TW293938B - Probe card assembly and kit, and methods of using same - Google Patents

Abstract

A probe card assembly includes a probe card, a space transformer having resilient contact structures (probe elements) mounted directly to (i.e., without the need for additional connecting wires or the like) and extending from terminals on a surface thereof, and an interposer disposed between the space transformer and the probe card. The space transformer and interposer are "stacked up" so that the orientation of the space transformer, hence the orientation of the tips of the probe elements, can be adjusted without changing the orientation of the probe card. Suitable mechanisms for adjusting the orientation of the space transformer, and for determining what adjustments to make, are disclosed. The interposer has resilient contact structures extending from both the top and bottom surfaces thereof, and ensures that electrical connections are maintained between the space transformer and the probe card throughout the space transformer's range of adjustment, by virtue of the interposer's inherent compliance. Multiple die sites on a semiconductor wafer are readily probed using the disclosed techniques, and the probe elements can be arranged to optimize probing of an entire wafer. Composite interconnection elements having a relatively soft core overcoated by a relatively hard shell, as the resilient contact structures are described.

Description

293938

On the top surface; an intermediate insert has a top surface, a chimney, and a bottom surface, a first plurality of elastic contact structures extend from the bottom surface Qiu Yidan Qiong Qiong surface; and a second plurality of contact structures from Its top surface extends; and one of the space transformers has a top surface, a bottom surface, and a plurality of contact pads are placed on its bottom surface to extend from its top surface with two or more elastic contact structures; wherein: The first plurality of elastic contact structures and the contact terminals of the probe card generate a pressure connection; and the device contacts the second plurality of elastic contact structures and the interval conversion unit to generate pressure connection; A device that does not need to change the orientation of the probe card 9. The probe card assembly according to item 8 of the patent application scope, where the device for adjusting the plane of the interval converter includes: multiple differential spirals, each including an outer The differential spiral element and the internal differential spiral element act on the bottom surface of the space transformer. 1 〇 · Probe card assembly according to item 9 of the patent application scope, separately included : Multiple pivot spheres are placed on the terminal of the internal differential spiral element. 1 1 · According to the probe card assembly of item 9 of the patent application scope, it also includes: The actuator mounting plate is placed under the probe card; Among them: -3- 293938 VI. Patent scope The differential screw is threaded into the actuator mounting plate. 1 2 · The probe card assembly according to item 8 of the patent scope is used to adjust the interval conversion The device of the plane of the device includes: a plurality of actuators acting on the bottom surface of the interval converter in response to a computer.

3. A method of manufacturing a tip structure for a terminal of a contact structure, comprising: depositing at least one layer of at least one conductive surface; depositing a layer of shielding material on top of at least one conductive layer of electrical material on a silicon wafer · A pattern of openings is formed on the shielding material; at least one layer of at least one kind of conductive substance enters this layer;

Remove this masking material 'to form a tip structure ;. deposit a bonding material on at least one conductive substance previously deposited in the opening to the layer; and v bond the tip structure to the terminal of the contact structure. Among them, 14 · According to the method of claim 13 of the patent application scope, the contact structure is an elastic contact structure. 15. The method according to item 13 of the patent application scope This contact structure is a composite interconnection element. 293938 6. Scope of patent application 16. According to the method of item 13 of the patent application scope, where the contact structure is an elastic contact structure placed on top of the space transformer of the probe card assembly. -5-