JP4106571B2 - Linear motor - Google Patents

Linear motor Download PDF

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JP4106571B2
JP4106571B2 JP2006037098A JP2006037098A JP4106571B2 JP 4106571 B2 JP4106571 B2 JP 4106571B2 JP 2006037098 A JP2006037098 A JP 2006037098A JP 2006037098 A JP2006037098 A JP 2006037098A JP 4106571 B2 JP4106571 B2 JP 4106571B2
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mover
pitch
magnetic poles
stator
magnetic
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JP2006174700A (en
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透 鹿山
憲昭 岩渕
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Yaskawa Electric Corp
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Description

本発明は,主に低速で駆動し直線運動をするステッピングモータ或いはサーボモータ、ダイレクトドライブモータに関する。   The present invention relates to a stepping motor, a servo motor, or a direct drive motor that mainly drives at a low speed and moves linearly.

従来、パルスモータの界磁を永久磁石で与えれば、コンパクトな構成で高い推力を得ることが知られており、様々な構造のものが考えられている。そのうち、可動子の応答性とダンピング特性を改善し、リード線処理を簡単にして安価に製造できるようにしたものが特開昭63−310361号公報に開示されている。
そのリニアモータの構造は同公報に詳しく述べられているが、概ね次のようになっている。断面がコ字状で上に開いた直線状の固定子には、内側に断面が同じくコ字状のヨークが2つ平行に並んで固定されており、ヨークの底にそれぞれコイルが長手方向に巻回されている。2つのヨークはそれぞれ上に伸びた2つの磁極を持っている。この磁極の上面にはそれぞれ磁極板が固定されており、他方の磁極板に向かって等間隔で突起状の極歯が伸びており、向かい合う極歯が互い違いになってクローポール形の磁極面をなしている。固定子の長手方向に移動可能に支持された可動子には、前記磁極面とエアギャップを介して対向するよう互いに平行な2組の永久磁石が設けられており、前記磁極板の突起と同じ間隔で極性が反転するよう着磁されている。
このような構成において、2つのヨークに巻回されたコイルに位相が90度ずれた2相の正弦波電流を供給すると、広く知られているリニアモータのメカニズムによって可動子は固定子の上を長手方向に移動することができる。
Conventionally, it has been known that if a field of a pulse motor is given by a permanent magnet, high thrust can be obtained with a compact configuration, and various structures are considered. Among them, Japanese Patent Application Laid-Open No. Sho 63-310361 discloses an improvement in the responsiveness and damping characteristics of the mover, which can simplify lead wire processing and can be manufactured at low cost.
The structure of the linear motor is described in detail in the publication, but is generally as follows. A linear stator with a U-shaped cross-section and opened upward has two U-shaped yokes with the same cross-section arranged in parallel on the inside, and the coils are arranged in the longitudinal direction at the bottom of the yoke. It is wound. The two yokes each have two magnetic poles extending upward. A magnetic pole plate is fixed to the upper surface of each magnetic pole. Protruding pole teeth extend at equal intervals toward the other magnetic pole plate. Opposing pole teeth are staggered to form a claw pole type magnetic pole surface. There is no. The movable element supported so as to be movable in the longitudinal direction of the stator is provided with two sets of permanent magnets parallel to each other so as to face the magnetic pole surface through an air gap, and is the same as the protrusion of the magnetic pole plate. It is magnetized so that the polarity is reversed at intervals.
In such a configuration, when a two-phase sine wave current having a phase difference of 90 degrees is supplied to the coils wound around the two yokes, the mover moves over the stator by a widely known linear motor mechanism. It can move in the longitudinal direction.

ところが前記の従来技術によると、次のような問題があった。
すなわち、固定子に設けた2つのヨークと磁極板が前記のような構造となっているため、ヨークを塊状の鉄心で形成して、磁極板を薄い軟磁性鋼板で形成せざるをえず、コイルに流す励磁電流を大きくすると磁気飽和が生じてモータのピークの推力が抑えられてしまうほか、可動子の移動速度を大きくすると磁極板の鉄損が大きくなるという欠点があった。
また、2つのヨーク上面から伸びて互い違いになった磁極板の極歯の間の隙間を通る磁束の漏れが全体として大きいので、励磁電流に対してモータの推力が小さい、すなわちモータ定数が小さいという欠点があった。
さらに、固定子と可動子の間に磁気吸引力が生じるので、可動子の支持機構に大きな負担がかかり、構造に歪みが生じて様々な弊害を生じるという欠点もあった。
However, according to the above prior art, there are the following problems.
That is, since the two yokes and the magnetic pole plate provided on the stator have the structure as described above, the yoke must be formed of a massive iron core, and the magnetic pole plate must be formed of a thin soft magnetic steel plate. Increasing the excitation current flowing through the coil causes magnetic saturation and suppresses the peak thrust of the motor, and increasing the moving speed of the mover increases the iron loss of the magnetic pole plate.
In addition, since the leakage of magnetic flux passing through the gap between the pole teeth of the pole plates that are staggered extending from the upper surfaces of the two yokes is large as a whole, the motor thrust is small with respect to the excitation current, that is, the motor constant is small. There were drawbacks.
Further, since a magnetic attractive force is generated between the stator and the mover, there is a drawback that a large load is applied to the support mechanism of the mover, and the structure is distorted to cause various adverse effects.

