201212490 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種組合具有複數個板狀永久磁鐵之可 動子及具有驅動線圈之電機子（固定子）而成之線性馬達。 【先前技術】 針對電子電路基板之檢查裝置的探針（檢查用接觸元 件）之垂直移動機構、或取放（pick and place，拿取零件 並放置於預定之位置）塑機器人之垂直移動機構等，要求高 速之移動且高精確度的定位。因此，在以滾珠螺桿將旋轉 型馬達之輸出轉換為平行運動（垂直運動）之習知方法中， 由於移動速度慢，因此無法滿足上述要求。 因此’在上述垂直移動中，係利用可直接取出平行運 動輸出之線性馬達。就將配設有多數個板狀永久磁鐵之四 方形狀的永久磁鐵構造體作為可動子，將具有通電線圈之 電機子作為固定子，且具有使可動子貫通於固定子之構成 的線性馬達而言，提案有各種形式者（例如專利文獻丨、2、 3 等）。 、 (先前技術文獻） (專利文獻） 專利文獻1 :日本特開2002-27729號公報 專利文獻2 :日本特開2002-142437號公報 專利文獻3 :日本特開2005-295708號公報 【發明内容】 (發明所欲解決之課題） 322935 4 201212490 習知之線性馬達與滾珠螺桿相比反應雖較快，但因可 動子之質量較大，雖可確保充分之推力，但無法實現所要 求之水準的反應速度。適用於高速化之線性馬達的構造為 可動磁鐵型，為了實現小型且具有大推力之線性馬達，必 須使電機子之磁極間距變小。 電機子之磁極係對應可動子之永久磁鐵的排列週期而 以特定之比率週期地設置，因此在各個磁極捲繞有驅動用 的線圈。為了提高線性馬達之推力密度，雖必須使磁極間 距變小’但在此種個別繞線構造中會有以下問題：捲繞之 線圈的空間會變窄，伴隨線圈之電阻的上昇，驅動時之發 熱會增加。 為了要解決該問題，提案有一種利用相位總括捲繞之 爪桿（claw-pole)型（爪齒型）之電機子的線性馬達。在該相 位總括捲繞方式中，使線圈總括地捲繞在電機子之磁極成 為同極的部分，減少線圏之個數，確保廣寬之捲繞線區域， 而具有使線圏之電阻降低的效果。然而，在該相位總括捲 繞方式中，由於一般係將成為對極之磁極齒以N極、S極 交替之方式配置，因此特別是在使磁極間距變小時，在相 鄰之磁極間短路的磁通會變多，而無法將從電機子產生之 磁通有效地施加在可動子之永久磁鐵側。並且，當在電機 子之磁極間短路的磁通之比例變大時，會有最大推力降低 且推力體格比降低之課題。 曾提案有一種以防止上述之異極間之磁通的短路為目 的之單極（monopolar)型的線性馬達。在該單極型中，未作 5 322935 201212490 成為如上所述將電機子之磁極齒交互地配置成N極、s極 的構造，而係使同時激磁之極性僅成為N極、S極之任一 極性。此時，由於成為對極之磁極齒並未存在於電機子， 因此不會產生短路磁場，而可提高作為比例限界之推力的 值。該方式係由於構造簡單，因此具有可小型化之優點。 然而，由於與雙極（bipolar)型相比較，永久磁鐵之利用率 會變為一半’因此就相同一之永久磁鐵的排列而言，施加 相同之驅動磁動勢時，推力係降低為1/2。此外，由於有 助於驅動之永久磁鐵的面積成為雙極型之一半，因此會有 以下課題：使相同程度之推力產生時永久磁鐵之負荷會變 高，並產生驅動時之永久磁鐵的磁導係數大幅降低之部 分，而有使永久減磁產生之危險性。 以往，在具有永久磁鐵及軟質磁性體之磁軛的可動子 中，會有因軟質磁性體之比透磁率高而產生之掣動力 (detent force，產生在移動方向之應力脈動）變大的問題。 本發明係鑑於上述事情而研創者’其目的在於提供一 種如單極驅動方式不容易產生在異極之磁極間短路之磁通 的構造，而且藉由進行雙極驅動而可防止最大推力之降 低’且推力磁動勢比高的線性馬達。 本發明之另一目的係提供一種在施加驅動磁動勢之際 永久磁鐵之磁導係數的降低會變少且減磁耐力會變高，^ 連續驅動時的耐久性會提升、耐熱性亦佳的線性 本發明之又另-目的係在於提供—财保磁通從可動 子之磁輪往磁極齒之流通，且形成磁氣飽和不容易在電機 322935 6 201212490 子產生之構造的線性馬達。 本發明之又另-目的係在於提供一種藉由以輕 磁性材料構成與電機子中之作為磁通路徑之效果較非 極齒相對向之部分’而謀求電機子之輕量化的線性馬達域 本發明之又另-目的係在於提供—種可抵消掣 尚諧波成分的線性馬達。 乃之 (用以解決課題之手段） 雜馬達錢平㈣之可料貫通 :電=而構成者’該線性馬達具備:可動子，= 有朝移動方向磁化的平板狀之永久磁鐵、及磁 你己置 ”磁鐵為相反之方向的平板狀之永久磁鐵，且在相鄰讀 =久磁鐵之間插人有平板狀之軟質磁性體的购； 機子，分別在與前述可動子㈣向之—方的面及另一及電 二ΓΓ。方之面的磁極窗與另一方之面的磁極齒之2 〇之方式每隔-個前述磁她對向地設置氣 :i=t，Π覆由一方之面之磁極齒所構成;: 的方式設有μ 磁極齒所構成的磁極齒群之外侧 、^ °又作為磁通之歸路的軟質磁性體之鐵心，別 =括地於”磁極料捲财施加軸磁動勢之驅動線 本發明之線性馬達的可動子係具有組合朝可動子之移 動方向（長度方向）磁化之平板狀的永久磁鐵與 質磁性體㈣軛之構成1具有交互配置有朝移動方向之 一方向磁化的永久磁鐵、及朝與移動方向之—方向相反的 322935 7 201212490 另一方向磁化之永久磁鐵，且在相鄰之一方向磁化之永久 磁鐵及在另一方向磁化之永久磁鐵之間配置有軟質磁性體 之磁軛的構成。另一方面，電機子係對應於可動子之磁軛 的排列，在與可動子相對向之一方的面與另一方的面每隔 一個磁軛對向設置有磁極齒，且一方之面的磁極齒與另一 方之面的磁極齒係配置在電氣角相差18〇。的位置。再者， 以包覆由一方之面的磁極齒及另一方之面的磁極齒所構成 之-對磁極麟之外側的以設㈣為磁通之歸路之軟質 磁I·生體的鐵〜再者’分別於前述—對磁極齒群，總括地 捲繞有施加驅動磁動勢之驅動線圈。 藉由使形成上述構成的可動子貫通於形成上述構成 電機子’並且使相同方向之電流流通於上述一對驅動 圈，藉此會產生推力，可動子會移動。此時，電機子之 方之面側的所有磁極齒係成為相同極性（例如N極），電 子之另-方之面側的所有磁極齒係成為與—方之面側的 極齒相反之相同極性（例如s極）。因此，在各個之面側 乎不會產生在相鄰之磁極間短路的磁通。此外，從驅動 圈施加之驅動磁動勢雖係與可動子之移動方向垂直，但 於可動子之永久磁鐵的磁化方向與移動方向平行，因此 久磁鐵減磁之方向的磁料易被施加，而使永久磁鐵之 導係數的降低較小。結果，耐熱溫度亦會變高。 本發明之線性馬達係兼具不容易產生磁極間之短路磁 通之構造的所謂單極型之優點、及同時可利用永久磁鐵之 N極、S極兩者之所謂雙極型之優點的線性馬達。 322935 8 201212490 在本發明之線性馬達中：前述磁極齒之屬於前述可動 子之附近側之前端部的前述移動方向之尺寸係比屬於前述 可動子之遠端側的基端部之前述移動方向的尺寸小。 在本發明之線性馬達的磁極齒中，接近可動子之前端 部的移動方向之尺寸比4離可動子之基端部的移動方向之 尺寸小。因此，由於使磁極齒之前端部變窄，因此磁通會 從可動子之磁軛確實地流通至磁極齒。另一方面，由於使 磁極齒之基端部變廣，因此不容易在電機子中產生磁性飽 和。 本發明之線性馬達係以比前述軟質磁性體更輕量之非 磁性的材料來取代前述電機子之與磁極齒相對向之部分的 軟質磁性體之鐵心、亦即位於磁極齒與磁極齒之間的電機 子構件。 在本發明之線性馬達的電機子中，係以比磁極齒之磁 性材更輕量的非磁性材料來構成與磁極齒相對向之部分。 因此，與以磁性材料構成整體之情形相比較，電機子係輕 量化，而成為更輕之線性馬達。與該磁極齒相對向之部分 係為本來磁通密度較小且作為磁通路徑之效果較小的部 分，因此即使以非磁性材料構成該部分，產生推力亦不太 會降低。 本發明之線性馬達係將前述磁極齒群分別分為2組 群，將2組群之間隔設為將其他之磁極齒的間隔加上或減 去主要之掣動力高諧波成分之1/2波長後的間隔。 在本發明之線性馬達的電機子中，將同一極之磁極齒 9 322935 201212490 群分為2組群，並將該等磁極齒群的間隔設為將磁極間距 加上主要之高諧波成分之半波長份後之間隔、或從磁極間 距減去該半波長份後的間隔。因此，高諧波成分會被抵消， 掣動力係降低。 本發明之線性馬達之前述主要的掣動力高諧波成分為 6次’且構成為加上或減去磁場週期之1/12。 在本發明之線性馬達的電機子中，將磁場週期2r (2 r = λ )之1/12( τ /6)加上磁極間距或從磁極間距予以 減去，而設為同一極之被區分的磁極齒群之間隔。因此， 抵消6次之掣動力高諧波成分。 本發明之線性馬達係在分別將前述永久磁鐵、前述磁 輕、刖述磁極齒之前述移動方向的尺寸設為Μ、γ、τ時， 滿足Υ < Μ < Τ之條件。 在本發明之線性馬達中，藉由滿足上述之尺寸條件， s過大之磁動勢施加在電機子之鐵心時從磁極齒施加之磁 通係經由磁軛流通至對極之磁極齒，因此與永久磁鐵之磁 化為反向之磁場難以被施加，因此減磁财力會變大。 (發明之效果） 在本發明中’分別於電機子之一方的面及另一方的 面，如單極型般地同時被勵磁之極性會恆常地成為N極、s 極之任一極，因此相鄰之磁極齒的極性會成為相同，因此 可防止異極間之磁通的短路。此外，可進行能有效地利用 可動子之永久磁鐵之磁通的雙極驅動，因此可實現高的推 力磁動勢比。此外，在驅動磁動勢之施加時永久磁鐵之減 322935 10 201212490 磁的影響度較少，磁導係數之降低會變小，因此可發揮高 耐熱性。 在本發明中，由於將磁極齒之前端側之尺寸設成比基 端侧之尺寸短，因此可提供一種確保對磁極齒之磁通的流 通且不容易產生磁氣飽和的構造。 在本發明中，由於以比磁極齒之磁性材更輕量的非磁 I"生材料來構成電機子之與磁極齒相對向之部分，因此即使 輕量亦可產生大的推力。 在本發明中，由於將同一極性之磁極齒群分為2組 群，並將該等之磁極齒群的間隔設為將主要之高諧波成分 之半波長份加上磁極間距後之間隔、或從磁極間距減去該 半波長份後的間隔，因此可使主要之高諳波成分抵消，且 可降低掣動力。 【實施方式】 以下，根據顯示本發明之實施形態的圖式詳細說明本 發明。 第1A、1B圖係顯示使用在本發明之線性馬達的可動子 之構成第1A圖為其斜視圖，第π圖為其剖面圖。 可動子1係組合有2種類平板狀之永久磁鐵Ua、Ub、 及平板狀之軟質雜體之魏12 _成，且形成依序交互 地接著永久磁鐵Ua、磁軛12、永久磁鐵Ub、磁軛^·· 的構成。 技在第ΙΑ、1B圖中，顯示在各永久磁鐵山、出之反 白則頭係表不各永久磁鐵Ua、Ub之磁化方向。永久磁鐵 322935 11 201212490 lla、lib ^係在可動子！之移動方向（可動子1的長度方 向）、換言之為找等永久磁鐵之連接方向磁化，但該等永 久磁鐵之磁化方向係彼此為18〇度不同之相反方向。再 者’在該等鄰接之永久磁鐵Ua與永久磁鐵 lib之間，插 入有平板狀之軟質礤性體的磁軛丨2。 在第1B圖中’ _示在磁輛12之反自箭頭係表示磁通 之流通，各磁軛12係發揮將來自永久磁鐵Ua、丨沁之磁 通方向變更為可動子1之厚度方向的作用。並且，在該可 動子1中’於磁軛12、12、··.，交互地形成有N極、s極、·..（參 照第1B圖）。亦即，作為N極之磁軛12N及作為S極之礤 軛12S係交互地存在。此外，各磁輛12(;磁軛12N、磁軛 12S)之表面及背面係成為同一極。 第2A至2C圖係顯示使用在本發明之線性馬達的電機 子之構成，第2A圖為其一部分之斜視圖，第2B圖為其局 部剖面斜視圖’第2C圖為其整體之破斷斜視圖。 電機子2係由整體形成中空長方體狀之軟質磁性體所 構成’在其中空部21貫通有形成上述構成之可動子1。電 機子2係具有.作為除了中空部21之外，構成周面之框體 之鐵心部22 ;從鐵心部22朝向中空部21之下方而配置之 上側的複數個磁極齒23a、23a、23a ;及從鐵心部22朝中 空部21之上方而配置之下側的複數個磁極齒23b、23b、 23b。以上側之複數個磁極齒23a、23a、23a構成一方之磁 極齒群（磁極齒集合體）24a，以下側之複數個磁極齒23b、 23b、23b構成另一方之磁極齒群（磁極齒集合體）24b。 12 322935 201212490 在與可動子1相對向之一方之面 23a、23a、23a及與可動子1相對向之另〜上側之磁極齒 的磁極齒23b、23b、23b係分別以列狀在電方的面之下側 方向（可動子1之移動方向）設置成對應於可^子2之長度 12之排列且隔著一個磁軛12相對向。 子1之磁軛 外里 亦即’依磁場週期 §又置一個一個之磁極齒23a、磁極齒23b。* u 亚且，上側之磁 極齒23a與下侧之磁極齒23b係設置在電氣角相異之 位置（偏離達磁場週期之一半的位置）。因此，例:在上侧 之磁極齒23a與可動子丨之-㈣永久磁鐵仏相對向 時，下侧之磁極齒23b係成為與可動子1之另一方的永久 磁鐵1 lb相對向之位置關係。 此外’各磁極齒23a、23b之寬度係從與可動子1相對 向之前端部往遠端之基端部以階段狀變寬。各磁極齒23a、 23b之前端部的寬度較佳為設成比磁軛12之寬度更長，以 使來自可動子1之磁軛12的磁通確實地流通。 鐵心部22係以包圍一對磁極齒群24a、24b之外側的 方式配置，而成為來自各磁極齒23a、23b之磁通的歸路。 將作為捲繞線之驅動線圈25a總括地捲繞在一方之磁極齒 群24a(磁極齒23a、23a、23a)，並且將作為捲繞線之驅動 線圈25b總括地捲繞在另一方之磁極齒群24b(磁極齒 23b、23b、23b)(參照第2C圖）。接著，以使驅動線圈25a 與驅動線圏25b之通電方向成為同一方向之方式，連接兩 驅動線圈25a、25b。第2C圖中之黑線箭頭係表示在驅動 線圏25a、驅動線圈25b之通電方向。 13 322935 201212490 構成一方磁極齒群24a之各磁極齒23a、23a、23a係 全部為相同極性（例如N極），構成另一方之磁極齒群2牝 的各磁極齒23b、23b、23b係成為全部相同之極性（例如s 極）。 再者，藉由使上述之第ΙΑ、圖所示之可動子1貫通 於第2A至2C圖所示之電機子2的中空部21，而構成本發 明之單相驅動的線性馬達（單相份之單元）3。第3圖係顯示 本發明之線性馬達之構成的局部破斷斜視圖。 在該線性馬達3之情形時，電機子2係作為固定子發 揮功能。並且，藉由使钱朝同—方向流通至驅動線圏 25a、25b，貫通至電機子2之中空部21的可動子i會相對 於電機子2(固定子）進行往復直線運動。 此外，在第1A圖所示之例中，雖作成為依序配置各6 個永久磁鐵11a、Ub及12個磁軛12的構 例，該等之個數亦可為任意數。並且，在第2A至％圖) 示的例中’雖作成為設置3組上側之磁極齒❿及下侧 磁極齒23b的構成，但此為其—例’該等之組數亦可為 意數。 —再者，亦可將用來使永久磁鐵Ua、Ub及磁輛12 著之構成體收納在框（未圖示）而構成可動體1。然而， 於相鄰之磁軏彼此為異極，因此為了抑制絲I磁通〖 ㈣’該框必__㈣。此外，亦可在該框設置劇 引導軌道（未圖示），於電機子2之中空部21設置用以化 線性引導軌道導通之缺口。 322935 14 201212490 此外，雖然已針對單相之祕馬達（單相份之單元）加 以說明，但在構成例如3相㈣之線性馬達時，只要將上 述之電機子3偏目隔達磁極間叫…⑼或磁極間距〆 、n + 2 3)(n為整數）之間隔而配置成直線狀，使可動子貫 即可。此外’此時考慮供驅動線圏收納之空間而 設定整數η即可。 以下 肖4圖_構成以上構紅本發明的線性 馬達3之動作機構。 叙2第4圖所不之方向於電機子2之驅動線圈25a及 25b通電時（·為從紙面之背面至表面之通流，χ ^表面至背面之通流），在上側之磁極齒23a、 a、a產生N極’在下側之磁極齒挪、挪、挪產生 另方面’在可動子1中’磁軛12N之表面背面皆 為N極’磁軛既之表面表面皆為S極。 因此在第4 ®所示之位置存在有可動子1時，在反 =2會產生吸弓丨力，可動子1之長度方向(移動方向) 、、成77破合成而成為推力，可動子1會移動。此時， 由於磁輛12之N極及s極皆有助於推力之產生，因而成為 雙極驅動。 以下，參照第5A至5C圖說明插入於可動子丨之永久 磁鐵11a、lib間的軟f磁性體之磁_ 12的效果（雙極驅動 功能）。 如第5A圖所示，當可動子i以單體存在時，各磁耗 12(磁輛12N、磁輕⑽之表面及背面為相同極性之磁極， 322935 15 201212490 且磁通會在表面及背面均f地產生。相對於此在使可動 子1貫通於電機子2時’亦即各磁輪12(磁輛⑽、磁軛 12S)與磁極齒23a、2北相對向時，如第沾圖所示，從各 磁輛12(磁輥12N、魏12S)產生之磁通係集中至磁極齒 23a、23b侧。例如，就第5B圖所示之位置關係而言，來 自屬於N極之磁輛12N的磁通係往上侧之磁_ 2如側集 中，來自屬於S極之磁軛12S的磁通係往下側之磁極齒2北 側集中。此外，當電氣角前進18〇。而成為第％圖所示之 位置關係時’來自屬於N極之磁1¾ 12N的磁通係往下側之 磁極齒23b侧集中，來自屬於s極之磁麵通係往 上側之磁極齒23a侧集中。 因此，藉由在永久磁鐵11a、llb間插入軟質磁體之磁 轭12即可將從固定之永久磁鐵iia、ub發生的磁通朝 上下方向切換，可使從所有之永久磁鐵Ua、Ub產生之磁 通有助於推力產生，而可實現雙極驅動。磁軛12係發揮將 =自永久磁鐵11a、llb之磁通朝上下方向切換之切換功 月t因此，可使從永久磁鐵lla、lib產生之磁通皆有助於 推力產生。此外，藉由作成為該種磁極齒之構成，由於相 鄰之磁極齒為同_的姉，因此與-般的相位騎捲繞型 的電機子相比較，可使縮小磁極間距時之磁通的鄰接異極 間之短路損失減為極小。 以下，針對本發明之線性馬達的特徵進一歩說明。 (1)可動子之永久磁鐵之磁通的利用率之提升： 第6A圖係顯示作為本發明之比較例而未設置磁軛時 322935 201212490 之磁通的流動之圖。在未設置磁軛時，由於從永久磁鐵 41a、41b|^上下均等地流通磁通，因此會產生未使用之磁 通（以第6A圖之虛線包圍的磁通），而無法獲得高的推力。 此外’第6B圖係顯示作為本發明之比較例而使用在厚度方 向磁化之永久磁鐵5la、51b時之磁通的流通之圖。此時， 由於亦會從永久磁鐵51a、51b朝上下均等地流通磁通，因 此亦會產生未使用之磁通（以第6B圖之虛線包圍的磁通）， 而無法獲得高的推力。 如以上所述，將未設置磁輛之可動子、或使用在厚度 方向磁化之永久磁鐵的可動子應用在本發明之電機子2的 磁極齒23a、23b之構成時，由於無法將從纟久磁鐵產生之 磁通朝磁極# 23a、23b之方向切換，因此會產生無助於推 力之磁通，推力密度會降低。在本發财，料將磁輕12 插入至可動子1 ’即可提升來自永久磁鐵山、出之磁通 的利用率。 (2)防止在相鄰之磁極齒間發生短路磁通： 在本發明之電機子2的構成中，在磁極齒之配置中， 刀別使同-極性之磁極I 23a、···及磁極齒23b.··分別集人 在單侧，並隔介可動子i使異極性之磁極齒23 極: 挪相對向配置。因此，由於相鄰之磁極齒為同一極性， 因此可防止在異極間之短路磁通的發生，並且可進行可動 子1之雙極驅動°因此’可有效地將藉由施加在電機子2 圈25a、25b的磁動勢所產生之磁通有效地施加於 可動子1，而可提升最大推力。 322935 17 201212490 (3)抑制驅動時之永久磁鐵之磁導係數的降低： 第7A圖係顯示作為本發明之比較例而使用揭露在例 如專利文獻1之在厚度方向磁化之永久磁鐵6la、仙時之 磁通的流通之圖。從磁極齒62施加之驅動磁通（圖中之虛 線箭頭）為可動子61之厚度方向，且永久磁鐵61a、61b之 磁化方向（圖十之反白箭頭）亦為可動子61之厚度方向，亦 即來自磁極齒62之驅動磁通（圖中虛線的箭頭）與永久磁 鐵61a、61b之磁化方向（圖中之反白箭頭）為完全相反之方 向，因此會產生減磁區域（以第7A圖之虛線所包圍之區 域），而造成磁導係數之降低。 在本發明中，如帛圖所示，在驅動時施加有最大之 磁動勢之電氣角90。的位置’從磁極齒23a施加至可動子工 之永久磁鐵lla、llb之驅動磁通（圖中之虛線箭頭）係與可 動子1之移動方向（長度方向）呈直角，相對於此，永^磁 鐵11a、lib之磁化方向（圖中之反白箭頭）係與可動子工之 =方向平行，因此不容易施加永久磁鐵Ua、ub減磁之 通而且’在重負載時來自磁極齒23a之驅動磁 (圖中之虛線箭頭）係選取通過磁輛12而進入磁極齒挪 此不容易施加與永久磁鐵Ua、llb之磁化方向 级果可使因此’柄耐性佳且可抑獅導餘之降低， 、'、σ果叮使動作溫度區域變廣。 太路係顯不第?Α圖所示之比較例與第7Β圖所示之 盘最j二之驅動磁動勢(=驅動電流Χ驅動線圈之捲繞數) 。最小磁導係數之關係的曲線圖。比較例與本發明例係， 322935 18 201212490 磁鐵厚度：5mm、電機子間隙：6. 6mm、磁場週期：18mm之 同一體格的形式。在第8圖中，實線A係表示比較例之特 性，實線B係表示本發明例之特性。由第8圖之結果，在 施加比較大之驅動磁動勢時，本發明例之磁導係數的降低 相較於比較例係較少。 第9圖係顯示使用稀土類磁鐵（ND-Fe-B磁鐵）作為可 動子時之溫度與減磁界限磁導係數（磁鐵之減磁開始之磁 導係數）之關係之一例的曲線圖。依據該第9圖之特性，在 將驅動磁動勢設為2400A時之比較例及本發明例中求出耐 熱溫度時係如以下所述。在比較例中，當驅動磁動勢為 2400A時，由第8圖之特性，由於最小磁導係數為0. 5，因 此其耐熱溫度依據第9圖之特性係成為55°C (參照圖中之 A)。另一方面，在本發明例中，當驅動磁動勢為2400A時， 由第8圖之特性最小磁導係數為1，其耐熱溫度依據第9 圖之特性係成為75°C (參照圖中之B)。如此，本發明係可 謀求耐熱溫度之提升。 (4)可動子之組裝性的提升： 以往，在將於厚度方向磁化之永久磁鐵排列在可動子 之長度方向（移動方向）的構造（第7A圖中）中，由於相鄰之 永久磁鐵的露出面彼此成為異極且有吸引力作用，因此在 組裝可動子時永久磁鐵會從框飛出，而欲吸著在相鄰之永 久磁鐵。因此，在裝入永久磁鐵後直到接著完成為止，必 須預先固定永久磁鐵。然而，本發明係為永久磁鐵吸引在 磁軛之構造，因此在維持組裝形狀之狀態下穩定，無須進 19 322935 201212490 行推壓。因此，可動子之組裝性變得良好。 此外，亦可復在可動子t寬度方向之兩緣部 度方向延伸之長形之非磁性體的磁軛，以軟質磁&朝長 軛及該非磁性體之磁軛構成可動子磁軛。軟質磁=體之磁 軛與非磁性體之磁軛係可利用螺絲、接著劑、鉚 體之礤 在該種可動子巾，以軟質磁性體之购與麵性^固疋。 構成可動子磁軛，並且將永久磁鐵吸著固定在 之磁軛 之磁軛，藉此作成之構成不但可使組立作業性人:：:生， 升，而且外部應力不會直接施加在永久磁鐵。因此，Q也提 ^且立作業性與構造信賴性之同時達成。在藉由接著:謀 疋永久磁鐵與鐵心之手法中，難以穩定地確保 3固 容易地產生接著力之變異，但在本發明之可動子^層’且 發生上述之缺失。 不會 (5)掣動力之減低： 在水久磁鐵與軟質磁性體共存於可動子之磁軛之情形 中，比透磁率會在移動方向（磁場週期方向）週期性變:f 因此高次之掣動力高諧波成分變得顯著。一般在相獨立型 之驅動中，3相合成時基本波（掣動力之週期與磁場週期相 同）及2次、4次之高諧波雖會被板消，但3次、6次、9 _人等之3倍數的高諧波會加強。 第1〇圖係用以說明主要之掣動力高諧波成分之抵消 手法的圖。在上述構成之可動子中，由於6次之高諧波成 刀比3次之高諧波成分有變多之傾向，因此將形成同一極 陡之磁極齒群分為2組群，將該等排列設為比其他磁極齒 20 322935 201212490 之間隔寬了 Γ /6( r :磁極間距、r = λ /2)(T1= r、Τ2 =τ + τ /6)。因此，由於產生在2群之磁極齒群的掣動 力之相位在6次之高諧波成分中差了 180。，因此6次之高 s皆波成分係被抵消而未被輸出。此外，雖設為比其他磁極 齒之間隔寬了 Γ/6,但即使設為比其他磁極齒之間隔窄了 r /6亦發揮同樣之效果。 接著’藉由對永久磁鐵進行歪斜（skew)配置（相對於與 移動方向垂直之方向賦予角度而配置永久磁鐵之長邊）即 可將12次以上之高諧波成分減低。此時之歪斜角度為〇至 4。。 由於上述之磁極齒群的移位量與永久磁鐵之歪斜角度 係分別獨立地變更，因此可有效地對主要之高諧波成分有 效地減低掣動力。 (6)減磁耐力之提升： 第11圖係顯示永久磁鐵、磁輕、磁極齒之尺寸例的 圖。如第11圖所示，將可動子之移動方向之永久磁鐵、磁 軛、磁極齒的尺寸分別設為M、Y、T時，係構成為滿足γ <M<T之關係。在該種構成中，特別是在被施加之磁動勢 為最大之電氣角90。附近，從磁極齒施加之磁通係經由磁 軛流通至對極之磁極齒，因此對永久磁鐵之影響會變少， 且減磁耐力會提升。 以下，針對本發明之線性馬達的其他實施形態加以說 明。本發明之線性馬達係如前所述，可實現垂直移動機構 中之馬速移動且高精確度之定位。在垂直移動機構中，一 322935 21 201212490 般係在χ-γ(水平方向）台之可動部設 置線性馬達，在此情 形下’由於線性馬達未身之重力會成為χ_γ軸驅動侧之負 荷’因此線性馬達係要求輕量化。 —以下之實施形態係滿足該要求者。在該實施形態中， 著眼於線⑨馬達之電機子，藉由將驅動時磁通密度不會變 高之部分從軟質磁，_取代為輕量之非磁性材料，就可謀 求輕量化’且不會使所發生之推力過度降低。 態的明之線性馬達之其他實施形 〜 圖為線性馬達之整體的斜視圖，第12Β 圖為顯=電機子之―部分構成的斜視圖。 。亥單相驅動之線性馬達（單相份之單元） 1性馬達3同樣地（參照第3圖），使 通 2:之中空部而構成。線性馬達3a之可動子1:= 前述之線性馬達3中夕H 7 叼稱成你… 略其說明。 °動子1的構成完全相同’因此省 上有所！異。2達3與該線性馬達3a係在電機子之構成 軟質磁性體所構成’但線性馬 =雖二 係由比軟質磁性體f虻θ 言，在線性馬達3中更之幸^之非磁性材料所構成。具體而 齒23a、23b相對向 子2的鐵心部22中，將與磁極 鎂合金等之輕量標有陰影線之部分）取代成例如 心部22係僅成2Γ。因此，在電機子2a中’鐵 相㈣_，與磁極齒❿、聊 ° 刀糸成為輕量之支持部材22a(參照第12B圖）。 