JP5796933B2 - プローブカードアセンブリ - Google Patents

プローブカードアセンブリ Download PDF

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Publication number
JP5796933B2
JP5796933B2 JP2009535458A JP2009535458A JP5796933B2 JP 5796933 B2 JP5796933 B2 JP 5796933B2 JP 2009535458 A JP2009535458 A JP 2009535458A JP 2009535458 A JP2009535458 A JP 2009535458A JP 5796933 B2 JP5796933 B2 JP 5796933B2
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JP
Japan
Prior art keywords
probe
controller
probe card
compliance
card assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2009535458A
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English (en)
Japanese (ja)
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JP2010508533A (ja
JP2010508533A5 (enExample
Inventor
キース ジェイ． ブレインリンガー，
キース ジェイ． ブレインリンガー，
Original Assignee
フォームファクター， インコーポレイテッド
フォームファクター， インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by フォームファクター， インコーポレイテッド, フォームファクター， インコーポレイテッド filed Critical フォームファクター， インコーポレイテッド
Publication of JP2010508533A publication Critical patent/JP2010508533A/ja
Publication of JP2010508533A5 publication Critical patent/JP2010508533A5/ja
Application granted granted Critical
Publication of JP5796933B2 publication Critical patent/JP5796933B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2009535458A 2006-11-01 2007-10-31 プローブカードアセンブリ Expired - Fee Related JP5796933B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/555,567 2006-11-01
US11/555,567 US7825675B2 (en) 2006-11-01 2006-11-01 Method and apparatus for providing active compliance in a probe card assembly
PCT/US2007/083264 WO2008057897A2 (en) 2006-11-01 2007-10-31 Method and apparatus for providing active compliance in a probe card assembly

Publications (3)

Publication Number Publication Date
JP2010508533A JP2010508533A (ja) 2010-03-18
JP2010508533A5 JP2010508533A5 (enExample) 2011-01-27
JP5796933B2 true JP5796933B2 (ja) 2015-10-21

Family

ID=39364076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009535458A Expired - Fee Related JP5796933B2 (ja) 2006-11-01 2007-10-31 プローブカードアセンブリ

Country Status (7)

Country Link
US (2) US7825675B2 (enExample)
EP (1) EP2080030A2 (enExample)
JP (1) JP5796933B2 (enExample)
KR (1) KR20090082446A (enExample)
CN (1) CN101535822A (enExample)
TW (1) TWI458984B (enExample)
WO (1) WO2008057897A2 (enExample)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7671614B2 (en) * 2005-12-02 2010-03-02 Formfactor, Inc. Apparatus and method for adjusting an orientation of probes
US7825675B2 (en) * 2006-11-01 2010-11-02 Formfactor, Inc. Method and apparatus for providing active compliance in a probe card assembly
US8528885B2 (en) * 2008-04-21 2013-09-10 Formfactor, Inc. Multi-stage spring system
US8004296B2 (en) * 2008-08-19 2011-08-23 Centipede Systems, Inc. Probe head apparatus for testing semiconductors
DE102008038184A1 (de) * 2008-08-19 2010-02-25 Suss Microtec Test Systems Gmbh Verfahren und Vorrichtung zur temporären elektrischen Kontaktierung einer Solarzelle
TWI410637B (zh) * 2009-09-17 2013-10-01 Mpi Corp 陣列式探針卡
US7986157B1 (en) * 2010-09-02 2011-07-26 Star Technologies Inc. High speed probing apparatus for semiconductor devices and probe stage for the same
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
US9134357B1 (en) * 2011-03-25 2015-09-15 Maxim Integrated, Inc. Universal direct docking at probe test
US8917105B2 (en) * 2012-05-25 2014-12-23 International Business Machines Corporation Solder bump testing apparatus and methods of use
JP5993649B2 (ja) * 2012-07-31 2016-09-14 東京エレクトロン株式会社 プローブカードへの基板当接装置、基板当接装置を備えた基板検査装置、及びプローブカードへの基板当接方法
KR101415984B1 (ko) * 2013-05-16 2014-07-09 (주)에이젯 반도체 소자 테스트용 핸들러장치의 디바이스 컨택 제어방법
JP2014002171A (ja) * 2013-09-27 2014-01-09 Tokyo Electron Ltd プローブカード
DE102015109008B4 (de) * 2015-06-08 2020-01-23 Infineon Technologies Ag Sonden-Anschlussflächen-Qualifikation
US10365323B2 (en) 2015-11-25 2019-07-30 Formfactor Beaverton, Inc. Probe systems and methods for automatically maintaining alignment between a probe and a device under test during a temperature change
EP3258279A1 (en) * 2016-06-16 2017-12-20 Multitest elektronische Systeme GmbH Pressing device and method of pressing a carrier against an electrical contact unit
JP7075725B2 (ja) * 2017-05-30 2022-05-26 株式会社日本マイクロニクス 電気的接続装置
TWI668457B (zh) * 2018-08-27 2019-08-11 創意電子股份有限公司 檢測裝置
US10809048B2 (en) * 2019-01-08 2020-10-20 Formfactor Beaverton, Inc. Probe systems and methods for calibrating capacitive height sensing measurements
US11821918B1 (en) 2020-04-24 2023-11-21 Microfabrica Inc. Buckling beam probe arrays and methods for making such arrays including forming probes with lateral positions matching guide plate hole positions
US11828775B1 (en) 2020-05-13 2023-11-28 Microfabrica Inc. Vertical probe arrays and improved methods for making using temporary or permanent alignment structures for setting or maintaining probe-to-probe relationships
US12188978B2 (en) * 2019-02-21 2025-01-07 Vuereal Inc. Probe structure for micro device inspection
US11768227B1 (en) 2019-02-22 2023-09-26 Microfabrica Inc. Multi-layer probes having longitudinal axes and preferential probe bending axes that lie in planes that are nominally parallel to planes of probe layers
US11561243B2 (en) * 2019-09-12 2023-01-24 International Business Machines Corporation Compliant organic substrate assembly for rigid probes
US11204383B2 (en) * 2019-09-30 2021-12-21 Formfactor, Inc. Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test, and probe systems that perform the methods
CN110793966B (zh) * 2019-11-07 2022-03-04 哈尔滨工业大学 航空电连接器接触件缩针自动化检测装置及其检测方法
US20240094261A1 (en) * 2020-08-12 2024-03-21 Microfabrica Inc. Probe Arrays and Improved Methods for Making and Using Longitudinal Deformation of Probe Preforms
CN115308457B (zh) * 2022-06-30 2023-12-22 上海泽丰半导体科技有限公司 用于高低温测试的探针卡制作方法及探针卡
TWI834270B (zh) * 2022-08-31 2024-03-01 中華精測科技股份有限公司 探針卡結構及其製作方法
TWI827473B (zh) * 2023-02-22 2023-12-21 鴻勁精密股份有限公司 電子元件作業機
CN119716177B (zh) * 2025-02-27 2025-06-06 苏州矽利康测试系统有限公司 一种光纤针卡

