2 JP2012132198A JP2012132198A JP5798982B2 JP 5798982 B2 JP5798982 B2 JP 5798982B2 JP 2012132198 A JP2012132198 A JP 2012132198A JP 2012132198 A JP2012132198 A JP 2012132198A JP 5798982 B2 JP5798982 B2 JP 5798982B2
- Authority
- JP
- Japan
- Prior art keywords
- trailing edge
- pmr
- gap
- central portion
- light pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title description 16
- 239000000758 substrate Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 26
- 229920002120 photoresistant polymer Polymers 0.000 description 18
- 230000008569 process Effects 0.000 description 12
- 230000008901 benefit Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 3
- 229910003321 CoFe Inorganic materials 0.000 description 2
- 229910019233 CoFeNi Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000111471 Convolvulus scoparius Species 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/23—Gap features
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
- G11B5/6082—Design of the air bearing surface
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetic Heads (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/134,600 | 2011-06-10 | ||
| US13/134,600 US8542463B2 (en) | 2011-06-10 | 2011-06-10 | Non-uniform write gap perpendicular writer for shingle writing |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015131002A Division JP6212518B2 (ja) | 2011-06-10 | 2015-06-30 | 垂直磁気記録(pmr)装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013004164A JP2013004164A (ja) | 2013-01-07 |
| JP2013004164A5 JP2013004164A5 (enExample) | 2015-08-20 |
| JP5798982B2 true JP5798982B2 (ja) | 2015-10-21 |
Family
ID=47292996
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012132198A Expired - Fee Related JP5798982B2 (ja) | 2011-06-10 | 2012-06-11 | 垂直磁気記録(pmr)装置およびその製造方法 |
| JP2015131002A Expired - Fee Related JP6212518B2 (ja) | 2011-06-10 | 2015-06-30 | 垂直磁気記録(pmr)装置の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015131002A Expired - Fee Related JP6212518B2 (ja) | 2011-06-10 | 2015-06-30 | 垂直磁気記録(pmr)装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (4) | US8542463B2 (enExample) |
| JP (2) | JP5798982B2 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8797686B1 (en) | 2010-12-23 | 2014-08-05 | Western Digital (Fremont), Llc | Magnetic recording transducer with short effective throat height and method of fabrication |
| US8848314B2 (en) * | 2011-12-07 | 2014-09-30 | HGST Netherlands B.V. | Write head designed for adjusting relative write phase between subtracks of a patterned media hypertrack |
| US8628672B1 (en) * | 2012-06-27 | 2014-01-14 | Western Digital (Fremont), Llc | Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel |
| US8824101B2 (en) * | 2012-10-08 | 2014-09-02 | Seagate Technology Llc | Write pole tip with trailing edge recess |
| US8830626B2 (en) * | 2012-12-03 | 2014-09-09 | Seagate Technology Llc | Write pole with shaped box shield |
| US9042051B2 (en) | 2013-08-15 | 2015-05-26 | Western Digital (Fremont), Llc | Gradient write gap for perpendicular magnetic recording writer |
| US8976484B1 (en) | 2013-10-24 | 2015-03-10 | HGST Netherlands B.V. | Magnetic recording with tilted media in the cross track direction |
| US9082423B1 (en) | 2013-12-18 | 2015-07-14 | Western Digital (Fremont), Llc | Magnetic recording write transducer having an improved trailing surface profile |
| US9224407B2 (en) * | 2014-01-13 | 2015-12-29 | Seagate Technology Llc | Varying write pole side shield gap |
| JP6162660B2 (ja) * | 2014-07-30 | 2017-07-12 | 株式会社東芝 | 磁気記録ヘッド及び磁気記録再生装置 |
| JP2016031774A (ja) | 2014-07-30 | 2016-03-07 | 株式会社東芝 | 磁気記録ヘッド及び磁気記録再生装置 |
| US9286919B1 (en) | 2014-12-17 | 2016-03-15 | Western Digital (Fremont), Llc | Magnetic writer having a dual side gap |
| JP6382713B2 (ja) * | 2014-12-26 | 2018-08-29 | 株式会社東芝 | 磁気記録再生装置 |
| US9508372B1 (en) * | 2015-06-03 | 2016-11-29 | Western Digital (Fremont), Llc | Shingle magnetic writer having a low sidewall angle pole |
| US9704510B2 (en) | 2015-09-24 | 2017-07-11 | Seagate Technology Llc | Data writer with graded side shields |