322935 22 201212490 此外，除了一部分使用輕量之非磁性材料之點以外， 線性馬達3a之電機子2a的下述其他構成係與線性馬達3 之電機子2相同：上側之磁極齒23a與下側之磁極齒23b 係設置在電氣角差了 180°之位置’當上侧之磁極齒23a與 可動子1之一方永久磁鐵11a相對向時，下側之磁極齒23b 係成為與可動子1之另一方之永久磁鐵lib相對向的位置 關係，將驅動線圏25a總括捲繞在複數個磁極齒23¾，將 驅動線圈25b總括捲繞在複數個磁極齒23b，使同一方向 之電流流通在驅動線圈25a與驅動線圈25b等。 以上側之複數個磁極齒23a所構成之一方之磁極齒群 (磁極齒集合體）、與以下侧之複數個磁極齒23b所構成之 另一方的磁極齒群（磁極齒集合體）之間，由於位置會相對 於可動子1之移動方向位移達1/2磁場週期份，因二在與 各磁極齒23a ’ 23b相對向之位置的鐵心部分，驅動時產^ ==度小。因此’即使在該部分未存在磁性材而設置 磁^材’在驅動時亦不容易成為磁通之流通的妨礙。因 ，將該部分取代成輕量之非磁性的支持部材^。 各自之磁極齒群間位置不會重聂、80 ’因此在 子1之侧面之該磁通的歸路^ 此’設置與位於可動 朝可動子1之義方向流通 ^部分’以確保磁通 刀错此在電機子2a内形 322935 23 201212490 磁路。並且，為了支撐由推力所產生之反作用力使 支持部材22a填充在未存在磁性體之部分。 日卑=13A、L3B圖係顯示使電流流通在驅動線圈.、挪 寺（驅動磁動勢12_、在電氣角9G。流通 2之電機子所產生之磁通密度的分佈之圖，並且，第14A、 14B圖係顯示驅動時之電機子中之磁通的流動之圖。第似 圖及第14A圖係顯示全部由磁性體所構 磁通密度的分佈及磁通的流通， 示將與磁極鈴對向之部分取代為非魏體201212490 VI. Description of the Invention: The present invention relates to a linear motor in which a movable body having a plurality of plate-shaped permanent magnets and a motor (fixator) having a driving coil are combined. [Prior Art] A vertical movement mechanism of a probe (contact element for inspection) of an inspection device for an electronic circuit board, or a vertical movement mechanism of a plastic robot such as pick and place (take a part and place it at a predetermined position) High-speed moving and high-precision positioning is required. Therefore, in the conventional method of converting the output of the rotary motor into the parallel motion (vertical motion) by the ball screw, since the moving speed is slow, the above requirement cannot be satisfied. Therefore, in the above vertical movement, a linear motor that can directly take out the parallel motion output is utilized. A permanent magnet structure in which a square shape of a plurality of plate-shaped permanent magnets is disposed as a movable member, and a motor having an energized coil is used as a stator, and a linear motor having a configuration in which a movable member passes through the stator is provided. The proposal has various forms (for example, patent documents 2、, 2, 3, etc.). (Prior Art) (Patent Document) Patent Document 1: Japanese Laid-Open Patent Publication No. JP-A-2002-172277 (Patent Document No. JP-A-2005-295074) (Problems to be Solved by the Invention) 322935 4 201212490 The linear motor of the prior art has a faster reaction than the ball screw, but because of the large mass of the mover, the full thrust can be ensured, but the required level of reaction cannot be achieved. speed. The linear motor suitable for high speed is constructed as a movable magnet type, and in order to realize a small linear motor having a large thrust, the pitch of the poles of the motor must be made small. Since the magnetic poles of the motor are periodically arranged at a specific ratio in accordance with the arrangement period of the permanent magnets of the mover, the drive coils are wound around the respective magnetic poles. In order to increase the thrust density of the linear motor, it is necessary to make the pitch of the magnetic pole small. However, in such an individual winding structure, there is a problem that the space of the wound coil is narrowed, and the resistance of the coil rises, and the driving time is increased. Fever will increase. In order to solve this problem, there has been proposed a linear motor using a motor of a claw-pole type (claw type) in which the phase is collectively wound. In the phase-collective winding method, the coil is wound around the magnetic pole of the motor to be the same pole portion, and the number of turns is reduced, thereby ensuring a wide winding line area and reducing the resistance of the coil. Effect. However, in this phase-collective winding method, since the magnetic pole teeth of the opposite pole are generally arranged such that the N pole and the S pole are alternated, the magnetic pole pitch is made small, and the magnetic poles are short-circuited between adjacent magnetic poles. The magnetic flux is increased, and the magnetic flux generated from the motor can not be effectively applied to the permanent magnet side of the movable member. Further, when the ratio of the magnetic flux short-circuited between the magnetic poles of the motor is large, there is a problem that the maximum thrust is lowered and the thrust physical ratio is lowered. There has been proposed a monopolar type linear motor for preventing the short circuit of the magnetic flux between the above-mentioned different poles. In the unipolar type, the configuration in which the magnetic pole teeth of the motor are alternately arranged in the N pole and the s pole is as described above, and the polarity of the simultaneous excitation is only the N pole and the S pole. One polarity. At this time, since the magnetic pole teeth that are the opposite poles are not present in the motor, the short-circuit magnetic field is not generated, and the value of the thrust which is the proportional limit can be increased. This method has the advantage of being miniaturizable because of its simple structure. However, since the utilization rate of the permanent magnet becomes half compared with the bipolar type, the thrust system is reduced to 1/1/ when the same driving magnetomotive force is applied for the same arrangement of the permanent magnets. 2. In addition, since the area of the permanent magnet that contributes to driving becomes one-half of the bipolar type, there is a problem that the load of the permanent magnet is increased when the same degree of thrust is generated, and the magnetic permeability of the permanent magnet at the time of driving is generated. The coefficient is greatly reduced, and there is a danger of permanent demagnetization. Conventionally, in a movable body having a yoke of a permanent magnet and a soft magnetic body, there is a problem that the detent force (the stress pulsation in the moving direction) is increased due to the high magnetic permeability of the soft magnetic material. . The present invention has been made in view of the above circumstances, and an object thereof is to provide a structure in which a magnetic flux which is short-circuited between magnetic poles of different poles is not easily generated in a unipolar driving manner, and it is possible to prevent a reduction in maximum thrust by performing bipolar driving. 'And a linear motor with a high thrust magnetomotive force ratio. Another object of the present invention is to provide a reduction in the magnetic permeability of a permanent magnet and a decrease in demagnetization resistance when a driving magnetomotive force is applied, and an improvement in durability and a heat resistance in continuous driving. Linearity Another aspect of the present invention is to provide a linear motor in which the magnetic flux is circulated from the magnetic wheel of the movable body to the magnetic pole teeth and forms a structure in which the magnetic saturation is not easily generated in the motor 322935 6 201212490. Still another object of the present invention is to provide a linear motor domain in which the weight of the motor is reduced by forming a portion of the motor that is opposite to the non-polar tooth in the motor as a magnetic flux path. Still another object of the invention is to provide a linear motor that can counteract the harmonic components of the genius. It is the means to solve the problem. Miscellaneous motor money (4) can be penetrated: electricity = and the composition of the linear motor: movable, = flat permanent magnet magnetized in the moving direction, and magnetic you The magnet is a flat-shaped permanent magnet in the opposite direction, and a flat-shaped soft magnetic body is inserted between adjacent readings and a long magnet; the machine is respectively in the same movable body (four) as the above - The side of the square and the other side of the electric pole. The magnetic pole window of the square side and the magnetic pole tooth of the other side of the square are arranged in the same way every other magnetic front: i=t, The magnetic pole teeth of one side are composed of: the magnetic core of the outer side of the magnetic pole tooth composed of μ magnetic pole teeth, and the core of the soft magnetic body which serves as the return path of the magnetic flux, and the magnetic pole material Driving line for applying a magnetomotive force of the shaft of the present invention The movable sub-system of the linear motor of the present invention has a configuration in which a plate-shaped permanent magnet that is magnetized in a moving direction (longitudinal direction) of the movable member and a configuration of a magnetic material (four) yoke are alternately arranged. a permanent magnet magnetized in one of the directions of movement, 322935 7 201212490, which is opposite to the moving direction, is a permanent magnet magnetized in the other direction, and a soft magnetic yoke is disposed between the permanent magnet magnetized in one of the adjacent directions and the permanent magnet magnetized in the other direction. Composition. On the other hand, the motor sub-system corresponds to the arrangement of the yokes of the movable member, and the magnetic pole teeth are provided opposite to each other on the one surface facing the movable member and the other surface, and the magnetic poles on one side are provided. The magnetic poles of the tooth and the other side are arranged at an electrical angle of 18 相. s position. Furthermore, it is composed of a magnetic pole tooth covering one surface and a magnetic pole tooth on the other side - a soft magnetic I of a magnetic body on the outer side of the magnetic pole (4) Furthermore, the driving coils to which the driving magnetomotive force is applied are collectively wound around the magnetic pole group, respectively. By causing the movable member having the above-described configuration to pass through the above-described constituent motor sub-members and causing a current in the same direction to flow through the pair of driving coils, thrust is generated and the movable member moves. At this time, all the magnetic poles on the surface side of the motor have the same polarity (for example, the N pole), and all the magnetic poles on the other side of the electron are the same as the opposite teeth on the side of the side. Polarity (eg s pole). Therefore, magnetic fluxes short-circuited between adjacent magnetic poles are not generated on the respective sides. Further, the driving magnetomotive force applied from the driving ring is perpendicular to the moving direction of the movable member, but the magnetization direction of the permanent magnet of the movable member is parallel to the moving direction, so that the magnetic material in the direction of demagnetization of the permanent magnet is easily applied. The reduction of the conductance coefficient of the permanent magnet is small. As a result, the heat resistant temperature also becomes high. The linear motor of the present invention has the advantages of a so-called unipolar type which is not easy to generate a short-circuit magnetic flux between magnetic poles, and a linearity which can take advantage of the so-called bipolar type of both the N pole and the S pole of the permanent magnet. motor. 