JP2013128138A5 - - Google Patents

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Publication number
JP2013128138A5
JP2013128138A5 JP2013024777A JP2013024777A JP2013128138A5 JP 2013128138 A5 JP2013128138 A5 JP 2013128138A5 JP 2013024777 A JP2013024777 A JP 2013024777A JP 2013024777 A JP2013024777 A JP 2013024777A JP 2013128138 A5 JP2013128138 A5 JP 2013128138A5
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JP
Japan
Prior art keywords
electrode
drive
upper electrode
mems device
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013024777A
Other languages
English (en)
Japanese (ja)
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JP2013128138A (ja
JP5726930B2 (ja
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Publication date
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Priority to JP2013024777A priority Critical patent/JP5726930B2/ja
Priority claimed from JP2013024777A external-priority patent/JP5726930B2/ja
Publication of JP2013128138A publication Critical patent/JP2013128138A/ja
Publication of JP2013128138A5 publication Critical patent/JP2013128138A5/ja
Application granted granted Critical
Publication of JP5726930B2 publication Critical patent/JP5726930B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013024777A 2013-02-12 2013-02-12 Ｍｅｍｓデバイス Expired - Fee Related JP5726930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013024777A JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013024777A JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2009214849A Division JP5204066B2 (ja) 2009-09-16 2009-09-16 Ｍｅｍｓデバイス

Publications (3)

Publication Number Publication Date
JP2013128138A JP2013128138A (ja) 2013-06-27
JP2013128138A5 true JP2013128138A5 (https=) 2013-08-08
JP5726930B2 JP5726930B2 (ja) 2015-06-03

Family

ID=48778454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013024777A Expired - Fee Related JP5726930B2 (ja) 2013-02-12 2013-02-12 Ｍｅｍｓデバイス

Country Status (1)

Country Link
JP (1) JP5726930B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6397913B2 (ja) * 2013-08-01 2018-09-26 キャベンディッシュ・キネティックス・インコーポレイテッドＣａｖｅｎｄｉｓｈ Ｋｉｎｅｔｉｃｓ， Ｉｎｃ． Ｍｅｍｓ抵抗スイッチおよびｍｉｍキャパシタを利用したｄｖｃ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10149950A (ja) * 1996-11-15 1998-06-02 Murata Mfg Co Ltd 可変容量コンデンサ
JP2007015067A (ja) * 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
JP4703585B2 (ja) * 2006-02-09 2011-06-15 株式会社東芝 半導体集積回路及び静電型アクチュエータの駆動方法
JP4373994B2 (ja) * 2006-05-31 2009-11-25 株式会社東芝 可変容量装置および携帯電話
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法

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