JP5735803B2 - レーザ走査反射計を用いる自動形状校正法 - Google Patents

レーザ走査反射計を用いる自動形状校正法 Download PDF

Info

Publication number
JP5735803B2
JP5735803B2 JP2010522067A JP2010522067A JP5735803B2 JP 5735803 B2 JP5735803 B2 JP 5735803B2 JP 2010522067 A JP2010522067 A JP 2010522067A JP 2010522067 A JP2010522067 A JP 2010522067A JP 5735803 B2 JP5735803 B2 JP 5735803B2
Authority
JP
Japan
Prior art keywords
calibration plate
reference mark
calibration
light beam
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010522067A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010536624A (ja
JP2010536624A5 (cg-RX-API-DMAC7.html
Inventor
クーパー，ガスリー
クナアック，クリストファー
Original Assignee
スリーディー システムズ インコーポレーテッド
スリーディー システムズ インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スリーディー システムズ インコーポレーテッド, スリーディー システムズ インコーポレーテッド filed Critical スリーディー システムズ インコーポレーテッド
Publication of JP2010536624A publication Critical patent/JP2010536624A/ja
Publication of JP2010536624A5 publication Critical patent/JP2010536624A5/ja
Application granted granted Critical
Publication of JP5735803B2 publication Critical patent/JP5735803B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K33/00—Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0037—Production of three-dimensional images

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010522067A 2007-08-23 2008-08-22 レーザ走査反射計を用いる自動形状校正法 Active JP5735803B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US95757607P 2007-08-23 2007-08-23
US60/957,576 2007-08-23
PCT/US2008/074021 WO2009026520A1 (en) 2007-08-23 2008-08-22 Automatic geometric calibration using laser scanning reflectometry

Publications (3)

Publication Number Publication Date
JP2010536624A JP2010536624A (ja) 2010-12-02
JP2010536624A5 JP2010536624A5 (cg-RX-API-DMAC7.html) 2011-10-06
JP5735803B2 true JP5735803B2 (ja) 2015-06-17

Family

ID=39811848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010522067A Active JP5735803B2 (ja) 2007-08-23 2008-08-22 レーザ走査反射計を用いる自動形状校正法

Country Status (5)

Country Link
US (2) US8040530B2 (cg-RX-API-DMAC7.html)
EP (1) EP2185344B1 (cg-RX-API-DMAC7.html)
JP (1) JP5735803B2 (cg-RX-API-DMAC7.html)
CN (1) CN101821081B (cg-RX-API-DMAC7.html)
WO (1) WO2009026520A1 (cg-RX-API-DMAC7.html)

