JP4537745B2 - Linear motor - Google Patents

Description

  The present invention relates to a linear motor, and in particular, a yoke constituting a stator is formed in a ring shape, and each armature winding is disposed for each yoke, and provided at the center of the yoke via a gap. The present invention relates to a linear motor that reciprocally drives a movable element.

Conventional linear motors are mainly used in a structure in which a center of a round rotating machine is cut open and developed into a linear shape. The linear motor includes a stator having armature windings and a mover supported by the stator so as to be relatively movable via a gap. Therefore, in the conventional linear motor, a large magnetic attractive force acts between the stator and the mover, and a large load is applied to the support mechanism of the mover, so that the entire apparatus is enlarged.
Among them, in order to cancel the magnetic attraction force acting between the stator and the mover and lighten the burden on the support mechanism of the mover, the stator having the armature winding on the C-type yoke There is known a linear motor configured to sandwich a mover via a pin (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 10-174418 (paragraph number 0006, FIGS. 1 and 2)

However, in the linear motor of Patent Document 1, since a plurality of armature windings are wound around one stator unit, the structure is complicated.
Furthermore, the adjacent stator magnetic poles have a structure in which different armature windings are wound, so that the space occupied by each stator and the magnetic pitch are widened. There is a problem of increasing the size.

Accordingly, the present invention has been made to solve the problems of the prior art, and the problem of the present invention is that the magnetic attraction force acting between the stator and the mover cancels out with a compact structure. It is to provide a linear motor.
Furthermore, an object of the present invention is to reduce the amount of change in inductance with respect to the relative movement displacement between the stator and the mover, and to reduce the thrust ripple.

In order to solve the above problems, a linear motor according to the present invention is a linear motor configured such that a primary side member having an armature winding and a secondary side member having a permanent magnet are relatively movable. The primary side member comprises a yoke having an armature tooth formed in a square ring shape and the armature winding wound around the yoke, and constitutes a permanent magnetic circuit of the yoke. A pair of the armature teeth are arranged on the surface facing the magnet so as to face both the front and back surfaces of the permanent magnet through a gap, and a plurality of the yokes are arranged along the longitudinal direction of the secondary member. Thus, the arrangement position of the armature winding wound around the yoke is different from the arrangement position of the armature winding wound around another yoke adjacent to the yoke. wound said armature winding, on the inside of the yoke Wound on one side of the upper and lower ends of the left and right away from the armature teeth provided projecting respectively from the central portion, the armature winding of the other yoke, the upper and lower ends of the left and right of said other yoke It is characterized by being wound on the other side.

According to the present invention, the linear motor is arranged along the longitudinal direction of the secondary side member, for example, the arrangement position of the armature winding of the odd-numbered yoke and the armature winding of the even-numbered yoke adjacently provided. The arrangement position of each of the linear motors can be offset by canceling out the magnetic attractive force acting between the primary side member and the secondary side member, and the primary side members can be arranged at narrow intervals. It can be made compact.
In addition, since the secondary side members are arranged between the armature tooth rows and the amount of change in inductance with respect to relative movement displacement can be reduced, thrust ripple can be reduced.

According to the linear motor of the present invention, the magnetic attractive force acting between the primary side member and the secondary side member is canceled out, the magnetic pitch between the primary side members is narrowed, and the height of the yoke is reduced. By making the structure compact so that it can be set, the entire linear motor can be made compact.
Further, according to the present invention, the amount of change in inductance with respect to the relative movement displacement between the primary side member and the secondary side member can be reduced, and thrust ripple can be reduced.

Hereinafter, a linear motor according to an embodiment of the present invention will be described with reference to FIGS.
Note that the direction of the linear motor changes depending on the installation direction, and therefore the direction is arbitrary. Hereinafter, the horizontal direction in the drawing of FIG. It demonstrates as a vertical direction.

≪Linear motor≫
First, the configuration of the linear motor R will be described with reference to FIG.
FIG. 1 is a schematic diagram showing a basic configuration diagram of a linear motor according to an embodiment of the present invention.
In FIG. 1, a linear motor R includes a stator (primary side member) having an armature winding 3 around which armature teeth 5 are wound with both left and right ends or outer periphery fixed to a fixed body (not shown). ) 1 and a mover (secondary member) 2 having a permanent magnet M provided so as to be relatively movable with respect to the stator 1. The linear motor R is configured such that the armature 2 is driven when an alternating current is supplied to the armature winding 3 from a power supply device (not shown). At this time, since the armature winding 3 generates heat, a cooling device 9 (see FIG. 20) described later for cooling the heat is disposed in contact with the armature winding 3. In the present embodiment, the stator 1 is fixed to a base (not shown), and the mover 2 is movably disposed on the base. However, a configuration in which the mover 2 is fixed to the base and the stator 1 is movably disposed on the base may be employed.

≪Stator≫
The stator 1 is arranged in a fixed state with respect to the mover 2, and the same shape has a predetermined interval along the moving direction of the mover 2 (magnetic pitch P (see FIG. 10)). And a plurality of stator units Y (see FIG. 3) which will be described later. The stator 1 includes a yoke 4, an armature tooth 5, an armature winding 3, and a guide rail 6 (see FIG. 14) described later. In the stator 1, a yoke 4 formed in a ring shape and an armature tooth 5 around which the armature winding 3 is wound and arranged opposite to each other constitute a magnetic circuit.
The stator 1 corresponds to a “primary member” described in the claims.

