JP5741573B2 - リニアモータ - Google Patents

リニアモータ Download PDF

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Publication number
JP5741573B2
JP5741573B2 JP2012507003A JP2012507003A JP5741573B2 JP 5741573 B2 JP5741573 B2 JP 5741573B2 JP 2012507003 A JP2012507003 A JP 2012507003A JP 2012507003 A JP2012507003 A JP 2012507003A JP 5741573 B2 JP5741573 B2 JP 5741573B2
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JP
Japan
Prior art keywords
magnetic pole
linear motor
magnetic
armature
pole teeth
Prior art date
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Active
Application number
JP2012507003A
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English (en)
Japanese (ja)
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JPWO2011118568A1 (ja
Inventor
川上　誠
川上　　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP2012507003A priority Critical patent/JP5741573B2/ja
Publication of JPWO2011118568A1 publication Critical patent/JPWO2011118568A1/ja
Application granted granted Critical
Publication of JP5741573B2 publication Critical patent/JP5741573B2/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP2012507003A 2010-03-23 2011-03-22 リニアモータ Active JP5741573B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012507003A JP5741573B2 (ja) 2010-03-23 2011-03-22 リニアモータ

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2010066802 2010-03-23
JP2010066802 2010-03-23
JP2010286817 2010-12-23
JP2010286817 2010-12-23
PCT/JP2011/056798 WO2011118568A1 (ja) 2010-03-23 2011-03-22 リニアモータ
JP2012507003A JP5741573B2 (ja) 2010-03-23 2011-03-22 リニアモータ

Publications (2)

Publication Number Publication Date
JPWO2011118568A1 JPWO2011118568A1 (ja) 2013-07-04
JP5741573B2 true JP5741573B2 (ja) 2015-07-01

Family

ID=44673119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012507003A Active JP5741573B2 (ja) 2010-03-23 2011-03-22 リニアモータ

Country Status (5)

Country Link
JP (1) JP5741573B2 (de)
CN (1) CN102792571B (de)
DE (1) DE112011100996T5 (de)
TW (1) TWI519043B (de)
WO (1) WO2011118568A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014064785A1 (ja) 2012-10-24 2014-05-01 株式会社日立製作所 リニアモータ及びリニアモータ駆動システム
EP2978113A4 (de) * 2013-03-22 2017-05-03 Hitachi Metals, Ltd. Linearmotor
JP6115729B2 (ja) * 2014-01-08 2017-04-19 株式会社安川電機 リニアモータ及びリニアモータの製造方法
FR3018405B1 (fr) * 2014-03-05 2017-11-03 Jean Baptiste Drevet Generateur electrique a aimants permanents dote d`un collecteur de flux magnetique
JP2016171739A (ja) * 2015-03-09 2016-09-23 住友重機械工業株式会社 リニアモータ、ステージ装置
SE539016C2 (en) * 2015-07-17 2017-03-21 Hagnestål Anders A generator for generating electric energy from movements of sea water
DE102015116881B4 (de) * 2015-10-05 2024-01-25 Langenstein & Schemann Gmbh Umformmaschine, insbesondere Schmiedehammer
WO2017137181A1 (en) 2016-02-12 2017-08-17 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
NL2018129A (en) 2016-02-12 2017-08-21 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP6581050B2 (ja) * 2016-08-24 2019-09-25 川崎重工業株式会社 ロボットの遠隔監視システム
WO2018167970A1 (ja) * 2017-03-17 2018-09-20 三菱電機株式会社 リニアモータ
TWI664795B (zh) * 2017-03-24 2019-07-01 日商日立金屬股份有限公司 Linear motor
CN107918107B (zh) * 2017-12-14 2023-09-08 安徽大学 永磁同步直线电机的退磁检测装置及检测方法
CN110165852B (zh) * 2019-06-19 2023-04-07 山东大学 一种双定子相组集中绕线聚磁式永磁直线电机

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10327571A (ja) * 1997-05-23 1998-12-08 Nikon Corp リニアパルスモータ
JP2001145328A (ja) * 1999-11-17 2001-05-25 Nikon Corp リニアモータ並びにこれを用いたステージ装置及び露光装置
JP2005185061A (ja) * 2003-12-22 2005-07-07 Okuma Corp リニアモータ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
WO2006077958A1 (ja) * 2005-01-21 2006-07-27 Nikon Corporation リニアモータ、ステージ装置、及び露光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002027729A (ja) 2000-07-06 2002-01-25 Hitachi Kiden Kogyo Ltd リニアモータ
JP3945150B2 (ja) 2000-11-06 2007-07-18 株式会社日立製作所 リニアモータ
JP4497986B2 (ja) 2004-03-31 2010-07-07 山洋電気株式会社 クローポール型三相リニアモータ
JP5083893B2 (ja) * 2008-01-29 2012-11-28 国立大学法人東京工業大学 電磁石形アクチュエータ及び平面モータ
JP5540482B2 (ja) * 2008-08-29 2014-07-02 日立金属株式会社 アクチュエータ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10327571A (ja) * 1997-05-23 1998-12-08 Nikon Corp リニアパルスモータ
JP2001145328A (ja) * 1999-11-17 2001-05-25 Nikon Corp リニアモータ並びにこれを用いたステージ装置及び露光装置
JP2005185061A (ja) * 2003-12-22 2005-07-07 Okuma Corp リニアモータ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
WO2006077958A1 (ja) * 2005-01-21 2006-07-27 Nikon Corporation リニアモータ、ステージ装置、及び露光装置

Also Published As

Publication number Publication date
CN102792571B (zh) 2016-01-20
JPWO2011118568A1 (ja) 2013-07-04
CN102792571A (zh) 2012-11-21
DE112011100996T5 (de) 2013-01-24
TW201212490A (en) 2012-03-16
TWI519043B (zh) 2016-01-21
WO2011118568A1 (ja) 2011-09-29

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