JP5732728B2 - 振動片、振動子及び発振器 - Google Patents
振動片、振動子及び発振器 Download PDFInfo
- Publication number
- JP5732728B2 JP5732728B2 JP2010039785A JP2010039785A JP5732728B2 JP 5732728 B2 JP5732728 B2 JP 5732728B2 JP 2010039785 A JP2010039785 A JP 2010039785A JP 2010039785 A JP2010039785 A JP 2010039785A JP 5732728 B2 JP5732728 B2 JP 5732728B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- base
- notch
- resonator element
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 claims description 67
- 238000005530 etching Methods 0.000 claims description 40
- 239000010453 quartz Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000004088 simulation Methods 0.000 description 8
- 239000012141 concentrate Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 230000035939 shock Effects 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010039785A JP5732728B2 (ja) | 2010-02-25 | 2010-02-25 | 振動片、振動子及び発振器 |
| US13/030,449 US8283988B2 (en) | 2010-02-25 | 2011-02-18 | Resonator element, resonator, oscillator, and electronic device |
| KR1020110015272A KR20110097655A (ko) | 2010-02-25 | 2011-02-21 | 진동편, 진동자, 발진기, 및 전자 기기 |
| TW103107346A TWI554029B (zh) | 2010-02-25 | 2011-02-22 | Vibration plates, vibrators, oscillators, and electronic machines |
| EP11155345.9A EP2363954A3 (en) | 2010-02-25 | 2011-02-22 | Resonator element of the tuning fork type, oscillator and electronic device |
| TW103107344A TWI532315B (zh) | 2010-02-25 | 2011-02-22 | Vibration plates, vibrators, oscillators, and electronic machines |
| TW100105836A TWI536736B (zh) | 2010-02-25 | 2011-02-22 | Vibration plates, vibrators, oscillators, and electronic machines |
| BRPI1101771-6A BRPI1101771A2 (pt) | 2010-02-25 | 2011-02-23 | palheta vibratória, vibrador, oscilador e dispositivo eletrÈnico |
| RU2011106951/07A RU2469469C2 (ru) | 2010-02-25 | 2011-02-24 | Вибрирующая пластина, вибратор, генератор и электронное устройство |
| CN201310337047.2A CN103401526B (zh) | 2010-02-25 | 2011-02-24 | 振动片、振子、振荡器以及电子设备 |
| CN2013103367658A CN103401525A (zh) | 2010-02-25 | 2011-02-24 | 振动片、振子、振荡器以及电子设备 |
| CN201110045508.XA CN102170275B (zh) | 2010-02-25 | 2011-02-24 | 振动片、振子、振荡器以及电子设备 |
| US13/613,622 US8598770B2 (en) | 2010-02-25 | 2012-09-13 | Resonator element having a notched base |
| US13/613,553 US8593039B2 (en) | 2010-02-25 | 2012-09-13 | Resonator element having a notched base |
| US14/068,126 US9252349B2 (en) | 2010-02-25 | 2013-10-31 | Resonator element, resonator, oscillator, and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010039785A JP5732728B2 (ja) | 2010-02-25 | 2010-02-25 | 振動片、振動子及び発振器 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013199390A Division JP5725116B2 (ja) | 2013-09-26 | 2013-09-26 | 振動片、振動子及び発振器 |
| JP2014127564A Division JP5787007B2 (ja) | 2014-06-20 | 2014-06-20 | 振動片、振動子及び発振器 |
| JP2015083713A Division JP2015136182A (ja) | 2015-04-15 | 2015-04-15 | 振動片、振動子及び発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011176665A JP2011176665A (ja) | 2011-09-08 |
| JP2011176665A5 JP2011176665A5 (enExample) | 2013-11-07 |
| JP5732728B2 true JP5732728B2 (ja) | 2015-06-10 |
Family
ID=44689099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010039785A Active JP5732728B2 (ja) | 2010-02-25 | 2010-02-25 | 振動片、振動子及び発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5732728B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5872314B2 (ja) * | 2012-02-13 | 2016-03-01 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP6209886B2 (ja) * | 2013-07-18 | 2017-10-11 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