≪York≫
The yoke 4 is a magnetic body formed by stacking, for example, steel plates formed in a square ring shape having a space in the center, and a permanent magnet M is movably disposed in the center of the space. . The yoke 4 is opposed to both the front and back surfaces of the permanent magnet M, and armature teeth 5 and 5 are vertically arranged on the permanent magnet M through a gap. In the yoke 4, guide rails 6, 6 are installed on the inner sides of the left and right sides, facing the sliders 7, 7 provided at the left and right ends of the permanent magnet M. For example, as will be described in detail later, the yoke 4 is assembled in plural, and a through hole 4a for fixing the yokes 4 is formed in the vicinity of the outer peripheral portion.
The ring-shaped yoke 4 may be formed by combining a plurality of divided yokes.

≪ Armature teeth ≫
The armature tooth 5 is an iron core around which the armature winding 3 is wound, and is formed of, for example, the same material having the same thickness as the yoke 4. The armature teeth 5 are respectively fixed or integrally formed on the upper and lower inner peripheral position sides of the yoke 4. For example, the ring-shaped armature teeth 5 are fixed by fitting the locking protrusions 5 c of the armature teeth 5 into the fixing grooves 4 b formed on the inner surfaces of the upper and lower central portions of the yoke 4.
The locking projection 5c and the fixing groove 4b are inserted and fitted in the lateral direction, and are formed in a trapezoidal shape, for example, so that the armature teeth 5 do not fall off from the yoke 4 to the permanent magnet M side. .

≪Thickness relationship between armature teeth and yoke≫
2A and 2B are diagrams showing the thickness relationship between the armature teeth and the yoke in the linear motor according to the embodiment of the present invention, wherein FIG. 2A is a schematic front view of the yoke, and FIG. 2B is an X- It is X sectional drawing.
When the steel plate is laminated along the longitudinal direction of the mover 2 (not shown) by combining the ring-shaped yoke 4 and the armature teeth 5, the product thickness W 1 of the yoke 4 is set to the armature winding of the armature teeth 5. By making it thicker than the product thickness W2 of the armature magnetic pole portion where 3 is disposed, the magnetic saturation of the yoke 4 can be relaxed due to the configuration of the magnetic circuit.
For example, the thickness of the steel plate forming the yoke 4 is W1, the steel plate thickness of the armature magnetic pole portion where the armature winding 3 of the armature tooth 5 is arranged is W2, and the height of the portion extending in the lateral direction of the yoke 4 is high. H1, the width of the portion extending in the vertical direction of the yoke 4 is h2, the cross-sectional area of the portion extending in the horizontal direction of the yoke 4 is S1, the cross-sectional area of the portion extending in the vertical direction of the yoke 4 is S2, and the armature tooth 5 If the cross-sectional area is S3, the cross-sectional area S1 of the portion extending in the lateral direction of the yoke 4 is
S1 = h1 × W1
And
The cross-sectional area S2 of the portion extending in the longitudinal direction of the yoke 4 is
S2 = h2 × W1
And
The cross-sectional area S3 of the armature teeth 5 is such that the magnetic flux flows from the left and right sides of the yoke 4 to the armature teeth 5.
S3 = S1 × 2≈S2 × 2
It is formed to become.
For this reason, the thickness W1 of the yoke 4 is
W1> W2
By doing so, the height h1 and the width h2 of the yoke 4 can be shortened in inverse proportion to the product thickness W1 of the yoke 4, so that the overall height h of the linear motor R is reduced.

≪Dummy magnetic pole≫
FIG. 3 is a view showing a modification of the armature teeth in the linear motor according to the embodiment of the present invention, and (a) shows a state when dummy magnetic poles are interposed between the armature teeth of each stator unit. Schematic shown, (b) is a schematic diagram showing a state when a dummy magnetic pole is installed on the armature teeth.
As shown in FIG. 3A, between the adjacent armature teeth 5 (51, 52, 53) of the stator units Y (Y1, Y2, Y3) arranged at a predetermined magnetic pitch P interval, respectively. A dummy magnetic pole 50a made of a magnetic material not wound with the armature winding 3 may be divided and interposed.
Further, as shown in FIG. 3B, the armature teeth 5 (51, 52, 53) of the stator unit Y (Y1, Y2, Y3) have end portions on the front and rear sides of the opposing surfaces. In addition, the substantially wing-shaped dummy magnetic poles 50b may be integrally installed.
Thus, by arranging the dummy magnetic pole 50a or 50b on the armature tooth 5, when moving the mover 2, the thrust ripple with respect to the relative movement displacement can be reduced, so that noise and vibration are reduced. The movement of the mover 2 can be made smooth.
A magnetic wedge may be used instead of the dummy magnetic poles 50a and 50b.