322935 8 201212490 In the linear motor of the present invention, the moving direction of the front end portion of the magnetic pole tooth belonging to the vicinity of the movable member is smaller than the moving direction of the base end portion belonging to the distal end side of the movable member Small size. In the magnetic pole teeth of the linear motor of the present invention, the moving direction of the end portion close to the movable portion is smaller than the size of the moving direction of the base end portion of the movable member. Therefore, since the front end portion of the magnetic pole tooth is narrowed, the magnetic flux reliably flows from the yoke of the movable member to the magnetic pole tooth. On the other hand, since the base end portion of the magnetic pole teeth is widened, it is not easy to cause magnetic saturation in the motor. The linear motor of the present invention replaces the core of the soft magnetic body of the motor portion opposite to the magnetic pole teeth by a non-magnetic material which is lighter than the soft magnetic body, that is, between the magnetic pole teeth and the magnetic pole teeth. Motor sub-components. In the motor of the linear motor of the present invention, a portion which is opposed to the magnetic pole teeth is formed of a non-magnetic material which is lighter than the magnetic material of the magnetic pole teeth. Therefore, the motor sub-system is lighter and becomes a lighter linear motor than the case where the magnetic material is integrally formed. The portion facing the magnetic pole tooth is a portion having a small magnetic flux density and a small effect as a magnetic flux path. Therefore, even if the portion is formed of a non-magnetic material, the thrust is less likely to decrease. In the linear motor of the present invention, the magnetic pole tooth group is divided into two groups, and the interval between the two groups is set to add or subtract the interval of the other magnetic pole teeth by 1/2 of the main power harmonic component. The interval after the wavelength. In the motor of the linear motor of the present invention, the magnetic pole teeth 9 322935 201212490 of the same pole are divided into two groups, and the spacing of the magnetic pole groups is set to add the magnetic pole spacing plus the main high harmonic component. The interval after the half wavelength is divided, or the interval after the half wavelength is subtracted from the magnetic pole pitch. Therefore, the high harmonic components are offset and the powertrain is reduced. The above-mentioned main neodymium dynamic harmonic component of the linear motor of the present invention is 6 times' and is configured to add or subtract 1/12 of the magnetic field period. In the motor of the linear motor of the present invention, 1/12 (τ /6) of the magnetic field period 2r (2 r = λ) is added to or subtracted from the magnetic pole pitch, and the same pole is distinguished. The spacing of the magnetic pole groups. Therefore, the power harmonic component of 6 times is offset. In the linear motor of the present invention, when the dimensions of the moving direction of the permanent magnet, the magnetic light, and the magnetic pole teeth are Μ, γ, and τ, respectively, < Μ < Τ conditions. In the linear motor of the present invention, by satisfying the above-described dimensional condition, when the excessive magnetism is applied to the core of the motor, the magnetic flux applied from the magnetic pole teeth flows through the yoke to the magnetic pole teeth of the opposite pole, and thus The magnetization of the permanent magnet is difficult to apply to the magnetic field in the opposite direction, so the demagnetization and financial resources become large. (Effects of the Invention) In the present invention, the polarity of the excitation of the surface of one side of the motor and the other surface of the motor, such as a unipolar type, is always one of the N pole and the s pole. Therefore, the polarities of the adjacent magnetic pole teeth are the same, so that the short circuit of the magnetic flux between the different poles can be prevented. Further, since the bipolar drive of the magnetic flux of the permanent magnet of the movable member can be effectively utilized, a high thrust magnetomotive force ratio can be realized. In addition, when the driving magnetomotive force is applied, the permanent magnet is reduced by 322935 10 201212490, the magnetic influence degree is small, and the magnetic permeability is reduced, so that high heat resistance can be exhibited. In the present invention, since the size of the front end side of the magnetic pole teeth is set to be shorter than the size of the base end side, it is possible to provide a structure for ensuring the flow of the magnetic flux to the magnetic pole teeth and which is less likely to cause magnetic saturation. In the present invention, since the non-magnetic I" raw material which is lighter than the magnetic material of the magnetic pole teeth constitutes a portion of the motor which faces the magnetic pole teeth, a large thrust can be generated even if it is lightweight. In the present invention, since the magnetic pole group of the same polarity is divided into two groups, and the interval between the magnetic pole groups is set to be an interval after the half-wavelength portion of the main harmonic component is added to the magnetic pole pitch, Or the interval after the half-wavelength is subtracted from the magnetic pole pitch, so that the main high-chopper component can be cancelled and the turbulence can be reduced. [Embodiment] Hereinafter, the present invention will be described in detail based on the drawings showing embodiments of the present invention. Figs. 1A and 1B are views showing a configuration of a movable member used in the linear motor of the present invention, and Fig. 1A is a perspective view thereof, and Fig. π is a cross-sectional view thereof. The movable member 1 is a combination of two types of flat permanent magnets Ua and Ub and a flat-shaped soft body, and is formed to sequentially alternately follow the permanent magnet Ua, the yoke 12, the permanent magnet Ub, and the magnetic body. The composition of the yoke ^··. In the figures 11 and 1B, the permanent magnets are shown in the reverse direction, and the heads indicate the magnetization directions of the permanent magnets Ua and Ub. Permanent magnet 322935 11 201212490 lla, lib ^ is in the movable! The direction of movement (the length direction of the movable member 1), in other words, the direction of connection of the permanent magnets, is magnetized, but the magnetization directions of the permanent magnets are opposite to each other by 18 degrees. Further, between the adjacent permanent magnets Ua and the permanent magnets lib, a yoke 2 having a flat soft body is inserted. In Fig. 1B, the reverse arrow from the magnetic vehicle 12 indicates the flow of the magnetic flux, and each of the yokes 12 changes the direction of the magnetic flux from the permanent magnets Ua and 丨沁 to the thickness direction of the movable member 1. effect. Further, in the movable member 1, N poles, s poles, and the like are alternately formed on the yokes 12, 12, ... (refer to Fig. 1B). That is, the yoke 12N as the N pole and the yoke 12S as the S pole are alternately present. Further, the surface and the back surface of each of the magnetic vehicles 12 (the yoke 12N and the yoke 12S) are the same pole. 2A to 2C are views showing the configuration of a motor used in the linear motor of the present invention, FIG. 2A is a perspective view of a part thereof, and FIG. 2B is a partial cross-sectional oblique view thereof. FIG. 2C is a broken squint of the whole. Figure. The motor unit 2 is composed of a soft magnetic body having a hollow rectangular parallelepiped shape as a whole. The movable portion 1 having the above-described configuration is penetrated through the hollow portion 21. The motor unit 2 has a core portion 22 which is a frame body constituting a peripheral surface other than the hollow portion 21, and a plurality of magnetic pole teeth 23a, 23a, 23a disposed on the upper side from the core portion 22 toward the lower side of the hollow portion 21. And a plurality of magnetic pole teeth 23b, 23b, and 23b disposed on the lower side from the core portion 22 toward the upper side of the hollow portion 21. The plurality of magnetic pole teeth 23a, 23a, and 23a on the upper side constitute one magnetic pole group (magnetic tooth assembly) 24a, and the plurality of magnetic pole teeth 23b, 23b, and 23b on the lower side constitute the other magnetic pole group (magnetic tooth assembly) ) 24b. 12 322935 201212490 The magnetic pole teeth 23b, 23b, and 23b of the magnetic pole teeth which are opposite to the movable element 1 and the magnetic pole teeth 23a, 23b, and 23b which are opposite to the movable element 1 are electrically connected in a row. The lower side direction of the face (the moving direction of the movable member 1) is set to correspond to the arrangement of the lengths 12 of the sliders 2 and opposed to each other via one yoke 12. In the outer yoke of the sub-1, the magnetic pole teeth 23a and the magnetic pole teeth 23b are placed one by one according to the magnetic field period. * u, the upper magnetic pole tooth 23a and the lower magnetic pole tooth 23b are disposed at positions different from the electrical angle (deviation from a position one half of the magnetic field period). Therefore, when the magnetic pole teeth 23a on the upper side and the (4) permanent magnets 可 of the movable stator are opposed to each other, the magnetic pole teeth 23b on the lower side are in a positional relationship with the other permanent magnets 11b of the movable member 1. . Further, the width of each of the magnetic pole teeth 23a and 23b is widened in a stepwise manner from the proximal end portion of the distal end portion facing the distal end portion of the movable member 1. The width of the front end portion of each of the magnetic pole teeth 23a, 23b is preferably set to be longer than the width of the yoke 12 so that the magnetic flux from the yoke 12 of the movable member 1 is surely circulated. The core portion 22 is disposed so as to surround the outer sides of the pair of magnetic pole pieces 24a and 24b, and serves as a return path for the magnetic fluxes from the respective magnetic pole teeth 23a and 23b. The drive coil 25a as a winding wire is wound around one of the magnetic pole tooth groups 24a (magnetic pole teeth 23a, 23a, 23a), and the drive coil 25b as a winding wire is wound around the other magnetic pole tooth in a collective manner. Group 24b (magnetic pole teeth 23b, 23b, 23b) (see Fig. 2C). Next, the two drive coils 25a and 25b are connected such that the drive coil 25a and the drive coil 25b are energized in the same direction. The black line arrow in Fig. 2C indicates the direction in which the drive coil 25a and the drive coil 25b are energized. 