JP5756712B2 - 水晶デバイス - Google Patents

水晶デバイス Download PDF

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Publication number
JP5756712B2
JP5756712B2 JP2011178554A JP2011178554A JP5756712B2 JP 5756712 B2 JP5756712 B2 JP 5756712B2 JP 2011178554 A JP2011178554 A JP 2011178554A JP 2011178554 A JP2011178554 A JP 2011178554A JP 5756712 B2 JP5756712 B2 JP 5756712B2
Authority
JP
Japan
Prior art keywords
crystal
length
electrode
vibrating piece
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011178554A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013042396A (ja
JP2013042396A5 (enExample
Inventor
佐々木　啓之
啓之 佐々木
憲治 島尾
憲治 島尾
石川　学
学 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2011178554A priority Critical patent/JP5756712B2/ja
Priority to US13/584,829 priority patent/US9018826B2/en
Priority to TW101129754A priority patent/TW201310905A/zh
Priority to CN2012102932834A priority patent/CN102957395A/zh
Publication of JP2013042396A publication Critical patent/JP2013042396A/ja
Publication of JP2013042396A5 publication Critical patent/JP2013042396A5/ja
Application granted granted Critical
Publication of JP5756712B2 publication Critical patent/JP5756712B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/09—Elastic or damping supports
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011178554A 2011-08-17 2011-08-17 水晶デバイス Expired - Fee Related JP5756712B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011178554A JP5756712B2 (ja) 2011-08-17 2011-08-17 水晶デバイス
US13/584,829 US9018826B2 (en) 2011-08-17 2012-08-14 Mesa-type quartz-crystal vibrating piece and quartz crystal device
TW101129754A TW201310905A (zh) 2011-08-17 2012-08-16 台面型石英晶體振動件及石英晶體裝置
CN2012102932834A CN102957395A (zh) 2011-08-17 2012-08-16 台面型石英晶体振动件及石英晶体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011178554A JP5756712B2 (ja) 2011-08-17 2011-08-17 水晶デバイス

Publications (3)

Publication Number Publication Date
JP2013042396A JP2013042396A (ja) 2013-02-28
JP2013042396A5 JP2013042396A5 (enExample) 2014-09-18
JP5756712B2 true JP5756712B2 (ja) 2015-07-29

Family

ID=47712155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011178554A Expired - Fee Related JP5756712B2 (ja) 2011-08-17 2011-08-17 水晶デバイス

Country Status (4)

Country Link
US (1) US9018826B2 (enExample)
JP (1) JP5756712B2 (enExample)
CN (1) CN102957395A (enExample)
TW (1) TW201310905A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6318556B2 (ja) * 2013-11-11 2018-05-09 セイコーエプソン株式会社 パッケージの製造方法および電子デバイスの製造方法
US20150188025A1 (en) * 2013-12-30 2015-07-02 Nihon Dempa Kogyo Co., Ltd. Container for electronic component and electronic component
KR20160032600A (ko) 2014-09-16 2016-03-24 삼성전기주식회사 압전 진동편, 그 제조방법 및 압전 진동자
CN106160694B (zh) * 2014-09-16 2019-07-30 三星电机株式会社 压电振动构件、制造压电振动构件的方法和压电振动器
WO2016121182A1 (ja) * 2015-01-29 2016-08-04 株式会社大真空 水晶振動板、及び水晶振動デバイス
JP2016152477A (ja) 2015-02-17 2016-08-22 セイコーエプソン株式会社 振動子、振動デバイス、発振器、電子機器、および移動体
JP2016158147A (ja) * 2015-02-25 2016-09-01 京セラクリスタルデバイス株式会社 水晶素子および水晶デバイス
JP2016174301A (ja) * 2015-03-17 2016-09-29 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
CN105007056A (zh) * 2015-07-22 2015-10-28 成都泰美克晶体技术有限公司 一种具有单凸结构的压电石英晶片
JP2017153010A (ja) * 2016-02-26 2017-08-31 京セラ株式会社 水晶素子および水晶デバイス
CN108490067B (zh) * 2018-04-20 2019-08-30 中国科学院长春应用化学研究所 一种插拔式安装的石英晶体检测池

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198716A (en) * 1991-12-09 1993-03-30 The United States Of America As Represented By The United States Department Of Energy Micro-machined resonator
JP2003017978A (ja) 2001-06-29 2003-01-17 Kinseki Ltd 圧電振動子
JP4506135B2 (ja) * 2003-09-18 2010-07-21 エプソントヨコム株式会社 圧電振動子
JP2006238263A (ja) * 2005-02-28 2006-09-07 Seiko Epson Corp 圧電振動片、及び圧電振動子
JP2008263387A (ja) * 2007-04-11 2008-10-30 Epson Toyocom Corp メサ型圧電振動片
JP5471303B2 (ja) * 2009-10-27 2014-04-16 セイコーエプソン株式会社 振動片及び振動子
JP4938124B2 (ja) * 2009-12-15 2012-05-23 日本電波工業株式会社 水晶デバイス
JP5562757B2 (ja) * 2010-08-07 2014-07-30 日本電波工業株式会社 メサ型のａｔカット水晶振動片及び水晶デバイス
JP5657400B2 (ja) * 2011-01-12 2015-01-21 日本電波工業株式会社 水晶デバイス
JP2013062579A (ja) * 2011-09-12 2013-04-04 Nippon Dempa Kogyo Co Ltd 圧電デバイス及び圧電デバイスの製造方法
JP5930526B2 (ja) * 2012-02-20 2016-06-08 日本電波工業株式会社 圧電振動素子及び圧電デバイス
JP6017189B2 (ja) * 2012-06-12 2016-10-26 日本電波工業株式会社 圧電振動片及び圧電デバイス

Also Published As

Publication number Publication date
JP2013042396A (ja) 2013-02-28
US20130043771A1 (en) 2013-02-21
CN102957395A (zh) 2013-03-06
US9018826B2 (en) 2015-04-28
TW201310905A (zh) 2013-03-01

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