≪Modification of armature teeth≫
4A and 4B are diagrams showing a modification of the armature tooth in the linear motor according to the embodiment of the present invention, wherein FIG. 4A is a schematic view showing a state in which a groove is formed in the armature tooth, and FIG. 4B is an armature. It is the schematic which shows the state which formed the tooth | gear in the curved surface form.
As shown in FIG. 4A, the armature tooth 5 has an uneven groove 5 d formed on the surface facing the mover 2. The grooves 5d may be formed by cutting a magnetic body forming the armature teeth 5 or may be formed by laminating laminated steel plates having different sizes. In this case, small laminated steel plates are arranged at both ends, a notch-shaped gap is formed on both ends of the armature tooth 5 in the direction in which the mover 2 moves, and the gap at the center of the armature tooth 5 and the armature tooth The gaps on both end sides of 5 may be made different by making a difference.
Further, as shown in FIG. 4B, the armature tooth 5 is formed so that the opposed surface of the mover 2 is curved with respect to the mover 2, and the gap G1 at the center of the armature tooth 5 and the electric machine The gap G2 on both ends of the child teeth 5 may be made different by making a difference.
Thus, by forming the groove 5d or the round curved gap G2 at both ends of the armature tooth 5 on the moving direction side, the magnetic flux at both ends of the armature tooth 5 can be reduced. Thereby, it is possible to prevent the mover 2 from moving steadily between the stator units Y, and to make the movement of the mover 2 smooth.

≪Plate material≫
FIG. 5 is a schematic view showing a state in which a plate member is bonded to an armature tooth in the linear motor according to the embodiment of the present invention.
As shown in FIG. 5, the armature teeth 5 arranged at a predetermined magnetic pitch P may be bonded to a plate member 5 e on the surface facing the mover 2. The plate member 5e is made of a thin plate-like magnetic body that is press-fitted between all the armature teeth 5 arranged above and below, and a guide for making it easy to insert the mover 2 at the front and rear end portions thereof. Part 5f is formed.
The armature tooth 5 has an effect of preventing dust and other dust from entering the gap between the armature tooth 5 and the mover 2 by disposing the mover 2 between the plate members 5e. In addition, the plate member 5e is configured such that the surface of the permanent magnet M does not directly contact the facing surface of the armature teeth 5 when the mover 2 is disposed so as to be biased to one of the armature teeth 5 disposed above and below. The armature 2 and the armature teeth 5 are also protected.
The plate member 5e may be a nonmagnetic material.

  Further, the armature teeth 5 may be used by appropriately combining the shapes shown in FIGS. 3A, 3B, 4A, 4B and FIG.

≪Moveable element≫
FIG. 6 is a plan view showing the mover of the linear motor according to the embodiment of the present invention.
A mover 2 shown in FIG. 6 is a member that moves by a magnetic force with respect to the stator 1 (see FIG. 1), and includes a permanent magnet M and sliders 7 that are integrally provided at both ends of the permanent magnet M. Thus, the yoke 4 (see FIG. 1) is disposed so as to be horizontally movable at the center. The mover 2 includes a slider (support mechanism) 7 along a longitudinal direction that is a moving direction, and is guided by a guide rail 6 provided at a position facing the yoke 4 in accordance with the slider (support mechanism) 7. Move. The mover 2 is formed of a long and narrow strip having a large number of permanent magnets M in which N poles and S poles are alternately arranged in a line at a predetermined interval (magnetic pole pitch I of the permanent magnets).
The mover 2 corresponds to a “secondary member” described in the claims.

≪Permanent magnet≫
As described above, the permanent magnets M are arranged at predetermined intervals (the magnetic pole pitch I of the permanent magnets) with N poles and S poles alternately.
The permanent magnet M may be skewed to change its direction by 90 degrees. Further, the permanent magnet M may change the predetermined interval I between the N pole and the S pole. Further, the shape of the permanent magnet M may be appropriately changed to a shape other than a quadrangle.
Further, the permanent magnet M constituting the mover 2 shown in FIG. 6 may be a ferromagnetic body, or may have a structure in which the permanent magnet M and the ferromagnetic body are combined.
Further, the permanent magnet M may be an electromagnet made of an air-core coil, or an electromagnet in which a coil is wound around a ferromagnetic material, in which N poles and S poles are alternately arranged. It can be used for the linear motor R.

≪ Armature winding ≫
FIG. 7 is a perspective view of a main part showing the arrangement of armature windings of the linear motor according to the embodiment of the present invention.
As shown in FIG. 7, the armature winding 3 is a conductive wire wound around one position of each armature tooth 5 protruding inward from the yoke 4. For example, in each stator unit Y1, Y2, one armature winding 31a, 31b is wound around the base end (yoke side) of the armature teeth 51a, 51b, and the other armature winding 32a, 32b. Is wound around the tip (mover side) of the armature teeth 52a, 52b. In this way, the armature winding 3 is wound in a different manner at the base end portion of the armature teeth 5 arranged facing each other, or at a position opposite to the tip end portion.
The armature winding 3 is, for example, the first (odd number) stator unit Y1 shown in FIG. 8 and the second (even number) shown in FIG. In the stator unit Y2, the arrangement positions of the armature windings 31a and 31b of the first (odd-numbered) yoke 41 and the armature windings 32a and 32a of the adjacent second (even-numbered) yoke 42 are provided. The arrangement position of 32b is arranged so as to be different from each other at positions opposite to the base end portion and the tip end portion.

≪Arrangement of armature winding≫
FIG. 8 is a diagram showing an arrangement of armature windings of the linear motor according to the embodiment of the present invention, and is a schematic diagram showing an arrangement state of armature windings in odd-numbered stator units.
As shown in FIG. 8, for example, in the first, third, fifth, seventh and ninth odd-numbered stator units Y1, Y3, Y5, Y7, Y9, the upper armature The windings 31 a, 33 a, 35 a, 37 a, 39 a are wound around the base end portion of each armature tooth 5 away from the mover 2.
In the odd-numbered stator units Y 1, Y 3, Y 5, Y 7, Y 9, the lower armature windings 31 b, 33 b, 35 b, 37 b, 39 b are armature teeth 5 located in the vicinity of the mover 2. It is wound around the tip.

