JP5757783B2 - スピントランスファー発振器構造およびその製造方法 - Google Patents
スピントランスファー発振器構造およびその製造方法 Download PDFInfo
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Description
同様に、C.Slonczewski による非特許文献1に開示されているスピントルクトランスファー(STT)磁化スイッチングは、ギガビット領域においてSTTーMRAM等のスピントロニクス素子に適用できる可能性があることから、近年、大きな関心を呼び起こした。
(a)Co、Ni、およびCo/Ni界面によるスピン偏極の程度が非常に高い。
(b)強固なNi層の挿入により、より安定性が高い。
(c)飽和磁化が、他のCo/Mの組み合わせ(Mは金属)の場合の2倍の1テスラと、非常に高い。
(d)安価である。
[Co(t1)/NiFe(t2)]
[Co(t1)/NiCo(t2)]
[CoFe(t1)/NiFe(t2)]
[CoFe(t1)/NiCo(t2)]
[CoFeR(t1)/Ni(t2)]
[CoFeR(t1)/NiFe(t2)]
[CoFeR(t1)/NiCo(t2)]
[Co(t1)/NiFe(t2)]
[Co(t1)/NiCo(t2)]
[CoFe(t1)/NiFe(t2)]
[CoFe(t1)/NiCo(t2)]
[CoFeR(t1)/Ni(t2)]
[CoFeR(t1)/NiFe(t2)]
[CoFeR(t1)/NiCo(t2)]
または
(Ta/Ru/Cu)/{[CoFe(t1)/Ni(t2)]Y /FeCo}/Cu/{[CoFe(t1)/Ni(t2)]x /FeCo}/(Ru/Ta/Ru)
第1の実施例における、ボトムSILを有する一連のSTO構造を製造した。
このボトムSILの構成は、Ta1/Ru2/Cu2/[Co(100-Z) FeZ 0.2/Ni0.5]X /スペーサ/FeCo10/Ru1/Ta4/Ru3という構造によって表される。各層の後ろの数値は、その層の厚みをナノメートルによって表す。
好適なボトムSILを製造した。
このボトムSIL構造は、Ta1/Ru2/Cu2/[Co(100-Z) FeZ 0.2/Ni0.5]X /スペーサ/[Co(100-Z) FeZ 0.2/Ni0.5]Y /FeCo10/Ru1/Ta4/Ru3という構造によって表される。この構造は、第1の実施の形態の変形例であり、非金属製スペーサと、FeCo10なる層との間に(CoFe/Ni)Y なる積層を挿入し、複合FGLを形成する(yは5以上30以下である)。
他の実施例における、トップSILを有する一連のSTO構造を製造した。
このトップSILの構成は、Ta1/Ru2/Cu2/FeCo10/スペーサ/[Co(100-Z) FeZ 0.2/Ni0.5]X /Ru1/Ta4/Ru3という構造によって表される。各層の後ろの番号は、その層の厚みをナノメートルによって表す。
好適なトップSILを製造した。
このトップSIL構造は、Ta1/Ru2/Cu2/[Co(100-Z) FeZ 0.2/Ni0.5]Y /FeCo10/スペーサ/[Co(100-Z) FeZ 0.2/Ni0.5]X /Ru1/Ta4/Ru3という構造によって表される。この構造は、例3におけるトップSIL構造を有する実施例の変形例であり、シード層とFeCo10層との間に(CoFe/Ni)Y という積層構造を挿入することにより、複合FGLを形成している(y=5〜30)。
他の好適な実施例として、例4に示すトップSIL構成をさらに変形し、[Co(100-Z) FeZ 0.2/Ni0.5]X という構造と交換結合するFeCo層を含むように複合SILを形成してもよい。その構造は、(Ta1/Ru2/Cu2)/{[Co(100-Z) FeZ 0.2/Ni0.5]Y /FeCo}/スペーサ/{[Co(100-Z) FeZ 0.2/Ni0.5]X /FeCo}/Ru1/Ta4/Ru3という構造によって表される。