本発明はこれらの欠点を解消するためになされたものであり、信頼性があり、高い推力が得られるモータを提供することを目的とする。
そこで本発明は、請求項1記載のように、エアギャップを介して対向する1対の磁極を複数対1つのコイルで励磁する電磁石を含み、複数の前記磁極対がピッチPで直線状にならび、前記コイルの励磁により前記隣り合う磁極対の磁界の向きが逆向きとなるように構成された固定子と、前記ピッチPで等間隔に永久磁石が並べられ、隣り合う前記永久磁石の磁極の磁界の向きが逆向きである可動子と、を備えたリニアモータであって、前記エアギャップの間を前記可動子の前記永久磁石が移動するようにしてリニアモータを構成している。
また、請求項2記載の発明は、同じくリニアモータに係り、エアギャップを介して対向する1対の磁極を複数対1つのコイルで励磁する電磁石を含み、複数の前記磁極対が直線状にならぶように構成された固定子と、ピッチPで等間隔に永久磁石が並べられ、隣り合う前記永久磁石の磁極の向きが互いに逆向きである可動子と、を備えたリニアモータであって、前記対向する1対の磁極の複数対が前記可動子の移動方向に前記ピッチPで等間隔にならび、かつ前記ピッチPで隣り合う前記磁極対の向きが逆向きとなることを特徴としている。。
また、請求項3記載の発明は、請求項1又は2記載のリニアモータにおいて、前記可動子の前記永久磁石が、その移動方向に対して垂直な断面が矩形であることを特徴としている。
また、請求項4記載の発明は、請求項1又は2記載のリニアモータにおいて、前記可動子の前記永久磁石が、前記固定子側の磁極対の対向する方向から見た断面が矩形であることを特徴としている。
また、請求項5記載の発明は、請求項1又は2記載のリニアモータにおいて、前記永久磁石の磁極の磁界の向きが、対向する1対の前記磁極間の磁界の向きであることを特徴としている。
さらに、請求項6記載の発明は、リニアモータに係り、エアギャップを介して対向する1対の磁極を持つ略環状の電磁石の鉄心を複数個その磁極が可動子の移動方向にピッチPで直線状にならぶ固定子と、前記ピッチPで等間隔に永久磁石が並べられ、隣り合う永久磁石の磁極の磁界の向きが互いに逆向きである可動子と、を備えたリニアモータであって、コイルが前記複数の磁極対に磁界を発生させるように巻かれ、前記コイルの励磁により前記可動子の移動方向の隣り合う前記磁極対の磁界の向きが逆向きとなることを特徴としている。
請求項7記載の発明は、リニアモータに係り、エアギャップを介して対向する1対の磁極を持つ略環状の電磁石の鉄心を複数個その磁極が可動子の移動方向にピッチPで直線状にならぶ固定子と、前記ピッチPで等間隔に永久磁石が並べられ、隣り合う永久磁石の磁極の向きが互いに逆向きである可動子と、を備えたリニアモータであって、1つのコイルが前記複数個の鉄心に磁界を発生させるように巻かれ、前記コイルの励磁により前記可動子の移動方向の隣り合う前記磁極対の磁界の向きが逆向きとなることを特徴としている。
また、請求項8記載の発明は、請求項6又は7記載のリニアモータにおいて、前記可動子の前記永久磁石が前記エアギャップの間を移動するようにしたことを特徴としている。
請求項9記載の発明は、リニアモータに係り、略環状の鉄心の一部にエアギャップを形成し前記エアギャップを介して対向する1対の磁極が形成された鉄心が複数個、その磁極面が可動子の移動方向に直線状にピッチPで等間隔にならべられ、かつ1つのコイルが前記複数個の鉄心に巻回されて、前記コイルの励磁により前記可動子の移動方向の隣り合う前記磁極対が逆向きの方向となることを特徴としている。
そして、請求項10記載の発明は、リニアモータに係り、請求項1〜5のいずれか1項記載の固定子を固定子ユニットとし、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴としている。
請求項11記載の発明は、リニアモータに係り、請求項6〜8のいずれか1項記載の固定子を複数個で固定子ユニットを成し、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴としている。
請求項12記載の発明は、リニアモータに係り、請求項9記載の複数の鉄心を含んで固定子ユニットを成し、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴としている。
The present invention has been made to solve these drawbacks, and an object of the present invention is to provide a motor that is reliable and can provide high thrust.
Accordingly, the present invention includes an electromagnet that excites a pair of magnetic poles opposed via an air gap with a plurality of one-to-one coils, and the plurality of magnetic pole pairs are linearly arranged at a pitch P. , A stator configured such that the magnetic field direction of the adjacent magnetic pole pair is reversed by excitation of the coil, and permanent magnets are arranged at equal intervals at the pitch P, and the magnetic poles of the adjacent permanent magnets A linear motor including a mover having a magnetic field having a reverse direction, wherein the permanent magnet of the mover moves between the air gaps.
The invention according to claim 2 also relates to a linear motor, and includes an electromagnet that excites a pair of magnetic poles opposed via an air gap with a plurality of one-to-one coils, and the plurality of magnetic pole pairs are arranged linearly. A linear motor comprising: a stator configured as described above; and a mover in which permanent magnets are arranged at equal intervals at a pitch P, and the directions of magnetic poles of adjacent permanent magnets are opposite to each other. A plurality of pairs of opposing magnetic poles are equally spaced at the pitch P in the moving direction of the mover, and adjacent magnetic pole pairs at the pitch P are opposite in direction. .
According to a third aspect of the present invention, in the linear motor according to the first or second aspect, the permanent magnet of the mover has a rectangular cross section perpendicular to the moving direction.
According to a fourth aspect of the present invention, in the linear motor according to the first or second aspect, the permanent magnet of the mover has a rectangular cross section as viewed from a direction in which the pair of magnetic poles on the stator side faces each other. It is characterized by.
According to a fifth aspect of the present invention, in the linear motor according to the first or second aspect, the direction of the magnetic field of the magnetic pole of the permanent magnet is the direction of the magnetic field between the pair of opposing magnetic poles. Yes.
Further, the invention according to claim 6 relates to a linear motor, wherein a plurality of substantially circular electromagnet cores having a pair of magnetic poles opposed via an air gap are linearly arranged at a pitch P in the moving direction of the mover. A linear motor comprising a stator arranged in a shape and a mover in which permanent magnets are arranged at equal intervals with the pitch P, and magnetic poles of adjacent permanent magnets have opposite magnetic directions. Is wound so as to generate a magnetic field in the plurality of magnetic pole pairs, and the magnetic field directions of the adjacent magnetic pole pairs in the moving direction of the mover are reversed by the excitation of the coil.
The invention according to claim 7 relates to a linear motor, wherein a plurality of substantially annular electromagnet cores having a pair of magnetic poles opposed via an air gap are linearly arranged at a pitch P in the moving direction of the mover. A linear motor including a stationary stator and permanent movers in which permanent magnets are arranged at equal intervals at the pitch P, and the directions of magnetic poles of adjacent permanent magnets are opposite to each other. A plurality of iron cores are wound so as to generate a magnetic field, and the magnetic field direction of the adjacent magnetic pole pair in the moving direction of the mover is reversed by excitation of the coil.
The invention according to claim 8 is the linear motor according to claim 6 or 7, characterized in that the permanent magnet of the movable element moves between the air gaps.
The invention according to claim 9 relates to a linear motor, wherein a plurality of iron cores each having an air gap formed in a part of a substantially annular iron core and a pair of magnetic poles opposed via the air gap are formed. Are linearly arranged at a pitch P in the moving direction of the mover, and one coil is wound around the plurality of iron cores, and adjacent to the moving direction of the mover by excitation of the coils. It is characterized in that the magnetic pole pairs are in opposite directions.
A tenth aspect of the present invention relates to a linear motor, wherein the stator according to any one of the first to fifth aspects is a stator unit, and the plurality of stator units are linear in the moving direction of the mover. The pitch between adjacent magnetic poles of adjacent stator units is “P + P / m” (P is the pitch between magnetic poles in the stator unit, m is 2, 3, 4,...). Yes.
An eleventh aspect of the invention relates to a linear motor, wherein a plurality of stators according to any one of the sixth to eighth aspects form a stator unit, and the plurality of stator units move the mover. The pitch between adjacent magnetic poles of adjacent stator units is “P + P / m” (P is the pitch between magnetic poles in the stator unit, m is 2, 3, 4,...). It is characterized by.
A twelfth aspect of the present invention relates to a linear motor, and includes a plurality of iron cores according to the ninth aspect to form a stator unit, the plurality of stator units being linearly arranged in the moving direction of the mover, and adjacent to each other. The pitch between adjacent magnetic poles of the matching stator unit is “P + P / m” (P is the pitch between the magnetic poles in the stator unit, m is 2, 3, 4,...).

以上述べたように、本発明によると、珪素鋼板を積層して固定子のC形鉄心或いはI形鉄心をなしているので、従来のものに比べて磁路の面積を大きくすることができ、磁気飽和が生じにくくなって高い推力を得ることができる。また各鉄心の並べられている方向に珪素鋼板が積層されているため、各鉄心間の漏れ磁束が小さく、推力の低下が最小に抑えられている。そして、可動子の永久磁石を薄くすると磁界変調率が大きくなるので、これによっても高い推力を得ることができる。
さらに、固定子と可動子間に働く磁気吸引力が永久磁石の両側面で相殺されるので可動子の支持機構に与える負担が小さく、リニアモータの信頼性を高めるなどの効果がある。
As described above, according to the present invention, since the silicon steel plates are laminated to form the C-shaped iron core or I-shaped iron core of the stator, the area of the magnetic path can be increased compared to the conventional one, Magnetic saturation hardly occurs and high thrust can be obtained. Moreover, since the silicon steel plates are laminated in the direction in which the iron cores are arranged, the leakage magnetic flux between the iron cores is small, and the reduction in thrust is minimized. If the permanent magnet of the mover is thinned, the magnetic field modulation factor increases, and thus a high thrust can be obtained.
Furthermore, since the magnetic attractive force acting between the stator and the mover is canceled by both side surfaces of the permanent magnet, the burden on the support mechanism of the mover is small, and there is an effect that the reliability of the linear motor is improved.