FIG. 9 is a diagram showing an arrangement of armature windings of the linear motor according to the embodiment of the present invention, and is a schematic diagram showing an arrangement state of armature windings in even-numbered stator units.
As shown in FIG. 9, in the second, fourth, sixth and eighth even-numbered stator units Y2, Y4, Y6, Y8, for example, the armature windings 32a, 32b, 34a , 34b, 36a, 36b, 38a, 38b are armature windings 31a, 31b, 33a, 33b, 35a of the odd-numbered stator units Y1, Y3, Y5, Y7, Y9 to be installed next to each other. , 35b, 37a, 37b, 39a, 39b. That is, the upper armature windings 32 a, 34 a, 36 a, and 38 a are wound around the tip portions of the armature teeth 5 that are located in the vicinity of the mover 2. In the even-numbered stator units Y2, Y4, Y6, and Y8, the lower armature windings 32b, 34b, 36b, and 38b are wound around the base end portions of the armature teeth 5 that are separated from the mover 2. It has been turned.

FIG. 10 is a schematic diagram showing an arrangement state of armature windings of the linear motor according to the embodiment of the present invention.
When the odd-numbered and even-numbered stator units Y1, Y2 to Y8, Y9 are assembled in that order, the state shown in FIG. 10 is obtained. That is, the armature windings 31a, 31b, 33a, 33b, 35a, 35b, 37a, 37b, 39a, 39b of the odd-numbered stator units Y1, Y3, Y5, Y7, Y9 shown in FIG. The armature windings 32a, 32b, 34a, 34b, 36a, 36b, 38a, 38b of the even-numbered stator units Y2, Y4, Y6, Y8 shown in FIG. The base end portion and the tip end portion are alternately replaced with each other. If these are arranged side by side in the order of the stator units Y1 to Y9 as shown in FIG. 10, they are arranged so as to overlap in the thickness direction of the armature winding 3 of the adjacent stator units Y1 to Y9. For this reason, the magnetic pitch P can be shortened by the amount of overlap of the armature windings 3 of the stator units Y1 to Y9, and the overall length L of the linear motor R in the direction in which the mover 2 moves is shortened. Thus, the entire linear motor R can be made compact.
Note that the odd-numbered stator units Y1, Y3, Y5, Y7, and Y9 and the even-numbered stator units Y2, Y4, Y6, and Y8 may be arranged in a row by reversing even numbers and odd numbers. .

≪Combination of yoke and permanent magnet≫
Next, the combination of the yoke 4 and the permanent magnet M is demonstrated with reference to FIG. 6 and FIG.
With respect to the nine yokes 4 having the armature winding 3 as shown in FIG. 10, the magnetic poles of the mover 2 are configured to have a magnetic pole pitch I opposed to the eight (see FIG. 6). .
Alternatively, with respect to the three yokes 4 having the armature winding 3, the magnetic poles of the mover 2 are configured such that the two magnetic pole pitches I are opposed to each other.
Alternatively, with respect to the twelve yokes 4 having the armature winding 3, the magnetic poles of the mover 2 are configured to have a magnetic pole pitch I facing 10 pieces.

≪Modification of armature winding≫
FIG. 11 is a view showing a modified example of the arrangement of the armature windings in the linear motor according to the embodiment of the present invention. FIG. 11A shows the armature windings wound around the tip portions of the upper and lower armature teeth. The schematic diagram which shows the state which carried out, (b) is the schematic which shows the state which wound the armature winding to each base end part of the upper and lower armature teeth.
As shown in FIGS. 11A and 11B, the armature winding 3 is wound around either the distal end portion or the proximal end portion of the upper and lower armature teeth 5 in the same stator unit Y, respectively. Also good. For example, in this case, the armature winding 3 is formed by winding the armature windings 31c and 31d around the end portions of the armature teeth 51a and 51b of the first (odd-numbered) stator unit Y1, The armature windings 31c and 32d are wound around the base end portions of the armature teeth 52a and 52b of the th (even-numbered) stator unit Y2. As described above, the armature winding 3 is wound around the armature teeth 5 of the stator units Y arranged in a row so as to be alternately different from each other, and close to the center of the yoke 4. And distant positions may be alternately arranged.

≪Modification of armature winding arrangement≫
FIG. 12 is a diagram showing a modified example of the arrangement of the armature windings in the linear motor according to the embodiment of the present invention. FIG. 12A is a schematic diagram showing the arrangement state of the armature windings in the odd-numbered stator units. FIG. 4B is a schematic diagram showing an arrangement state of armature windings in even-numbered stator units.
As shown in FIGS. 12A and 12B, the armature winding 3 may be wound around a ring-shaped yoke 4. That is, the armature windings 3 (31e, 31f, 32e, 32f) are armature teeth 5 (51a, 51b) in the yokes 4 (41, 42) of the odd-numbered and even-numbered stator units Y (Y1, Y2). , 52a, 52b) may be wound so as to be alternately different on one side of the base end portion.
In this case, the first (odd-numbered) stator unit Y1 and the second (even-numbered) stator unit Y2 shown in FIG. By turning the stator unit Y1 upside down, it can be used as the stator unit Y2, so the same can be assembled and used, greatly reducing the number of parts, assembly process, and part management man-hours. Can be reduced.

