JP5717087B2 - サセプタ - Google Patents
サセプタ Download PDFInfo
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- JP5717087B2 JP5717087B2 JP2010280628A JP2010280628A JP5717087B2 JP 5717087 B2 JP5717087 B2 JP 5717087B2 JP 2010280628 A JP2010280628 A JP 2010280628A JP 2010280628 A JP2010280628 A JP 2010280628A JP 5717087 B2 JP5717087 B2 JP 5717087B2
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- 238000000034 method Methods 0.000 claims description 26
- 238000001947 vapour-phase growth Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 3
- 238000007726 management method Methods 0.000 claims description 3
- 238000000927 vapour-phase epitaxy Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 57
- 230000035882 stress Effects 0.000 description 20
- 238000010586 diagram Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000005336 cracking Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- 235000012771 pancakes Nutrition 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000009291 secondary effect Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- FBOUIAKEJMZPQG-AWNIVKPZSA-N (1E)-1-(2,4-dichlorophenyl)-4,4-dimethyl-2-(1,2,4-triazol-1-yl)pent-1-en-3-ol Chemical compound C1=NC=NN1/C(C(O)C(C)(C)C)=C/C1=CC=C(Cl)C=C1Cl FBOUIAKEJMZPQG-AWNIVKPZSA-N 0.000 description 1
- 235000014443 Pyrus communis Nutrition 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
W=0.1×tan(15°)=0.027 (mm)
一方、Dに0.05mmを代入すると、W=0.013 (mm)となる。
14 底面 16、116 段差 18、118 凹面状底面
20 成形材料 22 外縁 24 図面上の破断面 30 刻印
32 縦ストローク 34 横ストローク 36 斜めストローク
40 割れ D 深さ W 影幅 θ 入射角
R1、R2 曲率半径
Claims (7)
- 半導体ウェーハを載置するための底面と側壁を有する円形凹状のポケットが形成される表側と、該表側に対向する裏側を備える円柱形状のサセプタにおいて、
前記ポケットが形成されるエリアに対応する裏側の対応エリア内に刻印を施したサセプタ。 - 前記ポケット内に前記底面が陥没する凹部を備え、
該凹部の底には凹面状底面を備えるが、
前記凹部が形成されるエリアに対応する裏側の対応エリア内に刻印を施した請求項1に記載のサセプタ。 - 前記サセプタは、枚葉式気相成長に使用されるサセプタであることを特徴とする請求項1又は請求項2記載のサセプタ。
- 前記刻印は、当該サセプタの半径方向に長さが10mm以上の直線状のストロークを含まないことを特徴とする請求項1から3のいずれかに記載のサセプタ。
- 半導体ウェーハを載置するための底面と側壁を有する円形凹状のポケットを形成する表側と、該表側に対向する裏側を備える円柱形状のサセプタの管理方法であって、
前記ポケットが形成されるエリアに対応する裏側の対応エリア内に前記サセプタを識別可能な刻印を施し、
前記刻印に基づき、前記サセプタを気相成長又は熱処理に使用し、気相成長用又は熱処理用に整備し、気相成長又は熱処理に備えて保管することを特徴とする管理方法。 - 気相成長又は熱処理させる半導体ウェーハを載置するための底面と側壁を有する円形凹状のポケットを備えるサセプタに刻印を施す刻印方法であって、
前記サセプタの表面を、前記ポケットが開口する表側、側面側、裏側に分け、
前記裏側を選択し、
前記ポケットを規定する側壁の上端であって前記ポケットの開口縁を形成する角部の位置を角部位置として特定し、
前記裏側において、前記角部位置から前記サセプタの形成材料を通って直線で結ぶことができない未達位置を特定し、
前記未達位置からなる施工場所に、その場所内に収まる所定の大きさの刻印をすることを特徴とする刻印方法。 - 請求項6に記載の刻印方法により、刻印を施すことを特徴とする前記サセプタの製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010280628A JP5717087B2 (ja) | 2010-12-16 | 2010-12-16 | サセプタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010280628A JP5717087B2 (ja) | 2010-12-16 | 2010-12-16 | サセプタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012129405A JP2012129405A (ja) | 2012-07-05 |
JP5717087B2 true JP5717087B2 (ja) | 2015-05-13 |
Family
ID=46646127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010280628A Active JP5717087B2 (ja) | 2010-12-16 | 2010-12-16 | サセプタ |
Country Status (1)
Country | Link |
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JP (1) | JP5717087B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4043557B2 (ja) * | 1997-09-16 | 2008-02-06 | 富士通株式会社 | データ管理方法、データ管理装置、及び、搭載台 |
JP4003527B2 (ja) * | 2002-04-25 | 2007-11-07 | 信越半導体株式会社 | サセプタおよび半導体ウェーハの製造方法 |
JP2004206702A (ja) * | 2002-12-12 | 2004-07-22 | Tokyo Electron Ltd | パーツ管理システム及び方法、並びにプログラム及び記憶媒体 |
US6985787B2 (en) * | 2002-12-31 | 2006-01-10 | Tokyo Electron Limited | Method and apparatus for monitoring parts in a material processing system |
US7587812B2 (en) * | 2006-02-07 | 2009-09-15 | Applied Materials, Inc. | Electronic device manufacturing component with an embedded chip and methods of using the same |
JP4868522B2 (ja) * | 2006-03-30 | 2012-02-01 | Sumco Techxiv株式会社 | エピタキシャルウェーハの製造方法及び製造装置 |
-
2010
- 2010-12-16 JP JP2010280628A patent/JP5717087B2/ja active Active
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JP2012129405A (ja) | 2012-07-05 |
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