JP5781002B2 - 電位測定装置 - Google Patents

電位測定装置 Download PDF

Info

Publication number
JP5781002B2
JP5781002B2 JP2012098097A JP2012098097A JP5781002B2 JP 5781002 B2 JP5781002 B2 JP 5781002B2 JP 2012098097 A JP2012098097 A JP 2012098097A JP 2012098097 A JP2012098097 A JP 2012098097A JP 5781002 B2 JP5781002 B2 JP 5781002B2
Authority
JP
Japan
Prior art keywords
shutter
coil
potential measuring
measuring device
yoke
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012098097A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013224905A (ja
JP2013224905A5 (enExample
Inventor
佳成 深田
佳成 深田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP2012098097A priority Critical patent/JP5781002B2/ja
Priority to KR1020130042885A priority patent/KR102045887B1/ko
Priority to US13/867,421 priority patent/US9110109B2/en
Publication of JP2013224905A publication Critical patent/JP2013224905A/ja
Publication of JP2013224905A5 publication Critical patent/JP2013224905A5/ja
Application granted granted Critical
Publication of JP5781002B2 publication Critical patent/JP5781002B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Control Or Security For Electrophotography (AREA)
JP2012098097A 2012-04-23 2012-04-23 電位測定装置 Active JP5781002B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012098097A JP5781002B2 (ja) 2012-04-23 2012-04-23 電位測定装置
KR1020130042885A KR102045887B1 (ko) 2012-04-23 2013-04-18 전위측정장치
US13/867,421 US9110109B2 (en) 2012-04-23 2013-04-22 Potential measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012098097A JP5781002B2 (ja) 2012-04-23 2012-04-23 電位測定装置

Publications (3)

Publication Number Publication Date
JP2013224905A JP2013224905A (ja) 2013-10-31
JP2013224905A5 JP2013224905A5 (enExample) 2015-04-16
JP5781002B2 true JP5781002B2 (ja) 2015-09-16

Family

ID=49580814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012098097A Active JP5781002B2 (ja) 2012-04-23 2012-04-23 電位測定装置

Country Status (3)

Country Link
US (1) US9110109B2 (enExample)
JP (1) JP5781002B2 (enExample)
KR (1) KR102045887B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6039916B2 (ja) * 2012-04-23 2016-12-07 株式会社コガネイ 電位測定装置
KR101554509B1 (ko) * 2014-07-01 2015-09-22 (주)선재하이테크 대전체의 정전하 감지기 및 그 측정 장치
TWI627424B (zh) * 2017-04-26 2018-06-21 廣達電腦股份有限公司 靜電偵測裝置以及方法
KR102619950B1 (ko) * 2017-12-28 2024-01-03 니덱 어드밴스 테크놀로지 가부시키가이샤 검사 장치 및 검사 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2657321B2 (ja) * 1990-02-20 1997-09-24 東京エレクトロン株式会社 イオン注入装置
JPH04317350A (ja) * 1991-04-16 1992-11-09 Matsushita Electric Ind Co Ltd 非接触型電位測定装置
JP3481720B2 (ja) * 1995-03-31 2003-12-22 株式会社リコー 表面電位測定装置
JPH10115647A (ja) 1996-10-14 1998-05-06 Hirose Chierii Precision:Kk 表面電位センサ
US6177800B1 (en) * 1998-11-10 2001-01-23 Xerox Corporation Method and apparatus for using shuttered windows in a micro-electro-mechanical system
JP2007051885A (ja) * 2005-08-16 2007-03-01 Canon Inc 電位測定装置、及び電位測定方法
JP5108795B2 (ja) 2009-01-15 2012-12-26 パナソニック株式会社 振動型リニアアクチュエータ
JP6039916B2 (ja) * 2012-04-23 2016-12-07 株式会社コガネイ 電位測定装置

Also Published As

Publication number Publication date
KR102045887B1 (ko) 2019-11-18
US20130307554A1 (en) 2013-11-21
JP2013224905A (ja) 2013-10-31
KR20130119353A (ko) 2013-10-31
US9110109B2 (en) 2015-08-18

Similar Documents

Publication Publication Date Title
JP6039916B2 (ja) 電位測定装置
CN108855846B (zh) 振动产生装置
JP5585550B2 (ja) 継電器
US8188623B2 (en) Linear vibration motor
US10536064B2 (en) Linear vibration motor
US20110204732A1 (en) Linear motor and mobile device having linear motor
JP2013224904A5 (enExample)
JP5781002B2 (ja) 電位測定装置
KR102202568B1 (ko) 진동 발생 장치 및 전자 기기
JP2017534066A5 (enExample)
JP2012039824A (ja) 振動発電機
CN111921828B (zh) 振动产生装置
JP2007037273A (ja) 振動型リニアアクチュエータ
JP2013224905A5 (enExample)
JP7421459B2 (ja) 磁気検出装置および回転検出装置
KR101022899B1 (ko) 수평 리니어 진동자
JP2004112937A (ja) 磁気アクチュエータ及び触覚呈示装置
CN120883025A (zh) 脉冲信号发生器和编码器
KR102066675B1 (ko) 진동 모터
JP2016201899A (ja) 振動構造体およびそれを用いた振動発電装置
JP5675009B2 (ja) 位置検出装置
JP5742860B2 (ja) 振動発電機
KR20180023199A (ko) 진동 발생 장치
KR20190057948A (ko) 진동 모터
JPH0824787A (ja) 起振装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150227

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150227

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20150227

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20150318

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150331

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150601

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150707

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150714

R150 Certificate of patent or registration of utility model

Ref document number: 5781002

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250