FIG. 13 is a view showing a modified example of the arrangement of the armature windings in the linear motor according to the embodiment of the present invention. FIG. 13A is a schematic diagram showing the arrangement state of the armature windings in the odd-numbered stator units. FIG. 4B is a schematic diagram showing an arrangement state of armature windings in even-numbered stator units.
As shown in FIGS. 13A and 13B, the armature winding 3 may be wound around the left and right ends of the ring-shaped yoke 4 away from the armature teeth 5. That is, the armature windings 3 (31g, 31h, 32g, 32h) are alternately arranged on the upper and lower ends of the left and right sides of the yokes 4 (41, 42) of the odd-numbered and even-numbered stator units Y (Y1, Y2). You may wind so that it may differ.
Also in this case, similarly to the stator unit Y shown in FIGS. 12A and 12B, the first (odd number) stator unit Y1 shown in FIG. 13A and the second (even number) And the same stator unit Y (Y1, Y2) may be reversed and assembled.
The armature windings 3 of the first (odd-numbered) and second (even-numbered) stator units Y1 and Y2 shown in FIGS. However, it may be one by one.

  In the linear motor R according to the embodiment of the present invention described above, the yoke 4, the armature tooth 5 or the armature winding 3 illustrated in FIGS. 1 to 13 may be appropriately mixed and combined. I do not care.

≪Guide mechanism≫ ≪Support mechanism≫
14A and 14B are diagrams showing examples of the guide mechanism and the support mechanism in the linear motor according to the embodiment of the present invention. FIG. 14A is a schematic view showing a support mechanism that supports a mover having both ends formed in a triangle. (B) is the schematic which shows the support mechanism which supports the needle | mover by which both ends were formed in planar shape, (c) is the schematic diagram which shows the support mechanism which supports the mover by which both ends were formed in circular arc shape. .
As shown in FIG. 14 (a), the mover 2 is a guide in which sliders (guide mechanisms) 7 are integrally disposed on the left and right sides of the permanent magnet M, and the sliders 7 are installed on the left and right inner sides of the yoke 4. A rail (support mechanism) 6 is slidably supported.
The slider 7 supports the mover 2 while guiding the mover 2 with the guide rail 6 so that the mover 2 can move smoothly with respect to the stator 1 without rattling. For example, the slider 7 is a projection having a tip formed in a triangular shape as viewed in a longitudinal section, and is engaged with the left and right guide rails 6 via a gap.
The guide rail (support mechanism) 6 is disposed on both sides of the slider 7 via a gap, and is formed in a triangular groove shape in accordance with the triangular shape of the slider 7.
Thereby, when the mover 2 moves, the sliders 7 on both sides are engaged with the guide rails 6 via the gaps, so that the mover 2 can move smoothly without dropping.
The slider 7 corresponds to a “guide mechanism” described in the claims, and the guide rail 6 corresponds to a “support mechanism”.

Further, the slider 7 and the guide rail 6 are formed in a rectangular shape when viewed from the longitudinal section as in the slider 7a shown in FIG. You may form in a groove shape.
Further, the slider 7 and the guide rail 6 are formed in a semicircular shape when viewed from the longitudinal section as in the slider 7b shown in FIG. You may form in arc-shaped groove shape.

  Note that the guide rails 6, 6a, 6b of the stator 1 and the sliders 7, 7a, 7b of the mover 2 shown in FIGS. In combination, the left and right shapes may be different.

≪Modified examples of guide mechanism and support mechanism≫
FIG. 15 is a view showing a modification of the guide mechanism and the support mechanism in the linear motor according to the embodiment of the present invention, and is a schematic view showing a state when the mover is supported by an aerostatic bearing.
As shown in FIG. 15, the support mechanism for supporting the mover 2 blows air from the pump 8 through the air passage H such as an air hose from four directions around the mover 2, You may make it float from the stator 1 by buoyancy. In this case, the discharge ports H <b> 1 to H <b> 4 of the air passage H are respectively installed on the surface of the upper and lower armature teeth 5 facing the mover 2 and the surface of the yoke 4 facing the mover 2. In the inner corner of the yoke 4, a suction port H <b> 5 is provided for sucking air ejected from the discharge ports H <b> 1 to H <b> 4 and improving the flow of air flowing through the stator 1.

FIG. 16 is a diagram showing a modification of the guide mechanism and the support mechanism in the linear motor according to the embodiment of the present invention, and is a schematic diagram showing a state when the mover is supported by a roller.
As shown in FIG. 16, the support mechanism for supporting the mover 2 is a slidably supported by contacting the gap between the upper and lower armature teeth 5 and the mover 2 with a roller 6 c interposed therebetween. It's okay. In this case, the roller 6c is formed of an oilless nonmagnetic material.

FIG. 17 is a diagram showing a modification of the guide mechanism and the support mechanism in the linear motor according to the embodiment of the present invention, and is a schematic diagram showing a state when the mover is supported by the hydrostatic bearing.
As shown in FIG. 17, the support mechanism for supporting the mover 2 includes oil between armature teeth 5 above and below the mover 2, yokes 4 on the left and right of the mover 2, and the mover 2. The hydrostatic bearing 6d may be installed, and the mover 2 may be supported so as to move in the hydrostatic bearing 6d. In this case, the hydrostatic bearing 6d is formed in a tubular shape into which oil O is injected. The mover 2 is provided in a state of being sealed and integrated in the hydrostatic bearing 6 d together with the oil O, and moves in the oil O.