| US9595273B1 (en) | 2015-09-30 | 2017-03-14 | Western Digital (Fremont), Llc | Shingle magnetic writer having nonconformal shields |
| US9767831B1 (en) | 2015-12-01 | 2017-09-19 | Western Digital (Fremont), Llc | Magnetic writer having convex trailing surface pole and conformal write gap |
| US9711168B1 (en) | 2016-05-17 | 2017-07-18 | Western Digital (Fremont), Llc | Method for providing a magnetic recording write apparatus by predefining side shields |
| US12315537B2 (en) * | 2022-10-21 | 2025-05-27 | International Business Machines Corporation | Magnetic write transducer with variable write gap length |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3689638B2 (ja) * | 1998-03-04 | 2005-08-31 | 株式会社日立グローバルストレージテクノロジーズ | 磁気ディスク装置 |
| JP4130868B2 (ja) | 2001-03-19 | 2008-08-06 | 株式会社日立グローバルストレージテクノロジーズ | 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置 |
| US7120988B2 (en) * | 2003-09-26 | 2006-10-17 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a write head having air bearing surface (ABS) |
| US7102854B2 (en) | 2003-10-03 | 2006-09-05 | Seagate Technology Llc | Transducing head with reduced side writing |
| JP4260002B2 (ja) * | 2003-12-24 | 2009-04-30 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 磁気ヘッドとその製造方法および磁気記録再生装置 |
| JP4118246B2 (ja) * | 2004-03-31 | 2008-07-16 | Tdk株式会社 | 垂直磁気記録ヘッド及びその製造方法 |
| US7477481B2 (en) | 2004-04-30 | 2009-01-13 | Hitachi Global Storage Technologies Netherlands B.V. | Bilayer trailing shield gap for perpendicular head |
| US7869160B1 (en) * | 2005-04-27 | 2011-01-11 | Western Digital (Fremont), Llc | Perpendicular recording head with shaped pole surfaces for higher linear data densities |
| US8079135B1 (en) * | 2007-12-13 | 2011-12-20 | Western Digital (Fremont), Llc | Method for providing a perpendicular magnetic recording (PMR) transducer |
| US8146236B1 (en) * | 2008-03-28 | 2012-04-03 | Western Digital (Fremont), Llc | Method for providing a perpendicular magnetic recording (PMR) transducer |
| JP5377893B2 (ja) * | 2008-06-19 | 2013-12-25 | 株式会社東芝 | 磁気ヘッドアセンブリおよび磁気記録再生装置 |
| JP2010146646A (ja) * | 2008-12-19 | 2010-07-01 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッドスライダ、その製造方法、及び磁気ディスク装置 |
| US8149537B2 (en) * | 2009-06-22 | 2012-04-03 | Seagate Technology Llc | Magnetic writer with multi-component shield |
| US8486285B2 (en) * | 2009-08-20 | 2013-07-16 | Western Digital (Fremont), Llc | Damascene write poles produced via full film plating |
| US8310786B2 (en) * | 2009-09-09 | 2012-11-13 | Hitachi Global Storage Technologies Netherlands B.V. | Asymmetric writer for shingled magnetic recording |
| US8134802B2 (en) | 2009-10-29 | 2012-03-13 | Headway Technologies, Inc. | Writer and reader arrangements for shingled writing |
| US8189294B2 (en) * | 2010-06-21 | 2012-05-29 | Seagate Technology Llc | Apparatus including modified write pole tip |
| US8432637B2 (en) * | 2010-11-10 | 2013-04-30 | HGST Netherlands B.V. | Wet etching silicon oxide during the formation of a damascene pole and adjacent structure |
| US9082425B2 (en) * | 2011-05-04 | 2015-07-14 | Seagate Technology Llc | Magnetic shield with flux concentration feature |
-
2011
- 2011-06-10 US US13/134,600 patent/US8542463B2/en active Active
-
2012
- 2012-06-11 JP JP2012132198A patent/JP5798982B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-23 US US14/033,744 patent/US9741368B2/en active Active
- 2013-09-23 US US14/033,736 patent/US8896965B2/en active Active
-
2014
- 2014-11-05 US US14/533,724 patent/US9013830B2/en active Active
-
2015
- 2015-06-30 JP JP2015131002A patent/JP6212518B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20150055252A1 (en) | 2015-02-26 |
| US20140016232A1 (en) | 2014-01-16 |
| US20120314324A1 (en) | 2012-12-13 |
| US9013830B2 (en) | 2015-04-21 |
| JP2015195078A (ja) | 2015-11-05 |
| JP2013004164A (ja) | 2013-01-07 |
| JP6212518B2 (ja) | 2017-10-11 |
| US8542463B2 (en) | 2013-09-24 |
| US8896965B2 (en) | 2014-11-25 |
| US20140014617A1 (en) | 2014-01-16 |
| US9741368B2 (en) | 2017-08-22 |
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