JP5732728B2 - 振動片、振動子及び発振器 - Google Patents

振動片、振動子及び発振器 Download PDF

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Publication number
JP5732728B2
JP5732728B2 JP2010039785A JP2010039785A JP5732728B2 JP 5732728 B2 JP5732728 B2 JP 5732728B2 JP 2010039785 A JP2010039785 A JP 2010039785A JP 2010039785 A JP2010039785 A JP 2010039785A JP 5732728 B2 JP5732728 B2 JP 5732728B2
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JP
Japan
Prior art keywords
axis
base
notch
resonator element
vibrating piece
Prior art date
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Active
Application number
JP2010039785A
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English (en)
Japanese (ja)
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JP2011176665A (ja
JP2011176665A5 (enExample
Inventor
明法 山田
明法 山田
周平 吉田
周平 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010039785A priority Critical patent/JP5732728B2/ja
Priority to US13/030,449 priority patent/US8283988B2/en
Priority to KR1020110015272A priority patent/KR20110097655A/ko
Priority to TW103107346A priority patent/TWI554029B/zh
Priority to EP11155345.9A priority patent/EP2363954A3/en
Priority to TW103107344A priority patent/TWI532315B/zh
Priority to TW100105836A priority patent/TWI536736B/zh
Priority to BRPI1101771-6A priority patent/BRPI1101771A2/pt
Priority to RU2011106951/07A priority patent/RU2469469C2/ru
Priority to CN201310337047.2A priority patent/CN103401526B/zh
Priority to CN2013103367658A priority patent/CN103401525A/zh
Priority to CN201110045508.XA priority patent/CN102170275B/zh
Publication of JP2011176665A publication Critical patent/JP2011176665A/ja
Priority to US13/613,622 priority patent/US8598770B2/en
Priority to US13/613,553 priority patent/US8593039B2/en
Priority to US14/068,126 priority patent/US9252349B2/en
Publication of JP2011176665A5 publication Critical patent/JP2011176665A5/ja
Application granted granted Critical
Publication of JP5732728B2 publication Critical patent/JP5732728B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010039785A 2010-02-25 2010-02-25 振動片、振動子及び発振器 Active JP5732728B2 (ja)

Priority Applications (15)

Application Number Priority Date Filing Date Title
JP2010039785A JP5732728B2 (ja) 2010-02-25 2010-02-25 振動片、振動子及び発振器
US13/030,449 US8283988B2 (en) 2010-02-25 2011-02-18 Resonator element, resonator, oscillator, and electronic device
KR1020110015272A KR20110097655A (ko) 2010-02-25 2011-02-21 진동편, 진동자, 발진기, 및 전자 기기
TW103107346A TWI554029B (zh) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
EP11155345.9A EP2363954A3 (en) 2010-02-25 2011-02-22 Resonator element of the tuning fork type, oscillator and electronic device
TW103107344A TWI532315B (zh) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
TW100105836A TWI536736B (zh) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
BRPI1101771-6A BRPI1101771A2 (pt) 2010-02-25 2011-02-23 palheta vibratória, vibrador, oscilador e dispositivo eletrÈnico
RU2011106951/07A RU2469469C2 (ru) 2010-02-25 2011-02-24 Вибрирующая пластина, вибратор, генератор и электронное устройство
CN201310337047.2A CN103401526B (zh) 2010-02-25 2011-02-24 振动片、振子、振荡器以及电子设备
CN2013103367658A CN103401525A (zh) 2010-02-25 2011-02-24 振动片、振子、振荡器以及电子设备
CN201110045508.XA CN102170275B (zh) 2010-02-25 2011-02-24 振动片、振子、振荡器以及电子设备
US13/613,622 US8598770B2 (en) 2010-02-25 2012-09-13 Resonator element having a notched base
US13/613,553 US8593039B2 (en) 2010-02-25 2012-09-13 Resonator element having a notched base
US14/068,126 US9252349B2 (en) 2010-02-25 2013-10-31 Resonator element, resonator, oscillator, and electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010039785A JP5732728B2 (ja) 2010-02-25 2010-02-25 振動片、振動子及び発振器

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2013199390A Division JP5725116B2 (ja) 2013-09-26 2013-09-26 振動片、振動子及び発振器
JP2014127564A Division JP5787007B2 (ja) 2014-06-20 2014-06-20 振動片、振動子及び発振器
JP2015083713A Division JP2015136182A (ja) 2015-04-15 2015-04-15 振動片、振動子及び発振器

Publications (3)

Publication Number Publication Date
JP2011176665A JP2011176665A (ja) 2011-09-08
JP2011176665A5 JP2011176665A5 (enExample) 2013-11-07
JP5732728B2 true JP5732728B2 (ja) 2015-06-10

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Family Applications (1)

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JP2010039785A Active JP5732728B2 (ja) 2010-02-25 2010-02-25 振動片、振動子及び発振器

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JP (1) JP5732728B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5872314B2 (ja) * 2012-02-13 2016-03-01 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015023422A (ja) 2013-07-18 2015-02-02 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6450551B2 (ja) * 2014-09-30 2019-01-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP7054177B2 (ja) * 2018-02-07 2022-04-13 リバーエレテック株式会社 水晶デバイス及びその製造方法
WO2025047588A1 (ja) * 2023-08-31 2025-03-06 株式会社大真空 音叉型圧電振動片および音叉型圧電振動子

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370421U (enExample) * 1989-11-10 1991-07-15
JP3931662B2 (ja) * 2001-01-15 2007-06-20 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP4356366B2 (ja) * 2003-06-10 2009-11-04 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP3951058B2 (ja) * 2003-08-19 2007-08-01 セイコーエプソン株式会社 音叉型圧電振動片
JP2007093485A (ja) * 2005-09-29 2007-04-12 Citizen Watch Co Ltd 水晶振動子及びその製造方法並びに物理量センサー
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
JP4539708B2 (ja) * 2007-11-02 2010-09-08 エプソントヨコム株式会社 圧電振動片、圧電振動子および加速度センサ
JP4645991B2 (ja) * 2007-11-12 2011-03-09 セイコーエプソン株式会社 水晶デバイスと音叉型水晶振動片ならびに音叉型水晶振動片の製造方法
JP2009164775A (ja) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd 圧電フレーム及び圧電デバイス

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