このようにすると、固定子の鉄心は珪素鋼板を積層した上、磁路の断面を従来よりも大きくすることができるので、前記従来技術に比べて磁気飽和が生じにくく、モータのピーク推力を大きくすることができる。
また、可動子と固定子の間に働く磁気吸引力が相殺されるので支持機構の負担が軽くなって信頼性の向上と機構の簡素化ができるのである。
以下、本発明の実施の形態を図に基づいて説明する。
図1は本発明の第1実施例を示す2相のリニアモータの斜視図であり、図2R>2はその一部を省略した平面図である。
図において1はベースであり、この上に固定子ユニット21、22を搭載して固定子2をなしている。固定子ユニット21、22はそれぞれ同じ構成の2つの片側磁石ユニット31Aと31B、32Aと32Bを備えており、片側磁石ユニット31Aは2つの同じ形状の鉄心41、43を備えている。鉄心41は珪素鋼板が積層されており、図3に示すような長方形をした略環状の一部(図では片方の側辺の上部)にエアギャップを形成してC形(ただし、エアギャップが鉄心の上部に形成されていて鉄心の中央には形成されていないので厳密な意味での「C」形ではなく、「略C」形が正しいが、以下便宜上C形と言う。)とし、その対向する平行な磁極面を持つ磁極511、512で1対の磁極対を形成しており、同じ形状のC形鉄心43を鉄心の中心間距離が2Pとなるよう平行に並べられている。両鉄心の下辺に共通にコイル61が巻回され、前記磁極面が上側になるよう横に寝せてベース1に固定して片側磁石ユニット31Aをなしている。
磁石ユニット31Bも同じように構成されており、C形鉄心41、42、43、44の磁極511、522、531、542と磁極512、521、532、541の磁極面がそれぞれ直線状にならび、互いに平行に対面している。同じ構成の固定子ユニット21と固定子ユニット22とは、中心間距離が4.5Pとなっており、隣り合うC形鉄心の中心間距離は1.5Pとなって、それぞれの磁極面が同一平面上にくるよう配置されている。
C形鉄心41、42、43、44の各磁極511と512、521と522、531と532、541と542の間の各エアギャップの間を可動子8の永久磁石7が移動するようになっている。各永久磁石7は、前記移動方向に対して垂直な断面および前記固定子側の磁極が対向する方向から見た断面がそれぞれ四角の棒状の永久磁石であり、これが前記移動方向に複数個配置され、図示しないテーブルにそれぞれ固定されている。そのテーブルは図示しない支持機構によって左右の移動方向に移動可能に支持されて可動子8をなしている。各永久磁石7は前記C形鉄心の各磁極面に向かう方向に着磁されており、長手方向にピッチPで着磁の向きが逆になっている。
In this way, the stator iron core can be laminated with silicon steel sheets and the magnetic path cross section can be made larger than before, so that magnetic saturation is less likely to occur and the peak thrust of the motor is increased. can do.
In addition, since the magnetic attractive force acting between the mover and the stator is offset, the burden on the support mechanism is reduced, and the reliability can be improved and the mechanism can be simplified.
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of a two-phase linear motor showing a first embodiment of the present invention, and FIG. 2R> 2 is a plan view with a part thereof omitted.
In the figure, reference numeral 1 denotes a base, on which stator units 21 and 22 are mounted to form a stator 2. Each of the stator units 21 and 22 includes two one-side magnet units 31A and 31B and 32A and 32B having the same configuration, and the one-side magnet unit 31A includes two iron cores 41 and 43 having the same shape. The iron core 41 is formed by laminating silicon steel plates, and an air gap is formed in a part of a substantially annular shape (as shown in FIG. 3) (upper side of one side) to form a C shape (however, the air gap is Since it is formed at the top of the iron core and not at the center of the iron core, it is not the “C” shape in the strict sense, but the “substantially C” shape is correct. A pair of magnetic poles 511 and 512 having opposing parallel magnetic pole faces form a pair of magnetic poles, and C-shaped iron cores 43 having the same shape are arranged in parallel so that the distance between the centers of the iron cores is 2P. A coil 61 is wound in common on the lower sides of both iron cores, and laid sideways so that the magnetic pole surface is on the upper side and fixed to the base 1 to form a one-side magnet unit 31A.
The magnet unit 31B is configured in the same manner, and the magnetic pole surfaces of the magnetic poles 511, 522, 531, and 542 of the C-shaped iron cores 41, 42, 43, and 44 and the magnetic pole surfaces of the magnetic poles 512, 521, 532, and 541 are linearly arranged. They face each other in parallel. The stator unit 21 and the stator unit 22 having the same configuration have a center-to-center distance of 4.5 P, and the center-to-center distance between adjacent C-shaped iron cores is 1.5 P, and their magnetic pole surfaces are the same. They are placed on a flat surface.
The permanent magnet 7 of the mover 8 moves between the air gaps between the magnetic poles 511 and 512, 521 and 522, 531 and 532, and 541 and 542 of the C-shaped iron cores 41, 42, 43, and 44. ing. Each permanent magnet 7 is a rectangular bar-shaped permanent magnet having a cross section perpendicular to the moving direction and a cross section viewed from the direction in which the stator-side magnetic poles face each other, and a plurality of these are arranged in the moving direction. These are fixed to a table (not shown). The table is supported by a support mechanism (not shown) so as to be movable in the left and right movement directions to form a movable element 8. Each permanent magnet 7 is magnetized in the direction toward each magnetic pole surface of the C-shaped iron core, and the direction of magnetization is reversed at a pitch P in the longitudinal direction.

