JP5743246B2 - 半導体装置及び関連する製造方法 - Google Patents
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Description
半導体装置構造に関する装置が提供される。半導体装置構造は、トレンチゲート構造と、トレンチゲート構造に隣接し第1の導電型を有する半導体材料の本体領域と、本体領域の下のトレンチゲート構造に隣接し、第2の導電型を有する半導体材料のドレイン領域と、本体領域内に形成され、第2の導電型を有する半導体材料のソース領域であって、本体領域の第1の部分がトレンチゲート構造とソース領域の間に配設されるソース領域と、本体領域の第1の部分を覆う水平方向ゲート構造とを含む。ある実施形態では、半導体装置構造は、トレンチゲート構造に隣接し第2の導電型を有する半導体材料の第1の領域をさらに含む。別の実施形態では、本体領域の第1の部分が、第1の領域とソース領域の間に配設される。他の実施形態では、本体領域の第2の部分が、第1の領域とドレイン領域の間に配設される。さらに他の実施形態では、半導体装置構造は、トレンチゲート構造と水平方向ゲート構造の間に配設され、第1の領域及びトレンチゲート構造を覆う誘電材料をさらに含む。ある実施形態では、トレンチゲート構造と水平方向ゲート構造が電気的に接続する。他の実施形態に従うと、水平方向ゲート構造の側面が、トレンチゲート構造からオフセットされる。さらに別の実施形態では、半導体装置構造は、トレンチゲート構造を覆い、水平方向ゲート構造の側面に隣接する誘電材料をさらに含む。別の実施形態では、半導体装置構造は、ソース領域及びこのソース領域に隣接する本体領域の第2の部分を覆う導電材料をさらに含み、第2の部分とソース領域は、この導電材料により電気的に接続する。さらに他の実施形態に従うと、ソース領域の下の本体領域の第2の部分は、ソース領域とドレイン領域の間に配設される。
Claims (10)
- 半導体装置構造を製造するための方法において、
第1の導電型を有する半導体材料の第1の領域に隣接する第1のゲート構造を形成する工程と、
前記第1の領域を覆う第2のゲート構造を形成する工程と、
第2の導電型を有するイオンを前記第1の領域に注入し、拡散させることによって、半導体材料の前記第1の領域内に第2の導電型を有する半導体材料の第2の領域を形成する工程と、
前記第2の領域内に前記第1の導電型を有する半導体材料の第3の領域を形成する工程であって、前記第2のゲート構造の下の前記第2の領域の第1の部分は前記第1のゲート構造と前記第3の領域の間に配設される、工程とを備える方法。 - 前記第2のゲート構造を形成する工程が、前記第1のゲート構造からオフセットされた前記第2のゲート構造を形成することを含む、請求項1に記載の方法。
- 前記第2の領域内に前記第1の導電型を有する半導体材料の第4の領域を形成する工程であって、前記第2の領域の前記第1の部分が前記第4の領域と前記第3の領域の間に配設される、半導体材料の第4の領域を形成する工程をさらに備える請求項2に記載の方法。
- 前記第4の領域を形成する工程が、前記第1のゲート構造に隣接する前記第4の領域を形成することを含み、前記第2の領域の第2の部分が前記第4の領域と前記第1の領域の間に配設される、請求項3に記載の方法。
- 前記第4の領域を形成する工程が、前記第2のゲート構造を注入マスクとして使用して前記第1の導電型を有するイオンを前記第2の領域に注入することを含む、請求項3に記載の方法。
- 前記第2のゲート構造を形成する工程が、
前記第1の領域を覆う導電材料の層を形成することと、
導電材料の前記層の第1の部分を取り除いて、前記第1のゲート構造に隣接する前記第1の領域の第1の部分を露出させることとを含み、
前記第2の領域を形成する工程が、前記第2の導電型を有するイオンを前記第1の領域の前記第1の部分に注入して前記第1のゲート構造に隣接する前記第2の領域の第2の部分を形成し、前記第2の領域の前記第2の部分は、前記第2の領域の前記第1の部分と前記第1のゲート構造の間に配設されることを含む、請求項1に記載の方法。 - 前記第2の領域の前記第2の部分内に前記第1の導電型を有する半導体材料の第4の領域を形成する工程をさらに含む請求項6に記載の方法。
- 前記第4の領域を形成する工程が、前記導電材料を注入マスクとして使用して、前記第1の導電型を有するイオンを前記第2の領域の前記第2の部分に注入することを含む、請求項7に記載の方法。
- 前記第1の導電型を有するイオンを注入する前に、前記第1のゲート構造と反対の前記第2のゲート構造側の前記第2の領域の第3の部分をマスキングする工程であって、前記第1の導電型を有するイオンを注入して前記第4の領域を形成すると共に前記第3の領域も形成し、前記第3の領域は前記第2の領域の前記第1の部分と前記第2の領域の第3の部分の間に配設される工程をさらに含む請求項8に記載の方法。
- 半導体装置構造を製造するための方法において、
第1の導電型を有する半導体材料の第1の領域に隣接するトレンチゲート構造を形成する工程と、
前記トレンチゲート構造からオフセットされ、前記第1の領域を覆う水平方向ゲート構造を形成する工程と、
第2の導電型を有するイオンを前記第1の領域に注入し、拡散させることによって、半導体材料の前記第1の領域内に第2の導電型を有する半導体材料の本体領域を形成する工程と、
前記トレンチゲート構造に隣接する前記本体領域内に前記第1の導電型を有する半導体材料の第2の領域を形成する工程と、
前記本体領域内に、前記第1の導電型を有する半導体材料のソース領域を形成する工程とを備え、
前記水平方向ゲート構造の下の前記本体領域の第1の部分が、前記第2の領域と前記ソース領域の間に配設され、
前記トレンチゲート構造に隣接する前記本体領域の第2の部分が、前記第1の領域と前記第2の領域の間に配設される、方法。
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