13 322935 201212490 Each of the magnetic pole teeth 23a, 23a, 23a constituting one magnetic pole group 24a has the same polarity (for example, N pole), and each of the magnetic pole teeth 23b, 23b, and 23b constituting the other magnetic pole group 2 is all Same polarity (eg s pole). Further, by making the above-described third and movable members 1 pass through the hollow portion 21 of the motor unit 2 shown in FIGS. 2A to 2C, the single-phase driven linear motor of the present invention (single phase) is constructed. Unit of the unit) 3. Fig. 3 is a partially broken perspective view showing the configuration of the linear motor of the present invention. In the case of the linear motor 3, the motor sub 2 functions as a stator. Further, by moving the money in the same direction to the drive coils 25a and 25b, the movable member i penetrating into the hollow portion 21 of the motor unit 2 reciprocates linearly with respect to the motor unit 2 (fixer). Further, in the example shown in Fig. 1A, the configuration of the six permanent magnets 11a, Ub and the twelve yokes 12 is sequentially arranged, and the number of these may be any number. Further, in the example shown in the second embodiment of FIG. 2A to FIG. 2, the configuration is such that the magnetic pole tooth and the lower magnetic pole tooth 23b of the upper three groups are provided. However, the number of the groups may be number. Further, the movable body 1 may be configured by accommodating the permanent magnets Ua, Ub and the magnetic vehicle 12 in a frame (not shown). However, the adjacent magnetic yokes are different from each other, so in order to suppress the magnetic flux of the wire I, the frame must be __(4). Further, a play guide rail (not shown) may be provided in the frame, and a notch for guiding the linear guide rail to be turned on in the hollow portion 21 of the motor unit 2 may be provided. 322935 14 201212490 In addition, although the single-phase secret motor (single-phase unit) has been described, in the case of a linear motor such as 3-phase (4), the above-mentioned motor sub-segment 3 is separated from the magnetic poles... (9) Alternatively, the magnetic pole pitch 〆, n + 2 3) (n is an integer) may be arranged in a straight line so as to be movable. Further, in this case, it is sufficient to set the integer η in consideration of the space for accommodating the drive wire. The following Fig. 4 shows the action mechanism of the linear motor 3 of the present invention. When the driving coils 25a and 25b of the motor sub- 2 are energized (the flow from the back surface of the paper surface to the surface, the flow from the surface to the back surface), the magnetic pole teeth 23a on the upper side , a, a generates N pole 'on the magnetic pole on the lower side, shifting, moving, and moving. 'In the movable body 1 'the surface of the yoke 12N is N pole on both sides. The surface of the yoke is S pole. Therefore, when there is a movable member 1 at the position indicated by the 4th, the suction force is generated in the reverse = 2, and the length direction (moving direction) of the movable member 1 is broken and the thrust is formed into 77, and the movable member 1 is moved. Will move. At this time, since the N pole and the s pole of the magnetic vehicle 12 contribute to the generation of the thrust, it becomes a bipolar drive. Hereinafter, the effect of the magnetic _ 12 of the soft f magnetic body inserted between the permanent magnets 11a and 11b of the movable element (bipolar driving function) will be described with reference to Figs. 5A to 5C. As shown in Fig. 5A, when the movable member i exists as a single body, each magnetic consumption 12 (the surface and the back surface of the magnetic vehicle 12N and the magnetic light (10) are magnetic poles of the same polarity, 322935 15 201212490 and the magnetic flux is on the surface and the back surface. In contrast, when the movable member 1 is passed through the motor unit 2, that is, when each of the magnetic wheels 12 (magnetic vehicle (10), yoke 12S) and the magnetic pole teeth 23a, 2 are opposed to each other, As shown, the magnetic flux generated from each magnetic vehicle 12 (magnetic roller 12N, Wei 12S) is concentrated to the magnetic pole teeth 23a, 23b side. For example, in the positional relationship shown in Fig. 5B, the magnetic material belonging to the N pole is derived. The magnetic flux of the 12N magnetic flux is concentrated toward the upper side, and the magnetic flux from the yoke 12S belonging to the S pole is concentrated toward the north side of the magnetic pole tooth 2 on the lower side. Further, when the electrical angle advances by 18 〇, it becomes In the positional relationship shown in Fig. 100, the magnetic flux from the magnetic poles 13b belonging to the N pole is concentrated toward the magnetic pole teeth 23b on the lower side, and the magnetic pole teeth 23a belonging to the s pole are concentrated on the magnetic pole teeth 23a side. Therefore, the magnetic flux generated from the fixed permanent magnets iia, ub can be inserted by inserting the yoke 12 of the soft magnet between the permanent magnets 11a and 11b. By switching between the up and down direction, the magnetic flux generated from all the permanent magnets Ua, Ub contributes to the generation of the thrust, and the bipolar drive can be realized. The yoke 12 functions to shift the magnetic flux from the permanent magnets 11a, 11b toward the up and down direction. By switching the switching power t, therefore, the magnetic flux generated from the permanent magnets 11a, 11b can contribute to the generation of the thrust. Further, by making the magnetic pole teeth, the adjacent magnetic pole teeth are the same Therefore, compared with the general phase riding type motor, the short-circuit loss between adjacent poles of the magnetic flux when the magnetic pole pitch is reduced can be minimized. Hereinafter, the characteristics of the linear motor of the present invention are (1) Improvement of the utilization rate of the magnetic flux of the permanent magnet of the mover: Fig. 6A is a view showing the flow of the magnetic flux of 322935 201212490 when the yoke is not provided as a comparative example of the present invention. In the yoke, since the magnetic flux is uniformly distributed from the permanent magnets 41a and 41b|^, the unused magnetic flux (the magnetic flux surrounded by the broken line in Fig. 6A) is generated, and high thrust cannot be obtained. Figure 6B shows As a comparative example of the present invention, the flow of the magnetic flux when the permanent magnets 51a and 51b are magnetized in the thickness direction is used. In this case, the magnetic flux is equally distributed from the permanent magnets 51a and 51b to the upper and lower sides. An unused magnetic flux (magnetic flux surrounded by a broken line in Fig. 6B) is generated, and a high thrust cannot be obtained. As described above, a movable member without a magnetic vehicle or a permanent magnet magnetized in a thickness direction is used. When the movable member is applied to the configuration of the magnetic pole teeth 23a and 23b of the motor unit 2 of the present invention, since the magnetic flux generated from the permanent magnet cannot be switched in the direction of the magnetic poles #23a and 23b, magnetic force which does not contribute to the thrust is generated. Pass, the thrust density will decrease. In this case, it is expected that the magnetic light 12 can be inserted into the movable member 1 ' to increase the utilization rate of the magnetic flux from the permanent magnet mountain. (2) Prevention of short-circuit magnetic flux between adjacent magnetic pole teeth: In the configuration of the motor sub-piece 2 of the present invention, in the arrangement of the magnetic pole teeth, the same-polar magnetic poles I 23a, ... and magnetic poles are formed The teeth 23b.·· are respectively arranged on one side, and the movable poles i are arranged to make the magnetic pole teeth 23 of different polarities: Therefore, since the adjacent magnetic pole teeth have the same polarity, the occurrence of the short-circuit magnetic flux between the different poles can be prevented, and the bipolar driving of the movable member 1 can be performed. Therefore, it can be effectively applied to the motor sub- 2 The magnetic flux generated by the magnetomotive force of the rings 25a, 25b is effectively applied to the movable member 1, and the maximum thrust can be increased. 322935 17 201212490 (3) Reduction of the magnetic permeability of the permanent magnet when the driving is suppressed: Fig. 7A shows a permanent magnet 6a, sensitized in the thickness direction, for example, disclosed in Patent Document 1, as a comparative example of the present invention. The diagram of the flux of the flux. The driving magnetic flux (the dotted arrow in the figure) applied from the magnetic pole teeth 62 is the thickness direction of the movable member 61, and the magnetization direction of the permanent magnets 61a, 61b (the reverse white arrow in FIG. 10) is also the thickness direction of the movable member 61. That is, the driving magnetic flux from the magnetic pole teeth 62 (the arrow in the dotted line in the figure) and the magnetization direction of the permanent magnets 61a, 61b (the anti-white arrows in the drawing) are in the opposite direction, and thus the demagnetization region is generated (by the 7A). The area enclosed by the dotted line of the figure causes a decrease in the permeability coefficient. In the present invention, as shown in the figure, the electrical angle 90 of the maximum magnetomotive force is applied during driving. The position "the drive magnetic flux (the dotted arrow in the figure) applied to the permanent magnets 11a, 11b of the movable stator 23a is at right angles to the moving direction (longitudinal direction) of the movable member 1, and the opposite is true. The magnetization directions of the magnets 11a and lib (the white arrows in the figure) are parallel to the direction of the movable sub-work, so that it is not easy to apply the permanent magnet Ua, the ub demagnetization pass, and the drive from the magnetic pole teeth 23a at the time of heavy load. The magnetic (dotted arrow in the figure) is selected to pass through the magnetic wheel 12 and enter the magnetic pole tooth. This is not easy to apply and the magnetization direction of the permanent magnets Ua, 11b can be made so that the 'handle resistance is good and the lion's margin can be reduced. , ', σ fruit 叮 makes the operating temperature area wider. The trajectory of the trajectory is shown in the comparison example shown in Fig. 7 and the driving magnetomotive force of the disk (= driving current Χ driving coil winding number) shown in Fig. 7 . A graph of the relationship of the minimum permeability. Comparative Example and Inventive Example, 322935 18 201212490 Magnet thickness: 5 mm, motor subgap: 6.6 mm, magnetic field period: 18 mm in the form of the same physique. In Fig. 8, the solid line A indicates the characteristics of the comparative example, and the solid line B indicates the characteristics of the example of the present invention. As a result of Fig. 8, when the relatively large driving magnetomotive force is applied, the decrease in the permeability of the present invention is less than that of the comparative