以上の構成において、固定子ユニット21のコイル61、62に、電流を図2の向きに供給して励磁するときの状況について説明する。
C形鉄心41、42を通る磁束はそれぞれ図3(a)、(b)に示すように、永久磁石7の着磁方向と一致して磁束が加算される。永久磁石7の極性とエアギャップを介して対面するC形鉄心の磁極の極性が異なり、磁気吸引力を生じるので、可動子8の移動方向位置は図2の状態で安定保持される。磁気吸引する力の和は、2つのC形鉄心の2つの磁極の吸引力の大きさが等しく、逆向きであるため、キャンセルされてゼロになる。
次に、固定子ユニット21、22の励磁を切替えるときの動作について図4を用いて説明する。図4は固定子1の励磁の状態を4ステップに分けて、それぞれ励磁中の磁極の状態を上から見たものを示している。(a)は、図2、図3で説明したものと同じ励磁の状態にあり、対面する固定子の磁極と可動子の磁極が異極になり磁気吸引力により安定保持されている。(b)は、(a)で固定子ユニット21に供給した電流と同じように固定子ユニット22に電流を供給した時の状態を示しており、(a)と同じ理由で、(a)に対して可動子8が右に0.5P移動した位置で安定保持されている。(c)は(a)の場合と逆向きの電流を供給した状態を示しており、(b)に対して0.5P右に移動した位置で安定保持されている。(d)は(b)の場合と逆向きの電流を供給した状態を示しており、(c)に対して0.5P右に移動した位置で安定保持されている。(a)から(d)までの4ステップを経て(a)に戻る1サイクルの電流の切替えにより、可動子8は2Pだけ右に移動することができるので、これを繰り返すことによって可動子8を連続的に右に移動させることができるのである。逆の順序で電流を切替えていくと、同じメカニズムで可動子8を左に移動させることができるのは言うまでもない。
In the above configuration, the situation when the current is supplied to the coils 61 and 62 of the stator unit 21 in the direction shown in FIG.
As shown in FIGS. 3A and 3B, the magnetic flux passing through the C-shaped iron cores 41 and 42 is added in accordance with the magnetization direction of the permanent magnet 7. Since the polarity of the permanent magnet 7 and the polarity of the magnetic pole of the C-shaped iron core facing each other through the air gap are different and magnetic attractive force is generated, the moving direction position of the mover 8 is stably held in the state of FIG. The sum of the magnetic attractive forces is canceled and becomes zero because the attractive forces of the two magnetic poles of the two C-shaped iron cores are equal and in opposite directions.
Next, the operation when switching the excitation of the stator units 21 and 22 will be described with reference to FIG. FIG. 4 shows the state of excitation of the stator 1 divided into four steps, and the state of the magnetic pole being excited is viewed from above. (A) is in the same excitation state as described with reference to FIGS. 2 and 3, and the stator magnetic poles and the mover magnetic poles facing each other have different polarities and are stably held by the magnetic attractive force. (B) shows the state when a current is supplied to the stator unit 22 in the same manner as the current supplied to the stator unit 21 in (a). For the same reason as (a), (a) On the other hand, the mover 8 is stably held at a position moved 0.5P to the right. (C) shows a state in which a current having a direction opposite to that in the case of (a) is supplied, and is stably held at a position moved to the right by 0.5P with respect to (b). (D) has shown the state which supplied the electric current of the reverse direction to the case of (b), and is stably hold | maintained in the position which moved 0.5P right with respect to (c). By switching the current for one cycle, which returns to (a) after going through the four steps from (a) to (d), the mover 8 can move to the right by 2P. It can be moved continuously to the right. Needless to say, if the current is switched in the reverse order, the movable element 8 can be moved to the left by the same mechanism.