Claims (27)
- スピントロニクス素子に適用されるスピントランスファー発振器(STO)構造であって、
基体上に形成された下部タンタル(Ta)層と、前記下部タンタル層と接するように形成された、fcc[111]またはhcp[001]結晶配向構造を有する金属層M1とを少なくとも含む複合シード層と、
高垂直磁気異方性(PMA)を示す(磁性層A1/磁性層A2)x なる積層構造(但し、x=5〜50;A1の厚さt1<A2の厚さt2)を含み、前記複合シード層の上面に接して形成されたスピン注入層(SIL)と、
前記スピン注入層の上に形成された非磁性スペーサ層と、
前記非磁性スペーサ層の上に形成された高飽和磁束密度層(高Bs層)を含む磁界発生層(FGL)と、
前記磁界発生層の上面に接するように形成されたキャップ層と
を備え、
前記磁性層A1は、Co、CoFeまたはCoFeR(但し、Rは、Ru、Rh、Pd、Ti、Zr、Hf、Ni、Cr、Mg、MnまたはCuである)からなり、前記磁性層A2は、Ni、NiFeまたはNiCo(但し、NiFeおよびNiCoにおけるNi含有量は50原子%ないし100原子%である)からなる(但し、前記磁性層A1がCoである場合、前記磁性層A2はNiFeまたはNiCoであり、前記磁性層A2がNiである場合、前記磁性層A1はCoFeまたはCoFeRである)
STO構造。 - 前記磁界発生層は、FeCo、または、Al、Ge、Si、Ga、B、C、SeおよびSnのうちから選択される少なくとも1種の原子を含むFeCo合金を含む
請求項1に記載のSTO構造。 - 前記複合シード層において、前記下部タンタル層は0.5nmないし10nmの厚さを有し、前記金属層M1は1nmないし10nmの厚さを有する
請求項1に記載のSTO構造。 - 前記複合シード層において、前記金属層M1はRu、Cu、AuまたはNiCrからなり、前記複合シード層はTa/M1なる構成を有する
請求項1に記載のSTO構造。 - 前記複合シード層は、前記金属層M1とは異なる金属層M2(但し、M2は、Cu、Ti、Pd、W、Rh、AuまたはAg)を前記金属層M1の上にさらに含むことにより、Ta/M1/M2なる構造を有し、
前記下部タンタル層の厚さは0.5nmないし10nmであり、前記金属層M1の厚さは1nmないし10nmであり、前記金属層M2の厚さは0.1nmないし10nmである
請求項1に記載のSTO構造。 - 前記磁性層A1の厚さt1は0.05nmないし0.5nmであり、前記磁性層A2の厚さt2は0.2nmないし1nmである
請求項1に記載のSTO構造。 - 前記磁界発生層は、高Bs層である前記FeCo層に加えて、さらに、前記非磁性スペーサ層の上面に接するように形成された高PMAの(A1/A2)Y 積層体(但し、Y=5〜30; A1/A2は、Co/NiFe、Co/NiCo、CoFe/NiFe、CoFe/NiCo、CoFeR/Ni、CoFeR/NiFeまたはCoFeR/NiCo; Rは、Ru、Rh、Pd、Ti、Zr、Hf、Ni、Cr、Mg、MnまたはCu)を含むことにより、(A1/A2)Y /FeCoなる複合FGL構造を有し、
前記高Bs層であるFeCo層が前記高PMAの(A1/A2)Y 積層体と交換結合することにより、前記高Bs層の内部に部分的なPMAが生成されている
請求項2に記載のSTO構造。 - 非磁性スペーサ層はCPP−GMR構造を与えるCuからなり、またはCPP−TMR構造を与えるAlOX 、MgO、TiOX 、TiAlOX 、MgZnOX もしくはZnOX からなる