Families Citing this family (134)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101821081B (zh) * 2007-08-23 2014-06-25 3D系统公司 利用激光扫描反射计的自动几何校准
DE102009016585A1 (de) 2009-04-06 2010-10-07 Eos Gmbh Electro Optical Systems Verfahren und Vorrichtung zum Kalibrieren einer Bestrahlungsvorrichtung
WO2011019669A1 (en) * 2009-08-09 2011-02-17 Rolls-Royce Corporation Method and apparatus for calibrating a projected image manufacturing device
US8233157B2 (en) * 2009-09-30 2012-07-31 Og Technologies, Inc. Method and apparatus of a portable imaging-based measurement with self calibration
US20120032946A1 (en) * 2010-08-04 2012-02-09 Wei-Chung Wang New calibration procedures for three-dimensional digital image correlation
ITVI20110333A1 (it) * 2011-12-23 2013-06-24 Ettore Maurizio Costabeber Macchina stereolitografica con gruppo ottico perfezionato
CN102798849B (zh) * 2012-08-14 2014-03-26 中国科学院光电技术研究所 一种消除由于串扰引起光斑质心偏移的方法
WO2014074954A2 (en) * 2012-11-08 2014-05-15 Suman Das Systems and methods for fabricating three-dimensional objects
US9554094B1 (en) * 2012-11-30 2017-01-24 Cognex Corporation System and method for determining a displaced substrate with a vision system
US8923650B2 (en) 2013-01-07 2014-12-30 Wexenergy Innovations Llc System and method of measuring distances related to an object
US10883303B2 (en) 2013-01-07 2021-01-05 WexEnergy LLC Frameless supplemental window for fenestration
US9230339B2 (en) 2013-01-07 2016-01-05 Wexenergy Innovations Llc System and method of measuring distances related to an object
US9845636B2 (en) 2013-01-07 2017-12-19 WexEnergy LLC Frameless supplemental window for fenestration
US10196850B2 (en) 2013-01-07 2019-02-05 WexEnergy LLC Frameless supplemental window for fenestration
US9691163B2 (en) 2013-01-07 2017-06-27 Wexenergy Innovations Llc System and method of measuring distances related to an object utilizing ancillary objects
US10464172B2 (en) 2013-02-21 2019-11-05 Nlight, Inc. Patterning conductive films using variable focal plane to control feature size
WO2014130895A1 (en) 2013-02-21 2014-08-28 Nlight Photonics Corporation Laser patterning multi-layer structures
US10520721B2 (en) * 2013-03-15 2019-12-31 The Brain Window, Inc. Optical beam scanning system having a synthetic center of beam rotation
US20160067820A1 (en) * 2013-04-26 2016-03-10 United Technologies Corporation Selective laser melting system
US11612957B2 (en) * 2016-04-29 2023-03-28 Nuburu, Inc. Methods and systems for welding copper and other metals using blue lasers
US10971896B2 (en) 2013-04-29 2021-04-06 Nuburu, Inc. Applications, methods and systems for a laser deliver addressable array
US11654489B2 (en) * 2013-04-29 2023-05-23 Nuburu, Inc. Devices, systems and methods for three-dimensional printing
US10562132B2 (en) 2013-04-29 2020-02-18 Nuburu, Inc. Applications, methods and systems for materials processing with visible raman laser
JP6334682B2 (ja) * 2013-04-29 2018-05-30 ヌブル インク 三次元プリンティングのための装置、システムおよび方法
CN103395301B (zh) * 2013-07-17 2016-07-06 大族激光科技产业集团股份有限公司 一种激光打标机三维校正方法和装置
GB201317974D0 (en) 2013-09-19 2013-11-27 Materialise Nv System and method for calibrating a laser scanning system
BE1024052B1 (nl) * 2013-12-03 2017-11-08 Layerwise N.V. Werkwijze en inrichting voor het kalibreren van meerdere energiestralen voor het additief vervaardigen van een object
TWI594873B (zh) * 2014-05-12 2017-08-11 三緯國際立體列印科技股份有限公司 偵測成型材特性的方法與立體列印裝置
US10618131B2 (en) 2014-06-05 2020-04-14 Nlight, Inc. Laser patterning skew correction
US9233568B1 (en) 2014-06-25 2016-01-12 Xerox Corporation Cross-process direction uniformity for wide format printers
CN104044273B (zh) * 2014-06-26 2017-05-03 珠海天威飞马打印耗材有限公司 三维打印机的校准方法及其装置
DE102014215061A1 (de) * 2014-07-31 2016-02-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Komponente und Verfahren zu ihrer Herstellung
CN105720463B (zh) 2014-08-01 2021-05-14 恩耐公司 光纤和光纤传输的激光器中的背向反射保护与监控
DE102014012286B4 (de) * 2014-08-22 2016-07-21 Cl Schutzrechtsverwaltungs Gmbh Vorrichtung und Verfahren zum Herstellen von dreidimensionalen Objekten
US11646549B2 (en) 2014-08-27 2023-05-09 Nuburu, Inc. Multi kW class blue laser system