example. Fig. 9 is a graph showing an example of the relationship between the temperature at which a rare earth magnet (ND-Fe-B magnet) is used as a movable member and the demagnetization limit magnetic permeability (magnetism coefficient at the start of demagnetization of a magnet). According to the characteristics of the ninth graph, the heat resistance temperature is determined in the comparative example when the driving magnetomotive force is 2400 A and the heat insulating temperature in the present invention example. In the comparative example, when the driving magnetomotive force is 2400 A, the characteristic of Fig. 8 is that since the minimum permeance coefficient is 0.5, the heat resistance temperature is 55 ° C according to the characteristics of Fig. 9 (refer to the figure). A). On the other hand, in the example of the present invention, when the driving magnetomotive force is 2400 A, the characteristic minimum permeance coefficient of Fig. 8 is 1, and the heat resistance temperature thereof is 75 ° C according to the characteristics of Fig. 9 (refer to the figure). B). Thus, the present invention can achieve an improvement in heat resistant temperature. (4) Improvement of the assemblability of the movable member: In the conventional structure in which the permanent magnet magnetized in the thickness direction is arranged in the longitudinal direction (moving direction) of the movable member (in FIG. 7A), the adjacent permanent magnet is The exposed faces are mutually different and attractive, so that when the movable member is assembled, the permanent magnets fly out of the frame and are attracted to the adjacent permanent magnets. Therefore, the permanent magnet must be fixed in advance after the permanent magnet is loaded until it is completed. However, the present invention is such that the permanent magnet is attracted to the yoke structure, and therefore is stable in the state in which the assembled shape is maintained, and it is not necessary to push it in the line of 19,322,935 201212490. Therefore, the assembly property of the movable member becomes good. Further, an elongated non-magnetic yoke extending in the direction of both edges of the movable member t in the width direction may be formed, and the movable magnetic yoke may be formed by the soft magnetic & yoke and the non-magnetic yoke. The magnetic yoke of the soft magnetic body and the yoke of the non-magnetic body can be made of a screw, an adhesive, or a rivet. In this type of movable shawl, the soft magnetic body is purchased and the surface is fixed. The movable yoke is formed, and the permanent magnet is affixed to the yoke of the yoke, whereby the composition is formed not only to form a working person:: raw, rising, and external stress is not directly applied to the permanent magnet . Therefore, Q also mentions that the workability and construction reliability are achieved at the same time. In the following method of urging a permanent magnet and a core, it is difficult to stably ensure that the singulation of the adhesion force is easily caused by the 3 solid, but the above-described vacancy occurs in the movable layer of the present invention. (5) 掣 reduction of power: In the case where the long-lasting magnet and the soft magnetic body coexist in the yoke of the movable element, the specific permeability will periodically change in the moving direction (the direction of the magnetic field): f is therefore higher掣 Power high harmonic components become significant. Generally, in the independent type of driving, the basic wave (the period of the power and the period of the magnetic field) and the high harmonics of the second and fourth times are eliminated by the three phases, but three times, six times, and nine times. The harmonics of 3 times the number of people will be strengthened. The first diagram is used to illustrate the main method of the cancellation of the dynamic high harmonic components. In the movable member having the above-described configuration, since the sixth harmonic generating tool tends to have a higher harmonic component than the third harmonic, the magnetic pole group forming the same extremely steep is divided into two groups, and the like. The arrangement is set to be wider than the other magnetic pole teeth 20 322935 201212490 by Γ /6 (r: magnetic pole pitch, r = λ /2) (T1 = r, Τ 2 = τ + τ / 6). Therefore, the phase of the turbulent force generated in the magnetic pole groups of the two groups is different by 180 in the harmonic component of the sixth order. Therefore, the 6th high s wave component is cancelled and not output. Further, although it is wider than 其他/6 than the other magnetic pole teeth, even if it is narrower than the other magnetic pole teeth, r /6 has the same effect. Then, by performing a skew arrangement on the permanent magnet (the long side of the permanent magnet is disposed with respect to the direction perpendicular to the moving direction), the harmonic component of 12 or more times can be reduced. The skew angle at this time is 〇 to 4. . Since the amount of displacement of the magnetic pole group described above and the angle of inclination of the permanent magnet are independently changed, the main harmonic component can be effectively reduced in power. (6) Improvement of demagnetization endurance: Fig. 11 is a view showing an example of the dimensions of permanent magnets, magnetic light, and magnetic pole teeth. As shown in Fig. 11, when the dimensions of the permanent magnet, the yoke, and the magnetic pole teeth in the moving direction of the movable member are respectively M, Y, and T, they are configured to satisfy γ. <M <T relationship. In this configuration, in particular, the electrical angle 90 at which the applied magnetomotive force is maximum is the maximum. In the vicinity, the magnetic flux applied from the magnetic pole teeth flows through the yoke to the magnetic pole teeth of the opposite pole, so that the influence on the permanent magnet is reduced, and the demagnetization endurance is improved. Hereinafter, other embodiments of the linear motor of the present invention will be described. The linear motor of the present invention is capable of realizing the positioning of the horse speed in the vertical movement mechanism with high precision as described above. In the vertical movement mechanism, a 322935 21 201212490 is generally provided with a linear motor in the movable portion of the χ-γ (horizontal direction) stage. In this case, 'the gravity of the linear motor does not become the load on the driving side of the χγ axis. Linear motors are required to be lightweight. - The following embodiments are those that satisfy this requirement. In this embodiment, attention is paid to the motor of the wire 9 motor, and the portion where the magnetic flux density does not become high during driving is replaced by a soft magnetic material, and _ is replaced by a lightweight non-magnetic material, thereby achieving weight reduction. It does not excessively reduce the thrust that occurs. Other embodiments of the linear motor of the state - The figure is an oblique view of the whole of the linear motor, and the 12th drawing is a perspective view of the partial configuration of the motor. . Single-phase-driven linear motor (single-phase unit) The 1-sex motor 3 is similarly constructed (see Fig. 3) and has a hollow portion of 2:. The movable motor 1 of the linear motor 3a: = The aforementioned linear motor 3 in the evening H 7 叼 is called you... Slightly explained. °The composition of the mover 1 is exactly the same 'so it saves! different. 2 to 3 and the linear motor 3a is formed by a soft magnetic body formed by the motor. However, the linear horse = although the second is made of a soft magnetic body f 虻 θ, the non-magnetic material is more fortunate in the linear motor 3 Composition. Specifically, the teeth 23a and 23b are replaced with a part of the core portion 22 of the stator 2, which is hatched with a light weight such as a magnetic magnesium alloy, for example, and the core portion 22 is only 2 turns. Therefore, in the motor unit 2a, the 'iron phase (four)_, and the magnetic poles and the knives become the lightweight support members 22a (see Fig. 12B). 322935 22 201212490 In addition, except for the point where a part of the lightweight non-magnetic material is used, the following other configuration of the motor 2a of the linear motor 3a is the same as that of the motor 2 of the linear motor 3: the magnetic teeth 23a on the upper side and the lower side The magnetic pole teeth 23b are disposed at a position where the electrical angle difference is 180°. When the upper magnetic pole teeth 23a face the one permanent magnet 11a of the movable member 1, the lower magnetic pole teeth 23b become the other side of the movable member 1. The positional relationship of the permanent magnets lib is relatively large, and the drive coils 25a are collectively wound around the plurality of magnetic pole teeth 233a, and the drive coils 25b are collectively wound around the plurality of magnetic pole teeth 23b, so that current in the same direction flows through the drive coils 25a and The coil 25b and the like are driven. Between the magnetic pole tooth group (magnetic pole tooth assembly) formed by the plurality of magnetic pole teeth 23a on the upper side, and the other magnetic pole tooth group (magnetic pole tooth assembly) composed of the plurality of magnetic pole teeth 23b on the lower side, Since the position is displaced by 1/2 of the magnetic field period with respect to the moving direction of the movable member 1, the iron portion of the position opposite to the respective magnetic pole teeth 23a' 23b is small when the driving is performed. Therefore, even if the magnetic material is not present in the portion, the magnetic material is not easily hindered from the flow of the magnetic flux when it is driven. This part is replaced by a lightweight non-magnetic support member. The position between the respective magnetic pole groups will not be repeated, 80', so the return of the magnetic flux on the side of the sub-1 is set to be in the direction of the movable movable member 1 to ensure the flux cutter Wrong this is in the motor 2a shape 322935 23 201212490 magnetic circuit. Further, in order to support the reaction force generated by the thrust, the support member 22a is filled in a portion where the magnetic body is not present. The maps of the magnetic flux density generated by the motor in the drive coil, the sacred temple (the driving magnetomotive force 12_, the electrical angle 9G, the flow 2), and the distribution of the magnetic flux density generated by the motor The 14A and 14B diagrams show the flow of the magnetic flux in the motor during driving. The first and the 14A diagrams show the distribution of the magnetic flux density and the flux of the magnetic flux, which are shown by the magnetic body. Part of the bell opposite is replaced by non-Well