請求項1に記載のSTO構造。 - 前記スピン注入層は、前記非磁性スペーサ層の下面に接するFeCo層をさらに含むことにより、(A1/A2)x /FeCoなる複合SIL構造を有し、
前記FeCo層が前記(A1/A2)x 積層構造と交換結合することにより、より強固なSIL構造が形成されている
請求項7に記載のSTO構造。 - 前記基体が記録ヘッドにおける主磁極であり、前記キャップ層の上面が前記記録ヘッドのトレーリングシールドに接している
請求項1に記載のSTO構造。 - スピントロニクス素子に適用されるスピントランスファー発振器(STO)構造であって、
基体上に形成された下部タンタル(Ta)層と、前記下部タンタル層と接するように形成された、fcc[111]またはhcp[001]結晶配向構造を有する金属層M1とを少なくとも含む複合シード層と、
前記複合シード層の上に形成された高飽和磁束密度層(高Bs層)を含む磁界発生層(FGL)と、
前記磁界発生層の上に形成された非磁性スペーサ層と、
高垂直磁気異方性(PMA)を示す(磁性層A1/磁性層A2)x なる積層構造(但し、x=5〜50;A1の厚さt1<A2の厚さt2)を含み、前記非磁性スペーサ層の上面に接して形成されたスピン注入層(SIL)と、
前記スピン注入層の上面に接するように形成されたキャップ層と
を備え、
前記磁性層A1は、Co、CoFeまたはCoFeR(但し、Rは、Ru、Rh、Pd、Ti、Zr、Hf、Ni、Cr、Mg、MnまたはCuである)からなり、前記磁性層A2は、Ni、NiFeまたはNiCo(但し、NiFeおよびNiCoにおけるNi含有量は50原子%ないし100原子%である)からなる(但し、前記磁性層A1がCoである場合、前記磁性層A2はNiFeまたはNiCoであり、前記磁性層A2がNiである場合、前記磁性層A1はCoFeまたはCoFeRである)
STO構造。 - 前記磁界発生層は、FeCo、または、Al、Ge、Si、Ga、B、C、SeおよびSnのうちから選択される少なくとも1種の原子を含むFeCo合金を含む
請求項11に記載のSTO構造。 - 前記複合シード層において、前記下部タンタル層は0.5nmないし10nmの厚さを有し、前記金属層M1は1nmないし10nmの厚さを有する
請求項11に記載のSTO構造。 - 前記複合シード層において、前記金属層M1はRu、Cu、AuまたはNiCrからなり、前記複合シード層はTa/M1なる構成を有する
請求項11に記載のSTO構造。 - 前記複合シード層は、前記金属層M1とは異なる金属層M2(但し、M2は、Cu、Ti、Pd、W、Rh、AuまたはAg)を前記金属層M1の上にさらに含むことにより、Ta/M1/M2なる構造を有し、
前記下部タンタル層の厚さは0.5nmないし10nmであり、前記金属層M1の厚さは1nmないし10nmであり、前記金属層M2の厚さは0.1nmないし10nmである
請求項11に記載のSTO構造。 - 前記磁性層A1の厚さt1は0.05nmないし0.5nmであり、前記磁性層A2の厚さt2は0.2nmないし1nmである
請求項11に記載のSTO構造。 - 前記磁界発生層は、高Bs層である前記FeCo層に加えて、さらに、前記複合シード層の上面に接するように形成された高PMAの(A1/A2)Y 積層体(但し、Y=5〜30; A1/A2は、Co/NiFe、Co/NiCo、CoFe/NiFe、CoFe/NiCo、CoFeR/Ni、CoFeR/NiFeまたはCoFeR/NiCo; Rは、Ru、Rh、Pd、Ti、Zr、Hf、Ni、Cr、Mg、MnまたはCu)を含むことにより、(A1/A2)Y /FeCoなる複合FGL構造を有し、
前記高Bs層であるFeCo層が前記高PMAの(A1/A2)Y 積層体と交換結合することにより、前記高Bs層の内部に部分的なPMAが生成されている