≪Various modifications of support mechanism≫
FIG. 18 is a schematic diagram showing various modifications of the support mechanism in the linear motor according to the embodiment of the present invention.
Furthermore, as shown in FIGS. 18A and 18B, the support mechanism for supporting the mover 2 is configured such that the left and right end portions of the mover 2 are formed in a triangle, the upper and lower slopes of the triangle, and the stator 1 A roller gauge 6e (see FIG. 18 (a)) having a square cross section for supporting the mover 2 is interposed between the opposing surfaces, or a roller follower 6f (see FIG. 18 (b)) having a substantially drum-shaped cross section. Thus, the mover 2 may be supported obliquely from above and below.
Further, as shown in FIG. 18C, the support mechanism may be configured such that a bearing 6g is installed between the stator 1 and the left and right ends of the mover 2 to support the mover 2 from above and below. good.
As shown in FIG. 18 (d), the support mechanism has a cross roller guide 6h installed between the guide rail 6 of the stator 1 and the slider 7 provided by separating the left and right ends of the mover 2. You may support the needle | mover 2 from an up-down direction.
As shown in FIG. 18 (e), the support mechanism is configured such that a linear motor pack 6 i is installed between the guide rail 6 of the stator 1 and the left and right ends of the mover 2, and the mover 2 is moved in the vertical direction. You may support.
As shown in FIG. 18 (f), the support mechanism is configured such that a slide pack 6 j made of balls is installed between the guide rail 6 of the stator 1 and the guide rails 6 on the left and right ends of the mover 2, and the movable mechanism is movable. You may support the child 2 from an up-down direction.

FIG. 19 is a view showing a modification of the support mechanism in the linear motor according to the embodiment of the present invention. FIG. 19A is a schematic view showing a support mechanism that supports only the left and right upper sides of the mover, and FIG. It is the schematic which shows the support mechanism which supports the object position of the left-right upper and lower one side of a needle | mover.
Furthermore, as shown in FIG. 19A, the support mechanism is provided with a slider 7c only on one of the left and right upper sides or the lower side of the mover 2, and the slider 7c is slidable by a guide rail 6k. You may make it support.
As shown in FIG. 19B, the support mechanism may be configured such that a slider 7d is provided on one of the left and right symmetrical upper and lower sides of the mover 2 and the slider 7d is slidably supported by the guide rail 6m. good.

The support mechanism for supporting the mover 2 described above may be installed inside the yoke 4 for each yoke 4 of the stator units Y arranged in a row or for every plurality of stator units Y.
Further, the support mechanism may be divided into the gap of the yoke 4 from the front-rear direction outside of the ring-shaped yoke 4, or only the front-rear direction of the yoke 4 or only the inner side of the yoke 4 in the front-rear direction. Alternatively, the yoke 4 may be appropriately provided both inside and outside in the front-rear direction.

≪Cooling device≫
20A and 20B are diagrams showing a cooling device in the linear motor according to the embodiment of the present invention. FIG. 20A is a schematic diagram showing piping in which the refrigerant returns to the original position, and FIG. It is the schematic which shows the piping made to flow to one direction.
The cooling device 9 is for cooling each armature winding 3 (see FIG. 1). For example, as shown in FIG. 20 (a), a pipe 9a is formed so as to meander and an armature is formed. It is installed so as to be in contact with the periphery of the winding 3 and absorb heat. The pipe 9a is installed so that a refrigerant composed of air, water, or oil flowing through the pipe 9a is formed and circulated so as to return to the original position. The pipe 9a is made of a material such as resin that is not magnetized.
As shown in FIG. 20B, the pipe 9b may be arranged so that the refrigerant flows in one direction.

≪Encoder≫
In the embodiment of the linear motor of the present invention, an encoder (not shown) is arranged along the longitudinal direction of the mover 2 as in the conventional linear motor, and an encoder is detected at a position facing the encoder. A device (not shown) is provided and used as a linear drive device.

<< Operation >>
Next, the operation of the linear motor according to the embodiment of the present invention will be described.
With the above configuration, as shown in FIG. 1, the magnetic flux is placed between the upper armature tooth 5 and the lower armature tooth 5 in the gap between the upper armature tooth 5 and the lower armature tooth 5. The armatures that flow up and down are formed alternately between the armature teeth 5 and 5 on the side, and the mover 2 moves relative to each other through the gap.

At this time, the arrangement position of the armature winding 3 of the odd-numbered yoke 4 arranged along the longitudinal direction of the mover 2 is different from the arrangement position of the armature winding 3 of the even-numbered yoke 4. Since the magnetic attractive force acting between the stator 1 and the mover 2 can be canceled and the amount of change in inductance with respect to relative movement displacement can be reduced, thrust ripple can be reduced. Thereby, the vibration and noise of the moving needle | mover 2 can be reduced, and the movement of the needle | mover 2 can be made smooth (refer FIG. 10).
Further, as shown in FIG. 10, the linear motor R is arranged so that the positions of the adjacent armature windings 3 are alternately different so as to overlap in a side view, and the magnetic pitch P between the stator units Y is set. By making each narrow, the entire length L in the moving direction of the linear motor R can be shortened.
Further, as shown in FIGS. 2A and 2B, by making the product thickness W1 of the yoke 4 thicker than the product thickness W2 of the armature magnetic pole portion where the armature winding 3 of the armature tooth 5 is arranged. Since the height h1 and the width h2 of the yoke 4 can be shortened, the height h of the entire linear motor R can be reduced. Thereby, this invention can achieve size reduction of the linear motor R whole.