之磁通密度的分佈及磁通之流通。 电微卞T :全部由磁性體所構成之電機子中，如第“A圖之虛 雖:頭所不錢有磁通，在磁極齒正下方之部分磁通密度 在^極之磁極齒間（以虛線包圍之區域），磁通 通之ϋΐ小與該磁極餘對向之部分係幾乎不會作為磁 通之通道。因此，在本實施形態中，刪 == 與磁極齒相對向之部分）的磁性體^輕=== 在本實施形‘4中，由於如第14Β圖之虛線箭頭所示流 =有磁通，因此即使將與魏齒相對向之部分作為非磁性 ，亦不會妨礙磁通之流通。並且，產生在第⑽圖所示 之磁極齒的磁通密度分佈係形成與第13Α圖所示之磁極齒 產生之磁通密度分佈大致同樣的分佈。而且，即使為與非 磁”接之鐵心部分（以虛線所包圍之區域），磁通密度 亦^夏增加。因此，即使將—部分取代成輕量之非磁性體 322935 24 201212490 可獲得相同程 時’與全部由磁性體所構成之情形相比較 度之推力。 在本實施形態中’可取代成輕量之非磁性體（支持部材 22a)之體積比率為30至5Q%左右，雖取決於使用之非磁 性體的材料，但電機子之重量係可達成2〇至左右之 輕孴I。 此外，本實施形態之線性馬達3a中的動作機構係虚前 述之線性馬達3的動作機構相同。並且，當然線性馬達如 亦具有前述（1)至（6)所述之線性馬達3的特徵。 在上述之實施形態中，作成為將一部分（磁通密度低之 部分）取代成輕量之非磁性體的構成，而不會造成推力之減 低，以實現更輕之線性馬達。針對謀求該線性馬達之輕量 化的其他實施形態加以說明。在本實施形態中，在不容易 產生電機子之磁氣飽和的部分設置在長度方向（可動子之 移動方向）貫通之1個或複數個貫通孔。與以磁性體構成電 機子整體之情形相比較，可使電機子之質量變輕達無磁性 體之貫通孔的份。即使為設置該貫通孔之構成，幾乎看不 出推力之降低。 (實施例） 以下’針對本發明者製作之線性馬達之具體構成、及 所製作之線性馬達的特性加以說明。 第15A、15B圖係本發明之單相份之線性馬達3的實施 例之上面圖及側面圖。使可動子1貫通至電機子2的中空 部21，以構成線性馬達3，其中，該電機子2係分別以列 322935 25 201212490 狀設有複數個磁極齒23a、磁極齒23b，且在由該複數個磁 極齒23a所構成之磁極齒群、由複數個磁極齒23b所構成 之磁極齒群分別總括捲繞有驅動線圈25a、驅動線圈25b 所構成者’而該可動子1係交互地依序排列有永久磁鐵 11a、磁輛12、永久磁鐵lib、磁輛12··.。 首先，就使用在線性馬達3之平板狀的可動子1而言， 製作包含第ΙΑ、1B圖所示之形狀之永久磁鐵ua、ilb的 可動子1。所使用之永久磁鐵lla、llb係為Nd_Fe_B系燒 結磁鐵，並切成長度38匪、寬度3mm、厚度5mm的平板形 狀。並且，製作出以金屬線切割器將軟鐵切成長度38mm、 寬度6醒、厚度5mm之平板形狀者，以作為軟質磁性體之 磁耗12。 並且，準備該等永久磁鐵54個及磁輛55個，以環氧 系接著劑依永久磁鐵11a、磁輛12、永久磁鐵ub、磁梃 12、…之順序交互地接著，而製作長度492咖、寬度38mm、 厚度5mm之板狀體，將該製作之板狀體插入鋁製之框而作 成可動子1。永久磁鐵11a、永久磁鐵llb之磁化方向雖係 朝可動子1之移動方向（長度方向），但其方向係彼此相反 之方向（參照第ΙΑ、1B圖之反白箭頭）。 接著’依預定之順序使第16A至16F圖及第17G至ηκ 圖（第18Α 18Κ圖）所示之由石夕鋼板所構成之鐵心素材a 至K積層’以製作電機子2。各鐵^素材A至κ皆係長邊 90mm、短邊62賴’厚度則為’鐵心素材c、D、E、G、Η、 J、K為2賴’鐵心素材A、B為3_ ’鐵心素材F、丨為5咖。 322935 26 201212490 而且>，各鐵心素材UK之中空形狀不同β βfn材A i κ皆係以環氧系接著劑接著由厚度 • 5nm之糊㈣朗定形狀者*構成，厚度2丽之鐵心 素材係將厚度〇· 5mm之♦鋼板重疊4片而―體化，同樣地 厚度3mm、5mm之鐵心素材係分別重疊6片、1〇片並予以 一體化而構成。 各鐵^素材A至K之積層順序及積層片數係如下所述。 H + G + F+ {E + D + CH-B + C + D + E + A}x3 + E + D + C +The distribution of magnetic flux density and the flow of magnetic flux. Electric micro T: In the motor consisting of all magnetic bodies, as in the case of the "A picture of the virtual figure: the head does not have the magnetic flux, the magnetic flux density directly under the magnetic pole teeth is between the magnetic pole teeth of the ^ pole (the area surrounded by the broken line), the portion of the magnetic flux that is small and the portion opposite to the magnetic pole is hardly a channel for the magnetic flux. Therefore, in the present embodiment, the portion where the magnetic pole is opposite to the magnetic pole tooth is deleted. Magnetic body = light === In the present embodiment, '4', since the flow is indicated by the dotted arrow in Fig. 14 and there is magnetic flux, even if the portion facing the Wei tooth is non-magnetic, it does not hinder The magnetic flux density distribution of the magnetic pole teeth shown in the figure (10) is substantially the same as the magnetic flux density distribution generated by the magnetic pole teeth shown in Fig. 13 . The part of the core that is magnetically connected (the area enclosed by the dotted line) also increases the magnetic flux density in summer. Therefore, even if the portion is replaced by a lightweight non-magnetic body 322935 24 201212490, the thrust of the same process can be obtained as compared with the case where all of the magnetic bodies are formed. In the present embodiment, the volume ratio of the non-magnetic material (support member 22a) which can be replaced with a light amount is about 30 to 5 Q%, and the weight of the motor can be achieved depending on the material of the non-magnetic material to be used. 〇 左右 to the left and right 孴 I. Further, the operation mechanism of the linear motor 3a of the present embodiment is the same as the operation mechanism of the linear motor 3 described above. And, of course, the linear motor also has the features of the linear motor 3 described in the above (1) to (6). In the above-described embodiment, a part (the portion having a low magnetic flux density) is replaced by a lightweight non-magnetic material, and the thrust is not reduced to realize a lighter linear motor. Other embodiments for reducing the weight of the linear motor will be described. In the present embodiment, one or a plurality of through holes penetrating in the longitudinal direction (moving direction of the movable member) are provided in a portion where the magnetic flux of the motor is not easily generated. The mass of the motor can be made lighter than that of the through hole of the non-magnetic body as compared with the case where the magnetic body is formed integrally with the motor. Even in the configuration in which the through hole is provided, the decrease in thrust is hardly observed. (Embodiment) Hereinafter, the specific configuration of the linear motor manufactured by the inventors and the characteristics of the produced linear motor will be described. 15A and 15B are a top view and a side view of an embodiment of the single-phase linear motor 3 of the present invention. The movable member 1 is inserted into the hollow portion 21 of the motor unit 2 to constitute a linear motor 3, wherein the motor unit 2 is provided with a plurality of magnetic pole teeth 23a and magnetic pole teeth 23b in a row of 322935 25 201212490, respectively. The magnetic pole group formed by the plurality of magnetic pole teeth 23a and the magnetic pole group formed by the plurality of magnetic pole teeth 23b are each wound with a drive coil 25a and a drive coil 25b, and the movable member 1 is alternately arranged. The permanent magnet 11a, the magnetic vehicle 12, the permanent magnet lib, and the magnetic vehicle 12·. are arranged. First, the movable member 1 including the permanent magnets ua and ilb having the shapes shown in Figs. 1 and 1B is used for the movable member 1 of the flat motor 3. The permanent magnets 11a and 11b used were Nd_Fe_B-based sintered magnets, and were cut into a flat plate shape having a length of 38 Å, a width of 3 mm, and a thickness of 5 mm. Further, a soft wire having a length of 38 mm, a width of 6 awake, and a thickness of 5 mm was cut by a wire cutter to obtain a magnetic loss of 12 as a soft magnetic material. Further, 54 permanent magnets and 55 magnetic vehicles are prepared, and the epoxy-based adhesive is alternately followed by the permanent magnet 11a, the magnetic vehicle 12, the permanent magnet ub, the magnetic cymbal 12, ..., and the length 492 is produced. A plate-shaped body having a width of 38 mm and a thickness of 5 mm was inserted into the frame made of aluminum to form the movable member 1. The magnetization directions of the permanent magnet 11a and the permanent magnet 11b are in the moving direction (longitudinal direction) of the movable member 1, but the directions thereof are opposite to each other (see the reverse arrows in Fig. 1B). Then, the core material a to the K layer ' formed of the Shih-tung steel plate shown in Figs. 16A to 16F and 17G to ηκ (Fig. 18Α 18Κ) are sequentially prepared in order to produce the motor unit 2. Each iron ^ material A to κ is long side 90mm, short side 62 赖 'thickness is 'iron core material c, D, E, G, Η, J, K is 2 Lai' core material A, B is 3_ 'iron core material F, 丨 is 5 coffee. 322935 26 201212490 Moreover, each hollow core material has a hollow shape different from β βfn material A i κ, which is composed of an epoxy-based adhesive and then a thickness of 5 nm paste (four) shape, * thickness of 2 core material In the same manner, the core material having a thickness of 〇·5 mm is superposed on four sheets, and the core material having a thickness of 3 mm and 5 mm is formed by superposing six sheets and one sheet, and integrating them. The stacking order and the number of laminated sheets of each of the iron materials A to K are as follows. H + G + F+ {E + D + CH-B + C + D + E + A}x3 + E + D + C +
I + J + K 以該積層順序疊合鐵心素材A至K，而構成外形為高 度62mm、寬度9〇麵、長度78mm之單相份的單元（參照第 15A圖、第15B圖）。藉由該構成，一方面之磁極齒與另一 方面之磁極齒係成為電氣角差了 18『之配置。磁極齒間（間 隙）為 6. 6mm。 第19圖係顯示該單元之相鄰之磁極齒23a、23a(23b、 23b)的平面形狀。在各磁極齒23a(23b)中寬度會從與可 動子1相對向之前端部朝遠端之基端部以3階段逐漸變 寬。考慮來自可動子1之磁軛12之磁通，最前端部之寬度 係比磁扼12之寬度（6mm)略| 7mm，為了防止磁性飽和之 發生，最基端部之寬度為接近磁極間距（18mm)215mm。此 外雖作成為使寬度以階段狀變化之構成，但亦可與該構 成不同，使寬度從與可動子1相對向之前端侧往基端側連 續地變寬而構成傾斜狀。 相對於該單相份之單元，以總括包含單元之上側之磁 322935 27 201212490 極齒群24a的方式捲繞驅動線圏脱，並且以總括包含單 兀•之下側之磁極齒群24b的方式捲繞驅動線圈25b。此時， 以可2分割插入之方式將捲繞框（bobbin，未圖示）裝入單 元内而接著在磁極齒群後，分別將直徑lmm之珠瑯被覆鋼 線捲繞各100次而作成驅動線圈25a、驅動線圈咖。 如以上所述 躓層複數片之矽鋼板而製作單相份 機子的料時，因切鋼板之厚度的變異之影響，而有單 相份之皁兀_層^(可動子之移動方 為所希望之長度的可能性。當各單元並非成為 度，吻^會惡化。為了避免上述事態，較佳為依 需要，將^置磁極齒而僅由鐵心部所構成之厚度0.05至 〇. lmm左右的夕鋼板作為間隔件，夾持在電機子之長度方 向（可動子之移動方向）的—端或兩端，以修正電機子之長 準備3個以上迷方式製作之電機子2，以相鄰之電機 子2間的相對性電氣角前進12{)。份之方式（具體而言為 27mm)以直線狀配置3個電機子2。將電機子2之間隔作為 _，因此該3相份之全長係成為288_( = 78麵3+27賴 X2)。並且’將可動子1插入3個電機子2之中央的中空部 (參照第20圖)’以使可動子i不會與電機子 2接觸而可朝 長度方向移動之方式固定在測試座。 預先在各電機子之上側的鐵心部及下側之鐵心部設置 朝長度方向（可動子之移動方向）貫通之複數個貫通孔，以 長形之軸總括輯U相、W目、W相之各單w電機子）。此 322935 28 201212490 時’為了確保所希望之剛性力及真直度，較佳為將該軸之 直徑設為5mm以上。 在各相之每個單元串聯連接驅動線圈，以使其一對之 驅動線圈之繞線方向成為相同之方式結線。並且了將該等 U相、V相、W相之各單元的捲繞線作為星結線，且連接在 馬達控制器。並且’在可動？丨側連接測力計（f〇rce guage) ’而可測量相對於驅動磁動勢之推力。 在如以上方式連接後，改變施加在驅動線圈之驅動電 流而測量可動子丨之推力。此時，以將測力計推壓在可動 子1之方法測量推力。第21圖顯示該推力之測量結果與推 力磁動勢比的算出結果。並且，製作與本發明之實施例為 同一體格的線性馬達，做為形成為例如專利文獻1揭示之 第7A圖所示之構成的比較例，並以與本發明實施例相同之 條件測量推力。亦將該推力之測定結果及推力磁動勢比之 算出結果顯示在第21圖。 第21圖之橫軸係每一電機子單相之驅動磁動勢（=驅 動電流X驅動線圈之捲繞數）[A] ’縱軸係推力[N]及推力磁 動勢比[N/A]。並且，圖中A為表示本發明例之推力、圖 中B為表示比較例之推力，圖中c為表示本發明例之推力 磁動勢比’圖中D為表示比較例之推力磁動勢比的特性。 如第21圖所示，對於同一之驅動磁動勢，在推力之比 例區域中’於本發明例中，與比較例相比較，可實現高65 /6左右之推力。並且’在本發明例中亦可提升财熱溫度。 因此’本發明係可提供一種要求高速移動且高精確度之定 29 322935 201212490 位之適用於產業上之移動機構的線性馬達。 接著’針對謀求掣動力之減低之其他實施例加以說 明。第22A、22B圖係本發明之其他實施例之單相份的線性 馬達3之上面圖及側面圖，第23圖係本發明之單相份之線 性馬達3的其他實施例的剖面圖。 所使用之永久磁鐵11a、11b係長度38mm、寬度4mm、 厚度5匪，軟質磁性體之磁軛12係設為長度38mm、寬度 3· 5mm、厚度5顏。此外，磁極間距τ係7. 5mm(磁場週期為 15mm)、磁極齒23a、23b之寬度為6mm，不等間距移仅量 係設為r /6= 1.25mm。並且，將永久磁鐵1 ia、llb之歪 斜角度設為2°。 針對不進行將磁極齒之間隔設為均一之永久磁鐵的蛋 斜配置之構成的線性馬達（構成例丨）、雖進行磁極齒之間 隔調整但不進行永久磁鐵之歪斜配置之構成的線性馬達 (構成例2)、及調整磁極齒之間隔且進行永久磁鐵之歪斜 配置之構成的線性馬達（構成例3)，求出單相份及3相合 成之各高諧波次數中之掣動力的振幅。將該結果顯示在第 24A 至 24C 圖。 在第24A圖所示之構成例1中，第6次高諧波成分之 掣動力會變得非常大《在第24B圖所示之構成例2中，第 6次高譜波成分之掣動力雖減低，但第12次高諧波成分之 f動力係較大。相對於此，在第24C圖所示之構成例3中， 第6次高諧波成分及第12次高諧波成分之掣動力皆會減 低。 30 322935 201212490 ^者，針對將電機子之鐵心部的一部分（與磁極齒相對 向之。卩分）取代為輕量之非磁性體（支持部材）以謀求輕量 化的又其他實施例加以說明。第25A、25B圖係本發明之 他實化例之單相份的線性馬達之上面圖及側面 圖。第26圖係顯示又一其他實施例之單相份的線性馬達 3a之°〗面圖。再者，第27圖係顯示又一其他實施例之電 機子2a的構成素材之斜視圖。 電機子2a之整體尺寸係與第22A、22B圖所示之實施 例相同，與磁極齒相對向之部分（在可動子1之移動方向 6丽份之長度：標有陰影線之部分）係由支持部材22a所構 成’該支持部材22a並非由雜體所構成而是由鎮合金所 構成。此外，使用在可動子i之永久磁鐵Ua、Ub及磁軛 12之尺寸係與第22A圖所示之實施例相同，相鄰之磁極齒 23a、23a、23b、23b的間距亦與第23圖所示之實施例相 同。 製作使用在線性馬達3a之平板狀的可動子ι(長度： 410mm、寬度：38mm、厚度：5mm)。此外，所使用之永久磁 鐵11a、lib及磁輥12之材料、及其製作步驟係與前述之 第15A、15B圖所示之實施例的情形相同，而省略其說明。 使利用環氧系接著劑接著以金屬線切割器從構成磁極 齒之厚度0· 5mm之矽鋼板（材質50A800、比重7. 8g/Cm3) 切成預定形狀之12片而構成之鐵心部材31、與以厚度6mm 從鎂合金（材質LA141、Mg-14質量％Li-l質量卜比重 1· 36g/cm3)切成預定形狀之輕量部材（支持部材）32相接 31 322935 201212490 合而製作第1電機子素材33。並且，利用環氧系接著劑接 著以金屬線切割器從厚度〇.5mm之矽鋼板切成預定形狀之 複數片，以製作成為磁極齒之側面部分的第2電機子素材 34。 並且，如第27圖所示，交互地配置第丨電機子素材 33、第2電機子素材34，使該等第1電機子素材33、第2 電機子素材34接合，以製作外形為高度62腿、寬度9〇_、 長度59.75mm之單相份的單元。以可2分割插入之方式將 捲繞框（bobbin，未圖示）裝入單元内而接著在磁極齒群 後，分別將直徑1_之琺瑯被覆鋼線捲繞各1〇〇次而作成 驅動線圈。 使用在所製作之電機子2A的石夕鋼板之質量、鎮合金之 質量係分別為每一單相U11.2g、95.57g，單相之電機子 2a整體的.質量為1206. 77g。 準備3個以上述方式製作之電機子2a，以相鄰之電機 子2間的相對性電氣角前進120。份之方式（具體而言為 27.75rom)以直線狀配置3個電機子2a。該3相份之全長係 成為 234. 75ram( = 59. 75mmx3 + 27. 75mmx2)。並且，將可動 子1插入3個電機子2a之中央的中空部（參照第26圖）， 以使可動子1不會與電機子2a接觸而可朝長度方向移動之 方式固定在測試座。 在各相之每個單元串聯連接驅動線圈，以使其一對之 驅動線圈之繞線方向成為相同之方式結線。並且，將該等 各单元之捲繞線作為星結線，且連接在馬達控制器。並 322935 32 201212490 且在了動子1側連接測力計，而可測量相對於驅動磁動 勢之推力。 在如以上方式連接後，改變施加在驅動線圈之驅動電 流而測量線性馬達3a之可動子1之推力。此時，以將測力 计推壓在可動子1之方法測量推力。第28圖係顯示該推力 之測夏結果與推力磁動勢比的算出結果。並且，除了以磁 性體（矽鋼板）構成電機子整體之外，將與此實施例之線性 馬達3a同一體格之線性馬達製作成比較例，並以與線性馬 達3a相同之條件測量推力。