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03177039A (ja) * 1989-12-05 1991-08-01 Fujitsu Ltd 半導体試験装置
JP3163221B2 (ja) * 1993-08-25 2001-05-08 東京エレクトロン株式会社 プローブ装置
US6246247B1 (en) * 1994-11-15 2001-06-12 Formfactor, Inc. Probe card assembly and kit, and methods of using same
US5974662A (en) * 1993-11-16 1999-11-02 Formfactor, Inc. Method of planarizing tips of probe elements of a probe card assembly
US6624648B2 (en) * 1993-11-16 2003-09-23 Formfactor, Inc. Probe card assembly
JPH0951023A (ja) * 1995-08-04 1997-02-18 Nippon Steel Corp 半導体試験装置
TW293938B (en) * 1995-11-09 1996-12-21 Formfactor Inc Probe card assembly and kit, and methods of using same
KR100212169B1 (ko) * 1996-02-13 1999-08-02 오쿠보 마사오 프로브, 프로브의 제조, 그리고 프로브를 사용한 수직동작형 프로브 카드 어셈블리
JP3407192B2 (ja) * 1998-12-31 2003-05-19 株式会社ダイトー テストハンドの制御方法及び計測制御システム
JP2001110857A (ja) * 1999-10-06 2001-04-20 Tokyo Electron Ltd プローブ方法及びプローブ装置
US6509751B1 (en) * 2000-03-17 2003-01-21 Formfactor, Inc. Planarizer for a semiconductor contactor
US7262611B2 (en) * 2000-03-17 2007-08-28 Formfactor, Inc. Apparatuses and methods for planarizing a semiconductor contactor
US6441629B1 (en) * 2000-05-31 2002-08-27 Advantest Corp Probe contact system having planarity adjustment mechanism
DE10039336C2 (de) * 2000-08-04 2003-12-11 Infineon Technologies Ag Verfahren zum Testen von Halbleiterschaltungen und Testvorrichtung zur Durchführung des Verfahrens
US6841991B2 (en) * 2002-08-29 2005-01-11 Micron Technology, Inc. Planarity diagnostic system, E.G., for microelectronic component test systems
US7084650B2 (en) * 2002-12-16 2006-08-01 Formfactor, Inc. Apparatus and method for limiting over travel in a probe card assembly
US7545147B2 (en) * 2004-08-31 2009-06-09 Eaglepicher Technologies, Llc System and method for nondestructive testing of thermal batteries
US7385411B2 (en) 2004-08-31 2008-06-10 Formfactor, Inc. Method of designing a probe card apparatus with desired compliance characteristics
US7671614B2 (en) * 2005-12-02 2010-03-02 Formfactor, Inc. Apparatus and method for adjusting an orientation of probes
US7688085B2 (en) * 2006-06-13 2010-03-30 Formfactor, Inc. Contactor having a global spring structure and methods of making and using the contactor
US7825675B2 (en) * 2006-11-01 2010-11-02 Formfactor, Inc. Method and apparatus for providing active compliance in a probe card assembly

Also Published As

Publication number Publication date
KR20090082446A (ko) 2009-07-30
US20080100312A1 (en) 2008-05-01
EP2080030A2 (en) 2009-07-22
US8513965B2 (en) 2013-08-20
TWI458984B (zh) 2014-11-01
WO2008057897A3 (en) 2008-12-11
US7825675B2 (en) 2010-11-02
JP2010508533A (ja) 2010-03-18
TW200831908A (en) 2008-08-01
CN101535822A (zh) 2009-09-16
US20110043240A1 (en) 2011-02-24
WO2008057897A2 (en) 2008-05-15

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