JP5723241B2 - 流量制御装置および流量制御方法 - Google Patents
流量制御装置および流量制御方法 Download PDFInfo
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- JP5723241B2 JP5723241B2 JP2011173433A JP2011173433A JP5723241B2 JP 5723241 B2 JP5723241 B2 JP 5723241B2 JP 2011173433 A JP2011173433 A JP 2011173433A JP 2011173433 A JP2011173433 A JP 2011173433A JP 5723241 B2 JP5723241 B2 JP 5723241B2
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- Prior art keywords
- fluid passage
- deformable portion
- chamber
- fluid
- flow rate
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- 238000000034 method Methods 0.000 title claims description 14
- 239000012530 fluid Substances 0.000 claims description 82
- 239000012528 membrane Substances 0.000 claims description 33
- 125000006850 spacer group Chemical group 0.000 claims description 16
- 238000007599 discharging Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 24
- 239000011347 resin Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 230000004044 response Effects 0.000 description 8
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173433A JP5723241B2 (ja) | 2011-08-08 | 2011-08-08 | 流量制御装置および流量制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173433A JP5723241B2 (ja) | 2011-08-08 | 2011-08-08 | 流量制御装置および流量制御方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013037552A JP2013037552A (ja) | 2013-02-21 |
| JP2013037552A5 JP2013037552A5 (enExample) | 2014-04-17 |
| JP5723241B2 true JP5723241B2 (ja) | 2015-05-27 |
Family
ID=47887111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011173433A Active JP5723241B2 (ja) | 2011-08-08 | 2011-08-08 | 流量制御装置および流量制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5723241B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL262070A (en) * | 2018-10-02 | 2020-04-30 | Dvash Eli | Device and method for adjustable regulation of liquid or gas flow |
| JP2022181631A (ja) * | 2021-05-26 | 2022-12-08 | 東京エレクトロン株式会社 | 流体の流れを制御する装置、断面形状可変流路の製造方法、基板を処理する装置及び流体の流れを制御する方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530511A (en) * | 1978-08-23 | 1980-03-04 | Nisshin Steel Co Ltd | Hydraulic control element |
| JP2936691B2 (ja) * | 1990-10-15 | 1999-08-23 | ソニー株式会社 | バルブ |
| US5441231A (en) * | 1994-05-17 | 1995-08-15 | Payne; Barrett M. M. | Valve closing actuator |
| JP3626277B2 (ja) * | 1995-05-10 | 2005-03-02 | 大成ラミック株式会社 | 流量制御弁 |
| JPH11230380A (ja) * | 1998-02-17 | 1999-08-27 | Hitachi Plant Eng & Constr Co Ltd | 風量調整ダンパ |
| US6102361A (en) * | 1999-03-05 | 2000-08-15 | Riikonen; Esko A. | Fluidic pinch valve system |
| JP2001355748A (ja) * | 2000-06-14 | 2001-12-26 | Surpass Kogyo Kk | 流量調整弁 |
| JP5767793B2 (ja) * | 2010-08-31 | 2015-08-19 | 株式会社エー・シー・イー | 排気圧力／流量コントローラ |
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2011
- 2011-08-08 JP JP2011173433A patent/JP5723241B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013037552A (ja) | 2013-02-21 |
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