亦將該推力之測定結果及推力 磁動勢比之算出結果顯示在第28圖。此外，該比較例之線 性馬達中之電機子的質量係每一單相1659. 32g。 第28圖之橫軸係每一電機子單相之驅動磁動勢（==:驅 動電流X驅動線圈之捲繞數）[A]，縱軸係推力[N]及推力磁 動勢比[N/A]。並且’圖中E為表示本實施例之推力、圖 中F為表示比較例之推力，圖中G為表示本實施例之推力 磁動勢比，圖中Η為表示比較例之推力磁動勢比的特性。 如第28圖所示，在本實施例中，至驅動磁動勢成為 1 ，在 1600A為止，可獲得與比較例同等之推力特性。炎> ， 本實施例中，與比較例相比較’最大推力雖小丨5%左右 澈量比 但與比較例相比較可謀求27%之輕量化，因此推力與係 係本實施例高於比較例。因此’本實施例之線性馬遠3技 最適合垂直移動機構之構造。 ， 以磁性體構成電機子整體之線性馬達3的重*難重艘 但可獲得優異之推力特性。另一方面，以輕量之泮蝤咮 322935 33 201212490 :成與磁極齒相對向之部分的 略差’但可使重量減小1此，依據使推力特性雖 即可分開使用該等之本發·線性馬^之^、用途3等， 此外，雖針對使關合金作 ^生馬達如。 部分的輕量非_之情形加對向之 該材料所要求之條件為:輕量月二= 就滿足該等侔2=而ίΓ材22a而發揮功能。 切朦。： 用鋁合金、鋰合金、強 渓膠、妷纖維、玻璃環氧樹脂等。 者為:Γΐ輕量之非磁性體的部分而言，第27圖等所示 ‘、、、例1亦可針對以磁性體構成整體之電機子，取得 Α圖所示之磁通密度的分佈，並依據所取得之磁通: ^佈’將所產生之磁通密度小之部分取代成輕量之 ，體。例如，可將最大驅動時磁通密度僅產生鐵心 :磁通密度之1/3左右以下的部分取代為輕量之=: 此外，與上述之製作例不同，亦可使電機子上下分割 =製作。此時’使預定之複數0鋼板積㈣著而製二 =上侧之磁極齒之電機子的上側部分，且使預定之複數^ 立夕鋼板積層接著而製作包含下側之磁極齒之電機子的下 部分，並使該等之上侧部分及下側部分一體結合，側 幾子。此時，藉由將電機子之鐵心部的分割部作成 令易產生磁氣飽和之部位，即彳避免推力之降低。此外不 在該製作手法中，於使上側部分及下側部分一體結八之 322935 34 201212490 月J 了使在捲繞框（bobbiη)捲繞有線圈者與上側部分的磁 極齒群及下侧部分的磁極齒分別群接著。因此，可容易地 將容積率提升至80%以上。並且，亦可提升組裝作業性。 【圖式簡單說明】 第1Α及1Β圖係顯示使用在本發明之線性馬達之可動 子之構成的斜視圖及剖面圖。 第2Α至2C圖係顯示使用在本發明之線性馬達之電機 子之構成的斜視圖。 第3圖係顯示本發明之線性馬達之構成的局部破斷斜 视圖。 第4圖係用以說明本發明之線性馬達之推力發生的原 理之圖。 第5Α至5C圖係用以說明可動子之磁軛之功能的圖。 第6Α及6Β圖係用以s兒明比較例之磁通流通的圖。 第7Α及7Β圖係用以說明本發明例與比較例中之磁通 之流動的圖。 第8圖係顯示驅動磁動勢與最小磁 關係的曲 線圖。 第9圖係顯示溫度與減磁限磁場導係數之關係之一例 第1〇圖係用以說明主要之掣動力高諧波成分之抵消 的圖。 第圖係顯示永久磁鐵、磁輕、磁極齒之尺寸例的圖。 第似及12Β ®係顯林發明之線性馬達之其他實施 35 322935 201212490 形癌的構成之斜視圖。 第13A及13B圖係顯示產生在電機子之磁通密度之分 佈的圖。 第14A及14B圖係顯示驅動時之電機子中之磁通的流 動之圖。 第15A及15B圖係本發明之單相份之線性馬達的實施 例之上面圖及側面圖。 第16A至16F圖係顯示構成電機子之複數種之鐵心素 材的平面圖。 第17G至17K圖係顯示構成電機子之複數種之鐵心素 材的平面圖。 第18A至18K圖係顯示構成電機子之複數種鐵心素材 的斜視圖。 第19圖係顯示電機子之磁極齒之平面形狀的圖。 第20圖係顯示本發明之線性馬達之實施例的外觀形 狀之圖。 第21圖係顯示本發明之線性馬達之實施例中的推力 特性之測定結果的曲線圖。 第22A及22B圖係本發明之單相份之線性馬達的其他 實施例之上面圖及侧面圖。 第23圖係本發明之單相份之線性馬達的其他實施例 的剖面圖。 第24A至24C圖係顯示3種構成例中之單相份及3相 合成所產生之各高譜波次數之掣動力的振幅之曲線圖。 36 322935 201212490 第25A及25B圖係本發明之單相份的線性馬達之又一 其他實施例之上面圖及侧面圖。 第26圖係本發明之單相份的線性馬達之又一其他實 施例之剖面圖。 第27圖係顯示本發明之又一其他實施例之電機子的 構成素材之斜視圖。 第28圖係顯示本發明之線性馬達之又一其他實施例 的推力特性之測定結果的曲線圖。 【主要元件符號說明】 1 可動子 2、2a 電機子 3、3a 線性馬達 11a、lib 永久磁鐵 12(12N、12S) 磁輛 21 中空部 22 鐵心部 22a 支持部材（非磁性體） 23a、23b 磁極齒 24a、24b 磁極齒群 25a 、 25b 驅動線圈 37 322935I + J + K superimposes the core materials A to K in this lamination order, and forms a single-phase unit having a height of 62 mm, a width of 9 〇, and a length of 78 mm (refer to Figs. 15A and 15B). With this configuration, the magnetic pole teeth on the one hand and the magnetic pole tooth system on the other side have an electrical angle difference of 18". The magnetic pole (gap) is 6. 6 mm. Fig. 19 is a view showing the planar shape of the adjacent magnetic pole teeth 23a, 23a (23b, 23b) of the unit. In each of the magnetic pole teeth 23a (23b), the width is gradually widened in three stages from the base end portion which is opposite to the movable end 1 toward the distal end portion. Considering the magnetic flux from the yoke 12 of the movable member 1, the width of the foremost end portion is slightly larger than the width (6 mm) of the magnetic cymbal 12 by 7 mm. To prevent the occurrence of magnetic saturation, the width of the most proximal end portion is close to the magnetic pole pitch ( 18mm) 215mm. In addition, the width is changed in a stepwise manner. However, unlike the configuration, the width may be continuously increased from the front end side toward the proximal end side of the movable member 1 to form an inclined shape. With respect to the single-phase unit, the drive line is wound in such a manner as to include the magnetic 322935 27 201212490 pole group 24a on the upper side of the unit, and the magnetic pole group 24b including the single side and the lower side is collectively included. The drive coil 25b is wound. In this case, a winding frame (bobbin, not shown) is inserted into the unit so that the bobbin (not shown) can be inserted into the unit, and then, after the magnetic pole group, the bead-coated steel wire having a diameter of 1 mm is wound 100 times, respectively. The coil 25a is driven and the coil is driven. When the single-phase machine is made of the tantalum steel sheet of the plurality of layers of the above-mentioned layer, the saponin_layer of the single-phase portion is affected by the variation of the thickness of the cut steel sheet (the movement of the movable element is The possibility of the desired length. When each unit is not a degree, the kiss will deteriorate. In order to avoid the above situation, it is preferable to set the thickness of the magnetic pole portion to the thickness of 0.05 to 〇. The left and right slabs are used as spacers, and are clamped to the end or both ends of the length direction of the motor (moving direction of the movable member), and the motor 2 prepared by modifying the length of the motor is prepared by three or more fans. The relative electrical angle between the adjacent motor poles 2 advances by 12{). The three motor sections 2 are arranged in a straight line (specifically, 27 mm). The interval between the motor segments 2 is taken as _, so the total length of the three phases is 288_(=78 faces 3+27 赖X2). Further, the movable member 1 is inserted into the hollow portion (see Fig. 20) at the center of the three motor segments 2 so that the movable member i can be fixed to the test holder so as not to be in contact with the motor unit 2 so as to be movable in the longitudinal direction. In the core portion on the upper side of each motor and the lower core portion, a plurality of through holes penetrating in the longitudinal direction (moving direction of the movable member) are provided, and the U-phase, W-mesh, and W-phase are collectively included in the elongated axis. Each single w motor). In the case of 322935 28 201212490, it is preferable to set the diameter of the shaft to 5 mm or more in order to secure the desired rigidity and straightness. The drive coils are connected in series to each of the respective phases so that the winding directions of the pair of drive coils are connected in the same manner. Further, the winding wires of the respective units of the U phase, the V phase, and the W phase are used as a star line, and are connected to the motor controller. And 'moving? The thrust side is connected to the dynamometer (f〇rce guage) and the thrust relative to the driving magnetomotive force can be measured. After the connection as described above, the driving current applied to the driving coil is changed to measure the thrust of the movable sub-turn. At this time, the thrust is measured by pushing the dynamometer against the movable member 1. Fig. 21 shows the calculation results of the thrust measurement result and the thrust magnetomotive force ratio. Further, a linear motor having the same constitution as that of the embodiment of the present invention is produced as a comparative example formed as shown in Fig. 7A disclosed in Patent Document 1, and the thrust is measured under the same conditions as those of the embodiment of the present invention. The result of the measurement of the thrust and the calculation result of the thrust magnetomotive force ratio are also shown in Fig. 21. The horizontal axis of Fig. 21 is the driving magnetomotive force of each motor sub-phase (= drive current X drive coil winding number) [A] 'longitudinal axis thrust [N] and thrust magnetomotive force ratio [N/ A]. Further, in the figure, A is a thrust showing an example of the present invention, and B is a thrust showing a comparative example, and c is a thrust magnetomotive force ratio in the example of the present invention. In the figure, D is a thrust magnetomotive force indicating a comparative example. The characteristics of the ratio. As shown in Fig. 21, for the same driving magnetomotive force, in the ratio region of the thrust, in the example of the present invention, the thrust of about 65 / 6 can be achieved as compared with the comparative example. And in the example of the present invention, the heat temperature can also be raised. Therefore, the present invention can provide a linear motor suitable for industrial moving mechanisms that requires high-speed movement and high precision. Next, other embodiments for pursuing the reduction of power are described. 22A and 22B are a top view and a side view of a single-phase linear motor 3 according to another embodiment of the present invention, and Fig. 23 is a cross-sectional view showing another embodiment of the single-phase linear motor 3 of the present invention. The permanent magnets 11a and 11b used were 38 mm in length, 4 mm in width, and 5 in thickness, and the yoke 12 of the soft magnetic body was set to have a length of 38 mm, a width of 3 mm, and a thickness of 5. Further, the magnetic pole pitch τ is 7. 5 mm (the magnetic field period is 15 mm), the width of the magnetic pole teeth 23a and 23b is 6 mm, and the unequal pitch shift is only r / 6 = 1.25 mm. Further, the skew angles of the permanent magnets 1 ia and 11b are set to 2°. A linear motor (constitution example) that does not perform an arrangement of an egg-corner arrangement in which the distance between the magnetic pole teeth is a uniform permanent magnet, and a linear motor in which the arrangement of the magnetic pole teeth is adjusted without causing the permanent magnet to be skewed ( In the linear motor (Configuration Example 3) in which the interval between the magnetic pole teeth is adjusted and the permanent magnet is arranged in a skewed manner, the amplitude of the turbulent power in the single-phase and three-phase combined harmonic orders is obtained. . The results are shown in Figures 24A through 24C. In the configuration example 1 shown in Fig. 24A, the enthalpy of the sixth harmonic component becomes very large. "In the configuration example 2 shown in Fig. 24B, the kinetic power of the sixth high-spectrum component. Although it is reduced, the powertrain of the 12th harmonic component is larger. On the other hand, in the configuration example 3 shown in Fig. 24C, the power of the sixth harmonic component and the twelfth harmonic component are reduced. 30 322935 201212490 ^ Other embodiments will be described in which a part of the core portion of the motor (which is opposed to the magnetic pole teeth) is replaced with a lightweight non-magnetic body (support member) to reduce the weight. 