JP5736968B2 - エンコーダ装置、駆動装置、及びロボットシステム - Google Patents

エンコーダ装置、駆動装置、及びロボットシステム Download PDF

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JP5736968B2
JP5736968B2 JP2011119300A JP2011119300A JP5736968B2 JP 5736968 B2 JP5736968 B2 JP 5736968B2 JP 2011119300 A JP2011119300 A JP 2011119300A JP 2011119300 A JP2011119300 A JP 2011119300A JP 5736968 B2 JP5736968 B2 JP 5736968B2
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encoder
circuit
operation clock
angular position
position data
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JP2012247306A5 (enExample
JP2012247306A (ja
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森田　徹
徹 森田
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Nikon Corp
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Nikon Corp
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JP2011119300A 2011-05-27 2011-05-27 エンコーダ装置、駆動装置、及びロボットシステム Active JP5736968B2 (ja)

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JP2011119300A JP5736968B2 (ja) 2011-05-27 2011-05-27 エンコーダ装置、駆動装置、及びロボットシステム

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JP2011119300A JP5736968B2 (ja) 2011-05-27 2011-05-27 エンコーダ装置、駆動装置、及びロボットシステム

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JP2012247306A JP2012247306A (ja) 2012-12-13
JP2012247306A5 JP2012247306A5 (enExample) 2014-07-10
JP5736968B2 true JP5736968B2 (ja) 2015-06-17

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Publication number Priority date Publication date Assignee Title
JP2015206747A (ja) * 2014-04-23 2015-11-19 株式会社ニコン エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
GB2525866A (en) * 2014-05-06 2015-11-11 Johnson Electric Sa Controller for driving a stepper motor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4736285B2 (ja) * 2001-09-12 2011-07-27 株式会社ジェイテクト 電動パワーステアリング装置
JP2010249585A (ja) * 2009-04-13 2010-11-04 Yamatake Corp 現在位置特定装置及び現在位置特定方法
JP5402313B2 (ja) * 2009-06-26 2014-01-29 株式会社ニコン エンコーダおよび信号処理方法
JP5251768B2 (ja) * 2009-07-17 2013-07-31 株式会社ニコン 試験装置および試験方法

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