JP4550713B2 - 磁気抵抗効果素子の製造方法 - Google Patents
磁気抵抗効果素子の製造方法 Download PDFInfo
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Description
本実施例においては、図3に示す積層構造を有する磁気抵抗効果素子を作製した。
下地層12:Ta[5nm]/Ru[2nm]
ピニング層13:Pt50Mn50[15nm]
ピン層14:Co90Fe10[3.6nm]/Ru[0.9nm]/{(Fe50Co50[1nm]/Cu[0.25nm])×2/Fe50Co50[1nm]}
金属層15:Cu[0.5nm]
スペーサ層16:Al2O3絶縁層22およびCu電流パス21(Al90Cu10[1nm]成膜後に第1の酸化工程/第2の酸化工程)
金属層17:Cu[0.25nm]
フリー層18:Co90Fe10[1nm]/Ni83Fe17[3.5nm]
キャップ層19:Cu[1nm]/Ta[5nm]
上電極20。
本実施例では、様々な方法を用いてCCP−CPP素子を作製し、これらのCCP−CPP素子について特性を比較した結果を説明する。作製した磁気抵抗効果素子は以下の積層構造を有する。
下地層12:Ta[5nm]/Ru[2nm]
ピニング層13:Pt50Mn50[15nm]
ピン層14:Co90Fe10[4nm]/Ru[0.9nm]/Co90Fe10[4nm]
金属層15:Cu[0.5nm]
スペーサ層16:Al2O3絶縁層22およびCu電流パス21(Al90Cu10[0.5〜1nm]成膜後に第1の酸化工程/第2の酸化工程)
金属層17:Cu[0.25nm]
フリー層18:Co90Fe10[1nm]/Ni83Fe17[3.5nm]
キャップ層19:Cu[1nm]/Ta[5nm]。
実施例2(B):第1の酸化工程の酸化ガス分圧 1×10-7Torr
実施例2(C):第1の酸化工程の酸化ガス分圧 1×10-6Torr。
第1の酸化工程の酸化ガス分圧を第2の酸化工程の酸化ガス分圧の1/10よりも高くした、2段階の酸化工程を順次行い、第1の酸化工程において第2の金属層に希ガスのイオンビームまたはRFプラズマの照射を行う。第1の酸化工程の酸化ガス分圧を5×10-6Torrとし、第2の酸化工程の酸化ガス分圧を1×10-5Torrとする。第2の酸化工程において、不完全に酸化されたAlOxに希ガス(例えばAr)のイオンビームまたはRFプラズマを照射するIAO工程を行う。
酸化ガス分圧を1×10-5Torrで一定とした、1段階の酸化工程を行う。比較例2では、1段階の酸化工程において、第2の金属層に希ガス(例えばAr)のイオンビームまたはRFプラズマを照射するIAO工程を行う。
実施例2(A):5.5%、
実施例2(B):5.0%、
実施例2(C):5.1%、
比較例1:2.5%、
比較例2:2.4%
であった。
Claims (8)
- 磁化方向が実質的に一方向に固着された磁化固着層と、磁化方向が外部磁界に対して変化する磁化自由層と、前記磁化固着層と前記磁化自由層との間に設けられた絶縁層及び前記絶縁層を貫通する電流パスを含むスペーサ層と、を有する磁気抵抗効果素子の製造方法において、
前記スペーサ層を形成するにあたり、
前記電流パスを形成する第1の非磁性金属層を成膜し、
前記第1の非磁性金属層上に、前記絶縁層に変換される、前記第1の非磁性金属層よりも酸化、窒化、または酸窒化されやすい第2の金属層を成膜し、
第1の酸化工程の酸化ガス分圧、第1の窒化工程の窒化ガス分圧、または第1の酸窒化工程の酸窒化ガス分圧が1×10 -8 Torr〜1×10 -6 Torrであり、第2の酸化工程の酸化ガス分圧、第2の窒化工程の窒化ガス分圧、または第2の酸窒化ガス分圧が1×10 -5 Torr以上である酸化工程、窒化工程または酸窒化工程を順次行い、
前記第1の酸化工程、前記第1の窒化工程、または前記第1の酸窒化工程において前記第2の金属層に希ガスのイオンビームまたはRFプラズマの照射を行う
ことを特徴とする磁気抵抗効果素子の製造方法。 - 前記第1の酸化工程の酸化ガス分圧、前記第1の窒化工程の窒化ガス分圧、または前記第1の酸窒化ガス分圧が、前記第2の酸化工程の酸化ガス分圧、前記第2の窒化工程の窒化ガス分圧、または前記第2の酸窒化工程の酸窒化ガス分圧の1/1000〜1/10であることを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
- 前記スペーサ層上に、さらに非磁性金属層を形成することを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
- 前記第1の酸化工程、前記第1の窒化工程または前記第1の酸窒化工程は、前記希ガスのイオンビームまたはRFプラズマの加速電圧を30V以上130V以下に設定して行うことを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
- 前記第2の酸化工程、前記第2の窒化工程、または前記第2の酸窒化工程は、前記第2の金属層の酸化物、窒化物、または酸窒化物に希ガスのイオンビームまたはRFプラズマを照射しながら行うことを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
- 前記第2の酸化工程、第2の窒化工程、または第2の酸窒化工程は、前記希ガスのイオンビームまたはRFプラズマの加速電圧を50V以上100V以下に設定して行うことを特徴とする請求項5に記載の磁気抵抗効果素子の製造方法。
- 前記第1の非磁性金属層は、Cu、AuおよびAgからなる群より選択される少なくとも1種の元素を含むことを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
- 前記絶縁層は、Al、Si、Hf、Mg、Ti、Ta、Mo、W、Nb、CrおよびZrからなる群より選択される少なくとも1種の元素を含む酸化物、窒化物、または酸窒化物で形成されていることを特徴とする請求項1に記載の磁気抵抗効果素子の製造方法。
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CN200610137368.8A CN100483512C (zh) | 2005-10-21 | 2006-10-20 | 磁阻效应元件的制造方法 |
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JP4786331B2 (ja) | 2005-12-21 | 2011-10-05 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