  The present invention is not limited to the above-described embodiment, and various modifications and changes can be made within the scope of the technical idea, and the present invention extends to these modifications and changes. Of course.

  Further, in addition to the above-described embodiments of each combination, a combination employing only a part may be used. Each component of the linear motor R shown in each figure may be a straddling combination regardless of the figure number, or a combination thereof may be molded.

  For example, in the embodiment of the present invention, in the linear motor R, the mover 2 is disposed on the permanent magnet side and is movable to the yoke 4, and the stator 1 is disposed on the yoke 4 side where the armature winding 3 is provided. The combination of fixed structures has been described as an example, but on the contrary, the mover is fixed to the yoke side with the armature winding, and the combination is arranged on the permanent magnet side movable to the yoke. It may be.

It is the schematic which shows the basic block diagram of the linear motor which concerns on embodiment of this invention. It is a figure which shows the thickness relationship of the armature tooth and yoke in the linear motor which concerns on embodiment of this invention, (a) is a schematic front view of a yoke, (b) is XX sectional drawing of (a). is there. It is a figure which shows the modification of the armature tooth in the linear motor which concerns on embodiment of this invention, (a) is the schematic which shows a state when a dummy magnetic pole is interposed between the armature teeth of each stator unit, (B) is the schematic which shows a state when installing a dummy magnetic pole in an armature tooth. It is a figure which shows the modification of the armature tooth in the linear motor which concerns on embodiment of this invention, (a) is the schematic which shows the state which formed the groove | channel in the armature tooth, (b) is a curved-shaped armature tooth It is the schematic which shows the state formed in. It is the schematic which shows the state which bonded the board member to the armature tooth in the linear motor which concerns on embodiment of this invention. It is a top view which shows the needle | mover of the linear motor which concerns on embodiment of this invention. It is a principal part perspective view which shows arrangement | positioning of the armature winding of the linear motor which concerns on embodiment of this invention. It is a figure which shows arrangement | positioning of the armature winding of the linear motor which concerns on embodiment of this invention, and is the schematic which shows the arrangement | positioning state of the armature winding in an odd-numbered stator unit. It is a figure which shows arrangement | positioning of the armature winding of the linear motor which concerns on embodiment of this invention, and is the schematic which shows the arrangement | positioning state of the armature winding in the even-numbered stator unit. It is the schematic which shows the arrangement | positioning state of the armature winding of the linear motor which concerns on embodiment of this invention. It is a figure which shows the modification of arrangement | positioning of the armature winding in the linear motor which concerns on embodiment of this invention, (a) shows the state which wound the armature winding to each front-end | tip part of the upper and lower armature teeth. FIG. 4B is a schematic diagram illustrating a state in which the armature winding is wound around the base end portions of the upper and lower armature teeth. FIG. 9 is a diagram showing a modification of the arrangement of armature windings in the linear motor according to the embodiment of the present invention, where (a) is a schematic diagram showing the arrangement of armature windings in odd-numbered stator units; ) Is a schematic diagram showing an arrangement state of armature windings in even-numbered stator units. FIG. 9 is a diagram showing a modification of the arrangement of armature windings in the linear motor according to the embodiment of the present invention, where (a) is a schematic diagram showing the arrangement of armature windings in odd-numbered stator units; ) Is a schematic diagram showing an arrangement state of armature windings in even-numbered stator units. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows each example of the guide mechanism in the linear motor which concerns on embodiment of this invention, and a support mechanism, (a) is schematic which shows the support mechanism which supports the needle | mover by which both ends were formed in the triangle, (b) FIG. 5 is a schematic diagram showing a support mechanism for supporting a mover having both ends formed in a planar shape, and FIG. 5C is a schematic view showing a support mechanism for supporting a mover having both ends formed in an arc shape. It is a figure which shows the modification of the guide mechanism and support mechanism in the linear motor which concerns on embodiment of this invention, and is the schematic which shows a state when a needle | mover is supported by the aerostatic bearing. It is a figure which shows the modification of the guide mechanism and support mechanism in the linear motor which concerns on embodiment of this invention, and is the schematic which shows a state when a needle | mover is supported by the roller. It is a figure which shows the modification of the guide mechanism in the linear motor which concerns on embodiment of this invention, and a support mechanism, and is the schematic which shows a state when a needle | mover is supported by the hydrostatic bearing. It is the schematic which shows the various modifications of the support mechanism in the linear motor which concerns on embodiment of this invention. FIG. 8 is a diagram illustrating a modification of the support mechanism in the linear motor according to the embodiment of the present invention, where (a) is a schematic diagram illustrating a support mechanism that supports only the upper left and right sides of the mover, and (b) is a left and right view of the mover. It is the schematic which shows the support mechanism which supports the object position of upper and lower one side. It is a figure which shows the cooling device in the linear motor which concerns on embodiment of this invention, (a) is the schematic which shows the piping which made the refrigerant return to the direction of the original position, (b) is a refrigerant | coolant flows in one direction It is the schematic which shows the made piping.

Explanation of symbols

1 Stator (Primary member)
2 Mover (secondary member)
3, 31a-39a, 31b-39b Armature winding 4, 41-49 Yoke 5, 51a, 51b, 52a, 52b Armature tooth 5d Groove 5e Plate member 6, 6a, 6b, 6k Guide rail (support mechanism)
6c Roller (support mechanism)
6d Hydrostatic bearing (support mechanism)
6e Roller gauge (support mechanism)
6f Roller follower (support mechanism)
6g Bearing (support mechanism)
6h Cross roller guide (support mechanism)
6i Linear motor pack (support mechanism)
6j Slide pack (support mechanism)
7, 7a, 7b, 7c, 7d Rider (guide mechanism)
50a, 50b Dummy magnetic pole G1 Armature tooth gap G2 Armature tooth gap on both sides M Permanent magnet P Magnetic pitch R Linear motor W2 Armature magnetic pole part thickness W1 Yoke thickness

Claims (13)

A linear motor configured such that a primary side member having an armature winding and a secondary side member having a permanent magnet are relatively movable,
The primary side member forms a magnetic circuit with a yoke formed in a ring shape and having armature teeth, and the armature winding wound around the yoke,
On the surface of the yoke facing the permanent magnet, a pair of the armature teeth are disposed facing the front and back surfaces of the permanent magnet through a gap,
A plurality of the yokes are arranged along the longitudinal direction of the secondary side member, and the arrangement position of the armature winding wound around the yoke and the winding around another yoke adjacent to the yoke are arranged. While the arrangement position of the armature winding made is different,
The armature winding wound around the yoke is wound around one side of the base end portion of the armature tooth,
The linear motor, wherein the armature winding of the other yoke is wound on one side of the other end of the base end portion of the armature tooth. A linear motor configured such that a primary side member having an armature winding and a secondary side member having a permanent magnet are relatively movable,
Said primary member constitutes a yoke having a rectangular ring shape is formed by the armature teeth, and the armature winding wound on the yoke, in the magnetic circuit,
On the surface of the yoke facing the permanent magnet, a pair of the armature teeth are disposed facing the front and back surfaces of the permanent magnet through a gap,
A plurality of the yokes are arranged along the longitudinal direction of the secondary side member, and the arrangement position of the armature winding wound around the yoke and the winding around another yoke adjacent to the yoke are arranged. While the arrangement position of the armature winding made is different,
It said armature winding wound on the yoke is wound on one side of the upper and lower ends of the left and right away from the armature teeth provided projecting respectively from the upper and lower central portion of the inside of the yoke,
The other of the armature winding of the yoke, a linear motor, characterized in that wound around the other side of the upper and lower ends of the left and right of said other yoke.   The secondary member is floated from the yoke by blowing air sent from the pump through an air path into the gap between the pair of armature teeth and the secondary member. The linear motor according to claim 1, wherein:   The linear motor according to claim 1, wherein a roller is interposed in the gap between the pair of armature teeth and the secondary member.   Between the inner wall surface of the yoke facing both ends of the secondary side member and the secondary side member, an hydrostatic bearing that seals the secondary side member with oil is provided. The linear motor according to claim 1, wherein the linear motor is characterized. Both end portions of the secondary side member in contact with the inside of the yoke are formed in a triangle in a cross-sectional view along the longitudinal direction,
2. A rectangular roller gauge is interposed between the triangular upper and lower slopes and the opposing surface of the yoke, respectively, as viewed in cross section for supporting the secondary member. Item 3. The linear motor according to Item 2. Both end portions of the secondary side member in contact with the inside of the yoke are formed in a triangle in a cross-sectional view along the longitudinal direction,
2. A substantially drum-shaped roller follower is interposed between the upper and lower slopes of the triangle and the opposing surface of the yoke, respectively, as viewed in cross section for supporting the secondary member. Or the linear motor of Claim 2.   Bearings for supporting the secondary member from above and below are installed on both ends of the secondary member facing the inside of the yoke and on the side wall surface of the yoke facing the both ends. The linear motor according to claim 1, wherein the linear motor is characterized. Sliders respectively provided at both ends of the secondary member facing the inside of the yoke;
The cross roller guide which supports the said secondary side member from an up-down direction is installed between the guide rail provided in the inner wall surface of the said yoke which the said slider opposes, or characterized by the above-mentioned. The linear motor according to claim 2. Both ends of the secondary member facing the inner wall surface of the yoke;
The linear motor pack which supports the said secondary side member from an up-down direction is installed between the guide rail provided in the inner wall surface of the said yoke which the said both ends oppose. Or the linear motor of Claim 2. Sliders respectively provided at both ends of the secondary member facing the inner wall surface of the yoke;
The slide pack which supports the said secondary side member from an up-down direction is installed between the guide rail provided in the inner wall surface of the said yoke which the said slider opposes. Item 3. The linear motor according to Item 2. A slider is provided on each of the upper side or the lower side of both end portions of the secondary member facing the inner wall surface of the yoke,
The guide rail which supports the said slider from the upper direction or the downward direction is each installed in the inner wall surface of the said yoke which the said secondary side member opposes, The Claim 1 or Claim 2 characterized by the above-mentioned. Linear motor. A slider is provided on each of the left and right symmetrical upper and lower sides of both ends of the secondary member facing the inner wall surface of the yoke,
The guide rail which supports the said slider from the upper direction or the downward direction is each installed in the inner wall surface of the said yoke which the said secondary side member opposes, The Claim 1 or Claim 2 characterized by the above-mentioned. Linear motor.

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