JP5713547B2 - センサ装置及びセンサ装置を製造するための方法 - Google Patents

センサ装置及びセンサ装置を製造するための方法 Download PDF

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Publication number
JP5713547B2
JP5713547B2 JP2009206599A JP2009206599A JP5713547B2 JP 5713547 B2 JP5713547 B2 JP 5713547B2 JP 2009206599 A JP2009206599 A JP 2009206599A JP 2009206599 A JP2009206599 A JP 2009206599A JP 5713547 B2 JP5713547 B2 JP 5713547B2
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JP
Japan
Prior art keywords
another
substrate
sensor device
cavity
diaphragm
Prior art date
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Active
Application number
JP2009206599A
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English (en)
Japanese (ja)
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JP2010117346A5 (enExample
JP2010117346A (ja
Inventor
クロプフ フランク
クロプフ フランク
シュテッツラー アルノ
シュテッツラー アルノ
コーバー ユルゲン
コーバー ユルゲン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
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Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JP2010117346A publication Critical patent/JP2010117346A/ja
Publication of JP2010117346A5 publication Critical patent/JP2010117346A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP2009206599A 2008-09-10 2009-09-08 センサ装置及びセンサ装置を製造するための方法 Active JP5713547B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008041943.5 2008-09-10
DE102008041943A DE102008041943A1 (de) 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung

Publications (3)

Publication Number Publication Date
JP2010117346A JP2010117346A (ja) 2010-05-27
JP2010117346A5 JP2010117346A5 (enExample) 2012-10-25
JP5713547B2 true JP5713547B2 (ja) 2015-05-07

Family

ID=41650625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009206599A Active JP5713547B2 (ja) 2008-09-10 2009-09-08 センサ装置及びセンサ装置を製造するための方法

Country Status (4)

Country Link
US (1) US8375796B2 (enExample)
JP (1) JP5713547B2 (enExample)
DE (1) DE102008041943A1 (enExample)
FR (1) FR2935794B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140057501A1 (en) * 2012-08-27 2014-02-27 GM Global Technology Operations LLC Electrical-mechanical fastening device for motor vehicles
DE102016225652A1 (de) * 2016-12-20 2018-06-21 Piezocryst Advanced Sensorics Gmbh Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583081Y2 (ja) * 1978-02-09 1983-01-19 富士電機株式会社 拡散形半導体圧力センサ
US4222277A (en) * 1979-08-13 1980-09-16 Kulite Semiconductor Products, Inc. Media compatible pressure transducer
GB9321398D0 (en) * 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
DE10260105A1 (de) * 2002-12-19 2004-07-01 Robert Bosch Gmbh Drucksensor
US7055392B2 (en) * 2003-07-04 2006-06-06 Robert Bosch Gmbh Micromechanical pressure sensor
DE102004006201B4 (de) * 2004-02-09 2011-12-08 Robert Bosch Gmbh Drucksensor mit Siliziumchip auf einer Stahlmembran
JP2005233953A (ja) * 2004-02-17 2005-09-02 Robert Bosch Gmbh マイクロメカニカル式の高圧センサを製造するための方法及びマクロメカニカル式の圧力センサ
JP2006047190A (ja) * 2004-08-06 2006-02-16 Denso Corp 圧力センサ
DE102005027365A1 (de) 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung
DE102009002004A1 (de) * 2009-03-31 2010-10-07 Robert Bosch Gmbh Sensoranordnung zum Erfassen von hohen Drücken
US8074521B2 (en) * 2009-11-09 2011-12-13 Kulite Semiconductor Products, Inc. Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications

Also Published As

Publication number Publication date
FR2935794A1 (fr) 2010-03-12
DE102008041943A1 (de) 2010-03-11
US20100058873A1 (en) 2010-03-11
US8375796B2 (en) 2013-02-19
JP2010117346A (ja) 2010-05-27
FR2935794B1 (fr) 2019-07-05

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