TWI526797B (zh) * 2014-09-02 2016-03-21 三緯國際立體列印科技股份有限公司 立體列印裝置的校正裝置以及校正方法
CN107454868B (zh) * 2014-11-24 2020-01-03 添加剂工业有限公司 用于通过增材制造生产物品的设备和校准设备的方法
CN105800919B (zh) * 2014-12-31 2018-06-26 上海微电子装备（集团）股份有限公司 一种激光玻璃封装装置及校准方法
US9837783B2 (en) 2015-01-26 2017-12-05 Nlight, Inc. High-power, single-mode fiber sources
WO2016122660A1 (en) * 2015-01-30 2016-08-04 Hewlett-Packard Development Company, L.P. Agent calibration
US10509390B2 (en) 2015-02-12 2019-12-17 Glowforge Inc. Safety and reliability guarantees for laser fabrication
WO2016131021A1 (en) 2015-02-12 2016-08-18 Glowforge Inc. Safety and reliability guarantees for laser fabrication
US10050404B2 (en) 2015-03-26 2018-08-14 Nlight, Inc. Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss
US20160311160A1 (en) * 2015-04-24 2016-10-27 Global Filtration Systems, A Dba Of Gulf Filtration Systems Inc. Apparatus and method for forming three-dimensional objects using scanning axis compensation and dynamic offset
CN106273453B (zh) * 2015-06-05 2018-09-25 三纬国际立体列印科技股份有限公司 立体印刷装置与其印刷误差校正方法
WO2017008022A1 (en) 2015-07-08 2017-01-12 Nlight, Inc. Fiber with depressed central index for increased beam parameter product
WO2017038051A1 (en) 2015-08-31 2017-03-09 Canon Kabushiki Kaisha Shaping apparatus and shaping method
US10807187B2 (en) * 2015-09-24 2020-10-20 Arcam Ab X-ray calibration standard object
CN106584855B (zh) * 2015-10-13 2018-09-11 三纬国际立体列印科技股份有限公司 立体物件成形装置的光源校正方法
US10933468B2 (en) 2015-11-16 2021-03-02 Renishaw Plc Additive manufacturing method and apparatus
US11179807B2 (en) 2015-11-23 2021-11-23 Nlight, Inc. Fine-scale temporal control for laser material processing
US10074960B2 (en) 2015-11-23 2018-09-11 Nlight, Inc. Predictive modification of laser diode drive current waveform in order to optimize optical output waveform in high power laser systems
CN108367389B (zh) 2015-11-23 2020-07-28 恩耐公司 激光加工方法和装置
DE102015226722A1 (de) * 2015-12-23 2017-06-29 Eos Gmbh Electro Optical Systems Vorrichtung und Verfahren zum Kalibrieren einer Vorrichtung zum generativen Herstellen eines dreidimensionalen Objekts
DE102016200043A1 (de) * 2016-01-05 2017-07-06 Eos Gmbh Electro Optical Systems Verfahren zum Kalibrieren einer Vorrichtung zum Herstellen eines dreidimensionalen Objekts
CN108698164B (zh) 2016-01-19 2021-01-29 恩耐公司 处理3d激光扫描仪系统中的校准数据的方法
US10112260B2 (en) * 2016-01-20 2018-10-30 General Electric Company Aligning lasers of laser additive manufacturing system
US20170242424A1 (en) * 2016-02-19 2017-08-24 General Electric Company Laser power monitoring in additive manufacturing
US12172377B2 (en) 2016-04-29 2024-12-24 Nuburu, Inc. Blue laser metal additive manufacturing system
US20220072659A1 (en) * 2016-04-29 2022-03-10 Nuburu, Inc. Methods and Systems for Reducing Hazardous Byproduct from Welding Metals Using Lasers
WO2017189982A1 (en) 2016-04-29 2017-11-02 Nuburu, Inc. Visible laser additive manufacturing
EP3241668B1 (en) * 2016-05-04 2019-07-10 SLM Solutions Group AG Device and method for calibrating an irradiation system of an apparatus for producing a three-dimensional work piece
CN106182779B (zh) * 2016-08-25 2019-04-12 佛山市南海中南机械有限公司 一种3d打印机的焦平面校正装置及其校正方法
US10732439B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Fiber-coupled device for varying beam characteristics
US10730785B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Optical fiber bending mechanisms
KR102498030B1 (ko) 2016-09-29 2023-02-08 엔라이트 인크. 조정 가능한 빔 특성
DE102016222186B3 (de) * 2016-11-11 2018-04-12 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Kalibrieren zweier Scannereinrichtungen jeweils zur Positionierung eines Laserstrahls in einem Bearbeitungsfeld und Bearbeitungsmaschine zum Herstellen von dreidimensionalen Bauteilen durch Bestrahlen von Pulverschichten
US11167497B2 (en) 2016-11-14 2021-11-09 Renishaw Plc Localising sensor data collected during additive manufacturing
US12420355B2 (en) 2016-11-25 2025-09-23 Glowforge Inc. Laser fabrication with beam detection
WO2018098397A1 (en) 2016-11-25 2018-05-31 Glowforge Inc. Calibration of computer-numerically-controlled machine