請求項12に記載のSTO構造。 - 非磁性スペーサ層はCPP−GMR構造を与えるCuからなり、またはCPP−TMR構造を与えるAlOX 、MgO、TiOX 、TiAlOX 、MgZnOX もしくはZnOX からなる
請求項11に記載のSTO構造。 - 前記スピン注入層は、前記キャップ層の下面に接するFeCo層をさらに含むことにより、(A1/A2)x /FeCoなる複合SIL構造を有し、
前記FeCo層が前記(A1/A2)x 積層構造と交換結合することにより、より強固なSIL構造が形成されている
請求項17に記載のSTO構造。 - 前記基体が記録ヘッドにおける主磁極であり、前記キャップ層の上面が前記記録ヘッドのトレーリングシールドに接している
請求項11に記載のSTO構造。 - スピントロニクス素子に適用されるスピントランスファー発振器(STO)構造の製造方法であって、
基体上に、下部タンタル(Ta)層と、前記下部タンタル層と接するfcc[111]またはhcp[001]結晶配向を有する金属層M1とを少なくとも含む、fcc[111]結晶格子を有する複合シード層を形成する工程と、
前記複合シード層の上に、所定の積層構造体を形成する工程と
を含み、
前記所定の積層構造体が、
(Co/NiFe)x 、(Co/NiCo)x 、(CoFe/Ni)x 、(CoFe/NiFe)x 、(CoFe/NiCo)x 、(CoFeR/Ni)x 、(CoFeR/NiFe)x 、または(CoFeR/NiCo)x なる積層構造(但し、NiFeおよびNiCoにおけるNi含有量は50原子%ないし100原子%であり、x=5〜50であり、Rは、Ru、Rh、Pd、Ti、Zr、Hf、Ni、Cr、Mg、MnまたはCuであり、Ni、NiFeまたはNiCoの厚さt2はCo、CoFeまたはCoFeRの厚さt1よりも大きい)を有する積層スピン注入層(SIL)と、
高飽和磁束密度層(高Bs層)を含む磁界発生層(FGL)と、
前記積層スピン注入層と前記磁界発生層との間に形成された非磁性スペーサ層と、
最上層としてのキャップ層と
を有する
STO構造の製造方法。 - さらに、
150°Cないし300°Cの温度の下で0.5時間ないし5時間にわたって前記STO構造をアニールする工程を含む
請求項21に記載のSTO構造の製造方法。 - 前記磁界発生層は、FeCo層またはFeCo合金層を含むと共に、高PMAの(A1/A2)Y 積層体(但し、Y=5〜30)を含む構造を有し、
前記(A1/A2)Y 積層体を前記FeCo層またはFeCo合金層と交換結合させることにより、前記高Bs層の内部に部分的なPMAを生成する
請求項21に記載のSTO構造の製造方法。 - 前記積層スピン注入層と、前記磁界発生層における前記(A1/A2)Y 積層体とを、DCマグネトロンスパッタリングにより成膜する
請求項23に記載のSTO構造の製造方法。 - 前記金属層M1は、Ru、Cu、AuまたはNiCrを含む
請求項21に記載のSTO構造の製造方法。 - 前記金属層M1とは異なる金属層M2(但し、M2は、Cu、Ti、Pd、W、Rh、AuまたはAg)を前記金属層M1の上にさらに形成することにより、前記複合シード層がTa/M1/M2なる構造を有するようにし、
前記下部タンタル層の厚さを0.5nmないし10nmとし、前記金属層M1の厚さを1nmないし10nmとし、前記金属層M2の厚さを0.1nmないし10nmとする
請求項21に記載のSTO構造の製造方法。 - 前記磁性層A1の厚さt1を0.05nmないし0.5nmとし、前記磁性層A2の厚さt2を0.2nmないし1nmとする
請求項21に記載のSTO構造の製造方法。
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