JP5788153B2 - Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置 - Google Patents

Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置 Download PDF

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JP5788153B2
JP5788153B2 JP2010169338A JP2010169338A JP5788153B2 JP 5788153 B2 JP5788153 B2 JP 5788153B2 JP 2010169338 A JP2010169338 A JP 2010169338A JP 2010169338 A JP2010169338 A JP 2010169338A JP 5788153 B2 JP5788153 B2 JP 5788153B2
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ray
rays
diffracted
sample
polycapillary
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Japanese (ja)
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JP2012032164A (ja
JP2012032164A5 (enExample
Inventor
中野　朝雄
朝雄 中野
義徳 上ヱ地
義徳 上ヱ地
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Rigaku Corp
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Rigaku Corp
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Priority to JP2010169338A priority Critical patent/JP5788153B2/ja
Application filed by Rigaku Corp filed Critical Rigaku Corp
Priority to GB1301244.8A priority patent/GB2495260B/en
Priority to CN201180036808.XA priority patent/CN103026215B/zh
Priority to US13/812,556 priority patent/US9518940B2/en
Priority to DE112011102492T priority patent/DE112011102492T5/de
Priority to PCT/JP2011/067278 priority patent/WO2012014982A1/ja
Publication of JP2012032164A publication Critical patent/JP2012032164A/ja
Publication of JP2012032164A5 publication Critical patent/JP2012032164A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/301—Accessories, mechanical or electrical features portable apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2010169338A 2010-07-28 2010-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置 Expired - Fee Related JP5788153B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010169338A JP5788153B2 (ja) 2010-07-28 2010-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置
CN201180036808.XA CN103026215B (zh) 2010-07-28 2011-07-28 X射线衍射方法以及使用该方法的便携式x射线衍射装置
US13/812,556 US9518940B2 (en) 2010-07-28 2011-07-28 X-ray diffraction method and portable X-ray diffraction apparatus using same
DE112011102492T DE112011102492T5 (de) 2010-07-28 2011-07-28 Röntgenbeugungsverfahren und tragbares Röntgenbeugungsgerät, das dieses verwendet
GB1301244.8A GB2495260B (en) 2010-07-28 2011-07-28 X-ray diffraction method and portable x-ray diffraction apparatus using same
PCT/JP2011/067278 WO2012014982A1 (ja) 2010-07-28 2011-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010169338A JP5788153B2 (ja) 2010-07-28 2010-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置

Related Child Applications (1)

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JP2015001667A Division JP6084993B2 (ja) 2015-01-07 2015-01-07 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置

Publications (3)

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JP2012032164A JP2012032164A (ja) 2012-02-16
JP2012032164A5 JP2012032164A5 (enExample) 2012-09-13
JP5788153B2 true JP5788153B2 (ja) 2015-09-30

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US (1) US9518940B2 (enExample)
JP (1) JP5788153B2 (enExample)
CN (1) CN103026215B (enExample)
DE (1) DE112011102492T5 (enExample)
GB (1) GB2495260B (enExample)
WO (1) WO2012014982A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5695589B2 (ja) * 2012-03-02 2015-04-08 株式会社リガク Ｘ線強度補正方法およびｘ線回折装置
CN102625555A (zh) * 2012-04-05 2012-08-01 无锡日联科技有限公司 一种可用于连续工作状态下的物理聚焦微焦点x射线源
KR20140145682A (ko) * 2013-06-13 2014-12-24 삼성전자주식회사 엑스선 영상 장치 및 그 제어방법
US10161887B2 (en) * 2015-01-20 2018-12-25 United Technologies Corporation Systems and methods for materials analysis
CN104897705B (zh) * 2015-06-26 2019-05-21 北京师范大学 一种识别液体种类的x射线衍射谱仪与方法
KR101867318B1 (ko) * 2016-11-23 2018-06-15 (주)이림전자 휴대용 엑스레이장치의 엑스레이 모듈 어셈블리
JP6776181B2 (ja) * 2017-05-31 2020-10-28 株式会社神戸製鋼所 応力測定方法
WO2019117276A1 (ja) * 2017-12-15 2019-06-20 株式会社堀場製作所 放射線検出器及び放射線検出装置
EP3885748A4 (en) * 2018-11-22 2022-10-19 Rigaku Corporation SAMPLE HOLDER OF A SINGLE-CRYSTAL X-RAY STRUCTURAL ANALYSIS DEVICE, SAMPLE HOLDER UNIT AND OCCLUSION METHOD

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2852682B2 (ja) * 1990-03-19 1999-02-03 マツダ株式会社 セラミック部品の強度測定法
US5497008A (en) * 1990-10-31 1996-03-05 X-Ray Optical Systems, Inc. Use of a Kumakhov lens in analytic instruments
JP2000146872A (ja) * 1998-11-17 2000-05-26 Rigaku Corp Ｘ線回折装置
JP2000314709A (ja) * 1999-04-30 2000-11-14 Agency Of Ind Science & Technol 結晶構造データと構成元素データを同時に計測するシステム及び方法
JP2001194325A (ja) * 2000-01-06 2001-07-19 Ours Tex Kk Ｘ線分析装置および方法
JP4777539B2 (ja) * 2001-05-29 2011-09-21 エスアイアイ・ナノテクノロジー株式会社 複合ｘ線分析装置
US6697453B1 (en) * 2002-02-08 2004-02-24 Metscan Technologies, Llc Portable X-ray diffractometer
EP1660874B1 (en) 2003-08-04 2014-05-07 X-Ray Optical Systems, Inc. In-situ x-ray diffraction system using sources and detectors at fixed angular positions
JP3912606B2 (ja) 2004-10-26 2007-05-09 株式会社リガク Ｘ線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法
US7321652B2 (en) * 2005-09-15 2008-01-22 Jordan Valley Semiconductors Ltd. Multi-detector EDXRD
WO2008097345A2 (en) * 2006-08-10 2008-08-14 X-Ray Optical Systems, Inc. Wide parallel beam diffraction imaging method and system
EP2260294A4 (en) * 2008-02-25 2012-02-08 X Ray Optical Sys Inc SAMPLE MODULE WITH SAMPLE FLOWS WINDOW SPLIT, FOR X-RAY ANALYSIS SYSTEM
JP5150316B2 (ja) * 2008-03-12 2013-02-20 理研計器株式会社 エックス線分析装置用支持台
GB0807474D0 (en) * 2008-04-24 2008-12-03 Durham Scient Crystals Ltd Determination of Composition of Liquids
US7646847B2 (en) 2008-05-01 2010-01-12 Bruker Axs Inc. Handheld two-dimensional X-ray diffractometer
JP2012013423A (ja) * 2010-06-29 2012-01-19 Nippon Steel Corp Ｘ線応力測定装置

Also Published As

Publication number Publication date
GB2495260A (en) 2013-04-03
DE112011102492T5 (de) 2013-07-25
CN103026215B (zh) 2016-08-31
JP2012032164A (ja) 2012-02-16
US9518940B2 (en) 2016-12-13
GB2495260B (en) 2016-11-02
CN103026215A (zh) 2013-04-03
WO2012014982A1 (ja) 2012-02-02
GB201301244D0 (en) 2013-03-06
US20130129051A1 (en) 2013-05-23

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