WO2018098398A1 (en) * 2016-11-25 2018-05-31 Glowforge Inc. Preset optical components in a computer numerically controlled machine
IT201600124372A1 (it) * 2016-12-07 2018-06-07 Dws Srl Macchina stereolitografica con gruppo ottico perfezionato
DE102016124695A1 (de) * 2016-12-16 2018-06-21 Cl Schutzrechtsverwaltungs Gmbh Belichtungseinrichtung für eine Vorrichtung zur additiven Herstellung dreidimensionaler Objekte
US10814427B2 (en) 2017-01-11 2020-10-27 General Electric Company Systems and methods for additive manufacturing in-build assessment and correction of laser pointing accuracy
KR102404336B1 (ko) 2017-01-31 2022-05-31 누부루 인크. 청색 레이저를 사용한 구리 용접 방법 및 시스템
US10800103B2 (en) 2017-03-09 2020-10-13 Applied Materials, Inc. Additive manufacturing with energy delivery system having rotating polygon and second reflective member
US10589382B2 (en) 2017-03-30 2020-03-17 General Electric Company Overlapping border and internal sections of object formed by different AM melting beam sources in overlapping field region
WO2018187489A1 (en) 2017-04-04 2018-10-11 Nlight, Inc. Optical fiducial generation for galvanometric scanner calibration
KR102423330B1 (ko) 2017-04-21 2022-07-20 누부루 인크. 다중-피복 광섬유
US10940641B2 (en) 2017-05-26 2021-03-09 Applied Materials, Inc. Multi-light beam energy delivery with rotating polygon for additive manufacturing
US10981323B2 (en) 2017-05-26 2021-04-20 Applied Materials, Inc. Energy delivery with rotating polygon and multiple light beams on same path for additive manufacturing
EP3631136A4 (en) 2017-05-30 2021-03-10 Wexenergy LLC ADDITIONAL WINDOW WITHOUT FRAME FOR WINDOWS
US20180347969A1 (en) * 2017-05-30 2018-12-06 General Electric Company Calibration systems for calibrating energy emitting devices of additive manufacturing systems and related program products
US10804680B2 (en) 2017-06-13 2020-10-13 Nuburu, Inc. Very dense wavelength beam combined laser system
WO2018231981A1 (en) * 2017-06-15 2018-12-20 Macmillan James Method of characterizing, calibrating, and controlling galvanometer laser steering systems
US11135773B2 (en) 2017-06-23 2021-10-05 Applied Materials, Inc. Additive manufacturing with multiple mirror scanners
US20180369914A1 (en) 2017-06-23 2018-12-27 Applied Materials, Inc. Additive manufacturing with multiple polygon mirror scanners
US11481887B2 (en) 2017-08-24 2022-10-25 C&B Tech Apparatuses and methods for warpage measurement
US10723078B2 (en) * 2017-09-28 2020-07-28 3D Systems, Inc. Method of aligning pixelated light engines
DE102017219559A1 (de) 2017-11-03 2019-05-09 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zur Vermessung eines Basiselements einer Bauzylinder-Anordnung, mit Ablenkung eines Messlaserstrahls durch eine Scanner-Optik
US10919218B2 (en) * 2017-11-08 2021-02-16 General Electric Company Interlace calibration and methods of use thereof
US11331855B2 (en) * 2017-11-13 2022-05-17 Applied Materials, Inc. Additive manufacturing with dithering scan path
EP3495143B1 (en) * 2017-12-08 2021-07-07 CL Schutzrechtsverwaltungs GmbH Apparatus and method for additively manufacturing three-dimensional objects
EP3737832A4 (en) * 2018-01-09 2021-08-11 Formlabs, Inc. OPTICAL DETECTION TECHNIQUES FOR THE CALIBRATION OF AN ADDITIVE MANUFACTURING DEVICE AND ASSOCIATED SYSTEMS AND PROCESSES
US10611093B2 (en) 2018-01-09 2020-04-07 Formlabs, Inc. Optical sensing techniques for calibration of an additive fabrication device and related systems and methods
US10286484B1 (en) * 2018-01-12 2019-05-14 General Electric Company Systems and methods for additive manufacturing calibration
DE102018205403A1 (de) * 2018-04-11 2019-10-17 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Kalibrieren einer Bearbeitungsmaschine und Bearbeitungsmaschine
CN112313066A (zh) 2018-05-09 2021-02-02 应用材料公司 使用多边形扫描仪的增材制造
US10943367B1 (en) * 2018-07-11 2021-03-09 Waymo Llc Calibration of detection system to vehicle using a mirror
WO2020093030A1 (en) 2018-11-02 2020-05-07 Inkbit, LLC Intelligent additive manufacturing
US11354466B1 (en) 2018-11-02 2022-06-07 Inkbit, LLC Machine learning for additive manufacturing
