JP5736968B2 - エンコーダ装置、駆動装置、及びロボットシステム - Google Patents
エンコーダ装置、駆動装置、及びロボットシステム Download PDFInfo
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- JP5736968B2 JP5736968B2 JP2011119300A JP2011119300A JP5736968B2 JP 5736968 B2 JP5736968 B2 JP 5736968B2 JP 2011119300 A JP2011119300 A JP 2011119300A JP 2011119300 A JP2011119300 A JP 2011119300A JP 5736968 B2 JP5736968 B2 JP 5736968B2
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011119300A JP5736968B2 (ja) | 2011-05-27 | 2011-05-27 | エンコーダ装置、駆動装置、及びロボットシステム |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2011119300A JP5736968B2 (ja) | 2011-05-27 | 2011-05-27 | エンコーダ装置、駆動装置、及びロボットシステム |
Publications (3)
| Publication Number | Publication Date |
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| JP2012247306A JP2012247306A (ja) | 2012-12-13 |
| JP2012247306A5 JP2012247306A5 (ru) | 2014-07-10 |
| JP5736968B2 true JP5736968B2 (ja) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2011119300A Active JP5736968B2 (ja) | 2011-05-27 | 2011-05-27 | エンコーダ装置、駆動装置、及びロボットシステム |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015206747A (ja) * | 2014-04-23 | 2015-11-19 | 株式会社ニコン | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
| GB2525866A (en) * | 2014-05-06 | 2015-11-11 | Johnson Electric Sa | Controller for driving a stepper motor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4736285B2 (ja) * | 2001-09-12 | 2011-07-27 | 株式会社ジェイテクト | 電動パワーステアリング装置 |
| JP2010249585A (ja) * | 2009-04-13 | 2010-11-04 | Yamatake Corp | 現在位置特定装置及び現在位置特定方法 |
| JP5402313B2 (ja) * | 2009-06-26 | 2014-01-29 | 株式会社ニコン | エンコーダおよび信号処理方法 |
| JP5251768B2 (ja) * | 2009-07-17 | 2013-07-31 | 株式会社ニコン | 試験装置および試験方法 |
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| JP2012247306A (ja) | 2012-12-13 |
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