JP4514721B2 (ja) * | 2006-02-09 | 2010-07-28 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気抵抗効果ヘッド、磁気記録再生装置及び磁気記憶装置 |
JP2007299880A (ja) * | 2006-04-28 | 2007-11-15 | Toshiba Corp | 磁気抵抗効果素子,および磁気抵抗効果素子の製造方法 |
JP4550777B2 (ja) | 2006-07-07 | 2010-09-22 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッド、磁気記録再生装置及び磁気メモリ |
JP5044157B2 (ja) * | 2006-07-11 | 2012-10-10 | 株式会社東芝 | 磁気抵抗効果素子,磁気ヘッド,および磁気再生装置 |
JP4388093B2 (ja) | 2007-03-27 | 2009-12-24 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド、磁気記録再生装置 |
JP2009080904A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気記録装置 |
JP2009164182A (ja) * | 2007-12-28 | 2009-07-23 | Hitachi Global Storage Technologies Netherlands Bv | 磁気抵抗効果素子、磁気ヘッド及び磁気記録再生装置 |
US8289663B2 (en) * | 2008-04-25 | 2012-10-16 | Headway Technologies, Inc. | Ultra low RA (resistance x area) sensors having a multilayer non-magnetic spacer between pinned and free layers |
JP5039007B2 (ja) * | 2008-09-26 | 2012-10-03 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリ及び磁気記録再生装置 |
JP5032429B2 (ja) * | 2008-09-26 | 2012-09-26 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリ及び磁気記録再生装置 |
JP5039006B2 (ja) * | 2008-09-26 | 2012-10-03 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリ及び磁気記録再生装置 |
JP5032430B2 (ja) * | 2008-09-26 | 2012-09-26 | 株式会社東芝 | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリ及び磁気記録再生装置 |
JP2010080839A (ja) | 2008-09-29 | 2010-04-08 | Toshiba Corp | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリおよび磁気記録再生装置 |
WO2010107073A1 (ja) | 2009-03-19 | 2010-09-23 | 株式会社村田製作所 | 磁気インピーダンス素子およびそれを用いた磁気センサ |
US8363459B2 (en) * | 2009-06-11 | 2013-01-29 | Qualcomm Incorporated | Magnetic tunnel junction device and fabrication |
US8728333B2 (en) * | 2010-02-12 | 2014-05-20 | Headway Technologies, Inc. | Method to fabricate small dimension devices for magnetic recording applications |
JP5460375B2 (ja) * | 2010-02-22 | 2014-04-02 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
US8300356B2 (en) * | 2010-05-11 | 2012-10-30 | Headway Technologies, Inc. | CoFe/Ni Multilayer film with perpendicular anistropy for microwave assisted magnetic recording |
JP5714065B2 (ja) * | 2013-07-26 | 2015-05-07 | 株式会社東芝 | 磁気記録装置 |
JP5893184B2 (ja) * | 2015-03-12 | 2016-03-23 | 株式会社東芝 | 磁気記録装置 |
US10516096B2 (en) * | 2018-03-28 | 2019-12-24 | Globalfoundries Singapore Pte. Ltd. | Magnetic random access memory structures, integrated circuits, and methods for fabricating the same |
KR20210010744A (ko) * | 2019-07-19 | 2021-01-28 | 삼성전자주식회사 | 자기 기억 소자 |
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JP2005136309A (ja) * | 2003-10-31 | 2005-05-26 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド、ヘッドサスペンションアッセンブリ、磁気再生装置、磁気抵抗効果素子の製造方法、および、磁気抵抗効果素子製造装置 |
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US7785662B2 (en) | 2010-08-31 |
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