WO2020107030A1 (en) 2018-11-23 2020-05-28 Nuburu, Inc Multi-wavelength visible laser source
CA3127651A1 (en) 2019-02-02 2020-08-06 Nuburu, Inc. High reliability, high power, high brightness blue laser diode systems and methods of making the same
CN111650598A (zh) * 2019-02-19 2020-09-11 北京京东尚科信息技术有限公司 一种车载激光扫描系统外参标定方法和装置
WO2020185567A1 (en) 2019-03-08 2020-09-17 Formlabs, Inc. Techniques for contamination detection in additive fabrication and related systems and methods
EP3938177B1 (en) 2019-03-15 2024-05-01 Formlabs, Inc. Method and system for calibration of optics modules for additive fabrication devices
NL2022874B1 (en) * 2019-04-05 2020-10-08 Vmi Holland Bv Calibration tool and method
US11980965B2 (en) * 2019-04-23 2024-05-14 General Electric Company Systems and methods for multi-laser head alignment in additive manufacturing systems
EP3736110A1 (en) * 2019-05-09 2020-11-11 LayerWise NV System for aligning laser system to a carrier plate
US11487268B2 (en) * 2019-07-25 2022-11-01 Pratt & Whitney Canada Corp. Method of calibrating a machine having at least two rotation axes
CN110464326B (zh) 2019-08-19 2022-05-10 上海联影医疗科技股份有限公司 一种扫描参数推荐方法、系统、装置及存储介质
EP3795336B1 (en) * 2019-09-19 2022-07-13 LayerWise NV Calibration method for powder fusion system
US10994477B1 (en) 2019-11-01 2021-05-04 Inkbit, LLC Optical scanning for industrial metrology
US11712837B2 (en) 2019-11-01 2023-08-01 Inkbit, LLC Optical scanning for industrial metrology
US11919244B2 (en) 2019-11-15 2024-03-05 Lawrence Livermore National Security, Llc System and method for in situ volumetric sensing of 3D cure state of resin being used in an additive manufacturing system
CN113119459B (zh) * 2019-12-31 2022-08-09 上海联泰科技股份有限公司 3d打印设备的标定系统、方法及3d打印设备
CN111275761B (zh) * 2020-01-17 2023-10-03 湖北三江航天红峰控制有限公司 一种自适应高度的视觉定位激光标刻方法
DE102020201952A1 (de) * 2020-02-17 2021-08-19 Realizer Gmbh Kalibrierung
GB202010315D0 (en) 2020-07-06 2020-08-19 Renishaw Plc Improvements in or relating to an optical scanner for directing electromagnetic radiation to different locations within a sacn field
US10994490B1 (en) * 2020-07-31 2021-05-04 Inkbit, LLC Calibration for additive manufacturing by compensating for geometric misalignments and distortions between components of a 3D printer
US12011881B2 (en) 2020-07-31 2024-06-18 Formlabs, Inc. Techniques for optical control calibration in additive fabrication and related systems and methods
KR102352989B1 (ko) * 2020-08-13 2022-01-24 한국생산기술연구원 광흡수율 측정용 분말층 모사장치 및 이를 이용한 광흡수율 측정시스템
US11919228B2 (en) 2020-12-23 2024-03-05 Formlabs, Inc. Techniques for improved additive fabrication on a film surface and related systems and methods
DE102021103493C5 (de) * 2021-02-15 2024-08-22 Novanta Europe Gmbh Verfahren für eine Scanfeldkorrektur mindestens einer Laserscannervorrichtung, Laserscannervorrichtung, Streumusterelement, Streumusterhaltevorrichtung und Scanfeldkorrektursystem
US12309327B2 (en) 2021-02-24 2025-05-20 General Electric Company Automated beam scan calibration, alignment, and adjustment
US20220281175A1 (en) * 2021-03-02 2022-09-08 General Electric Company Laser calibration device for additive manufacturing
CN113009496B (zh) * 2021-03-05 2024-05-28 南京大学 一种激光测距振镜成像系统及方法
CN113358068B (zh) * 2021-04-26 2023-06-20 福建数博讯信息科技有限公司 一种落地式脚手架的校正方法及装置
US11850790B2 (en) 2021-11-03 2023-12-26 Lawrence Livermore National Security, Llc System and method for microwave volumetric additive manufacturing
CN114034244B (zh) * 2021-11-08 2023-01-31 北京工业大学 一种基于Makima算法获得CMM测量范围内任意点几何误差的方法
US20250312850A1 (en) * 2022-06-07 2025-10-09 Nikon Slm Solutions Ag Calibration method and printing system configured to produce a three-dimensional workpiece
CN114779465B (zh) * 2022-06-23 2022-09-13 杭州灵西机器人智能科技有限公司 一种双线激光扫描系统和方法
DE102022120064A1 (de) * 2022-08-09 2024-02-15 Dmg Mori Additive Gmbh Vorrichtung und Verfahren zur Kalibrierung einer auf optischer Wechselwirkung basierenden Fertigungsanlage
US20240210161A1 (en) * 2022-12-22 2024-06-27 10X Genomics, Inc. Systems and methods of measuring sample thickness

