JP2013210095A5 - - Google Patents

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Publication number
JP2013210095A5
JP2013210095A5 JP2013048065A JP2013048065A JP2013210095A5 JP 2013210095 A5 JP2013210095 A5 JP 2013210095A5 JP 2013048065 A JP2013048065 A JP 2013048065A JP 2013048065 A JP2013048065 A JP 2013048065A JP 2013210095 A5 JP2013210095 A5 JP 2013210095A5
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JP
Japan
Prior art keywords
liquid
gas
diaphragm
outlet
flow
Prior art date
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Application number
JP2013048065A
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English (en)
Japanese (ja)
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JP5725482B2 (ja
JP2013210095A (ja
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Publication date
Priority claimed from US13/785,819 external-priority patent/US8783652B2/en
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Publication of JP2013210095A publication Critical patent/JP2013210095A/ja
Publication of JP2013210095A5 publication Critical patent/JP2013210095A5/ja
Application granted granted Critical
Publication of JP5725482B2 publication Critical patent/JP5725482B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013048065A 2012-03-12 2013-03-11 膜蒸着のための液体流量制御 Active JP5725482B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261609616P 2012-03-12 2012-03-12
US61/609,616 2012-03-12
US13/785,819 2013-03-05
US13/785,819 US8783652B2 (en) 2012-03-12 2013-03-05 Liquid flow control for film deposition

Publications (3)

Publication Number Publication Date
JP2013210095A JP2013210095A (ja) 2013-10-10
JP2013210095A5 true JP2013210095A5 (enExample) 2014-07-17
JP5725482B2 JP5725482B2 (ja) 2015-05-27

Family

ID=47900664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013048065A Active JP5725482B2 (ja) 2012-03-12 2013-03-11 膜蒸着のための液体流量制御

Country Status (4)

Country Link
US (1) US8783652B2 (enExample)
EP (2) EP3040591B1 (enExample)
JP (1) JP5725482B2 (enExample)
KR (1) KR101432243B1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8240636B2 (en) 2009-01-12 2012-08-14 Fresenius Medical Care Holdings, Inc. Valve system
US9199022B2 (en) 2008-09-12 2015-12-01 Fresenius Medical Care Holdings, Inc. Modular reservoir assembly for a hemodialysis and hemofiltration system
US8597505B2 (en) 2007-09-13 2013-12-03 Fresenius Medical Care Holdings, Inc. Portable dialysis machine
US9358331B2 (en) 2007-09-13 2016-06-07 Fresenius Medical Care Holdings, Inc. Portable dialysis machine with improved reservoir heating system
US8137553B2 (en) 2007-11-29 2012-03-20 Fresenius Medical Care Holdings, Inc. Priming system and method for dialysis systems
US9308307B2 (en) 2007-09-13 2016-04-12 Fresenius Medical Care Holdings, Inc. Manifold diaphragms
US8105487B2 (en) 2007-09-25 2012-01-31 Fresenius Medical Care Holdings, Inc. Manifolds for use in conducting dialysis
CA3057807C (en) 2007-11-29 2021-04-20 Thomas P. Robinson System and method for conducting hemodialysis and hemofiltration
KR101508483B1 (ko) 2008-10-30 2015-04-06 프레제니우스 메디칼 케어 홀딩스 인코퍼레이티드 모듈화된 휴대용 투석장치
US9201036B2 (en) 2012-12-21 2015-12-01 Fresenius Medical Care Holdings, Inc. Method and system of monitoring electrolyte levels and composition using capacitance or induction
US9157786B2 (en) 2012-12-24 2015-10-13 Fresenius Medical Care Holdings, Inc. Load suspension and weighing system for a dialysis machine reservoir
US9354640B2 (en) * 2013-11-11 2016-05-31 Fresenius Medical Care Holdings, Inc. Smart actuator for valve
WO2018088326A1 (ja) * 2016-11-08 2018-05-17 株式会社フジキン バルブ装置、このバルブ装置を用いた流量制御方法および半導体製造方法
US11022224B2 (en) * 2016-11-30 2021-06-01 Fujikin Incorporated Valve device, flow control method using the same, and semiconductor manufacturing method
US11506290B2 (en) * 2017-09-25 2022-11-22 Fujikin Incorporated Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
CN111373182A (zh) * 2017-11-24 2020-07-03 株式会社富士金 阀装置以及使用该阀装置的控制装置的控制方法、流体控制装置以及半导体制造装置
DE102018001048A1 (de) * 2018-02-09 2019-08-14 Atlas Copco Ias Gmbh Dosierventil
KR102398907B1 (ko) * 2018-03-09 2022-05-17 가부시키가이샤 후지킨 밸브 장치
IL268254B2 (en) * 2019-07-24 2024-10-01 Ham Let Israel Canada Ltd Fluid-flow control device
CN114450514B (zh) * 2019-09-25 2024-03-29 芝浦机械株式会社 流量调整阀、泵单元以及表面处理装置
JP2024158856A (ja) * 2023-04-28 2024-11-08 株式会社堀場エステック 流体制御弁、流体制御装置、及び、材料供給システム

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5092360A (en) * 1989-11-14 1992-03-03 Hitachi Metals, Ltd. Flow rated control valve using a high-temperature stacked-type displacement device
JPH0784662B2 (ja) * 1989-12-12 1995-09-13 アプライドマテリアルズジャパン株式会社 化学的気相成長方法とその装置
EP0602595B1 (en) * 1992-12-15 1997-07-23 Applied Materials, Inc. Vaporizing reactant liquids for CVD
JPH08200525A (ja) * 1995-01-31 1996-08-06 Hitachi Metals Ltd 液体原料気化器用弁
JPH1089532A (ja) * 1995-12-13 1998-04-10 Rintetsuku:Kk 気化装置の弁構造
JPH11319660A (ja) * 1998-05-15 1999-11-24 Rintec:Kk 気化装置
KR100649852B1 (ko) 1999-09-09 2006-11-24 동경 엘렉트론 주식회사 기화기 및 이것을 이용한 반도체 제조 시스템
JP2001317646A (ja) * 2000-05-08 2001-11-16 Smc Corp 圧電式流体制御弁
JP2004092824A (ja) * 2002-09-02 2004-03-25 Fujikin Inc 流体制御器
JP2005113221A (ja) * 2003-10-08 2005-04-28 Lintec Co Ltd 気化器並びにこれを用いた液体気化供給装置
CN1894526A (zh) * 2003-10-17 2007-01-10 松德沃技术公司 故障保险气动致动阀
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4933936B2 (ja) * 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
DE502007004403D1 (de) 2007-08-03 2010-08-26 Georg Fischer Wavin Ag Ventilanordnung mit Drehmomentbegrenzer
KR101387634B1 (ko) 2010-02-05 2014-04-22 엠 에스피 코포레이션 액상 전구체 증발을 위한 미세 액적 분무기
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

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