JP5726930B2 - Ｍｅｍｓデバイス - Google Patents

Ｍｅｍｓデバイス Download PDF

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Publication number
JP5726930B2
JP5726930B2 JP2013024777A JP2013024777A JP5726930B2 JP 5726930 B2 JP5726930 B2 JP 5726930B2 JP 2013024777 A JP2013024777 A JP 2013024777A JP 2013024777 A JP2013024777 A JP 2013024777A JP 5726930 B2 JP5726930 B2 JP 5726930B2
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Japan
Prior art keywords
electrode
drive
electrodes
capacitance
drive electrode
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Expired - Fee Related
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JP2013024777A
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Japanese (ja)
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JP2013128138A (ja
JP2013128138A5 (https=
Inventor
民雄 池橋
民雄 池橋
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Toshiba Corp
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Toshiba Corp
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Priority to JP2013024777A priority Critical patent/JP5726930B2/ja
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Publication of JP2013128138A5 publication Critical patent/JP2013128138A5/ja
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JP2013024777A 2013-02-12 2013-02-12 Ｍｅｍｓデバイス Expired - Fee Related JP5726930B2 (ja)

Priority Applications (1)

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JP2013024777A JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

Applications Claiming Priority (1)

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JP2013024777A JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

Related Parent Applications (1)

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JP2009214849A Division JP5204066B2 (ja) 2009-09-16 2009-09-16 Ｍｅｍｓデバイス

Publications (3)

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JP2013128138A JP2013128138A (ja) 2013-06-27
JP2013128138A5 JP2013128138A5 (https=) 2013-08-08
JP5726930B2 true JP5726930B2 (ja) 2015-06-03

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Family Applications (1)

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JP2013024777A Expired - Fee Related JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

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JP (1) JP5726930B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6397913B2 (ja) * 2013-08-01 2018-09-26 キャベンディッシュ・キネティックス・インコーポレイテッドＣａｖｅｎｄｉｓｈ Ｋｉｎｅｔｉｃｓ， Ｉｎｃ． Ｍｅｍｓ抵抗スイッチおよびｍｉｍキャパシタを利用したｄｖｃ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10149950A (ja) * 1996-11-15 1998-06-02 Murata Mfg Co Ltd 可変容量コンデンサ
JP2007015067A (ja) * 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
JP4703585B2 (ja) * 2006-02-09 2011-06-15 株式会社東芝 半導体集積回路及び静電型アクチュエータの駆動方法
JP4373994B2 (ja) * 2006-05-31 2009-11-25 株式会社東芝 可変容量装置および携帯電話
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法

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JP2013128138A (ja) 2013-06-27

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