次に、本発明の第2実施例を図を用いて説明する。
図5(a)は一部を省略した第2実施例のリニアモータの平面図であり、(b)は(a)のA−A’断面図である。
第2実施例は一部を除いて第1実施例と類似しており、異なる点のみ説明する。変更点の1つは、第1実施例のC形鉄心41をC形鉄心451とI形鉄心461とに分けた点にあり、それぞれ対面する磁極551、552の2組の磁極面が平行になるようベース1に剛に固定されている。
もう一つの変更点は可動子8にあり、前記2組の磁極面の間に位置するよう永久磁石72、71が非磁性材73を間に挟んで直接または間接に図示しないテーブルに固着されている。そして、永久磁石71、72とC形鉄心、I形鉄心とで閉じた磁気回路をなしている。C形鉄心452、453、454はC形鉄心451と同じであり、I形鉄心462、463、464はI形鉄心461と同じであり、これらによって構成する片側磁極ユニット33A、33Bは第1実施例の片側ユニット31A、31Bに対応している。
このような構成をした第2実施例のリニアモータの動作は、固定子2の磁束の発生状況が第1実施例と同じになるので、第1実施例と同じような動作をする。第1実施例に比べると、固定子2と可動子8との対向する磁極面の面積がおよそ2倍になっているので、推力が2倍になるという特徴がある。以上述べた2つの実施例は片側磁石ユニットが2個の場合を述べたが、3個以上であってもよい。また2つの実施例は2相のリニアモータであるが、固定子ユニットを3個設け、その中心間距離を16P/3、すなわち隣り合う鉄心の中心間距離を4P/3とすることにより、3相のリニアモータとすることができる。
同様に固定子ユニットをm個設け、その中心間距離を(P+P/m)とすればm相のモータとすることができ、いずれも前記の2相のモータと同様、電流の切換えで両方向に移動させることができる。
Next, a second embodiment of the present invention will be described with reference to the drawings.
FIG. 5A is a plan view of the linear motor of the second embodiment with a part thereof omitted, and FIG. 5B is a cross-sectional view taken along line AA ′ of FIG.
The second embodiment is similar to the first embodiment except for a part, and only different points will be described. One of the changes is that the C-shaped iron core 41 of the first embodiment is divided into a C-shaped iron core 451 and an I-shaped iron core 461, and two sets of magnetic pole surfaces 551 and 552 facing each other are parallel to each other. It is rigidly fixed to the base 1 so that it becomes.
Another change is in the mover 8, and permanent magnets 72 and 71 are directly or indirectly fixed to a table (not shown) with a nonmagnetic material 73 in between so as to be positioned between the two sets of magnetic pole surfaces. Yes. The permanent magnets 71 and 72 and the C-shaped iron core and the I-shaped iron core form a closed magnetic circuit. The C-shaped iron cores 452, 453, and 454 are the same as the C-shaped iron core 451, the I-shaped iron cores 462, 463, and 464 are the same as the I-shaped iron core 461, and the one-side magnetic pole units 33A and 33B constituted by them are the first embodiment. This corresponds to the one-side units 31A and 31B in the example.
The operation of the linear motor of the second embodiment having such a configuration is the same as that of the first embodiment because the magnetic flux generation state of the stator 2 is the same as that of the first embodiment. Compared to the first embodiment, the area of the opposing magnetic pole surfaces of the stator 2 and the mover 8 is approximately doubled, so that the thrust is doubled. In the two embodiments described above, the case where there are two one-side magnet units has been described, but three or more magnet units may be used. The two embodiments are two-phase linear motors, but three stator units are provided and the center-to-center distance is 16 P / 3, that is, the center-to-center distance between adjacent iron cores is 4 P / 3. Phase linear motor.
Similarly, if m stator units are provided and the distance between the centers is (P + P / m), an m-phase motor can be obtained. In both cases, the current is switched in both directions as in the case of the two-phase motor. Can be moved.