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385238A (en) * 1981-03-03 1983-05-24 Veeco Instruments Incorporated Reregistration system for a charged particle beam exposure system
US4575330A (en) 1984-08-08 1986-03-11 Uvp, Inc. Apparatus for production of three-dimensional objects by stereolithography
DE3670021D1 (de) * 1985-08-23 1990-05-10 Ciba Geigy Ag Verfahren und vorrichtung zur feinjustierung eines laserstrahls.
JPS6280619A (ja) * 1985-10-04 1987-04-14 Konishiroku Photo Ind Co Ltd 液晶表示装置
MY103662A (en) * 1988-01-28 1993-08-28 Emhart Ind Method of setting up apparatus for handling electrical or electronic components
US5267013A (en) * 1988-04-18 1993-11-30 3D Systems, Inc. Apparatus and method for profiling a beam
US5059359A (en) * 1988-04-18 1991-10-22 3 D Systems, Inc. Methods and apparatus for production of three-dimensional objects by stereolithography
US5495328A (en) 1988-04-18 1996-02-27 3D Systems, Inc. Apparatus and method for calibrating and normalizing a stereolithographic apparatus
US5133987A (en) * 1989-10-27 1992-07-28 3D Systems, Inc. Stereolithographic apparatus and method
US5182715A (en) * 1989-10-27 1993-01-26 3D Systems, Inc. Rapid and accurate production of stereolighographic parts
US5145432A (en) * 1991-11-27 1992-09-08 Zenith Electronics Corporation Optical interprogation system for use in constructing flat tension shadow mask CRTS
US5430666A (en) * 1992-12-18 1995-07-04 Dtm Corporation Automated method and apparatus for calibration of laser scanning in a selective laser sintering apparatus
US6445813B1 (en) * 1994-08-24 2002-09-03 Matsushita Electric Industrial Co., Ltd. System for inspecting an apparatus of a printed circuit board
DE4437284A1 (de) * 1994-10-18 1996-04-25 Eos Electro Optical Syst Verfahren zum Kalibrieren einer Steuerung zur Ablenkung eines Laserstrahls
US6107637A (en) * 1997-08-11 2000-08-22 Hitachi, Ltd. Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
US5978521A (en) * 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine calibration locations of multiple cameras that image a common object
US5978080A (en) * 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view
US6366690B1 (en) * 1998-07-07 2002-04-02 Applied Materials, Inc. Pixel based machine for patterned wafers
US6444895B1 (en) * 1998-09-28 2002-09-03 Nec Corporation Device and method for nondestructive inspection on semiconductor device
EP1024459A3 (en) 1999-01-19 2002-11-13 3D Systems, Inc. Method and apparatus for forming three-dimensional objects using stereolithography
US6325961B1 (en) 1999-02-08 2001-12-04 3D Systems, Inc. Stereolithographic method and apparatus with enhanced control of prescribed stimulation and application
EP1173302B1 (en) * 1999-04-27 2005-04-20 GSI Lumonics Inc. Laser calibration apparatus and method
US6798925B1 (en) * 2000-12-22 2004-09-28 Cognex Corporation Method and apparatus for calibrating an image acquisition system
US6646728B1 (en) 2001-07-09 2003-11-11 3D Systems, Inc. Calibrating a focused beam of energy in a solid freeform fabrication apparatus by measuring the propagation characteristics of the beam
US7225044B2 (en) * 2002-11-11 2007-05-29 Micron Technology, Inc. Methods for supporting substrates during fabrication of one or more objects thereon by programmable material consolidation techniques
US6863362B2 (en) * 2002-12-19 2005-03-08 Edc Biosystems, Inc. Acoustically mediated liquid transfer method for generating chemical libraries
US7064318B2 (en) * 2003-08-26 2006-06-20 Thermo Finnigan Llc Methods and apparatus for aligning ion optics in a mass spectrometer
US6948254B2 (en) * 2003-10-27 2005-09-27 Micronic Laser Systems Ab Method for calibration of a metrology stage
CN100537196C (zh) * 2006-06-28 2009-09-09 西安交通大学 一种用于光固化快速成型工艺的精度校正方法
CN101821081B (zh) * 2007-08-23 2014-06-25 3D系统公司 利用激光扫描反射计的自动几何校准

