JP2013037552A5 - - Google Patents

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Publication number
JP2013037552A5
JP2013037552A5 JP2011173433A JP2011173433A JP2013037552A5 JP 2013037552 A5 JP2013037552 A5 JP 2013037552A5 JP 2011173433 A JP2011173433 A JP 2011173433A JP 2011173433 A JP2011173433 A JP 2011173433A JP 2013037552 A5 JP2013037552 A5 JP 2013037552A5
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JP
Japan
Prior art keywords
fluid passage
flow rate
deformable portion
chamber
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011173433A
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English (en)
Japanese (ja)
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JP5723241B2 (ja
JP2013037552A (ja
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Publication date
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Priority to JP2011173433A priority Critical patent/JP5723241B2/ja
Priority claimed from JP2011173433A external-priority patent/JP5723241B2/ja
Publication of JP2013037552A publication Critical patent/JP2013037552A/ja
Publication of JP2013037552A5 publication Critical patent/JP2013037552A5/ja
Application granted granted Critical
Publication of JP5723241B2 publication Critical patent/JP5723241B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011173433A 2011-08-08 2011-08-08 流量制御装置および流量制御方法 Active JP5723241B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011173433A JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011173433A JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Publications (3)

Publication Number Publication Date
JP2013037552A JP2013037552A (ja) 2013-02-21
JP2013037552A5 true JP2013037552A5 (enExample) 2014-04-17
JP5723241B2 JP5723241B2 (ja) 2015-05-27

Family

ID=47887111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011173433A Active JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Country Status (1)

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JP (1) JP5723241B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL262070A (en) * 2018-10-02 2020-04-30 Dvash Eli Device and method for adjustable regulation of liquid or gas flow
JP2022181631A (ja) * 2021-05-26 2022-12-08 東京エレクトロン株式会社 流体の流れを制御する装置、断面形状可変流路の製造方法、基板を処理する装置及び流体の流れを制御する方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530511A (en) * 1978-08-23 1980-03-04 Nisshin Steel Co Ltd Hydraulic control element
JP2936691B2 (ja) * 1990-10-15 1999-08-23 ソニー株式会社 バルブ
US5441231A (en) * 1994-05-17 1995-08-15 Payne; Barrett M. M. Valve closing actuator
JP3626277B2 (ja) * 1995-05-10 2005-03-02 大成ラミック株式会社 流量制御弁
JPH11230380A (ja) * 1998-02-17 1999-08-27 Hitachi Plant Eng & Constr Co Ltd 風量調整ダンパ
US6102361A (en) * 1999-03-05 2000-08-15 Riikonen; Esko A. Fluidic pinch valve system
JP2001355748A (ja) * 2000-06-14 2001-12-26 Surpass Kogyo Kk 流量調整弁
JP5767793B2 (ja) * 2010-08-31 2015-08-19 株式会社エー・シー・イー 排気圧力／流量コントローラ

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