以上述べたように、本発明によると、珪素鋼板を積層して固定子のC形鉄心或いはI形鉄心をなしているので、従来のものに比べて磁路の面積を大きくすることができ、磁気飽和が生じにくくなって高い推力を得ることができる。
また、各鉄心の並べられている方向に珪素鋼板が積層されているため、各鉄心間の漏れ磁束が小さく、推力の低下が最小に抑えられている。そして、可動子の永久磁石を薄くすると磁界変調率が大きくなるので、これによっても高い推力を得ることができる。
さらに、固定子と可動子間に働く磁気吸引力が永久磁石の両側面で相殺されるので可動子の支持機構に与える負担が小さく、リニアモータの信頼性を高めるなどの効果がある。
As described above, according to the present invention, since the silicon steel plates are laminated to form the C-shaped iron core or I-shaped iron core of the stator, the area of the magnetic path can be increased compared to the conventional one, Magnetic saturation hardly occurs and high thrust can be obtained.
Moreover, since the silicon steel plates are laminated in the direction in which the iron cores are arranged, the leakage magnetic flux between the iron cores is small, and the reduction in thrust is minimized. If the permanent magnet of the mover is thinned, the magnetic field modulation factor increases, and thus a high thrust can be obtained.
Furthermore, since the magnetic attractive force acting between the stator and the mover is canceled by both side surfaces of the permanent magnet, the burden on the support mechanism of the mover is small, and there is an effect that the reliability of the linear motor is improved.

本発明の第1実施例を示すリニアモータの斜視図The perspective view of the linear motor which shows 1st Example of this invention. 第1実施例の平面図Plan view of the first embodiment 第1実施例の説明図Illustration of the first embodiment 第1実施例の説明図Illustration of the first embodiment 第2実施例の構造図Structure diagram of the second embodiment

符号の説明Explanation of symbols

1 ベース
2 固定子
21、22、23、24 固定子ユニット
31A、31B、32A、32B、33A、33B、34A、34B 片側磁石ユニット
41、42、43、44、451、452、453、454 C形鉄心
461、462、463、464 I形鉄心
511、512、521、522、531、532、541、542、551、552 磁極
61、62 コイル
7、71、72 永久磁石
73 非磁性材
8 可動子
1 Base 2 Stator 21, 22, 23, 24 Stator unit 31A, 31B, 32A, 32B, 33A, 33B, 34A, 34B One side magnet unit 41, 42, 43, 44, 451, 452, 453, 454 C type Iron cores 461, 462, 463, 464 I-type iron cores 511, 512, 521, 522, 531, 532, 541, 542, 551, 552 Magnetic poles 61, 62 Coils 7, 71, 72 Permanent magnet 73 Non-magnetic material 8 Movable element

Claims (11)