| JP2015023422A (ja) | 2013-07-18 | 2015-02-02 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
| JP6450551B2 (ja) * | 2014-09-30 | 2019-01-09 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP7054177B2 (ja) * | 2018-02-07 | 2022-04-13 | リバーエレテック株式会社 | 水晶デバイス及びその製造方法 |
| WO2025047588A1 (ja) * | 2023-08-31 | 2025-03-06 | 株式会社大真空 | 音叉型圧電振動片および音叉型圧電振動子 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0370421U (enExample) * | 1989-11-10 | 1991-07-15 | ||
| JP3931662B2 (ja) * | 2001-01-15 | 2007-06-20 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| JP4356366B2 (ja) * | 2003-06-10 | 2009-11-04 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
| JP3951058B2 (ja) * | 2003-08-19 | 2007-08-01 | セイコーエプソン株式会社 | 音叉型圧電振動片 |
| JP2007093485A (ja) * | 2005-09-29 | 2007-04-12 | Citizen Watch Co Ltd | 水晶振動子及びその製造方法並びに物理量センサー |
| ATE453954T1 (de) * | 2007-07-19 | 2010-01-15 | Eta Sa Mft Horlogere Suisse | Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten |
| JP4539708B2 (ja) * | 2007-11-02 | 2010-09-08 | エプソントヨコム株式会社 | 圧電振動片、圧電振動子および加速度センサ |
| JP4645991B2 (ja) * | 2007-11-12 | 2011-03-09 | セイコーエプソン株式会社 | 水晶デバイスと音叉型水晶振動片ならびに音叉型水晶振動片の製造方法 |
| JP2009164775A (ja) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | 圧電フレーム及び圧電デバイス |
-
2010
- 2010-02-25 JP JP2010039785A patent/JP5732728B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011176665A (ja) | 2011-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4277818B2 (ja) | 圧電振動片および圧電デバイス | |
| CN103401526B (zh) | 振动片、振子、振荡器以及电子设备 | |
| JP5732728B2 (ja) | 振動片、振動子及び発振器 | |
| JP4879963B2 (ja) | 圧電振動片、圧電振動子及び圧電発振器 | |
| JP5652122B2 (ja) | 振動片、振動デバイス及び電子機器 | |
| JP5782707B2 (ja) | 電子機器 | |
| JP5565158B2 (ja) | 振動片、振動子、発振器、および電子機器 | |
| JP2011239132A (ja) | 振動片、振動子及び発振器 | |
| JP5251082B2 (ja) | 圧電振動片、圧電デバイスおよび圧電振動片の製造方法 | |
| JP4169012B2 (ja) | ジャイロ振動片、ジャイロセンサ、及びジャイロ振動片の製造方法 | |
| JP2011199330A (ja) | 振動片、振動子、発振器 | |
| JP5605501B2 (ja) | 音叉型振動子 | |
| JP5533213B2 (ja) | 振動片、振動子及び発振器 | |
| JP5725116B2 (ja) | 振動片、振動子及び発振器 | |
| JP6137277B2 (ja) | 振動片、振動子及び発振器 | |
| JP5796280B2 (ja) | 振動片、振動子及び発振器 | |
| JP5787007B2 (ja) | 振動片、振動子及び発振器 | |
| JP2011223228A (ja) | 振動片、振動子及び発振器 | |
| JP5552836B2 (ja) | 圧電振動片、圧電振動子及び発振器 | |
| JP2005123828A (ja) | 音叉型圧電振動片及び圧電デバイス | |
| JP5839083B2 (ja) | 振動片、振動子及び発振器 | |
| JP2015136182A (ja) | 振動片、振動子及び発振器 | |
| JP5494994B2 (ja) | 振動子の製造方法 | |
| JP2012023428A (ja) | 振動片、振動子及び発振器 | |
| JP5589517B2 (ja) | 振動片、振動子及び発振器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130131 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130918 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130924 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131001 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140422 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140620 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20140620 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141216 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150212 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150317 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150330 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Ref document number: 5732728 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |