FR2935794B1 - Dispositif de capteur et procede de fabrication - Google Patents

Dispositif de capteur et procede de fabrication Download PDF

Info

Publication number
FR2935794B1
FR2935794B1 FR0956090A FR0956090A FR2935794B1 FR 2935794 B1 FR2935794 B1 FR 2935794B1 FR 0956090 A FR0956090 A FR 0956090A FR 0956090 A FR0956090 A FR 0956090A FR 2935794 B1 FR2935794 B1 FR 2935794B1
Authority
FR
France
Prior art keywords
substrate
cavern
connecting element
sensor device
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956090A
Other languages
English (en)
French (fr)
Other versions
FR2935794A1 (fr
Inventor
Frank Klopf
Arno Stoetzler
Juergen Kober
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2935794A1 publication Critical patent/FR2935794A1/fr
Application granted granted Critical
Publication of FR2935794B1 publication Critical patent/FR2935794B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
FR0956090A 2008-09-10 2009-09-08 Dispositif de capteur et procede de fabrication Expired - Fee Related FR2935794B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008041943.5 2008-09-10
DE102008041943A DE102008041943A1 (de) 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung

Publications (2)

Publication Number Publication Date
FR2935794A1 FR2935794A1 (fr) 2010-03-12
FR2935794B1 true FR2935794B1 (fr) 2019-07-05

Family

ID=41650625

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956090A Expired - Fee Related FR2935794B1 (fr) 2008-09-10 2009-09-08 Dispositif de capteur et procede de fabrication

Country Status (4)

Country Link
US (1) US8375796B2 (enExample)
JP (1) JP5713547B2 (enExample)
DE (1) DE102008041943A1 (enExample)
FR (1) FR2935794B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140057501A1 (en) * 2012-08-27 2014-02-27 GM Global Technology Operations LLC Electrical-mechanical fastening device for motor vehicles
DE102016225652A1 (de) * 2016-12-20 2018-06-21 Piezocryst Advanced Sensorics Gmbh Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583081Y2 (ja) * 1978-02-09 1983-01-19 富士電機株式会社 拡散形半導体圧力センサ
US4222277A (en) * 1979-08-13 1980-09-16 Kulite Semiconductor Products, Inc. Media compatible pressure transducer
GB9321398D0 (en) * 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
DE10260105A1 (de) * 2002-12-19 2004-07-01 Robert Bosch Gmbh Drucksensor
US7055392B2 (en) * 2003-07-04 2006-06-06 Robert Bosch Gmbh Micromechanical pressure sensor
DE102004006201B4 (de) * 2004-02-09 2011-12-08 Robert Bosch Gmbh Drucksensor mit Siliziumchip auf einer Stahlmembran
JP2005233953A (ja) * 2004-02-17 2005-09-02 Robert Bosch Gmbh マイクロメカニカル式の高圧センサを製造するための方法及びマクロメカニカル式の圧力センサ
JP2006047190A (ja) * 2004-08-06 2006-02-16 Denso Corp 圧力センサ
DE102005027365A1 (de) 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung
DE102009002004A1 (de) * 2009-03-31 2010-10-07 Robert Bosch Gmbh Sensoranordnung zum Erfassen von hohen Drücken
US8074521B2 (en) * 2009-11-09 2011-12-13 Kulite Semiconductor Products, Inc. Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications

Also Published As

Publication number Publication date
FR2935794A1 (fr) 2010-03-12
DE102008041943A1 (de) 2010-03-11
US20100058873A1 (en) 2010-03-11
JP5713547B2 (ja) 2015-05-07
US8375796B2 (en) 2013-02-19
JP2010117346A (ja) 2010-05-27

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