エアギャップを介して対向する複数の磁極対を1つのコイルで励磁する電磁石を含み、複数の前記磁極対がピッチPで直線状にならび、前記コイルの励磁により前記隣り合う磁極対の磁界の向きが逆向きとなるように構成された固定子と、前記ピッチPで等間隔に永久磁石が並べられ、隣り合う前記永久磁石の磁極の磁界の向きが逆向きである可動子と、を備えたリニアモータであって、前記エアギャップの間を前記可動子の前記永久磁石が移動するようにしたことを特徴とするリニアモータ。 Including an electromagnet that excites a plurality of magnetic pole pairs opposed via an air gap with one coil, and the plurality of magnetic pole pairs are linearly arranged at a pitch P, and the magnetic field direction of the adjacent magnetic pole pairs is excited by the excitation of the coils And a mover in which permanent magnets are arranged at equal intervals at the pitch P, and the magnetic field directions of the magnetic poles of the adjacent permanent magnets are opposite to each other. A linear motor, wherein the permanent magnet of the mover moves between the air gaps. エアギャップを介して対向する複数の磁極対を1つのコイルで励磁する電磁石を含み、複数の前記磁極対が直線状にならぶように構成された固定子と、ピッチPで等間隔に永久磁石が並べられ、隣り合う前記永久磁石の磁極の向きが互いに逆向きである可動子と、を備えたリニアモータであって、前記対向する1対の磁極の複数対が前記可動子の移動方向に前記ピッチPで等間隔にならび、かつ前記ピッチPで隣り合う前記磁極対の向きが逆向きとなることを特徴とするリニアモータ。 An electromagnet that excites a plurality of magnetic pole pairs opposed via an air gap with a single coil, and a permanent magnet that is configured such that the magnetic pole pairs are arranged in a straight line and a pitch P at equal intervals. And a mover in which the directions of the magnetic poles of the adjacent permanent magnets are opposite to each other, wherein a plurality of pairs of the opposed pair of magnetic poles are arranged in the moving direction of the mover. A linear motor having equal intervals at a pitch P and adjacent magnetic pole pairs at the pitch P in opposite directions. 前記可動子の前記永久磁石は、その移動方向に対して垂直な断面が矩形であることを特徴とする請求項1又は2記載のリニアモータ。   The linear motor according to claim 1, wherein the permanent magnet of the mover has a rectangular cross section perpendicular to the moving direction thereof. 前記可動子の前記永久磁石は、前記固定子側の磁極対の対向する方向から見た断面が矩形であることを特徴とする請求項1又は2記載のリニアモータ。   3. The linear motor according to claim 1, wherein the permanent magnet of the mover has a rectangular cross section viewed from a direction in which the pair of magnetic poles on the stator side is opposed to each other. 前記永久磁石の磁極の磁界の向きは、対向する1対の前記磁極間の磁界の向きであることを特徴とする請求項1又は2記載のリニアモータ。   The linear motor according to claim 1, wherein the magnetic field direction of the magnetic pole of the permanent magnet is a magnetic field direction between the pair of opposing magnetic poles. エアギャップを介して対向する1対の磁極を持つ略環状の電磁石の鉄心を複数個その磁極が可動子の移動方向にピッチPで直線状にならぶ固定子と、前記ピッチPで等間隔に永久磁石が並べられ、隣り合う永久磁石の磁極の向きが互いに逆向きである可動子と、を備えたリニアモータであって、1つのコイルが前記複数個の鉄心に磁界を発生させるように巻かれ、前記コイルの励磁により前記可動子の移動方向の隣り合う前記磁極対の磁界の向きが逆向きとなることを特徴とするリニアモータ。   A plurality of substantially annular electromagnet cores having a pair of magnetic poles facing each other through an air gap, a stator in which the magnetic poles are linearly arranged at a pitch P in the moving direction of the mover, and permanent at equal intervals at the pitch P A linear motor having magnets arranged and movers in which the directions of the magnetic poles of adjacent permanent magnets are opposite to each other, wherein one coil is wound so as to generate a magnetic field in the plurality of iron cores. The linear motor is characterized in that the direction of the magnetic field of the pair of magnetic poles adjacent to each other in the moving direction of the mover is reversed by excitation of the coil. 前記可動子の前記永久磁石が前記エアギャップの間を移動するようにしたことを特徴とする請求項6記載のリニアモータ。 The linear motor according to claim 6 , wherein the permanent magnet of the mover moves between the air gaps. 略環状の鉄心の一部にエアギャップを形成し前記エアギャップを介して対向する1対の磁極が形成された鉄心が複数個、その磁極面が可動子の移動方向に直線状にピッチPで等間隔にならべられ、かつ1つのコイルが前記複数個の鉄心に巻回されて、前記コイルの励磁により前記可動子の移動方向の隣り合う前記磁極対が逆向きの方向となることを特徴とするリニアモータ。   A plurality of iron cores in which an air gap is formed in a part of a substantially annular iron core and a pair of magnetic poles facing each other through the air gap are formed, and the magnetic pole surfaces thereof are linearly arranged at a pitch P in the moving direction of the mover. The coils are wound at equal intervals, and one coil is wound around the plurality of iron cores, and the adjacent magnetic pole pairs in the moving direction of the mover are in opposite directions by excitation of the coils. Linear motor. 請求項1〜5のいずれか1項記載の固定子を固定子ユニットとし、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴とするリニアモータ。   The stator according to any one of claims 1 to 5, wherein the stator unit is a stator unit, the plurality of stator units are linearly arranged in a moving direction of the mover, and a pitch between adjacent magnetic poles of adjacent stator units is set. “P + P / m” (P is the pitch between magnetic poles in the stator unit, m is 2, 3, 4,...). 請求項6または7記載の固定子を複数個で固定子ユニットを成し、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴とするリニアモータ。 A plurality of stators according to claim 6 or 7 constitute a stator unit, the plurality of stator units are linearly arranged in the moving direction of the mover, and a pitch between adjacent magnetic poles of adjacent stator units is “P + P / m” (P is the pitch between magnetic poles in the stator unit, m is 2, 3, 4,...). 請求項8記載の複数の鉄心を含んで固定子ユニットを成し、該複数の固定子ユニットが前記可動子の移動方向に直線配置され、隣り合う固定子ユニットの隣り合う磁極間ピッチが「P+P/m」(Pは固定子ユニット内の磁極間ピッチ、mは2、3、4、・・・)となることを特徴とするリニアモータ。
A stator unit is formed including the plurality of iron cores according to claim 8 , wherein the plurality of stator units are linearly arranged in the moving direction of the mover, and a pitch between adjacent magnetic poles of adjacent stator units is “P + P”. / M ”(P is the pitch between the magnetic poles in the stator unit, m is 2, 3, 4,...).
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