Also Published As

Publication number Publication date
EP2185344B1 (en) 2018-06-13
US8040530B2 (en) 2011-10-18
CN101821081A (zh) 2010-09-01
WO2009026520A1 (en) 2009-02-26
JP2010536624A (ja) 2010-12-02
CN101821081B (zh) 2014-06-25
US20090051935A1 (en) 2009-02-26
US8237788B2 (en) 2012-08-07
EP2185344A1 (en) 2010-05-19
US20090060386A1 (en) 2009-03-05

Similar Documents

Publication Publication Date Title
JP5735803B2 (ja) レーザ走査反射計を用いる自動形状校正法
JP6959698B2 (ja) アディティブ製造装置内の複数のスキャナの較正方法
US10946581B2 (en) Method for calibrating an apparatus for manufacturing a three-dimensional object
US5495328A (en) Apparatus and method for calibrating and normalizing a stereolithographic apparatus
TWI446123B (zh) 用於量測及獲得與基板表面相關的高度資料之微影裝置及方法
TWI283802B (en) Lithographic apparatus and method for determining z position errors/variations and substrate table flatness
JP2019504182A (ja) アディティブ製造装置のためのモジュールおよび方法
EP3562649B1 (en) Sensor that simulates resin optical properties
JP6786332B2 (ja) 光造形装置、光造形方法および光造形プログラム
US6646728B1 (en) Calibrating a focused beam of energy in a solid freeform fabrication apparatus by measuring the propagation characteristics of the beam
ES3015447T3 (en) Improvements in or relating to an optical scanner for directing electromagnetic radiation to different locations within a scan field
CN1514306A (zh) 光刻装置、器件制造方法和由此制造得到器件
JP6457574B2 (ja) 計測装置
JP2002065655A (ja) ディジタル・イメージング・システムにおいて線源−イメージ間距離を決定するための方法及びシステム
JP3349508B2 (ja) 立体造形装置の較正装置および較正方法
WO2023024333A1 (zh) 一种精密的回转体测量装置和测量方法
EP0375097A2 (en) Stereolithographic beam profiling
HK1003490B (en) Stereolithographic beam profiling
CN100465792C (zh) 激光绘图装置、激光绘图方法以及光掩模的制造方法
JP5973472B2 (ja) リソグラフィ装置、放射ビームスポットフォーカスを測定するための方法、及びデバイス製造方法
JP2022539968A (ja) 放射スポットの中心を決定するための方法、センサ、及びステージ装置
US20070024938A1 (en) Method and apparatus using hologram masks for printing composite patterns onto large substrates
CN101799633A (zh) 一种离线测量成像系统最佳物面的方法和装置
JPH08327337A (ja) ３次元形状測定装置
EP0860267A2 (en) Stereolithographic beam profiling

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110818

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110818

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130215

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130226

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130527

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130603

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130626

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130703

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130725

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140422

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140722

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140729

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140822

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140829

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140922

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140930

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150324

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150417

R150 Certificate of patent or registration of utility model

Ref document number: 5735803

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250