25A and 25B are a top view and a side view of a single-phase linear motor of another embodiment of the present invention. Fig. 26 is a plan view showing the single-phase linear motor 3a of still another embodiment. Further, Fig. 27 is a perspective view showing the constituent material of the motor unit 2a of still another embodiment. The overall size of the motor sub-section 2a is the same as that of the embodiment shown in Figs. 22A and 22B, and the portion opposite to the magnetic pole teeth (the length of the aliquot in the moving direction of the movable member 1: the hatched portion) is The support member 22a constitutes the support member 22a which is not composed of a hybrid body but is made of a town alloy. Further, the dimensions of the permanent magnets Ua, Ub and the yoke 12 used in the movable member i are the same as those in the embodiment shown in Fig. 22A, and the pitch of the adjacent magnetic pole teeth 23a, 23a, 23b, 23b is also the same as that in Fig. 23. The embodiment shown is the same. A flat movable member ι (length: 410 mm, width: 38 mm, thickness: 5 mm) used in the linear motor 3a was produced. Further, the materials of the permanent magnets 11a, lib and the magnetic roller 12 used, and the manufacturing steps thereof are the same as those in the above-described embodiments shown in Figs. 15A and 15B, and the description thereof will be omitted. a core member 31 formed by cutting a 12-piece predetermined shape into a predetermined shape of a steel sheet (material 50A800, specific gravity 7.8 g/cm 3 ) constituting a magnetic pole tooth having a thickness of 0·5 mm by using a metal-based adhesive. The light-weight member (support member) 32 which is cut into a predetermined shape from a magnesium alloy (material LA141, Mg-14 mass% Li-1 mass ratio 1·36 g/cm3) with a thickness of 6 mm is connected to 31 322935 201212490. 1 motor sub-material 33. Then, a plurality of sheets of a predetermined shape are cut from a 矽.5 mm 矽 steel sheet by a wire cutter using an epoxy-based adhesive to form a second motor sub-material 34 which is a side portion of the magnetic pole teeth. Further, as shown in Fig. 27, the second motor sub-material 33 and the second motor sub-material 34 are alternately arranged, and the first motor sub-material 33 and the second motor sub-material 34 are joined to each other to have a height of 62. Single-phase unit with legs, width 9〇_, length 59.75mm. The winding frame (bobbin, not shown) is inserted into the unit so that it can be inserted into the unit, and then after the magnetic pole group, the diameter of the 珐琅-coated steel wire is wound one turn each time to drive Coil. The quality of the slab steel used in the motor 2A produced and the mass of the alloy are respectively U11.2g and 95.57g for each single phase, and the mass of the single phase motor 2a is 1206.77g. Three motor parts 2a produced in the above manner are prepared, and are advanced by 120 at a relative electrical angle between adjacent motor pieces 2. The three motor sections 2a are arranged in a straight line (specifically, 27.75 rom). The full length of the three phases was 234. 75 ram (= 59. 75 mm x 3 + 27. 75 mm x 2). Further, the movable member 1 is inserted into the hollow portion at the center of the three motor segments 2a (see Fig. 26) so that the movable member 1 can be fixed to the test holder so as not to be in contact with the motor portion 2a and to be movable in the longitudinal direction. The drive coils are connected in series to each of the respective phases so that the winding directions of the pair of drive coils are connected in the same manner. Further, the winding wires of the respective units are used as a star line and connected to the motor controller. And 322935 32 201212490 and connected to the dynamometer on the side of the mover 1, can measure the thrust relative to the drive magnetomotive force. After the connection as described above, the driving current of the driving coil is changed to measure the thrust of the movable member 1 of the linear motor 3a. At this time, the thrust is measured by pushing the dynamometer against the movable member 1. Fig. 28 shows the calculation results of the summer measurement result and the thrust magnetomotive force ratio of the thrust. Further, a linear motor of the same constitution as that of the linear motor 3a of this embodiment was fabricated as a comparative example except that the motor body was integrally formed of a magnetic body (the steel plate), and the thrust was measured under the same conditions as the linear motor 3a. The result of the measurement of the thrust and the calculation result of the thrust magnetomotive force ratio are also shown in Fig. 28. Further, the mass of the motor in the linear motor of the comparative example was 1659.32 g per single phase. The horizontal axis of Fig. 28 is the driving magnetomotive force of each motor sub-phase (==: driving current X driving coil winding number) [A], vertical axis system thrust [N] and thrust magnetomotive force ratio [ N/A]. Further, in the figure, E is the thrust of the present embodiment, and F is the thrust of the comparative example. In the figure, G is the thrust magnetomotive force ratio of the present embodiment, and Η is the thrust magnetomotive force of the comparative example. The characteristics of the ratio. As shown in Fig. 28, in the present embodiment, the driving magnetomotive force becomes 1 and the thrust characteristics equivalent to those of the comparative example can be obtained up to 1600A. In the present embodiment, compared with the comparative example, the maximum thrust is less than 5%, but the weight ratio is 27% compared with the comparative example. Therefore, the thrust and the system are higher than this embodiment. Comparative example. Therefore, the linear Ma Yuan 3 technique of the present embodiment is most suitable for the configuration of the vertical moving mechanism. The linear motor 3 which constitutes the motor as a whole with a magnetic body is difficult to handle, but excellent thrust characteristics can be obtained. On the other hand, in the case of lightweight 泮蝤咮 322935 33 201212490 : a slight difference from the portion opposite to the magnetic pole teeth 'but the weight can be reduced by one, and the hair can be used separately according to the thrust characteristics. · Linear horse ^, use 3, etc., in addition, although the alloy is made for the shut-off alloy. Part of the lightweight non- _ situation plus the opposite of the material required conditions: lightweight month two = to meet the 侔 2 = and Γ coffin 22a to function. Cut off. : Aluminum alloy, lithium alloy, strong silicone, rayon fiber, glass epoxy resin, etc. In the part of the non-magnetic material, the portion of the non-magnetic material shown in Fig. 27 and the like can be obtained for the motor having the magnetic body as a whole, and the distribution of the magnetic flux density shown in the figure can be obtained. And according to the obtained magnetic flux: ^ cloth 'to replace the part of the magnetic flux density produced by the light body. For example, the magnetic flux density at the maximum driving can be generated only by the iron core: a portion of about 1/3 or less of the magnetic flux density is replaced by a light weight =: Further, unlike the above-described production example, the motor can be divided up and down = . At this time, the upper portion of the motor of the magnetic pole tooth of the upper side is made by the predetermined number of 0 steel plates (four), and the predetermined plurality of magnetic plates are laminated to form a motor including the magnetic teeth of the lower side. The lower part and the upper side part and the lower side part are integrally joined, and the side is several. At this time, the portion where the core portion of the motor portion is made is made to be a portion where the magnetic gas is easily saturated, that is, the thrust is prevented from being lowered. In addition, in the manufacturing method, the upper portion and the lower portion are integrally joined with each other. 322935 34 201212490 J J. The magnetic pole group and the lower portion of the coil portion and the upper portion are wound around the winding frame (bobbiη). The magnetic pole teeth are respectively grouped. Therefore, the volume ratio can be easily raised to 80% or more. Moreover, assembly workability can also be improved. BRIEF DESCRIPTION OF THE DRAWINGS The first and second drawings show a perspective view and a cross-sectional view showing a configuration of a movable body used in the linear motor of the present invention. Figs. 2 to 2C are perspective views showing the configuration of a motor used in the linear motor of the present invention. Fig. 3 is a partially broken perspective view showing the configuration of the linear motor of the present invention. Fig. 4 is a view for explaining the principle of occurrence of thrust of the linear motor of the present invention. Figures 5 to 5C are diagrams for explaining the function of the yoke of the movable member. Figures 6 and 6 are diagrams showing the flux flow in the comparative example. Figures 7 and 7 are diagrams for explaining the flow of magnetic flux in the examples of the present invention and the comparative examples. Fig. 8 is a graph showing the relationship between the driving magnetomotive force and the minimum magnetic force. Figure 9 shows an example of the relationship between temperature and demagnetization limit magnetic field conductance. Fig. 1 is a diagram for explaining the cancellation of the main turbulent high harmonic components. The figure is a view showing an example of the dimensions of a permanent magnet, a magnetic light, and a magnetic pole tooth. Other implementations of linear motors invented by the first and 12Β ® lines 322935 201212490 Oblique view of the composition of cancer. Figures 13A and 13B show the distribution of the magnetic flux density generated in the motor. Figures 14A and 14B show the flow of the magnetic flux in the motor during driving. 15A and 15B are a top view and a side view of an embodiment of a single-phase linear motor of the present invention. Figs. 16A to 16F are plan views showing a plurality of core materials constituting the motor. Figs. 17G to 17K are plan views showing a plurality of core materials constituting the motor. Figs. 18A to 18K are perspective views showing a plurality of core materials constituting the motor. Fig. 19 is a view showing the planar shape of the magnetic pole teeth of the motor. Fig. 20 is a view showing the appearance of an embodiment of the linear motor of the present invention. Fig. 21 is a graph showing the measurement results of the thrust characteristics in the embodiment of the linear motor of the present invention. 22A and 22B are a top view and a side view of another embodiment of the single-phase linear motor of the present invention. Figure 23 is a cross-sectional view showing another embodiment of the single-phase linear motor of the present invention. Figs. 24A to 24C are graphs showing the amplitudes of the turbulent powers of the single-phase components and the three-phase synthesis in each of the three configuration examples. 36 322935 201212490 Figures 25A and 25B are a top view and a side view of still another embodiment of the single phase linear motor of the present invention. Figure 26 is a cross-sectional view showing still another embodiment of the single-phase linear motor of the present invention. Fig. 27 is a perspective view showing the constituent material of the motor of still another embodiment of the present invention. Fig. 28 is a graph showing the measurement results of the thrust characteristics of still another embodiment of the linear motor of the present invention. [Main component symbol description] 1 Movable 2, 2a Motor sub 3, 3a Linear motor 11a, lib Permanent magnet 12 (12N, 12S) Magnetic vehicle 21 Hollow portion 22 Iron core portion 22a Supporting member (non-magnetic body) 23a, 23b Magnetic pole Teeth 24a, 24b magnetic pole group 25a, 25b drive coil 37 322935